Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2010
01/05/2010US7642167 SON MOSFET using a beam structure and method for fabricating thereof
01/05/2010US7642165 Semiconductor device and fabrication method thereof
01/05/2010US7642164 Method of forming self aligned contacts for a power MOSFET
01/05/2010US7642163 Process of forming an electronic device including discontinuous storage elements within a dielectric layer
01/05/2010US7642162 Semiconductor device and method of manufacturing the same
01/05/2010US7642161 Method of fabricating recess gate in semiconductor device
01/05/2010US7642160 Method of forming a flash NAND memory cell array with charge storage elements positioned in trenches
01/05/2010US7642159 Semiconductor device and method for manufacturing the same
01/05/2010US7642158 Semiconductor memory device and method of production
01/05/2010US7642157 Method for enhancing electrode surface area in DRAM cell capacitors
01/05/2010US7642156 Three-dimensional flash memory cell
01/05/2010US7642155 Semiconductor device with metal nitride barrier layer between gate dielectric and silicided, metallic gate electrodes
01/05/2010US7642154 BiCMOS device and method of manufacturing a biCMOS device
01/05/2010US7642153 Methods for forming gate electrodes for integrated circuits
01/05/2010US7642152 Method of fabricating spacers and cleaning method of post-etching and semiconductor device
01/05/2010US7642151 Semiconductor device and method of manufacturing the same
01/05/2010US7642150 Techniques for forming shallow junctions
01/05/2010US7642149 Method for producing semiconductor device
01/05/2010US7642148 Methods of producing semiconductor devices including multiple stress films in interface area
01/05/2010US7642147 Methods for removing sidewall spacers
01/05/2010US7642146 Semiconductor CMOS devices and methods with NMOS high-k dielectric present in core region that mitigate damage to dielectric materials
01/05/2010US7642145 Method for producing electronic device
01/05/2010US7642144 Transistors with recessed active trenches for increased effective gate width
01/05/2010US7642143 Method of fabricating thin film transistor having multilayer structure and active matrix display device including the thin film transistor
01/05/2010US7642142 Method for manufacturing a flash memory device with cavities in upper portions of conductors
01/05/2010US7642141 Manufacturing method for display device
01/05/2010US7642140 CMOS integrated circuit devices and substrates having buried silicon germanium layers therein and method of forming same
01/05/2010US7642139 Semiconductor device production method and semiconductor device
01/05/2010US7642138 Split-channel antifuse array architecture
01/05/2010US7642137 Manufacturing method of chip package
01/05/2010US7642136 Method and apparatus for reducing stresses applied to bonded interconnects between substrates
01/05/2010US7642135 Thermal mechanical flip chip die bonding
01/05/2010US7642134 Semiconductor device, manufacturing method of semiconductor device, manufacturing equipment of semiconductor device, light emitting diode head, and image forming apparatus
01/05/2010US7642133 Method of making a semiconductor package and method of making a semiconductor device
01/05/2010US7642132 Three-dimensional package and method of making the same
01/05/2010US7642131 Decoupling capacitor closely coupled with integrated circuit
01/05/2010US7642130 Manufacturing method of wiring substrate
01/05/2010US7642129 Ball-mounting method for coplanarity improvement in large package
01/05/2010US7642128 Semiconductor device and method of forming a vertical interconnect structure for 3-D FO-WLCSP
01/05/2010US7642127 Method and system for sealing a substrate
01/05/2010US7642126 Method of manufacturing circuits
01/05/2010US7642125 Phase change memory cell in via array with self-aligned, self-converged bottom electrode and method for manufacturing
01/05/2010US7642124 Structure and fabrication of self-aligned high-performance organic FETs
01/05/2010US7642123 Thermally insulated phase change memory manufacturing method
01/05/2010US7642122 Method for forming nitride crystals
01/05/2010US7642121 LED bonding structures and methods of fabricating LED bonding structures
01/05/2010US7642120 CMOS image sensor and manufacturing method thereof
01/05/2010US7642119 Method for manufacturing image sensor
01/05/2010US7642118 Image sensor fabricating method
01/05/2010US7642117 CMOS image sensor
01/05/2010US7642115 Method for making a transducer
