| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/19/2010 | US7648909 Method for fabricating semiconductor device with metal line |
| 01/19/2010 | US7648908 Method for forming inlaid interconnect |
| 01/19/2010 | US7648907 Semiconductor device, wiring substrate forming method, and substrate processing apparatus |
| 01/19/2010 | US7648906 Method and apparatus for processing a conductive thin film |
| 01/19/2010 | US7648905 Flash memory device and a method of manufacturing the same |
| 01/19/2010 | US7648904 Metal line in semiconductor device and method for forming the same |
| 01/19/2010 | US7648903 Modular bonding pad structure and method |
| 01/19/2010 | US7648901 Manufacturing process and apparatus therefor utilizing reducing gas |
| 01/19/2010 | US7648900 Vias having varying diameters and fills for use with a semiconductor device and methods of forming semiconductor device structures including same |
| 01/19/2010 | US7648899 Interfacial layers for electromigration resistance improvement in damascene interconnects |
| 01/19/2010 | US7648898 Method to fabricate gate electrodes |
| 01/19/2010 | US7648897 Method for manufacturing conductive layer and semiconductor device |
| 01/19/2010 | US7648896 Deposited semiconductor structure to minimize n-type dopant diffusion and method of making |
| 01/19/2010 | US7648895 Vertical CVD apparatus for forming silicon-germanium film |
| 01/19/2010 | US7648894 Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same |
| 01/19/2010 | US7648893 Method for manufacturing a semiconductor-on-insulator substrate for microelectronics and optoelectronics |
| 01/19/2010 | US7648892 Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device |
| 01/19/2010 | US7648891 Semiconductor chip shape alteration |
| 01/19/2010 | US7648890 using aqueous acid solution which contains hydrogen fluoride, nitric acid, and phosphoric acid in single-wafer etching step; capable of performing a high level of flattening |
| 01/19/2010 | US7648889 Production method for device |
| 01/19/2010 | US7648888 Apparatus and method for splitting substrates |
| 01/19/2010 | US7648887 Classification apparatus for semiconductor substrate, classification method of semiconductor substrate, and manufacturing method of semiconductor device |
| 01/19/2010 | US7648886 Shallow trench isolation process |
| 01/19/2010 | US7648885 Method for forming misalignment inspection mark and method for manufacturing semiconductor device |
| 01/19/2010 | US7648884 Semiconductor device with integrated resistive element and method of making |
| 01/19/2010 | US7648883 Phosphorous doping methods of manufacturing field effect transistors having multiple stacked channels |
| 01/19/2010 | US7648882 SONOS flash memory and method for fabricating the same |
| 01/19/2010 | US7648881 Non-volatile memory devices with charge storage insulators and methods of fabricating such devices |
| 01/19/2010 | US7648880 Nitride-encapsulated FET (NNCFET) |
| 01/19/2010 | US7648879 High-voltage vertical transistor with a multi-gradient drain doping profile |
| 01/19/2010 | US7648878 Method for fabricating semiconductor device with recess gate |
| 01/19/2010 | US7648877 Structure and method for forming laterally extending dielectric layer in a trench-gate FET |
| 01/19/2010 | US7648876 Flash memory device |
| 01/19/2010 | US7648875 Methods for forming DRAM devices including protective patterns and related devices |
| 01/19/2010 | US7648874 Method of forming a dielectric structure having a high dielectric constant and method of manufacturing a semiconductor device having the dielectric structure |
| 01/19/2010 | US7648873 Methods of forming capacitors |
| 01/19/2010 | US7648872 Methods of forming DRAM arrays |
| 01/19/2010 | US7648871 Field effect transistors (FETS) with inverted source/drain metallic contacts, and method of fabricating same |
| 01/19/2010 | US7648870 Method of forming fuse region in semiconductor damascene process |
| 01/19/2010 | US7648869 Method of fabricating semiconductor structures for latch-up suppression |
| 01/19/2010 | US7648868 Metal-gated MOSFET devices having scaled gate stack thickness |
| 01/19/2010 | US7648867 Method for fabricating a semiconductor device |
| 01/19/2010 | US7648866 Method of manufacturing driving-device for unit pixel of organic light emitting display |
| 01/19/2010 | US7648865 Method for manufacturing pixel structure |
| 01/19/2010 | US7648864 Semiconductor structure including mixed rare earth oxide formed on silicon |
| 01/19/2010 | US7648863 Semiconductor device and manufacturing method thereof |
| 01/19/2010 | US7648862 Semiconductor device and method of manufacturing the same |
| 01/19/2010 | US7648861 Method of fabricating a semiconductor device including separately forming a second semiconductor film containing an impurity element over the first semiconductor region |
| 01/19/2010 | US7648860 Self-aligned thin-film transistor and method of forming same |
| 01/19/2010 | US7648859 Microcomponent comprising a hermetically-sealed microcavity and method for production of such a microcomponent |
| 01/19/2010 | US7648858 Methods and apparatus for EMI shielding in multi-chip modules |
| 01/19/2010 | US7648857 Process for precision placement of integrated circuit overcoat material |
| 01/19/2010 | US7648856 Methods for attaching microfeature dies to external devices |
