| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/28/2009 | US7565980 Wafer box with radially pivoting latch elements |
| 07/28/2009 | US7565880 Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same |
| 07/28/2009 | US7565879 Plasma processing apparatus |
| 07/28/2009 | US7565738 Method for manufacturing circuit device |
| 07/28/2009 | US7565737 Manufacturing method of package substrate |
| 07/28/2009 | US7565725 Method for forming a variable capacitor |
| 07/28/2009 | CA2541879C Anti-reflective substrate and the manufacturing method thereof |
| 07/23/2009 | WO2009091943A1 In-vacuum protective liners |
| 07/23/2009 | WO2009091840A2 Power transistor with protected channel |
| 07/23/2009 | WO2009091830A2 Cu surface plasma treatment to improve gapfill window |
| 07/23/2009 | WO2009091713A1 System and method for depositing a material on a substrate |
| 07/23/2009 | WO2009091644A1 Ternary azeotropic-like compositions with 1,1,1,2,3,3-hexafluoro-3-methoxy-propane and trans-1,2-dichloroethylene |
| 07/23/2009 | WO2009091642A2 Electrostatic surface cleaning |
| 07/23/2009 | WO2009091640A2 High temperature vacuum chuck assembly |
| 07/23/2009 | WO2009091630A2 Contamination prevention in extreme ultraviolet lithography |
| 07/23/2009 | WO2009091579A1 3-d and 3-d schottky diode for cross-point, variable-resistance material memories, processes of forming same, and methods of using same |
| 07/23/2009 | WO2009091448A1 Semiconductor constructions, nand unit cells, methods of forming semiconductor constructions, and methods of forming nand unit cells |
| 07/23/2009 | WO2009091440A1 Silsesquioxane resins |
| 07/23/2009 | WO2009091384A1 Nanofilm protective and release matrices |
| 07/23/2009 | WO2009091333A2 Method and apparatus for laminating a bumped wafer |
| 07/23/2009 | WO2009091226A2 Vacuum chuck |
| 07/23/2009 | WO2009091214A2 Substrate-supporting device, and a substrate-processing device having the same |
| 07/23/2009 | WO2009091195A2 Plasma processing apparatus and method |
| 07/23/2009 | WO2009091189A2 Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same |
| 07/23/2009 | WO2009091034A1 Surface inspection apparatus and surface inspection method |
| 07/23/2009 | WO2009091013A1 Field effect transistor, semiconductor device and semiconductor device manufacturing method |
| 07/23/2009 | WO2009091004A1 Thin film transistor substrate and display device |
| 07/23/2009 | WO2009090979A1 Capacitor, semiconductor device, method for manufacturing the capacitor, and method for manufacturing the semiconductor device |
| 07/23/2009 | WO2009090974A1 Semiconductor device and method for manufacturing the same |
| 07/23/2009 | WO2009090928A1 Exposure method and apparatus, and device manufacturing method |
| 07/23/2009 | WO2009090922A1 Photosensitive adhesive composition, filmy adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, semiconductor device, and process for producing semiconductor device |
| 07/23/2009 | WO2009090912A1 Method for processing amorphous carbon film, and semiconductor device manufacturing method using the method |
| 07/23/2009 | WO2009090904A1 Method for growing group iii nitride crystal |
| 07/23/2009 | WO2009090899A1 Placing table apparatus, processing apparatus and temperature control method |
| 07/23/2009 | WO2009090897A1 Electropolishing pad manufacturing method |
| 07/23/2009 | WO2009090896A1 Electronic component |
| 07/23/2009 | WO2009090893A1 Capacitive element, semiconductor device comprising the same, and method for manufacturing capacitive element |
| 07/23/2009 | WO2009090892A1 Nonvolatile random access memory |
| 07/23/2009 | WO2009090849A1 Method of wire bonding and structure including mounted electronic part |
| 07/23/2009 | WO2009090838A1 Dicing/die bonding film |
| 07/23/2009 | WO2009090831A1 Method for growing aluminum nitride crystal, process for producing aluminum nitride crystal, and aluminum nitride crystal |
| 07/23/2009 | WO2009090817A1 Dicing/die bonding film |
| 07/23/2009 | WO2009090816A1 Stage for substrate temperature control apparatus |
| 07/23/2009 | WO2009090780A1 Semiconductor device, manufacturing method thereof and display device |
| 07/23/2009 | WO2009090743A1 Substrate transport device |
| 07/23/2009 | WO2009090520A1 High aspect ratio holes or trenches |
| 07/23/2009 | WO2009090454A2 Method for treating germanium surfaces and solutions to be employed therein |
| 07/23/2009 | WO2009090349A2 Method for making an electrically conducting mechanical interconnection member |
| 07/23/2009 | WO2009090236A1 Process of treating defects during the bonding of wafers |
