Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2010
12/29/2010CN101930923A Fabrication method of MOS (Metal Oxide Semiconductor) transistor
12/29/2010CN101930922A Production method of MOS (Metal Oxide Semiconductor) transistor
12/29/2010CN101930921A Method for improving grid size uniformity
12/29/2010CN101930920A MOS (Metal Oxide Semiconductor) transistor and manufacture method thereof
12/29/2010CN101930919A Semiconductor device and manufacture method thereof
12/29/2010CN101930918A Semiconductor structure and lateral wall partitioning method
12/29/2010CN101930917A Method for etching connecting hole by dry method
12/29/2010CN101930916A Method for forming groove
12/29/2010CN101930915A Preparation method for molybdenum-aluminum-nitrogen (MoAlN) metal gate
12/29/2010CN101930914A Manufacturing method of silicon oxide-silicon oxynitride-silicon oxide layer in SONOS (Silicon Oxide Nitride Oxide Semiconductor)
12/29/2010CN101930913A Generating method of metal gate electrode
12/29/2010CN101930912A Process of realizing p plus and n plus diffusion on both sides of silicon chip by utilizing mask
12/29/2010CN101930911A Method for producing an epitaxially coated semiconductor wafer
12/29/2010CN101930910A Method for repairing substrate height difference formed by oxidation promotion after ion injection
12/29/2010CN101930909A Method for producing a semiconductor wafer
12/29/2010CN101930908A Method for polishing the edge of a semiconductor wafer
12/29/2010CN101930907A Irradiation apparatus and manufacturing method for semiconductor device
12/29/2010CN101930906A Vacuum interlocking chamber with in-built adapter unit
12/29/2010CN101930905A Detection structure and on-line wafer monitoring method
12/29/2010CN101930904A Assembly of wafer ejector and imaging device
12/29/2010CN101930903A Device for separating lead frame from flow channel
12/29/2010CN101930902A Heating cavity and semiconductor processing equipment
12/29/2010CN101930901A Soldering pin of wire jointing device for packaging semiconductor and wire jointing method
12/29/2010CN101930892A Electrostatic chuck and plasma device
12/29/2010CN101930890A Electrode component for plasma treatment, internal components for plasma treatment and manufacturing and separating method thereof
12/29/2010CN101930562A Particle generation factor determining system and charging method
12/29/2010CN101930480A Method for optimizing CMOS imaging sensor layout
12/29/2010CN101930184A Developing treatment apparatus
12/29/2010CN101930179A Method for passivating photoresist surface and photoetching method
12/29/2010CN101930178A Chemically amplified photoresist composition and method for forming resist pattern
12/29/2010CN101930167A Pellicle frame and lithographic pellicle
12/29/2010CN101930166A Pellicle frame and lithographic pellicle
12/29/2010CN101930165A Pellicle frame and lithographic pellicle
12/29/2010CN101930164A Dustproof film component
12/29/2010CN101930077A X-ray sensor and fabrication method thereof
12/29/2010CN101929846A Method for scanning wafer surface image
12/29/2010CN101929560A Two-way valve and semiconductor processing system applying industrial gas
12/29/2010CN101928990A Epitaxial growth method of GeSn alloy
12/29/2010CN101928947A Cleaning reagent and manufacturing process of aluminum pad
12/29/2010CN101928935A Plasma treatment apparatus, method for forming film, and method for manufacturing thin film transistor
12/29/2010CN101928927A Device and method for implanting ions
12/29/2010CN101928650A Fluorine-containing composition and application thereof
12/29/2010CN101928521A Abrasive pulp composition and metal-inlaid structure manufacturing method using same
12/29/2010CN101928396A Polyamide resin, positive-working photosensitive resin composition, method for producing pattern-formed resin film, semiconductor device, display device, and method for producing the semiconductor device and the display device
12/29/2010CN101927998A Graphene wafer, method for manufacturing the graphene wafer, method for releasing a graphene layer, and method for manufacturing a graphene device
12/29/2010CN101927457A Combined finisher
12/29/2010CN101927455A Polishing pad and method for polishing a semiconductor wafer
12/29/2010CN101927453A Grinding device of shallow trench isolation structure and method therefor
12/29/2010CN101927447A Method of the double sided polishing of a semiconductor wafer
12/29/2010CN101609800B Method for preparing crystallographic orientation semiconductor substrate
