Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2009
11/10/2009US7615391 Solar cell and method of fabricating the same
11/10/2009US7615390 Method and apparatus for forming expitaxial layers
11/10/2009US7615389 GaN lasers on ALN substrates and methods of fabrication
11/10/2009US7615388 Electroluminescent element
11/10/2009US7615387 Addition curing silicone composition capable of producing a cured product with excellent crack resistance
11/10/2009US7615386 Thick oxide film for wafer backside prior to metalization loop
11/10/2009US7615385 Double-masking technique for increasing fabrication yield in superconducting electronics
11/10/2009US7615384 Semiconductor display device and method of manufacturing the same
11/10/2009US7615319 Quick and accurate modeling of transmitted field
11/10/2009US7615288 cleaners comprising sheets or layers of polymers having tensile strength, used for cleaning substrates such as semiconductors, flat panel displays or printed circuits
11/10/2009US7615259 Method and apparatus for processing workpiece
11/10/2009US7615251 Processing device using shower head structure and processing method
11/10/2009US7615164 Plasma etching methods and contact opening forming methods
11/10/2009US7615163 Film formation apparatus and method of using the same
11/10/2009US7615133 Electrostatic chuck module and cooling system
11/10/2009US7615132 Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method
11/10/2009US7615131 Plasma etching chamber and plasma etching system using same
11/10/2009US7615121 Susceptor system
11/10/2009US7615120 Pulsed mass flow delivery system and method
11/10/2009US7615119 Apparatus for spin coating semiconductor substrates
11/10/2009US7615118 Substrate processing apparatus and substrate processing method
11/10/2009US7615117 Coating and processing apparatus and method
11/10/2009US7615116 Method for producing silicon epitaxial wafer and silicon epitaxial wafer
11/10/2009US7615115 Liquid-phase growth apparatus and method
11/10/2009US7614939 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
11/10/2009US7614934 Double-side polishing apparatus
11/10/2009US7614888 Flip chip package process
11/10/2009US7614840 Wafer processing apparatus having dust proof function
11/10/2009US7614541 Method and apparatus for placing conductive balls
11/10/2009US7614411 Controls of ambient environment during wafer drying using proximity head
11/10/2009US7614406 Method of cleaning substrates utilizing megasonic energy
11/05/2009WO2009135182A2 Combinatorial plasma enhanced deposition techniques
11/05/2009WO2009135144A2 Substrate container sealing via movable magnets
11/05/2009WO2009135137A2 System for non radial temperature control for rotating substrates
11/05/2009WO2009135072A2 Non-volatile resistive-switching memories
11/05/2009WO2009135066A2 End effector to substrate offset detection and correction
11/05/2009WO2009135050A2 Process kit for rf physical vapor deposition
11/05/2009WO2009134989A2 Antimony compounds useful for deposition of antimony-containing materials
11/05/2009WO2009134925A2 Process for forming cobalt and cobalt silicide materials in copper contact applications
11/05/2009WO2009134916A2 Process for forming cobalt and cobalt silicide materials in tungsten contact applications
11/05/2009WO2009134865A2 Endpoint detection in chemical mechanical polishing using multiple spectra
11/05/2009WO2009134840A2 Selective cobalt deposition on copper surfaces
11/05/2009WO2009134812A1 Mosfet with integrated field effect rectifier
11/05/2009WO2009134810A2 Vanadium oxide thin films
11/05/2009WO2009134799A1 Metallic foil substrate and packaging technique for thin film solar cells and modules
11/05/2009WO2009134778A2 Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion
11/05/2009WO2009134771A1 Molybdenum-niobium alloys, sputtering targets containing such alloys, methods of making such targets, thin films prepared therefrom and uses thereof
11/05/2009WO2009134678A2 Surface treatment to improved resistive-switching characteristics
11/05/2009WO2009134636A2 Suitably short wavelength light for laser annealing of silicon in dsa type systems
11/05/2009WO2009134588A2 Nonplanar faceplate for a plasma processing chamber
11/05/2009WO2009134412A1 Method for reducing defects of gate of cmos devices during cleaning processes by modifying a parasitic pn junction