| 07/23/2009 | WO2009090098A2 Method and apparatus for producing a solar cell |
| 07/23/2009 | WO2009089969A1 Layer transfer with reduction of post-fracture roughness |
| 07/23/2009 | WO2009089806A1 Electric contacting of semiconductor components having low contact resistance |
| 07/23/2009 | WO2009089794A1 Plasma processing equipment and gas distribution apparatus thereof |
| 07/23/2009 | WO2009089715A1 A method and device for optimized dispatch of wafer |
| 07/23/2009 | WO2009073501A3 System for diagnosis and treatment of photovoltaic and other semiconductor devices |
| 07/23/2009 | WO2009073087A3 A semiconductor device including a die region designed for aluminum-free solder bump connection and a test structure designed for aluminum-free wire bonding |
| 07/23/2009 | WO2009071982A3 Under bump routing layer method and apparatus |
| 07/23/2009 | WO2009071788A3 Method and device for selective etching |
| 07/23/2009 | WO2009066979A3 Mems based probe card and a method of testing semiconductor ion sensor using the same |
| 07/23/2009 | WO2009056478A3 Strained semiconductor-on-insulator by si:c combined with porous process |
| 07/23/2009 | WO2009037675A3 Transfer mechanism with multiple wafer handling capability |
| 07/23/2009 | WO2009029954A3 Improved solution deposition assembly |
| 07/23/2009 | WO2009004243A4 Assemblage of radiofrequency chips |
| 07/23/2009 | WO2008148882A3 Method for producing hybrid components |
| 07/23/2009 | WO2007002857A9 Structures and methods for forming shielded gate field effect transistors |
| 07/23/2009 | US20090187993 Processor hardware and software |
| 07/23/2009 | US20090187268 Temperature regulating method, thermal processing system and semiconductor device manufacturing method |
| 07/23/2009 | US20090187243 Biocompatible copper-based single-crystal shape memory alloys |
| 07/23/2009 | US20090186563 Wafer processing method |
| 07/23/2009 | US20090186557 Method of operating substrate processing apparatus and substrate processing apparatus |
| 07/23/2009 | US20090186490 Organic semiconductor device, field-effect transistor, and their manufacturing methods |
| 07/23/2009 | US20090186489 Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate |
| 07/23/2009 | US20090186488 Single wafer etching apparatus |
| 07/23/2009 | US20090186487 Edge ring assembly with dielectric spacer ring |
| 07/23/2009 | US20090186486 Method of forming damascene patterns of semiconductor devices |
| 07/23/2009 | US20090186485 Sub-lithographic printing method |
| 07/23/2009 | US20090186484 Pattern formation method |
| 07/23/2009 | US20090186483 Etching amount calculating method, storage medium, and etching amount calculating apparatus |
| 07/23/2009 | US20090186482 Method of forming capping structures on one or more material layer surfaces |
| 07/23/2009 | US20090186481 Method for integrating selective low-temperature ruthenium deposition into copper metallization of a semiconductor device |
| 07/23/2009 | US20090186480 Optical article |
| 07/23/2009 | US20090186479 Semiconductor processing system including vaporizer and method for using same |
| 07/23/2009 | US20090186478 Method for manufacturing semiconductor device |
| 07/23/2009 | US20090186477 Method of forming metal wiring of nonvolatile memory device |
| 07/23/2009 | US20090186476 Structure and method for improved sram interconnect |
| 07/23/2009 | US20090186475 Method of manufacturing a MOS transistor |
| 07/23/2009 | US20090186474 Nonvolatile semiconductor storage device and manufacturing method therefor |
| 07/23/2009 | US20090186473 Methods of Forming a Conductive Interconnect in a Pixel of an Imager and in Other Integrated Circuitry |
| 07/23/2009 | US20090186472 Method for manufacturing semiconductor device |
| 07/23/2009 | US20090186471 Method of fabricating semiconductor device for reducing thermal burden on impurity regions of peripheral circuit region |
| 07/23/2009 | US20090186470 Method for manufacturing silicon carbide semiconductor element |
| 07/23/2009 | US20090186469 Apparatus and method for doping |
| 07/23/2009 | US20090186468 Laser Annealing Method |
| 07/23/2009 | US20090186467 Substrate Processing Apparatus and Producing Method of Semiconductor Device |
| 07/23/2009 | US20090186466 Self-masking defect removing method |
| 07/23/2009 | US20090186465 Wafer dividing method |
| 07/23/2009 | US20090186464 Method for producing bonded wafer |
| 07/23/2009 | US20090186463 Method for manufacturing soi structure in desired region of a semiconductor device |
| 07/23/2009 | US20090186462 Semiconductor device and Fabrication method |
| 07/23/2009 | US20090186461 Narrow Width Metal Oxide Semiconductor Transistor |