| 01/19/2010 | US7648855 Device comprising an encapsulated microsystem and production method thereof |
| 01/19/2010 | US7648854 Methods of forming metal oxide layers, methods of forming gate structures using the same, and methods of forming capacitors using the same |
| 01/19/2010 | US7648853 Dual channel heterostructure |
| 01/19/2010 | US7648852 Low-voltage organic thin film transistor and fabrication method thereof |
| 01/19/2010 | US7648851 Method of fabricating backside illuminated image sensor |
| 01/19/2010 | US7648850 Method for producing semiconductor chip |
| 01/19/2010 | US7648849 Nitride semiconductor light emitting diode having mesh DBR reflecting layer |
| 01/19/2010 | US7648848 Semiconductor integrated circuit production method and device including preparing a plurality of SOI substrates, grouping SOI substrates having mutual similarities and adjusting their layer thicknesses simultaneously |
| 01/19/2010 | US7648847 In-situ monitoring and method to determine accumulated printed wiring board thermal and/or vibration stress fatigue using a mirrored monitor chip and continuity circuit |
| 01/19/2010 | US7648846 Active matrix substrate and repairing method thereof |
| 01/19/2010 | US7648820 Polycarbosilanes with chromogen and transparent moieties crosslinked by glycouril, alcohols, hydroxybenzyl, phenol, hydroxymethylbenzyl, cyclohexanoyl, propanol, fluorocarbon alcohols, vinyl ethers, and epoxides; semiconductors; lithography |
| 01/19/2010 | US7648818 contecting polymeric resist layer to an onium derivatizing agent in which at least one light field or dark field is modified, preferential removal of dark-field or light field regions with CO2 solution, which may be used to form patterned regions on substrates such as microelectronic substrates |
| 01/19/2010 | US7648807 preparing a plate-like substrate with a rectangular main surface, forming a marker for identifying the substrate on each of at least a plurality of end faces among four end faces of the substrate, the four end faces continuous with sides of the main surface, respectively; avoiding defective portion |
| 01/19/2010 | US7648782 Ceramic coating member for semiconductor processing apparatus |
| 01/19/2010 | US7648689 Process for the production of InP fine particles and InP fine particle dispersion obtained by the process |
| 01/19/2010 | US7648621 Copper electroplating method, pure copper anode for copper electroplating, and semiconductor wafer plated thereby with little particle adhesion |
| 01/19/2010 | US7648611 Plasma etching equipment |
| 01/19/2010 | US7648610 Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate |
| 01/19/2010 | US7648580 Substrate processing method and substrate processing device |
| 01/19/2010 | US7648579 Substrate support system for reduced autodoping and backside deposition |
| 01/19/2010 | US7648578 Substrate processing apparatus, and method for manufacturing semiconductor device |
| 01/19/2010 | US7648577 MBE growth of p-type nitride semiconductor materials |
| 01/19/2010 | US7648576 Epitaxial wafer and method for producing same |
| 01/19/2010 | US7648410 Polishing pad and chemical mechanical polishing apparatus |
| 01/19/2010 | US7648327 Wafer engine |
| 01/19/2010 | US7648322 Automatic carton magazine loading system |
| 01/19/2010 | US7647959 LCD bonding machine and method for fabricating LCD by using the same |
| 01/19/2010 | US7647886 Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers |
| 01/19/2010 | US7647694 Method for mounting electronic component |
| 01/19/2010 | CA2442127C Negative-resistance field-effect element |
| 01/19/2010 | CA2380114C Imprint method and device |
| 01/15/2010 | WO2009009380A2 Normally-off integrated jfet power switches in wide bandgap semiconductors and methods of making |
| 01/15/2010 | CA2729299A1 Normally-off integrated jfet power switches in wide bandgap semiconductors and methods of making |
| 01/14/2010 | WO2010006279A2 Chamber components for cvd applications |
| 01/14/2010 | WO2010006181A2 Methods and apparatus for abating electronic device manufacturing process effluent |
| 01/14/2010 | WO2010006156A2 Rapid thermal processing chamber with shower head |
| 01/14/2010 | WO2010006148A2 Wire slicing system |
| 01/14/2010 | WO2010006107A2 Semiconductor devices with non-punch-through semiconductor channels having enhanced conduction and methods of making |
| 01/14/2010 | WO2010006080A2 Graphene and hexagonal boron nitride planes and associated methods |
| 01/14/2010 | WO2010005934A2 Rf-biased capacitively-coupled electrostatic (rfb-cce) probe arrangement for characterizing a film in a plasma processing chamber |
| 01/14/2010 | WO2010005933A2 Passive capacitively-coupled electrostatic (cce) probe arrangement for detecting plasma instabilities in a plasma processing chamber |
| 01/14/2010 | WO2010005932A2 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber |
| 01/14/2010 | WO2010005931A2 Capacitively-coupled electrostatic (cce) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof |
| 01/14/2010 | WO2010005930A2 Capacitively-coupled electrostatic (cce) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof |
| 01/14/2010 | WO2010005878A1 Dielectric cap above floating gate |
| 01/14/2010 | WO2010005866A1 Method of making a nonvolatile memory device |
| 01/14/2010 | WO2010005831A2 Grayscale patterning of polymer thin films using direct-write multiphoton photolithography |