Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2009
08/26/2009CN100533272C Smoothening method of rotary coating material layer and production of photoresist layer
08/26/2009CN100533270C Apparatus for forming fine pattern
08/26/2009CN100533269C Photoetching projection assembly, loading locking device and method for transferring a object
08/26/2009CN100533237C Electro-optical device, method of manufacturing the same, and electronic apparatus
08/26/2009CN100533232C Substrate binding device
08/26/2009CN100533195C Encapsulation method of lens module
08/26/2009CN100533165C Methods of conducting wafer level burn-in of electronic devices
08/26/2009CN100533163C Crystal wafer for testing aging and electricity performances and construction thereof
08/26/2009CN100533143C Evaluation method of resist composition using immersion solvent
08/26/2009CN100533026C High-speed drying apparatus
08/26/2009CN100532711C Papermaking needle felt
08/26/2009CN100532658C Method for producing semiconductor crystal
08/26/2009CN100532639C Exhaust pipe with reactive by-product adhesion preventing means and method of preventing the adhesion
08/26/2009CN100532484C Method of polishing a tungsten-containing substrate
08/26/2009CN100531999C Laser processing apparatus and method using polygon mirror
08/25/2009US7581203 Method and apparatus for manufacturing multiple circuit patterns using a multiple project mask
08/25/2009US7580823 Generation and use of integrated circuit profile-based simulation information
08/25/2009US7580559 System and method for calibrating a spatial light modulator
08/25/2009US7580197 Projection optical system and method for photolithography and exposure apparatus and method using same
08/25/2009US7580176 Electrical characterization of interferometric modulators
08/25/2009US7580134 Method of measuring micro-structure, micro-structure measurement apparatus, and micro-structure analytical system
08/25/2009US7580111 Liquid for immersion exposure and immersion exposure method
08/25/2009US7580088 Contact for semiconductor and display devices
08/25/2009US7580075 Optical device and production method thereof
08/25/2009US7580020 Semiconductor device and liquid crystal panel driver device
08/25/2009US7579855 Method for manufacturing electrical contact element for testing electronic device and electrical contact element manufactured thereby
08/25/2009US7579851 Operation voltage supply apparatus and operation voltage supply method for semiconductor device
08/25/2009US7579694 Electronic devices including offset conductive bumps
08/25/2009US7579693 Mounting structure of ball grid array
08/25/2009US7579692 Method for forming a bump, semiconductor device and method of fabricating same, semiconductor chip, circuit board, and electronic instrument
08/25/2009US7579688 Heat radiation structure of semiconductor device, and manufacturing method thereof
08/25/2009US7579687 Circuit module turbulence enhancement systems and methods
08/25/2009US7579681 Super high density module with integrated wafer level packages
08/25/2009US7579680 Packaging system for semiconductor devices
08/25/2009US7579671 Semiconductor device and manufacturing method thereof
08/25/2009US7579667 Bonded-wafer superjunction semiconductor device
08/25/2009US7579664 Semiconductor device with trench type device isolation layer and method for fabricating the same
08/25/2009US7579663 Hermetic packaging and method of manufacture and use therefore
08/25/2009US7579661 Semiconductor device, electronic device and electronic apparatus
08/25/2009US7579653 TFT, electronic device having the TFT, and flat display device having the TFT
08/25/2009US7579652 Semiconductor device having a high withstand voltage
08/25/2009US7579649 Trench field effect transistor and method of making it
08/25/2009US7579647 Non-volatile semiconductor memory device having memory cell array suitable for high density and high integration
08/25/2009US7579638 Solid-state image pickup device and manufacturing method thereof
08/25/2009US7579628 Backlight device for liquid crystal display including a plurality of light emitting diodes within their own concaves aligned in a straight line within a larger concave
08/25/2009US7579626 Silicon carbide layer on diamond substrate for supporting group III nitride heterostructure device
08/25/2009US7579622 Fabrication of MEMS devices with spin-on glass
08/25/2009US7579590 Method of measuring thin layers using SIMS
08/25/2009US7579553 Front-and-back electrically conductive substrate
08/25/2009US7579309 Due to the relative high acetic acid content in a preferred etching solution highly satisfactory homogeneous surfaces can be obtained; etch rate which is low enough so that even thin semiconductor substrates can be etched; such as SOI or sSOI substrates
08/25/2009US7579308 Etching with organic ammonium compound and/or oxoammonium compound, water, and solvent
08/25/2009US7579307 Cleaner for semiconductor devices