12/29/2010CN101604626B Method for manufacturing semiconductor capacitance element
12/29/2010CN101587306B Alignment signal processing method in photoetching technology
12/29/2010CN101582397B Semiconductor device and manufacturing method thereof
12/29/2010CN101529603B Connected structure and method for manufacture thereof
12/29/2010CN101499411B Plasma processing apparatus
12/29/2010CN101494226B Thin-film transistor substrate and method of manufacturing the same, wiring structure and method of manufacturing the same
12/29/2010CN101494170B Method for preparing Sm2O3 film by microwave assisted hydrothermal process
12/29/2010CN101483159B Chip construction and process thereof, chip stacking construction and process thereof
12/29/2010CN101471395B Reaction chamber structure of solar battery edge-engraving machine
12/29/2010CN101441331B Semiconductor device including semiconductor thin film, crystallizing method for the semiconductor thin film, and crystallizing apparatus for the semiconductor thin film
12/29/2010CN101436612B Field effect transistor and method for forming the same
12/29/2010CN101420007B Encapsulation construction and method for LED wafer
12/29/2010CN101399181B Method for removing hard masks on gates in semiconductor manufacturing process
12/29/2010CN101383282B Method for wet processing wafer in fabrication of semiconductor integrated circuit device
12/29/2010CN101373720B Method of manufacturing semiconductor device
12/29/2010CN101355016B Method for cleaning semiconductor device
12/29/2010CN101329217B Apparatus and method for detecting resin leakage
12/29/2010CN101316683B Method for manufacturing microporous cmp materials having controlled pore size
12/29/2010CN101290970B Rewritable electrical storage with inorganic thin film and preparing method thereof
12/29/2010CN101276748B Plasma doping apparatus
12/29/2010CN101271916B Electrostatic-resistant gallium nitride illumination device and production method thereof
12/29/2010CN101271891B Electrostatic discharge protecting equipment and manufacturing method thereof
12/29/2010CN101261963B Miniature electronic part and making method
12/29/2010CN101257030B Semiconductor structure and method for forming semiconductor structure
12/29/2010CN101236917B Contact forming method on adjacent underlay and related semiconductor device
12/29/2010CN101219534B Polishing pad and method of producing the same
12/29/2010CN101218667B Semiconductor device and its making method
12/29/2010CN101174083B Protective film assembly container
12/29/2010CN101128972B Supply power adjusting apparatus and semiconductor manufacturing apparatus and its manufacture method
12/29/2010CN101128506B Multi-functional copolymers comprising rare earth metal complexes and devices thereof
12/29/2010CN101122613B Carrier tray for use with prober
12/29/2010CN101106897B High-speed picker applying multi-header turning tower structure
12/29/2010CN101105640B Lithographic apparatus and device manufacturing method
12/29/2010CN101101869B Laser annealing method and semiconductor device manufacturing method
12/29/2010CN101086484B Tongs device
12/29/2010CN101074485B Method of manufacturing electronic component
12/29/2010CN101068005B Semiconductor device package leadframe formed from multiple metal layers
12/29/2010CN101063816B Resist composition, method for forming resist pattern, array substrate fabricated and method of fabricating the array substrate
12/29/2010CN101060102B Nitride semiconductor substrate, method of making the same and epitaxial substrate for nitride semiconductor light emitting device
12/29/2010CN101034256B Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof
12/29/2010CN101028700B Processing device with rotary table
12/29/2010CN101005081B Non-volatile memory device, and manufacturing method and programming method thereof
12/29/2010CA2766244A1 Process for the production of a structured metallic coating
12/29/2010CA2757818A1 Fet with replacement gate structure and method of fabricating the same
12/28/2010USRE42007 Vertical geometry InGaN LED
12/28/2010US7861210 Exposure data generator and method thereof
12/28/2010US7861209 Method for interlayer and yield based optical proximity correction
12/28/2010US7860686 Process of geometrical characterisation of structures and device for implementing said process
12/28/2010US7860499 Switch circuit and method of switching radio frequency signals
12/28/2010US7859748 Microlithographic reduction projection catadioptric objective
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