Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2009
11/18/2009CN100561675C Grid and semiconductor device manufacture method, structure for manufacturing grid
11/18/2009CN100561674C Method for fabricating semiconductor device
11/18/2009CN100561673C Method for manufacturing metal-oxide-semiconductor device
11/18/2009CN100561672C Method for forming grid side wall layer
11/18/2009CN100561671C Method of preparing semiconductor device grids
11/18/2009CN100561670C Plasma doping method
11/18/2009CN100561669C Gallium nitride film material preparation method
11/18/2009CN100561668C Improved method of forming openings in an organic resin material
11/18/2009CN100561667C Method for forming anti-reflecting layer and method for manufacturing dual mosaic structure
11/18/2009CN100561666C Semiconductor technology processing system and processing method thereof
11/18/2009CN100561665C Method for fabricating a semiconductor device comprising surface cleaning step
11/18/2009CN100561664C Method for removing residual polyalcohol after etching and method for forming etching structure
11/18/2009CN100561663C Wet method etching device
11/18/2009CN100561655C A measurement method for plasma dynamic sheath layer diagnosis
11/18/2009CN100561642C Planar display device with double-grid emitter cathode controlling structure and its production
11/18/2009CN100561389C Formula-based run-to-run control
11/18/2009CN100561356C Integrative type direct-writing photo-etching method
11/18/2009CN100561355C Coating and developing method, coating and developing device
11/18/2009CN100561354C Peripheral exposure device irradiated by laser beam and uv-ray, and method thereof
11/18/2009CN100561353C Laser beam exposure device and method thereof
11/18/2009CN100561352C Peripheral exposure device irradiated by laser beam and uv-ray, and method thereof
11/18/2009CN100561351C Method for determining lens thermal deformation correctional parameter
11/18/2009CN100561350C Optical approximate correction method and its photomask pattern
11/18/2009CN100561349C Method for producing COB DRAM bit line for preventing it from collapse
11/18/2009CN100561348C Feature optimization using interference mapping lithography
11/18/2009CN100561347C Photoetching apparatus, device manufacturing method and device therefrom
11/18/2009CN100561339C Photo mask and manufacturing method of thin-film transistor substrates
11/18/2009CN100561321C Low temperature polycrystalline silicon film transistor full integrated active location substrate and its preparation method
11/18/2009CN100561318C Connecting structure for conduction thin film and thin film transistor array panel including the same connection structure
11/18/2009CN100561233C Fixing mechanism of probe card, fixing method of probe card and probe card
11/18/2009CN100560791C Annealing treatment method for deposition ring
11/18/2009CN100560790C Control method for ionic beam electric charge
11/18/2009CN100560787C Method for formation of titanium nitride film on metal substrate in magnetized sheet plasma source
11/18/2009CN100560702C Wire cutting liquid of semiconductor material
11/17/2009USRE40983 Method to plate C4 to copper stud
11/17/2009US7620479 Method and apparatus for controlling the strategy of compounding pharmaceutical admixtures
11/17/2009US7620232 Method and apparatus for pattern inspection
11/17/2009US7620088 Surface emitting-semiconductor laser component featuring emission in a vertical direction
11/17/2009US7619827 Projection optical system and method for photolithography and exposure apparatus and method using same
11/17/2009US7619748 Exposure apparatus mounted with measuring apparatus
11/17/2009US7619738 Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
11/17/2009US7619718 Method and system for active purging of pellicle volumes
11/17/2009US7619716 Exposure method
11/17/2009US7619714 Immersion exposure technique
11/17/2009US7619710 In-plane switching mode active matrix type liquid crystal display device and method of fabricating the same
11/17/2009US7619672 Retrograde well structure for a CMOS imager
11/17/2009US7619318 An encapsulant composition with a base at least partially filled with filler particles
11/17/2009US7619315 Stack type semiconductor chip package having different type of chips and fabrication method thereof
11/17/2009US7619312 Method and apparatus for precisely aligning integrated circuit chips
11/17/2009US7619311 Memory cell device with coplanar electrode surface and method