08/25/2009US7579288 Method of manufacturing a microelectronic component utilizing a tool comprising an ESD dissipative ceramic
08/25/2009US7579287 Surface treatment method, manufacturing method of semiconductor device, and manufacturing method of capacitive element
08/25/2009US7579286 Method of fabricating a semiconductor device using plasma to form an insulating film
08/25/2009US7579285 By a) providing semiconductor substrate in reactor, b) providing pulse of first precursor gas into reactor, c) providing pulse of second precursor gas into reactor, d) providing inert atmosphere, e) repeating step b) through step d), where at least once during step d) substrate exposed to UV radiation
08/25/2009US7579284 Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the same
08/25/2009US7579283 Insulating layer patterning method, insulating layer formed by the insulating layer patterning method, display device having the insulating layer
08/25/2009US7579282 Method for removing metal foot during high-k dielectric/metal gate etching
08/25/2009US7579281 Transistor assembly and method of its fabrication
08/25/2009US7579280 Method of patterning a film
08/25/2009US7579279 Method to passivate conductive surfaces during semiconductor processing
08/25/2009US7579278 Topography directed patterning
08/25/2009US7579277 Semiconductor device and method for fabricating the same
08/25/2009US7579276 Substrate processing apparatus and method of manufacturing semiconductor device
08/25/2009US7579275 Electric plating method, electric plating apparatus, program for plating, recording medium, and manufacturing method and manufacturing apparatus for semiconductor device
08/25/2009US7579274 Method and compositions for direct copper plating and filing to form interconnects in the fabrication of semiconductor devices
08/25/2009US7579273 Method of manufacturing a photodiode array with through-wafer vias
08/25/2009US7579272 Methods of forming low-k dielectric layers containing carbon nanostructures
08/25/2009US7579271 Method for forming low dielectric constant fluorine-doped layers
08/25/2009US7579270 Method for manufacturing a semiconductor device
08/25/2009US7579269 Microelectronic spring contact elements
08/25/2009US7579268 Method of manufacturing an integrated circuit
08/25/2009US7579266 Fuse structure for semiconductor integrated circuit with improved insulation film thickness uniformity and moisture resistance
08/25/2009US7579265 Method for manufacturing recess gate in a semiconductor device
08/25/2009US7579264 Method for manufacturing an electrode structure of a MOS semiconductor device
08/25/2009US7579263 Threading-dislocation-free nanoheteroepitaxy of Ge on Si using self-directed touch-down of Ge through a thin SiO2 layer
08/25/2009US7579262 Different embedded strain layers in PMOS and NMOS transistors and a method of forming the same
08/25/2009US7579260 Method of dividing an adhesive film bonded to a wafer
08/25/2009US7579259 Simplified method of producing an epitaxially grown structure
08/25/2009US7579258 Semiconductor interconnect having adjacent reservoir for bonding and method for formation
08/25/2009US7579257 Sample separating apparatus and method, and substrate manufacturing method
08/25/2009US7579256 Method for forming shallow trench isolation in semiconductor device using a pore-generating layer
08/25/2009US7579255 Semiconductor device and method for isolating the same
08/25/2009US7579254 Process for realizing an integrated electronic circuit with two active layer portions having different crystal orientations
08/25/2009US7579253 Method for cleaning a semiconductor wafer
08/25/2009US7579252 Self aligned process for BJT fabrication
08/25/2009US7579251 Aerosol deposition process
08/25/2009US7579250 Method for reducing hot carrier effect of MOS transistor
08/25/2009US7579249 Methods for fabricating DRAM semiconductor devices including silicon epitaxial and metal silicide layers
08/25/2009US7579248 Resolving pattern-loading issues of SiGe stressor
08/25/2009US7579247 Multi-state non-volatile integrated circuit memory systems that employ dielectric storage elements
08/25/2009US7579246 Semiconductor device manufacturing method including oblique ion implantation process and reticle pattern forming method
08/25/2009US7579244 Method of fabricating a semiconductor device
08/25/2009US7579243 Split gate memory cell method
08/25/2009US7579242 High performance multi-level non-volatile memory device
08/25/2009US7579241 Semiconductor device and method of manufacture thereof
08/25/2009US7579240 Method of making vertical transistor with horizontal gate layers
08/25/2009US7579239 Method for the manufacture of a non-volatile memory device and memory device thus obtained
08/25/2009US7579238 Method of forming a multi-bit nonvolatile memory device
1 ... 2074 2075 2076 2077 2078 2079 2080 2081 2082 2083 2084 2085 2086 2087 2088 2089 2090 2091 2092 2093 2094 ... 6590