11/05/2009WO2009134386A1 Method of reducing erosion of a metal cap layer during via patterning in semiconductor devices
11/05/2009WO2009134329A2 Vapor phase methods for forming electrodes in phase change memory devices
11/05/2009WO2009134328A2 Methods for forming electrodes in phase change memory devices
11/05/2009WO2009134323A1 Method for fabricating self-aligned complimentary pillar structures and wiring
11/05/2009WO2009134212A1 Apparatus and method for multiple substrate processing
11/05/2009WO2009134211A1 Inorganic graded barrier film and methods for their manufacture
11/05/2009WO2009134089A2 Capacitor-less memory device
11/05/2009WO2009134083A2 Method for depositing ultra fine crystal particle polysilicon thin film
11/05/2009WO2009134080A2 Method for depositing polysilicon thin film with ultra-fine crystal grains
11/05/2009WO2009134031A2 Rigid dual-servo nano stage
11/05/2009WO2009134006A1 Independently operating stacked robotic dual arm
11/05/2009WO2009133961A1 Methods of manufacturing capacitive electromechanical transducer and capacitive electromechanical transducers
11/05/2009WO2009133919A1 Bonding method and bonding apparatus
11/05/2009WO2009133903A1 Device having hole injection/transport layer, method for manufacturing the same, and ink for forming hole injection/transport layer
11/05/2009WO2009133897A1 Connecting material and semiconductor device
11/05/2009WO2009133891A1 Vertical field effect transistor
11/05/2009WO2009133849A1 Inspection device
11/05/2009WO2009133848A1 Surface examining device
11/05/2009WO2009133847A1 Observation device and observation method
11/05/2009WO2009133843A1 Radiation-sensitive resin composition, laminate and method for producing the same, and semiconductor device
11/05/2009WO2009133839A1 Water-reactive al composite material, water-reactive al film, method for production of the al film, and structural member for film-forming chamber
11/05/2009WO2009133762A1 Semiconductor device
11/05/2009WO2009133759A1 Method for cleaning euv exposure apparatus
11/05/2009WO2009133744A1 Magnetic storage element and magnetic memory
11/05/2009WO2009133704A1 Exposure apparatus, exposure method and device manufacturing method
11/05/2009WO2009133702A1 Stage apparatus, patterning apparatus, exposure apparatus, stage drive apparatus, exposure method, and device fabrication method
11/05/2009WO2009133699A1 Heating device, film forming apparatus, film forming method, and device
11/05/2009WO2009133682A1 Evaluation method and evaluation device
11/05/2009WO2009133663A1 Probe card
11/05/2009WO2009133650A1 Magnetization control method, information storage method, information storage element, and magnetic function element
11/05/2009WO2009133646A1 Bonding region judging method
11/05/2009WO2009133625A1 Wiring board, process for producing the same, and process for manufacturing electronic device
11/05/2009WO2009133621A1 Resist liquid diluting apparatus and method of diluting resist liquid
11/05/2009WO2009133612A1 Water-soluble cutting fluid composition, water-soluble cutting fluid, and method of cutting with the water-soluble cutting fluid
11/05/2009WO2009133515A1 Gate structure for field effect transistor
11/05/2009WO2009133510A1 Method of manufacturing a capacitor on a nanowire and integrated circuit having such a capacitor
11/05/2009WO2009133509A1 Integrated circuit manufacturing method and integrated circuit
11/05/2009WO2009133500A1 Method of forming a nanocluster-comprising dielectric layer and device comprising such a layer
11/05/2009WO2009133485A1 A field effect transistor and a method of manufacturing the same
11/05/2009WO2009133196A1 Method for providing oxide layers
11/05/2009WO2009133174A1 Dicing a semiconductor wafer
11/05/2009WO2009133105A1 Method for producing a hermetically sealed, electrical feedthrough using exothermic nanofilm
11/05/2009WO2009132849A1 Suction device with wedge-shaped sealing lip
11/05/2009WO2009132800A1 Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates
11/05/2009WO2009114244A3 Line width roughness improvement with noble gas plasma
11/05/2009WO2009111344A3 Method and apparatus for removing polymer from a substrate
11/05/2009WO2009111001A3 Silicon carbide polishing method utilizing water-soluble oxidizers
11/05/2009WO2009108568A3 Gas flow equalizer plate suitable for use in a substrate process chamber
11/05/2009WO2009108404A3 Bottom-up assembly of structures on a substrate
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