| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/28/2009 | US7566662 Method of dry cleaning silicon surface prior to forming self-aligned nickel silicide layer |
| 07/28/2009 | US7566661 Electroless treatment of noble metal barrier and adhesion layer |
| 07/28/2009 | US7566660 Semiconductor device and method for manufacturing the same |
| 07/28/2009 | US7566659 Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same |
| 07/28/2009 | US7566658 Method for fabricating a metal interconnection using a dual damascene process and resulting semiconductor device |
| 07/28/2009 | US7566657 Methods of forming through-substrate interconnects |
| 07/28/2009 | US7566655 Integration process for fabricating stressed transistor structure |
| 07/28/2009 | US7566654 Method for manufacturing a semiconductor device including interconnections having a smaller width |
| 07/28/2009 | US7566653 Interconnect structure with grain growth promotion layer and method for forming the same |
| 07/28/2009 | US7566652 Electrically inactive via for electromigration reliability improvement |
| 07/28/2009 | US7566651 Low contact resistance metal contact |
| 07/28/2009 | US7566650 Integrated circuit solder bumping system |
| 07/28/2009 | US7566649 Compressible films surrounding solder connectors |
| 07/28/2009 | US7566648 Method of making solder pad |
| 07/28/2009 | US7566647 Method of disposing and arranging dummy patterns |
| 07/28/2009 | US7566646 Three dimensional programmable device and method for fabricating the same |
| 07/28/2009 | US7566645 Semiconductor device and method for fabricating the same |
| 07/28/2009 | US7566644 Method for forming gate electrode of semiconductor device |
| 07/28/2009 | US7566643 Liquid phase deposition of contacts in programmable resistance and switching devices |
| 07/28/2009 | US7566642 Process of manufacturing an N-type Schottky barrier tunnel transistor |
| 07/28/2009 | US7566641 Low etch pit density (EPD) semi-insulating GaAs wafers |
| 07/28/2009 | US7566640 Method for manufacturing thin film integrated circuit device, noncontact thin film integrated circuit device and method for manufacturing the same, and idtag and coin including the noncontact thin film integrated circuit device |
| 07/28/2009 | US7566639 Manufacturing method for nitride semiconductor device and nitride semiconductor light emitting device obtained with the same |
| 07/28/2009 | US7566638 Method of dicing a semiconductor device into plural chips |
| 07/28/2009 | US7566637 Method of inhibition of metal diffusion arising from laser dicing |
| 07/28/2009 | US7566636 Method of scribing stuck mother substrate and method of dividing stuck mother substrate |
| 07/28/2009 | US7566635 Substrate dividing method |
| 07/28/2009 | US7566634 Method for chip singulation |
| 07/28/2009 | US7566633 Semiconductor device and method for manufacturing the same |
| 07/28/2009 | US7566631 Low temperature fusion bonding with high surface energy using a wet chemical treatment |
| 07/28/2009 | US7566630 Buried silicon dioxide / silicon nitride bi-layer insulators and methods of fabricating the same |
| 07/28/2009 | US7566629 Patterned silicon-on-insulator layers and methods for forming the same |
| 07/28/2009 | US7566628 Process for making a resistive memory cell with separately patterned electrodes |
| 07/28/2009 | US7566627 Air gap in integrated circuit inductor fabrication |
| 07/28/2009 | US7566626 System and method for providing a fully self aligned bipolar transistor using modified cavity formation to optimize selective epitaxial growth |
| 07/28/2009 | US7566625 Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method |
| 07/28/2009 | US7566624 Method for the production of transistor structures with LDD |
| 07/28/2009 | US7566623 Electronic device including a semiconductor fin having a plurality of gate electrodes and a process for forming the electronic device |
| 07/28/2009 | US7566622 Early contact, high cell density process |
| 07/28/2009 | US7566621 Method for forming semiconductor device having fin structure |
| 07/28/2009 | US7566620 DRAM including a vertical surround gate transistor |
| 07/28/2009 | US7566619 Methods of forming integrated circuit devices having field effect transistors of different types in different device regions |
| 07/28/2009 | US7566618 Non-volatile memory device having SONOS structure and manufacturing method thereof |
| 07/28/2009 | US7566617 Method for manufacturing semiconductor elemental device forming an amorphous high dielectric film and an amorphous silicon film |
| 07/28/2009 | US7566616 Methods for fabricating flash memory devices |
| 07/28/2009 | US7566615 Methods of fabricating scalable two transistor memory devices |
| 07/28/2009 | US7566614 Capacitor of semiconductor device and method of fabricating the same |
| 07/28/2009 | US7566613 Method of forming a dual gated FinFET gain cell |
| 07/28/2009 | US7566612 Method of fabricating capacitor in semiconductor device and semiconductor device using the same |
| 07/28/2009 | US7566611 Manufacturing method for an integrated semiconductor structure |
