Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2010
12/23/2010WO2010147187A1 Semiconductor device
12/23/2010WO2010147160A1 Glass frit for formation of electrode, and electrically conductive paste for formation of electrode and solar cell each utilizing same
12/23/2010WO2010147141A1 Film deposition method, pretreatment device, and treating system
12/23/2010WO2010147140A1 Barrier layer, film deposition method, and treating system
12/23/2010WO2010147120A1 Inductor element with core and method for producing the same
12/23/2010WO2010147104A1 Charged-particle microscope device, and method of controlling charged-particle beams
12/23/2010WO2010147103A1 Temporarily fixing agent for semiconductor wafer, and process for production of semiconductor device using same
12/23/2010WO2010147102A1 Temporarily fixing agent for semiconductor wafer, and process for production of semiconductor device using same
12/23/2010WO2010147081A1 Method for manufacturing ge film-provided soi substrate, and ge film-rpovided soi substrate
12/23/2010WO2010147079A1 Radiation-sensitive resin composition
12/23/2010WO2010147057A1 Temperature increase control method for heating device for substrate treatment system, computer recording medium, and substrate treatment system
12/23/2010WO2010147056A1 Imprinting system, imprinting method, and computer storage medium
12/23/2010WO2010147053A1 Vapor deposition device
12/23/2010WO2010147032A1 Semiconductor device
12/23/2010WO2010147029A1 Semiconductor device
12/23/2010WO2010147028A1 Method for manufacturing a plurality of semiconductor chips
12/23/2010WO2010147019A1 Alignment method, alignment device, and exposure device
12/23/2010WO2010147012A1 Epitaxial substrate, light-emitting element, light-emitting device, and method for producing epitaxial substrate
12/23/2010WO2010147002A1 Electrode connection structure, conductive adhesive used therefor, and electronic device
12/23/2010WO2010147001A1 Electrode connection method, electrode connection structure, conductive adhesive used therefor, and electronic device
12/23/2010WO2010146998A1 Substrate coating device
12/23/2010WO2010146983A1 Imprinting material with low dielectric constant
12/23/2010WO2010146982A1 Polyurethane, composition for formation of polishing layers that contains same, pad for chemical mechanical polishing, and chemical mechanical polishing method using same
12/23/2010WO2010146981A1 Substrate placing table
12/23/2010WO2010146970A1 Gas discharge structure, and device and method for plasma processing
12/23/2010WO2010146969A1 Plasma processing apparatus and plasma processing method
12/23/2010WO2010146965A1 Photo mask, photolithography method, substrate production method and display panel production method
12/23/2010WO2010146961A1 Plasma processing device and cooling device for plasma processing devices
12/23/2010WO2010146928A1 Substrate coating apparatus
12/23/2010WO2010146884A1 Semiconductor chip and structure for mounting same
12/23/2010WO2010146840A1 Substrate transfer device
12/23/2010WO2010146799A1 Defect inspection device and inspection method
12/23/2010WO2010146766A1 Resin composition for nanoimprint, and method for forming structure
12/23/2010WO2010146727A1 Semiconductor device and process for manufacture thereof
12/23/2010WO2010146709A1 Electronic parts transfer system, and electronic parts transfer method
12/23/2010WO2010146708A1 Electronic-part transfer apparatus, and electronic-part testing system provided with the transfer device
12/23/2010WO2010146692A1 Semiconductor device and method for manufacturing semiconductor device
12/23/2010WO2010146645A1 Semiconductor device and method for manufacturing semiconductor device
12/23/2010WO2010146641A1 Semiconductor device and process for manufacture thereof
12/23/2010WO2010146639A1 Nitride semiconductor device and method for manufacturing same
12/23/2010WO2010146561A1 Integrated cleaner and dryer
12/23/2010WO2010146524A1 Conformable electronic devices and methods for their manufacture
12/23/2010WO2010146234A1 Apparatus
12/23/2010WO2010146053A1 Thermolabile precursor compounds for improving the interparticulate contact points and for filling the interspaces in semiconductive metal oxide particle layers
12/23/2010WO2010145787A1 Process module for the inline-treatment of substrates
12/23/2010WO2010145712A1 Crack reduction at metal/organic dielectric interface
12/23/2010WO2010145557A1 System and method for determining performance of wearable electrode
12/23/2010WO2010145425A1 Surface mounting apparatus and corresponding surface mounting method for pop packaging devices
12/23/2010WO2010123263A3 Method for manufacturing a polycrystalline silicon thin film
12/23/2010WO2010123262A3 Apparatus and method for manufacturing a polycrystalline silicon thin film
