Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2009
11/05/2009WO2009102875A3 Apparatus for measuring beam characteristics and a method thereof
11/05/2009WO2009102684A3 Semiconductor device structures and related processes
11/05/2009WO2009102589A3 High efficiency electro-static chucks for semiconductor wafer processing
11/05/2009WO2009102165A3 Single electron transistor operating at room temperature and manufacturing method for same
11/05/2009WO2009101040A3 Microstructure modification in copper interconnect structure
11/05/2009WO2009099922A3 An apparatus for handling a substrate and a method thereof
11/05/2009WO2009099284A3 Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
11/05/2009WO2009096728A3 Apparatus for repairing photomask and repairing method using same
11/05/2009WO2009095380A8 Method for manufacturing heterostructures
11/05/2009WO2009092646A3 Method and apparatus for mounting a piece of foil on a substrate
11/05/2009WO2009091226A3 Vacuum chuck
11/05/2009WO2009084850A3 Method of patterning transparent conductive oxide of a conductive glass and conductive glass prepared thereby
11/05/2009WO2009053479A3 Application of high power magnetron sputtering to through silicon via metallization
11/05/2009US20090276082 Automated Material Handling System
11/05/2009US20090275694 Spin-on-Glass Anti-Reflective Coatings for Photolithography
11/05/2009US20090275297 Non-reciprocal component and method for making and using the component in a mobile terminal
11/05/2009US20090275215 Suitably short wavelength light for laser annealing of silicon in dsa type systems
11/05/2009US20090275214 Methods of reducing defect formation on silicon dioxide formed by atomic layer deposition (ald) processes and methods of fabricating semiconductor structures
11/05/2009US20090275213 Semiconductor wafer processing method and apparatus
11/05/2009US20090275212 Method and apparatus for processing semiconductor wafer after impurity implantation
11/05/2009US20090275211 Fabrication method of porous low-k dielectric film
11/05/2009US20090275210 Combinatorial plasma enhanced deposition techniques
11/05/2009US20090275209 Plasma processing apparatus and method
11/05/2009US20090275208 Compositions of Matter, and Methods of Removing Silicon Dioxide
11/05/2009US20090275207 Plasma processing method and computer readable storage medium
11/05/2009US20090275206 Plasma process employing multiple zone gas distribution for improved uniformity of critical dimension bias
11/05/2009US20090275205 Methods of removing silicon oxide and gaseous mixtures for achieving same
11/05/2009US20090275204 Method for abating effluent from an etching process
11/05/2009US20090275203 Method for processing a thin film micro device on a substrate
11/05/2009US20090275202 Silicon structure having an opening which has a high aspect ratio, method for manufacturing the same, system for manufacturing the same, and program for manufacturing the same, and method for manufacturing etching mask for the silicon structure
11/05/2009US20090275201 Substrate processing system
11/05/2009US20090275200 Technique for reducing topography-related irregularities during the patterning of a dielectric material in a contact level of closely spaced transistors
11/05/2009US20090275199 Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same
11/05/2009US20090275198 Vapor Phase Methods for Forming Electrodes in Phase Change Memory Devices
11/05/2009US20090275197 Method for manufacturing semiconductor device
11/05/2009US20090275196 Semiconductor device and manufacturing method thereof
11/05/2009US20090275195 Interconnect Structure Having a Silicide/Germanide Cap Layer
11/05/2009US20090275194 Semiconductor device having multiple wiring layers and method of producing the same
11/05/2009US20090275193 Method of manufacturing a semiconductor integrated circuit device
11/05/2009US20090275192 Molded dielectric layer in print-patterned electronic circuits
11/05/2009US20090275191 Method and apparatus for electrostatic discharge protection using a temporary conductive coating
11/05/2009US20090275190 METHOD FOR FORMING BUFFER LAYER FOR GaN SINGLE CRYSTAL
11/05/2009US20090275189 Method for manufacturing silicon on sapphire wafer
11/05/2009US20090275188 Slurry for polishing phase change material and method for patterning polishing phase change material using the same
11/05/2009US20090275187 Methods of forming capacitors
11/05/2009US20090275186 Method for forming capacitor of semiconductor device
11/05/2009US20090275185 Methods of forming capacitors
