Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2010
01/07/2010WO2010001727A1 Laser annealing device
01/07/2010WO2010001715A1 Wiring forming method
01/07/2010WO2010001705A1 Diamond semiconductor device and process for fabricating same
01/07/2010WO2010001691A1 Negative radiation-sensitive resin composition
01/07/2010WO2010001686A1 Semiconductor device using grapheme-graphite film and method of fabricating the same
01/07/2010WO2010001645A1 Method for forming metal oxide insulating film
01/07/2010WO2010001608A1 Substrate heating apparatus, liquid material applying apparatus provided with substrate heating apparatus, and substrate heating method
01/07/2010WO2010001607A1 Nitride semiconductor device
01/07/2010WO2010001583A1 Plasma processing device and method for monitoring state of discharge in plasma processing device
01/07/2010WO2010001567A1 Method and apparatus for cutting substrate
01/07/2010WO2010001541A1 Inductor and method for manufacturing the same
01/07/2010WO2010001540A1 Traveling vehicle system
01/07/2010WO2010001538A1 Fine structure and stamper for imprinting
01/07/2010WO2010001537A1 Method and apparatus for manufacturing display element, method and apparatus for manufacturing thin film transistor, and circuit forming apparatus
01/07/2010WO2010001536A1 Semiconductor integrated circuit device
01/07/2010WO2010001525A1 Pattern forming method
01/07/2010WO2010001518A1 Silicon single crystal wafer, process for producing silicon single crystal wafer, and method for evaluating silicon single crystal wafer
01/07/2010WO2010001513A1 Semiconductor device
01/07/2010WO2010001507A1 Semiconductor integrated circuit device
01/07/2010WO2010001506A1 Semiconductor integrated circuit device
01/07/2010WO2010001504A1 Electronic component
01/07/2010WO2010001501A1 Die mounting apparatus and die mounting method
01/07/2010WO2010001500A1 Bonding device
01/07/2010WO2010001497A1 Semiconductor die pickup apparatus and semiconductor die pickup method
01/07/2010WO2010001495A1 Laminated chip
01/07/2010WO2010001460A1 Wafer container
01/07/2010WO2010001440A1 Test device and socket board
01/07/2010WO2010001344A2 Integrating and optimizing different functional components on a single substrate having layer in common
01/07/2010WO2010001201A1 Method of forming a power semiconductor device and power semiconductor device
01/07/2010WO2010001192A2 Methods of combinatorial processing for screening multiple samples on a semiconductor substrate
01/07/2010WO2010001054A2 Method of preparing an electrical insulation film and application for the metallization of through-vias
01/07/2010WO2010001028A1 Germanium layer polishing
01/07/2010WO2010000596A1 Process for manufacturing a structure comprising a germanium layer on a substrate
01/07/2010WO2010000503A1 Coating system and method for coating a substrate
01/07/2010WO2009140196A3 Solar cells and method of making solar cells
01/07/2010WO2009139540A3 Non-contact type of vacuum pad
01/07/2010WO2009134989A3 Antimony compounds useful for deposition of antimony-containing materials
01/07/2010WO2009128646A3 Semiconductor substrate and method for manufacturing the same
01/07/2010WO2009120631A3 Surface cleaning and texturing process for crystalline solar cells
01/07/2010WO2009117693A3 Method of reclaiming and storing a valuable process gas
01/07/2010WO2009115686A3 Connection component with hollow inserts and method for making same
01/07/2010WO2009111728A3 Method and apparatus to remove and replace factory interface track
01/07/2010WO2009111326A3 Flash light annealing for thin films
01/07/2010WO2009108752A3 Laser-induced structuring of substrate surfaces
01/07/2010WO2009094176A3 Layer transfer for large area inorganic foils
01/07/2010WO2005122731A3 Method to form a conductive structure
01/07/2010US20100004875 Defect Inspection Method and Apparatus
01/07/2010US20100004425 Source material for preparing low dielectric constant material
01/07/2010US20100003883 Reflective type liquid crystal display device and fabricating method thereof
01/07/2010US20100003835 Low-K Precursors Based on Silicon Cryptands, Crown Ethers and Podands
01/07/2010US20100003834 Mram
01/07/2010US20100003833 Method of forming fluorine-containing dielectric film
01/07/2010US20100003832 Vapor phase deposition apparatus, method for depositing thin film and method for manufacturing semiconductor device