| 07/28/2009 | US7566610 Process for manufacturing integrated resistive elements with silicidation protection |
| 07/28/2009 | US7566609 Method of manufacturing a semiconductor structure |
| 07/28/2009 | US7566608 Methods of forming thin layers including zirconium hafnium oxide and methods of forming gate structures, capacitors, and flash memory devices using the same |
| 07/28/2009 | US7566607 Semiconductor device and fabrication process thereof |
| 07/28/2009 | US7566606 Methods of fabricating semiconductor devices having strained dual channel layers |
| 07/28/2009 | US7566605 Epitaxial silicon germanium for reduced contact resistance in field-effect transistors |
| 07/28/2009 | US7566604 Method of fabricating a dual-gate structure that prevents cut-through and lowered mobility |
| 07/28/2009 | US7566603 Method for manufacturing semiconductor device having metal silicide layer |
| 07/28/2009 | US7566602 Methods of forming single crystalline layers and methods of manufacturing semiconductor devices having such layers |
| 07/28/2009 | US7566601 Method of making a one transistor SOI non-volatile random access memory cell |
| 07/28/2009 | US7566600 SOI device with reduced drain induced barrier lowering |
| 07/28/2009 | US7566599 High performance FET with elevated source/drain region |
| 07/28/2009 | US7566598 Method of mask reduction for producing a LTPS-TFT array by use of photo-sensitive low-K dielectrics |
| 07/28/2009 | US7566597 Manufacturing method of thin film transistor array substrate |
| 07/28/2009 | US7566596 Method of manufacturing a thin film transistor substrate and stripping composition |
| 07/28/2009 | US7566595 Method of making and using guardringed SCR ESD protection cell |
| 07/28/2009 | US7566594 Fabricating method of semiconductor device |
| 07/28/2009 | US7566593 Fuse structure including cavity and methods for fabrication thereof |
| 07/28/2009 | US7566592 Method and process of manufacturing robust high temperature solder joints |
| 07/28/2009 | US7566591 Method and system for secure heat sink attachment on semiconductor devices with macroscopic uneven surface features |
| 07/28/2009 | US7566590 Low voltage drop and high thermal performance ball grid array package |
| 07/28/2009 | US7566589 Apparatus and method for signal bus line layout in semiconductor device |
| 07/28/2009 | US7566588 Semiconductor device with a resin-sealed optical semiconductor element |
| 07/28/2009 | US7566587 Method and apparatus for packaging electronic components |
| 07/28/2009 | US7566586 Method of manufacturing a semiconductor device |
| 07/28/2009 | US7566585 Semiconductor component and method for production of a semiconductor component |
| 07/28/2009 | US7566584 Electronic substrate manufacturing method, semiconductor device manufacturing method, and electronic equipment manufacturing method |
| 07/28/2009 | US7566582 Systems, methods and devices relating to actuatably moveable machines |
| 07/28/2009 | US7566581 Systems and methods for creating MEMS gyros |
| 07/28/2009 | US7566580 Method for heteroepitaxial growth of high-quality N-face GaN, InN, and AIN and their alloys by metal organic chemical vapor deposition |
| 07/28/2009 | US7566579 Method of fabricating semiconductor devices with a multi-role facilitation layer |
| 07/28/2009 | US7566578 GaN based group III-V nitride semiconductor light-emitting diode and method for fabricating the same |
| 07/28/2009 | US7566577 Semiconductor laser device and method of manufacturing the same |
| 07/28/2009 | US7566576 Gallium-containing light-emitting semiconductor device and method of fabrication |
| 07/28/2009 | US7566575 Mounting circuit and method for producing semiconductor-chip-mounting circuit |
| 07/28/2009 | US7566574 Method of performing a double-sided process |
| 07/28/2009 | US7566525 Method for forming an anti-etching shielding layer of resist patterns in semiconductor fabrication |
| 07/28/2009 | US7566482 Silicon-on-insulator (SOI) formed by implanting dopant into substrate, activating dopant by annealing, then anodizing in hydrogen fluoride- containing solution; oxidation |
| 07/28/2009 | US7566481 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) |
| 07/28/2009 | US7566435 Nanowires and method for making the same |
| 07/28/2009 | US7566422 Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus |
| 07/28/2009 | US7566385 Apparatus adapted for membrane-mediated electropolishing |
| 07/28/2009 | US7566379 Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
| 07/28/2009 | US7566378 Arrangement of electronic semiconductor components on a carrier system for treating said semiconductor components with a liquid medium |
| 07/28/2009 | US7566370 Wafer clamping apparatus and method for operating the same |
| 07/28/2009 | US7566368 Method and apparatus for an improved upper electrode plate in a plasma processing system |
| 07/28/2009 | US7566365 Liquid processing apparatus and liquid processing method |
| 07/28/2009 | US7566181 Controlling critical dimensions of structures formed on a wafer in semiconductor processing |
| 07/28/2009 | US7565995 Roller wire brake for wire bonding machine |
| 07/28/2009 | US7565994 Wire bonding apparatus |