12/23/2010WO2010117201A3 Production method for a polysilicon mask using a metal catalyst, and a production method for semiconductor elements using the same
12/23/2010WO2010110558A3 In-line heat treatment apparatus
12/23/2010WO2010104337A3 Probe card for testing film package
12/23/2010WO2010102106A3 Techniques for forming a contact to a buried diffusion layer in a semiconductor memory device
12/23/2010WO2010101413A3 Gate valve assembly and substrate-processing system comprising same
12/23/2010WO2010099862A3 Device and method for simultaneously microstructuring and doping semiconductor substrates
12/23/2010WO2009153422A8 Nitrogen-plasma surface treatment in a direct bonding method
12/23/2010US20100324732 Wafer center finding with a kalman filter
12/23/2010US20100324717 Thin-film solar-cell manufacturing system and common substrate storage rack
12/23/2010US20100324330 Process for Preventing Development Defect and Composition for Use in the Same
12/23/2010US20100323532 Method of thermal processing structures formed on a substrate
12/23/2010US20100323531 Method for forming insulating film and method for manufacturing semiconductor device
12/23/2010US20100323530 Modifier for low dielectric constant film, and method for production thereof
12/23/2010US20100323529 Method for forming insulating film and method for manufacturing semiconductor device
12/23/2010US20100323528 Semiconductor manufacturing apparatus and method for manufacturing a semiconductor
12/23/2010US20100323527 Selection and deposition of nanoparticles using CO2-expanded liquids
12/23/2010US20100323526 Method of processing silicon substrate and method of manufacturing substrate for liquid discharge head
12/23/2010US20100323525 Cd bias loading control with arc layer open
12/23/2010US20100323524 Method of etching the back side of a wafer
12/23/2010US20100323523 Methods Of Plasma Etching Platinum-Comprising Materials, Methods Of Processing Semiconductor Substrates In The Fabrication Of Integrated Circuitry, And Methods Of Forming A Plurality Of Memory Cells
12/23/2010US20100323522 Polishing composition and polishing method
12/23/2010US20100323521 Patterning method
12/23/2010US20100323520 Method of Forming Patterns of Semiconductor Device
12/23/2010US20100323519 Method of manufacturing semiconductor device suitable for forming wiring using damascene method
12/23/2010US20100323518 Method for producing a nanoporous layer
12/23/2010US20100323517 Microstructure modification in copper interconnect structure
12/23/2010US20100323516 Semiconductor device and manufacturing method thereof
12/23/2010US20100323515 Method for making semiconductor electrodes
12/23/2010US20100323514 Restoration method using metal for better cd controllability and cu filing
12/23/2010US20100323513 Fabrication method of semiconductor device having conductive bumps
12/23/2010US20100323512 Metal oxide film formation method and apparatus
12/23/2010US20100323511 Nonvolatile memories with laterally recessed charge-trapping dielectric
12/23/2010US20100323510 Methods of Forming Dispersions of Nanoparticles, and Methods of Forming Flash Memory Cells
12/23/2010US20100323509 Nonvolatile semiconductor memory device and method of manufacturing the same
12/23/2010US20100323508 Plasma grid implant system for use in solar cell fabrications
12/23/2010US20100323507 Substrate processing apparatus and producing method of device
12/23/2010US20100323506 Method for fabricating semiconductor substrates and semiconductor devices
12/23/2010US20100323505 Method for manufacturing semiconductor device
12/23/2010US20100323504 Laser irradiation apparatus and method for manufacturing semiconductor device
12/23/2010US20100323503 Integrated emitter formation and passivation
12/23/2010US20100323502 Method for manufacturing soi substrate
12/23/2010US20100323501 Plasma treatment apparatus, method for forming film, and method for manufacturing thin film transistor
12/23/2010US20100323500 System and Process for Producing Nanowire Composites and Electronic Substrates Therefrom
12/23/2010US20100323499 Method for manufacturing semiconductor device
12/23/2010US20100323498 Circuit Device and Method of Manufacturing Thereof
12/23/2010US20100323497 Method of transferring a thin layer onto a target substrate having a coefficient of thermal expansion different from that of the thin layer
12/23/2010US20100323496 Process for manufacturing a composite substrate
12/23/2010US20100323495 Recessed gate electrode mos transistor and method for fabricating the same
12/23/2010US20100323494 Narrow channel width effect modification in a shallow trench isolation device
12/23/2010US20100323493 Method for Fabricating an Integrated Circuit Including Resistivity Changing Material Having a Planarized Surface
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