| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/15/2011 | US7906413 Abrupt “delta-like” doping in Si and SiGe films by UHV-CVD |
| 03/15/2011 | US7906412 Method of fabricating group III nitride semiconductor single crystal, and method of fabricating group III nitride semiconductor single crystal substrate |
| 03/15/2011 | US7906411 Deposition technique for producing high quality compound semiconductor materials |
| 03/15/2011 | US7906410 Method of manufacturing semiconductor chip using laser light and plasma dicing |
| 03/15/2011 | US7906409 Device manufacturing method |
| 03/15/2011 | US7906408 Method of manufacturing strained silicon on-insulator substrate |
| 03/15/2011 | US7906407 Shallow trench isolation structures and a method for forming shallow trench isolation structures |
| 03/15/2011 | US7906406 Process for manufacturing a semiconductor wafer having SOI-insulated wells and semiconductor wafer thereby manufactured |
| 03/15/2011 | US7906405 Polysilicon structures resistant to laser anneal lightpipe waveguide effects |
| 03/15/2011 | US7906404 Power distribution for CMOS circuits using in-substrate decoupling capacitors and back side metal layers |
| 03/15/2011 | US7906403 Bipolar transistor and method of fabricating the same |
| 03/15/2011 | US7906402 Compensation techniques for substrate heating processes |
| 03/15/2011 | US7906401 Method of tuning threshold voltages of interdiffusible structures |
| 03/15/2011 | US7906400 Method of manufacturing a semiconductor device having transistors and semiconductor device having transistors |
| 03/15/2011 | US7906399 Narrow width metal oxide semiconductor transistor |
| 03/15/2011 | US7906398 Method of fabricating semiconductor device |
| 03/15/2011 | US7906397 Methods of fabricating nonvolatile semiconductor memory devices including a plurality of stripes having impurity layers therein |
| 03/15/2011 | US7906396 Flash memory and method of fabricating the same |
| 03/15/2011 | US7906395 Self-aligned patterning method by using non-conformal film and etch back for flash memory and other semiconductor applications |
| 03/15/2011 | US7906394 Implanted vertical source-line under straight stack for FLASH EPROM |
| 03/15/2011 | US7906393 Methods for forming small-scale capacitor structures |
| 03/15/2011 | US7906392 Pillar devices and methods of making thereof |
| 03/15/2011 | US7906391 Reducing leakage currents in memories with phase-change material |
| 03/15/2011 | US7906390 Thin gate electrode CMOS devices and methods of fabricating same |
| 03/15/2011 | US7906389 Butted source contact and well strap |
| 03/15/2011 | US7906388 Semiconductor device and method for manufacture |
| 03/15/2011 | US7906387 Method for manufacturing a transistor |
| 03/15/2011 | US7906386 Semiconductor device and method of fabricating the same |
| 03/15/2011 | US7906385 Method for selectively forming strain in a transistor by a stress memorization technique without adding additional lithography steps |
| 03/15/2011 | US7906384 Semiconductor devices having tensile and/or compressive stress and methods of manufacturing |
| 03/15/2011 | US7906383 Stress transfer in an interlayer dielectric by providing a stressed dielectric layer above a stress-neutral dielectric material in a semiconductor device |
| 03/15/2011 | US7906382 Method of crystallizing amorphous semiconductor thin film and method of fabricating poly-crystalline thin film transistor using the same |
| 03/15/2011 | US7906381 Method for integrating silicon-on-nothing devices with standard CMOS devices |
| 03/15/2011 | US7906380 Electric device having nanowires, manufacturing method thereof, and electric device assembly |
| 03/15/2011 | US7906378 Epoxy resin composition for encapsulating semiconductor element and semiconductor device |
| 03/15/2011 | US7906377 Fabrication method of circuit board |
| 03/15/2011 | US7906376 Magnetic particle-based composite materials for semiconductor packages |
| 03/15/2011 | US7906375 Compact co-packaged semiconductor dies with elevation-adaptive interconnection plates |