01/07/2010US20100003831 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus
01/07/2010US20100003830 Imprint mask manufacturing method, imprint mask manufacturing device, and semiconductor device manufacturing method
01/07/2010US20100003829 Clamped monolithic showerhead electrode
01/07/2010US20100003828 Methods for adjusting critical dimension uniformity in an etch process with a highly concentrated unsaturated hydrocarbon gas
01/07/2010US20100003827 Method and device for etching a substrate by means of plasma
01/07/2010US20100003826 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
01/07/2010US20100003825 Plasma etching method, control program and computer storage medium
01/07/2010US20100003824 Clamped showerhead electrode assembly
01/07/2010US20100003823 Method for Forming Trenches with Wide Upper Portion and Narrow Lower Portion
01/07/2010US20100003822 Method for producing columnar structured material
01/07/2010US20100003821 Wetting agent for semiconductors, and polishing composition and polishing method employing it
01/07/2010US20100003820 Method for manufacturing semiconductor device
01/07/2010US20100003819 Design layout data creating method, computer program product, and method of manufacturing semiconductor device
01/07/2010US20100003818 Method of fabricating semiconductor device
01/07/2010US20100003817 Method of light induced plating on semiconductors
01/07/2010US20100003816 Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed
01/07/2010US20100003815 Semiconductor device and method for manufacturing the same
01/07/2010US20100003814 Interconnections Having Double Capping Layer and Method for Forming the Same
01/07/2010US20100003813 Semiconductor device and method of fabricating the same
01/07/2010US20100003812 Solar Cell Fabrication Using Extrusion Mask
01/07/2010US20100003811 Method for manufacturing epitaxial wafer
01/07/2010US20100003810 Method of forming p-type compound semiconductor layer
01/07/2010US20100003809 Method for destruction of metallic carbon nanotubes, method for production of aggregate of semiconducting carbon nanotubes, method for production of thin film of semiconducting carbon nanotubes, method for destruction of semiconducting carbon nanotubes, method for
01/07/2010US20100003808 Method of preparing an electrically insulating film and application for the metallization of vias
01/07/2010US20100003807 Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium
01/07/2010US20100003806 Deterministic generation of an integrated circuit identification number
01/07/2010US20100003805 Semiconductor device fabrication method
01/07/2010US20100003804 Electronic Device and Method for Manufacturing Same
01/07/2010US20100003803 Manufacturing method of strained si substrate
01/07/2010US20100003802 Method for fabricating fin transistor
01/07/2010US20100003801 Method of Manufacturing a Semiconductor Device
01/07/2010US20100003800 Bipolar transistor with silicided sub-collector
01/07/2010US20100003799 Method for forming p-type lightly doped drain region using germanium pre-amorphous treatment
01/07/2010US20100003798 Semiconductor device and manufacturing method thereof
01/07/2010US20100003797 Method for forming transistor with high breakdown voltage
01/07/2010US20100003796 Manufacturing method of semiconductor device having self-aligned contact
01/07/2010US20100003795 Method for Fabricating Flash Memory Device Having Vertical Floating Gate
01/07/2010US20100003794 Method for defect reduction for memory cell capacitors
01/07/2010US20100003793 Method for forming silicide in semiconductor device
01/07/2010US20100003792 Method for fabricating pixel structure
01/07/2010US20100003791 Method for manufacturing electronic circuit component
01/07/2010US20100003790 Method for producing a micromechanical component having a thin-layer capping
01/07/2010US20100003789 Method of encapsulating a microelectronic device by a getter material
01/07/2010US20100003788 Method of making a semiconductor chip assembly with a post/base heat spreader and vertical signal routing
01/07/2010US20100003787 Method of making a semiconductor chip assembly with a post/base heat spreader and horizontal signal routing
01/07/2010US20100003786 Chip-level underfill process and structures thereof
01/07/2010US20100003785 Stacked integrated circuit assembly