Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2010
01/06/2010EP2140486A1 Carrier system and method for processing a plurality of substrates fixed to the carrier system
01/06/2010EP2140485A1 Method and device for producing a bond connection
01/06/2010EP2140483A1 Methods for optimizing thin film formation with reactive gases
01/06/2010EP2140482A2 Thin-film devices fromed from solid particles
01/06/2010EP2140481A1 Method and structure for reducing cracks in a dielectric layer in contact with metal
01/06/2010EP2140480A1 Method for manufacturing soi substrate and semiconductor device
01/06/2010EP2140252A1 Method for detecting surface defects on a substrate and device using said method
01/06/2010EP2139680A2 Novel methods for making and using halosilylgermanes
01/06/2010EP2139553A2 Apparatus and method for setting the parameters of an alert window used for timing the delivery of etc signals to a heart under varying cardiac conditions
01/06/2010EP2070114B1 Flip-chip interconnection through chip vias
01/06/2010EP1402081B1 Ring-type sputtering target
01/06/2010EP1358667B1 Methods of obtaining anisotropic crystalline films and device for implementation of one of the methods
01/06/2010EP1356501B1 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
01/06/2010EP1150302B1 Semiconductor integrated circuit and nonvolatile memory element
01/06/2010EP1103074B1 Mosfet having self-aligned gate and buried shield
01/06/2010EP1021828B1 A process for manufacturing ic-components to be used at radio frequencies
01/06/2010EP0852807B1 Method of electrically connecting a semiconductor chip to at least one contact surface
01/06/2010CN201378590Y Silica core containing device
01/06/2010CN101622705A Hetero-BIMOS injection process for non-volatile flash memory
01/06/2010CN101622704A Semiconductor device and method for resetting the same
01/06/2010CN101622703A Substrate support frame, and substrate processing apparatus including and method of loading and unloading substrate using the same
01/06/2010CN101622702A Tray transferring device
01/06/2010CN101622701A Tin-silver solder bumping in electronics manufacture
01/06/2010CN101622700A Conductive via formation utilizing electroplating
01/06/2010CN101622699A Interlayer insulation film, interconnect structure, and methods for production thereof
01/06/2010CN101622698A Plasma processing apparatus, plasma processing method, and storage medium
01/06/2010CN101622697A Etching solution and etching method
01/06/2010CN101622696A Substrate cleaning apparatus
01/06/2010CN101622695A CMP slurry for silicon film
01/06/2010CN101622694A Method and apparatus for drying substrates using a surface tensions reducing gas
01/06/2010CN101622693A Method for forming amorphous carbon film, amorphous carbon film, multilayer resist film, method for manufacturing semiconductor device, and computer-readable recording medium
01/06/2010CN101622692A Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method
01/06/2010CN101622691A Hetero-crystalline semiconductor device and method of making same
01/06/2010CN101622690A Semiconductor device having self-aligned epitaxial source and drain extensions
01/06/2010CN101622689A Wide-bandgap semiconductor devices
01/06/2010CN101622688A Information processor, information processing method and program
01/06/2010CN101621039A Pixel structure manufacturing method and pixel structure
01/06/2010CN101621038A Manufacturing method of active element array base plate
01/06/2010CN101621037A Tft sas memory unit structure
01/06/2010CN101621036A Semiconductor device with amorphous silicon MAS memory cell structure and method for manufacturing same
01/06/2010CN101621035A Amorphous silicon MONOS or MAS memory cell structure with OTP function
01/06/2010CN101621034A Data element of semiconductor device and method of fabricating the same
01/06/2010CN101621033A Method for etching dielectric storage layer in flash memory
01/06/2010CN101621032A Method for realizing low-voltage aluminum gate process
01/06/2010CN101621031A Structure and method for forming a thick bottom dielectric (TBD) for trench-gate devices
01/06/2010CN101621030A Self-aligned MOS structure with polysilicon contact
01/06/2010CN101621029A DRAM cell structure with selective anti-narrow width effect and generation method thereof
01/06/2010CN101621028A Method for reducing defects in memory cell capacitor
01/06/2010CN101621027A Method for adjusting characteristics of variable capacitance diode by using local secondary doping process
01/06/2010CN101621026A Back laser cutting method of glass passivated silicon wafer
