| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/29/2009 | CN100521104C A control method for semiconductor etching device |
| 07/29/2009 | CN100521103C Plasma processing apparatus and method |
| 07/29/2009 | CN100521102C Method for polysilicon etching |
| 07/29/2009 | CN100521101C System and method for cutting an integrated circuit device |
| 07/29/2009 | CN100521100C Solvent for cleaning |
| 07/29/2009 | CN100521099C Liquid treatment system and liquid treatment method |
| 07/29/2009 | CN100521098C Method for recycling a substrate |
| 07/29/2009 | CN100521097C Ultraviolet ray cleaning device and cleaning method |
| 07/29/2009 | CN100521096C Method for preparing polished semiconductor |
| 07/29/2009 | CN100521095C Method of forming inkjet print head |
| 07/29/2009 | CN100521094C Unpolished semiconductor wafer and manufacture method thereof |
| 07/29/2009 | CN100521093C Method of forming grid oxide film in high-voltage area of flash memory device |
| 07/29/2009 | CN100521092C Semiconductor device manufacturing method and substrate treating apparatus |
| 07/29/2009 | CN100521091C Polycrystalline silicon thin film, fabrication method thereof, and thin film transistor using the same |
| 07/29/2009 | CN100521090C 掩模材料转化 Mask material transformation |
| 07/29/2009 | CN100521089C Optical integrator, illumination optical device, exposal device ,method and element manufacture method |
| 07/29/2009 | CN100521088C Method and apparatus for bilayer photoresist dry development |
| 07/29/2009 | CN100521087C Circuitry component fabricating method |
| 07/29/2009 | CN100521086C Methods of forming metal-comprising materials and capacitor electrodes, and capacitor constructions |
| 07/29/2009 | CN100521085C Substrate processing apparatus |
| 07/29/2009 | CN100521084C Vacuum processing apparatus |
| 07/29/2009 | CN100521083C Processing method, compress control method, transmitting method and transmitting device |
| 07/29/2009 | CN100521082C Vacuum processing device, diagnostic method for static electricity chuck and storing medium |
| 07/29/2009 | CN100521081C Apparatus for manufacturing flat-panel display |
| 07/29/2009 | CN100521080C Apparatus for manufacturing flat-panel display |
| 07/29/2009 | CN100521079C Material supplying device and method |
| 07/29/2009 | CN100521078C Substrate cooling device and substrate cooling method |
| 07/29/2009 | CN100521077C Porous substrate with smooth surface and production method thereof |
| 07/29/2009 | CN100521076C Substrate processing method and substrate processing apparatus |
| 07/29/2009 | CN100521075C Device and method for removing chip outer protective layer |
| 07/29/2009 | CN100521074C Gas injection device |
| 07/29/2009 | CN100521073C Marking pen design for optical microscope |
| 07/29/2009 | CN100521072C Manufacturing method of semiconductor device, semiconductor device, substrate for electro-optical device, electro-optical device, and electronic apparatus |
| 07/29/2009 | CN100521071C Method of manufacturing a semiconductor device and an apparatus for use in such a method |
| 07/29/2009 | CN100521062C Particle-optical device and detection means |
| 07/29/2009 | CN100521017C Dye sensitized solar cells having foil electrodes |
| 07/29/2009 | CN100520957C Memory equipment capable of being calibrated and calibrating method thereof |
| 07/29/2009 | CN100520706C Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| 07/29/2009 | CN100520657C Device for feeding gas to chamber and method for controlling chamber inner pressure using the device |
| 07/29/2009 | CN100520600C Assembly comprising a sensor, a method therefor and a lithographic projection apparatus |
| 07/29/2009 | CN100520591C Lithographic apparatus and device manufacturing method |
| 07/29/2009 | CN100520590C Exposure device, exposure method, and exposure treating programme |
| 07/29/2009 | CN100520589C Lithographic apparatus and device manufacturing method |
| 07/29/2009 | CN100520588C Lithographic apparatus and device manufacturing method |
| 07/29/2009 | CN100520587C Lithographic apparatus, lorentz actuator and device manufacturing method |
| 07/29/2009 | CN100520586C Method for manufacturing a carbon nanotube multilayer pattern using photolithography and dry etching |
| 07/29/2009 | CN100520585C Method and apparatus for generating assist features utilizing an image field map |
| 07/29/2009 | CN100520584C Method for reducing nonuniformity of image printed on substrate using light micro-image cover and light micro- image cover |
| 07/29/2009 | CN100520583C Photoetching apparatus and method for optimizing lighting light source by photoetching analog technology |