11/05/2009US20090275184 Fabricating Method of Semiconductor Device
11/05/2009US20090275183 Method of manufacturing semiconductor device
11/05/2009US20090275182 Method for fabricating a metal high dielectric constant transistor with reverse-t gate
11/05/2009US20090275181 Semiconductor device and method of manufacturing the same
11/05/2009US20090275180 Method for manufacturing a semiconductor device
11/05/2009US20090275179 Complementary metal oxide semiconductor device with an electroplated metal replacement gate
11/05/2009US20090275178 Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same
11/05/2009US20090275177 Semiconductor device with multiple channels and method of fabricating the same
11/05/2009US20090275176 Semiconductor device and method of fabricating the same
11/05/2009US20090275175 Modified chip attach process
11/05/2009US20090275174 Soldering Container and Production Method of Semiconductor Device
11/05/2009US20090275173 Methods for reducing stress in microelectronic devices and microelectronic devices formed using such methods
11/05/2009US20090275172 Stacking semiconductor device and production method thereof
11/05/2009US20090275171 Methods for assembling thin semiconductor die
11/05/2009US20090275170 Low temperature hermetic bonding at water level and method of bonding for micro display application
11/05/2009US20090275169 Semiconductor devices and methods of forming the same
11/05/2009US20090275168 Phase change material with filament electrode
11/05/2009US20090275165 Process for fabricating a high-integration-density image sensor
11/05/2009US20090275163 System and Method of Encapsulation
11/05/2009US20090275162 Cmos-compatible bulk-micromachining process for single-crystal mems/nems devices
11/05/2009US20090275160 Semiconductor device manufacturing method
11/05/2009US20090275159 Method for manufacturing nitride semiconductor laser element
11/05/2009US20090275158 Manufacturing method of display device
11/05/2009US20090275157 Optical device shaping
11/05/2009US20090275156 Light-emitting gallium nitride-based III-V group compound semiconductor device and manufacturing method thereof
11/05/2009US20090275155 Method of fabrication a liquid crystal display device
11/05/2009US20090275154 Method of fabricating light emitting device
11/05/2009US20090275153 Method of production of semiconductor light emission device and method of production of light emission apparatus
11/05/2009US20090275151 Method Of Forming Printhead By Removing Sacrificial Material Through Nozzle Apertures
11/05/2009US20090275150 Film formation apparatus and method for semiconductor process
11/05/2009US20090275149 Methods and systems for controlling critical dimensions in track lithography tools
11/05/2009US20090275148 Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
11/05/2009US20090275147 Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
11/05/2009US20090275146 Method and apparatus for manufacturing device
11/05/2009US20090274872 Device and Method for Coating a Micro-and/or Nano-Structured Structural Substrate and Coated Structural Substrate
11/05/2009US20090274831 Process of manufacturing luminescent device
11/05/2009US20090274778 Compositions Exhibiting Inhibition Of Cyclooxygenase-2
11/05/2009US20090274537 Suspension apparatus and exposure apparatus
11/05/2009US20090273972 Magnetic logic element with toroidal multiple magnetic films and a method of logic treatment using the same
11/05/2009US20090273963 Semiconductor storage device, semiconductor storage device manufacturing method and package resin forming method
11/05/2009US20090273927 Poly night light
11/05/2009US20090273914 Apparatus and methods of forming an interconnect between a workpiece and substrate
11/05/2009US20090273882 Capacitor and method for fabricating the same
11/05/2009US20090273877 Electrostatic Chuck
11/05/2009US20090273772 Light reflecting mask, exposure apparatus, and measuring method
11/05/2009US20090273747 Liquid crystal display and method for manufacturing the same
11/05/2009US20090273696 Image sensors and methods with antiblooming channels and two side driving of control signals
11/05/2009US20090273595 Active matrix type display device
11/05/2009US20090273414 Multi-Channel Filter Assemblies
11/05/2009US20090273390 Method of mediating forward voltage drift in a sic device
11/05/2009US20090273376 Ac/dc converters and methods of manufacturing same
11/05/2009US20090273102 Semiconductor Substrate and Method for Manufacturing the Same
11/05/2009US20090273100 Integrated circuit having interleaved gridded features, mask set and method for printing