01/06/2010CN101621025A Method for separating a plurality of semiconductor element dies on upper surface of wafer substrate
01/06/2010CN101621024A Wafer tipping machine and tipping method
01/06/2010CN101621023A Device for treating substrates and support frame thereof
01/06/2010CN101621022A Combined type chip carrying disk and epitaxy machine platform thereof
01/06/2010CN101621021A Substrate support frame and substrate processing device containing the frame
01/06/2010CN101621020A Wafer supporting device and etching device
01/06/2010CN101621019A Apparatus and method for checking and repairing solder ball
01/06/2010CN101621018A Metal-oxide-semiconductor field effect transistor (MOSFET) frequency characteristic derivation detector and detecting method thereof
01/06/2010CN101621017A Test method for loss of top of etched metal lead
01/06/2010CN101621016A Method and system for detecting defects in manufacture of integrated circuit
01/06/2010CN101621015A Metal lug surface planarization method
01/06/2010CN101621014A Technology method for improving packaging qualification rate of encapsulation module
01/06/2010CN101621013A Method for producing an organic light-emitting device
01/06/2010CN101621012A Method of fabricating stacked semiconductor package with localized cavities for wire bonding
01/06/2010CN101621011A Method for mutually connecting substrates, flip chip mounting body, and mutual connection structure between substrates
01/06/2010CN101621010A Semiconductor device and method of fabricating the same
01/06/2010CN101621009A Method for manufacturing body-contact structure of partially depleted SOI MOSFET
01/06/2010CN101621008A TFT floating gate memory cell structure
01/06/2010CN101621007A SANOS memory cell structure
01/06/2010CN101621006A Method for forming P-type light doping drain electrode region by pre-noncrystallization processing of germanium
01/06/2010CN101621005A TFT MONOS or SONOS memory cell structure
01/06/2010CN101621004A Method for enhancing characteristic frequency and linearity of gallium nitride transistor with high electron mobility
01/06/2010CN101621003A Novel production process of high-pressure diode
01/06/2010CN101621002A Manufacturing method of low-voltage transient voltage suppression diode chip
01/06/2010CN101621001A Mechanical enhancement of dense and porous organosilicate materials by uv exposure
01/06/2010CN101621000A Plasma etching method and control program
01/06/2010CN101620999A Method for preparing V-shaped groove gallium arsenide patterned substrate by using ammonium hydroxide corrosive liquid
01/06/2010CN101620998A Method for forming silicide in semiconductor device
01/06/2010CN101620997A Method for etching high-K metal gate structure
01/06/2010CN101620996A Method for preparing gate oxidation layer
01/06/2010CN101620995A Gate dielectric layer, manufacturing method thereof, semiconductor device and manufacturing method thereof
01/06/2010CN101620994A Methods for determining the minimum thickness of doped gate dielectric layer, polysilicon layer and laminated top layer
01/06/2010CN101620993A Substrate processing method and substrate processing apparatus
01/06/2010CN101620992A Growing method of semiconductor substrate
01/06/2010CN101620991A Growth of atomic layer deposition epitaxial silicon of TFT flash memory cell
01/06/2010CN101620990A Method for reducing 4H-SiC intrinsic deep energy level defects
01/06/2010CN101620989A Dry etching apparatus
01/06/2010CN101620988A Stacked load lock chamber and substrate processing apparatus including the same
01/06/2010CN101620987A substrate cleaning apparatus
01/06/2010CN101620986A Adhesive tape attaching method
01/06/2010CN101620985A Chip edge etching device and related chip planarization method
01/06/2010CN101620984A Pick up method of device mounted with adhesive membrane
01/06/2010CN101620983A Thin film production method
01/06/2010CN101620982A Method for cleaning wafer and cleaning device
01/06/2010CN101620981A Inorganic film etching method in semiconductor manufacture procedure and shallow groove isolation area forming method
01/06/2010CN101620980A Back-end process simulated substrate and method for forming same
01/06/2010CN101620382A Substrate treatment apparatus and treatment method
01/06/2010CN101620374A Exposure mask using gray-tone pattern, manufacturing method of tft substrate using the same and liquid crystal display device having the tft substrate
01/06/2010CN101618520A Substrate supporting unit and single type substrate polishing apparatus using the same
01/06/2010CN100579339C Making method for circuit board and method for reducing electrode joint thickness of circuit board embedded element