| 07/29/2009 | CN100520582C Photoetching equipment and devices producing method |
| 07/29/2009 | CN100520581C Photoetching apparatus and devices producing method |
| 07/29/2009 | CN100520580C Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 07/29/2009 | CN100520575C Method of enhancing clear field phase shift masks by adding parallel line to phase 0 region |
| 07/29/2009 | CN100520541C Thin film transistor array substrate and fabricating method thereof |
| 07/29/2009 | CN100520503C Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate by using the system |
| 07/29/2009 | CN100520427C Laser beam inspection equipment |
| 07/29/2009 | CN100520411C Semiconductor acceleration sensor device and method for manufacturing the same |
| 07/29/2009 | CN100520382C Plasma monitoring method, plasma monitor and plasma treatment appts. |
| 07/29/2009 | CN100519833C Shower head, thin films manufacturing device and manufacturing method |
| 07/29/2009 | CN100519832C Method for forming film |
| 07/29/2009 | CN100519829C Aperture masks for circuit fabrication |
| 07/29/2009 | CN100519683C Heat-peelable pressure-sensitive adhesive sheet |
| 07/29/2009 | CN100519624C Crosslinkable fluoroaromatic prepolymer and use thereof |
| 07/29/2009 | CN100519623C Fluorinated aromatic polymer and use thereof |
| 07/29/2009 | CN100519368C Substrate transfer device and cleaning method thereof and substrate processing system and cleaning method thereof |
| 07/29/2009 | CN100519105C Vacuum suction unit |
| 07/29/2009 | CN100519078C Polishing apparatus and polishing method |
| 07/28/2009 | US7568084 Semiconductor integrated circuit including multiple basic cells formed in arrays |
| 07/28/2009 | US7567735 Optical device wafer, and optical device chip and method for manufacturing the same |
| 07/28/2009 | US7567454 Thin film magnetic memory device capable of conducting stable data read and write operations |
| 07/28/2009 | US7567421 Bipolar electrostatic chuck |
| 07/28/2009 | US7567310 Array substrate having color filter on the film transistor structure for LCD device and method of fabricating the same |
| 07/28/2009 | US7567235 Self-aligning optical sensor package |
| 07/28/2009 | US7567118 Booster circuit |
| 07/28/2009 | US7566975 Semiconductor device and method for manufacturing the same |
| 07/28/2009 | US7566971 Semiconductor device and manufacturing method thereof |
| 07/28/2009 | US7566964 Aluminum pad power bus and signal routing for integrated circuit devices utilizing copper technology interconnect structures |
| 07/28/2009 | US7566957 Support device with discrete getter material microelectronic devices |
| 07/28/2009 | US7566951 Silicon structures with improved resistance to radiation events |
| 07/28/2009 | US7566946 Precision passive circuit structure |
| 07/28/2009 | US7566939 Fabrication of silicon micro-mechanical structures |
| 07/28/2009 | US7566938 Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures |
| 07/28/2009 | US7566936 Complementary MIS device |
| 07/28/2009 | US7566928 Byte-operational nonvolatile semiconductor memory device |
| 07/28/2009 | US7566924 Semiconductor device with gate spacer of positive slope and fabrication method thereof |
| 07/28/2009 | US7566922 Field effect transistor with suitable source, drain and channel materials and integrated circuit comprising same |
| 07/28/2009 | US7566919 Method to reduce seedlayer topography in BICMOS process |
| 07/28/2009 | US7566916 Ohmic metal contact and channel protection in GaN devices using an encapsulation layer |
| 07/28/2009 | US7566907 Thin film transistors and semiconductor constructions |
| 07/28/2009 | US7566906 Thin film transistor array panel and manufacturing method thereof |
| 07/28/2009 | US7566903 Semiconductor device and method of manufacturing the same |
| 07/28/2009 | US7566893 Best focus detection method, exposure method, and exposure apparatus |
| 07/28/2009 | US7566834 Wiring board and semiconductor package using the same |
| 07/28/2009 | US7566669 Laser irradiation apparatus and laser irradiation method |
| 07/28/2009 | US7566668 Method of forming contact |
| 07/28/2009 | US7566667 Methods of fabricating a semiconductor device having a barrier metal layer and devices formed thereby |
| 07/28/2009 | US7566666 Composition for removing an insulation material and related methods |
| 07/28/2009 | US7566665 Semiconductor device manufacturing method and manufacturing line thereof |
| 07/28/2009 | US7566664 Selective etching of MEMS using gaseous halides and reactive co-etchants |
| 07/28/2009 | US7566663 Method for manufacturing semiconductor device or semiconductor wafer using a chucking unit |