11/17/2009US7619310 Semiconductor interconnect and method of making same
11/17/2009US7619309 Integrated connection arrangements
11/17/2009US7619299 Semiconductor device and method of manufacturing the same
11/17/2009US7619294 Shallow trench isolation structure with low trench parasitic capacitance
11/17/2009US7619292 Semiconductor integrated device having solid-state image sensor packaged within and production method for same
11/17/2009US7619291 Devices having horizontally-disposed nanofabric articles and methods of making the same
11/17/2009US7619285 Method of fabricating CMOS transistor and CMOS transistor fabricated thereby
11/17/2009US7619282 Hybrid circuit and electronic device using same
11/17/2009US7619279 Three dimensional flash cell
11/17/2009US7619275 Process for forming an electronic device including discontinuous storage elements
11/17/2009US7619274 Nonvolatile semiconductor memory device and method of manufacturing the same
11/17/2009US7619269 Semiconductor device, manufacturing process thereof and imaging device
11/17/2009US7619265 Molecular single electron transistor (MSET) detector device
11/17/2009US7619263 Method of radiation generation and manipulation
11/17/2009US7619253 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
11/17/2009US7619251 Laser crystallization method suppressing propagation of cracks forming a display device
11/17/2009US7619250 Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
11/17/2009US7619249 Thin film array panel and manufacturing method thereof
11/17/2009US7619199 Time-resolved measurement apparatus and position-sensitive election multiplier tube
11/17/2009US7619184 Multi-parameter process and control method
11/17/2009US7619158 Thermoelectric device having P-type and N-type materials
11/17/2009US7618904 Method of manufacturing a semiconductor device
11/17/2009US7618903 Providing a mold in which a hydrophobic-resist treatment is performed over a surfaceof the prepatterned mold by distributing vapor-deposited metal particles over the surface of the base mold (polydimethylsiloxane) where the metal particles have hydrophilic properties to insure durability of the base
11/17/2009US7618902 Plasma treatment of a semiconductor surface for enhanced nucleation of a metal-containing layer
11/17/2009US7618901 Process for growing a dielectric layer on a silicon-containing surface using a mixture of N2O and O3
11/17/2009US7618900 Semiconductor device and method of fabricating semiconductor device
11/17/2009US7618899 Method of patterning a matrix into a substrate via multiple, line-and-space, sacrificial, hard mask layers
11/17/2009US7618898 Method and apparatus for forming contact hole
11/17/2009US7618897 Alkali etching liquid for silicon wafer and etching method using same
11/17/2009US7618895 Method for etching doughnut-type glass substrates
11/17/2009US7618894 Multi-step selective etching for cross-point memory
11/17/2009US7618893 Methods of forming a layer for barrier applications in an interconnect structure
11/17/2009US7618892 Via hole forming method
11/17/2009US7618891 Method for forming self-aligned metal silicide contacts
11/17/2009US7618890 Methods for forming conductive structures and structures regarding same
11/17/2009US7618889 Dual damascene fabrication with low k materials
11/17/2009US7618888 Temperature-controlled metallic dry-fill process
11/17/2009US7618887 Semiconductor device with a metal line and method of forming the same
11/17/2009US7618886 Semiconductor device and method of manufacturing the same
11/17/2009US7618885 Semiconductor device having a recess channel and method for fabricating the same
11/17/2009US7618884 Method and device with durable contact on silicon carbide
11/17/2009US7618883 Method for introducing impurities and apparatus for introducing impurities
11/17/2009US7618882 Method for manufacturing semiconductor device and laser irradiation apparatus
11/17/2009US7618881 Thin-film transistor and manufacturing method thereof
11/17/2009US7618879 Non-uniform minority carrier lifetime distributions in high performance silicon power devices
11/17/2009US7618878 Wafer dividing method
11/17/2009US7618877 Semiconductor wafer, method of manufacturing the same, and method of manufacturing a semiconductor device
11/17/2009US7618876 Semiconductor device and method of manufacturing the same by filling a trench which includes an additional coating step
11/17/2009US7618875 Marking method for product information
11/17/2009US7618874 Methods of forming capacitors