01/05/2010US7642114 Micro electro mechanical device and manufacturing method thereof
01/05/2010US7642113 Semiconductor wafer dividing method
01/05/2010US7642112 Method of manufacturing bonded substrate stack
01/05/2010US7642111 Liquid crystal display device
01/05/2010US7642110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device
01/05/2010US7642109 Electrical connection in OLED devices
01/05/2010US7642108 LED including photonic crystal structure
01/05/2010US7642107 Split transfer gate for dark current suppression an imager pixel
01/05/2010US7642106 Methods for identifying an allowable process margin for integrated circuits
01/05/2010US7642105 Manufacturing method for partially-good memory modules with defect table in EEPROM
01/05/2010US7642104 Method for contacting semiconductor components with a test contact
01/05/2010US7642103 Method of fabricating semiconductor device
01/05/2010US7642102 Real-time parameter tuning using wafer thickness
01/05/2010US7642101 Semiconductor device having in-chip critical dimension and focus patterns
01/05/2010US7642100 Method and system for yield and productivity improvements in semiconductor processing
01/05/2010US7642099 Manufacturing method for ferroelectric memory device
01/05/2010US7642098 Ferromagnetic or ferrimagnetic layer, method for the production thereof, and use thereof
01/05/2010US7642038 irradiating TiO2 photocatalyst and a silicone coupler having fluorocarbon chain with light through the light-transmitting substrate to modify a part of a surface of the material containing the fluorocarbon chain which is to be a 2nd region; patterning a conductive material to form pattern to 2nd region
01/05/2010US7642017 Reflective photomask, method of fabricating the same, and reflective blank photomask
01/05/2010US7641988 Comprises an epitaxial nitride layer with a light-emitting device structure formed on the above self-supported nitride semiconductor substrate; having large light emission with a low driving voltage; gallium nitride
01/05/2010US7641933 Pre-fired ceramic; improved direct current blocking
01/05/2010US7641879 Methods of synthesis of isotopically enriched borohydride and methods of synthesis of isotopically enriched boranes
01/05/2010US7641806 Manufacturing method for membrane member
01/05/2010US7641763 Apparatus and method for removing coating film
01/05/2010US7641761 Apparatus and method for forming thin film using surface-treated shower plate
01/05/2010US7641738 Method of wet cleaning a surface, especially of a material of the silicon-germanium type
01/05/2010US7641737 Evaporation source for evaporating an organic
01/05/2010US7641434 Dual substrate loadlock process equipment
01/05/2010US7641247 End effector assembly for supporting a substrate
01/05/2010US7640946 Vacuum treating device with lidded treatment container
01/05/2010US7640660 Method for manufacturing multilayer wiring board incorporating carbon fibers and glass fibers
01/05/2010US7640656 Method for manufacturing a pre-molding leadframe strip with compact components
01/05/2010CA2428255C Onium salts and the use therof as latent acids
12/2009
12/31/2009US20090325469 Substrate supporting unit and single type substrate polishing apparatus using the same
12/31/2009US20090325467 Method of Thinning Wafer and Support plate
12/31/2009US20090325465 Polishing apparatus, polishing method, and processing apparatus
12/31/2009US20090325393 Heat treatment method and heat treatment apparatus
12/31/2009US20090325392 Sub-second annealing processes for semiconductor devices
12/31/2009US20090325391 Ozone and teos process for silicon oxide deposition
12/31/2009US20090325390 Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device
12/31/2009US20090325389 Substrate processing apparatus and manufacturing method of semiconductor device
12/31/2009US20090325388 Method of semiconductor processing
12/31/2009US20090325387 Methods and apparatus for in-situ chamber dry clean during photomask plasma etching
12/31/2009US20090325386 Process and System For Varying the Exposure to a Chemical Ambient in a Process Chamber
12/31/2009US20090325385 Method for manufacturing silicon wafer
12/31/2009US20090325384 Method of manufacturing semiconductor device
12/31/2009US20090325383 Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method for semiconductor device
12/31/2009US20090325382 Bevel etcher and the related method of flattening a wafer
12/31/2009US20090325381 Prevention and reduction of solvent and solution penetration into porous dielectrics using a thin barrier layer