| 03/15/2011 | US7906374 COF packaging structure, method of manufacturing the COF packaging structure, and method for assembling a driver IC and the COF packaging structure thereof |
| 03/15/2011 | US7906373 Thermally enhanced electrically insulative adhesive paste |
| 03/15/2011 | US7906372 Lens support and wirebond protector |
| 03/15/2011 | US7906370 Mounting method of electronic components, manufacturing method of electronic component-embedded substrate, and electronic component-embedded substrate |
| 03/15/2011 | US7906369 Memory and access device and method therefor |
| 03/15/2011 | US7906368 Phase change memory with tapered heater |
| 03/15/2011 | US7906365 Method of manufacturing solar cell panel |
| 03/15/2011 | US7906364 Methods for manufacturing a sensor assembly |
| 03/15/2011 | US7906363 Method of fabricating semiconductor device having three-dimensional stacked structure |
| 03/15/2011 | US7906362 Assembling two substrates by molecular adhesion |
| 03/15/2011 | US7906360 Manufacturing process for a photodetector |
| 03/15/2011 | US7906359 Method of forming a surface micromachined MEMS device |
| 03/15/2011 | US7906358 Epitaxial growth of cubic crystalline semiconductor alloys on basal plane of trigonal or hexagonal crystal |
| 03/15/2011 | US7906357 P-type layer for a III-nitride light emitting device |
| 03/15/2011 | US7906356 Method of manufacturing array substrate of horizontal electric field type transreflective liquid crystal display |
| 03/15/2011 | US7906354 Light emitting nanowire device |
| 03/15/2011 | US7906353 Method of fabricating interferometric devices using lift-off processing techniques |
| 03/15/2011 | US7906352 Chip and method for producing a chip |
| 03/15/2011 | US7906351 Method for metal gate quality characterization |
| 03/15/2011 | US7906350 Method for calibrating a metrology tool |
| 03/15/2011 | US7906349 Method for manufacturing semiconductor device including ferroelectric capacitor |
| 03/15/2011 | US7906348 Method of feed forward control of scanned rapid thermal processing |
| 03/15/2011 | US7906347 Magnetic storage device and method of manufacturing the same |
| 03/15/2011 | US7906346 Method for manufacturing a magnetic memory device and magnetic memory device |
| 03/15/2011 | US7906258 Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device |
| 03/15/2011 | US7906257 Photomask manufacturing method and semiconductor device manufacturing method |
| 03/15/2011 | US7906252 Multiple resist layer phase shift mask (PSM) blank and PSM formation method |
| 03/15/2011 | US7906038 Aqueous polishing liquid and chemical mechanical polishing method |
| 03/15/2011 | US7906033 Plasma etching method and apparatus |
| 03/15/2011 | US7906032 Method for conditioning a process chamber |
| 03/15/2011 | US7906030 Dry etching method, fine structure formation method, mold and mold fabrication method |
| 03/15/2011 | US7905982 Antenna for plasma processor apparatus |
| 03/15/2011 | US7905979 Method for holding substrate in vacuum |
| 03/15/2011 | US7905960 Apparatus for manufacturing substrate |
| 03/15/2011 | US7905959 Lid assembly for a processing system to facilitate sequential deposition techniques |
| 03/15/2011 | US7905958 Group III-nitride semiconductor crystal and manufacturing method thereof, and group III-nitride semiconductor device |
| 03/15/2011 | US7905700 Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus |
| 03/15/2011 | US7905666 Optical module and method of manufacturing the same |
| 03/15/2011 | US7905030 Linearity measuring apparatus for wafer orientation flat |
| 03/10/2011 | WO2011029010A2 Method of forming a semiconductor device |
| 03/10/2011 | WO2011028807A2 Metrology systems and methods |
| 03/10/2011 | WO2011028796A1 Fin-type device system and method |
| 03/10/2011 | WO2011028748A2 Method and apparatus for producing and measuring dynamically focussed, steered and shaped oblique laser illumination for spinning wafer inspection system |
| 03/10/2011 | WO2011028700A2 Chemical mechanical polishing conditioner |
| 03/10/2011 | WO2011028667A2 Reduced isotropic etchant material consumption and waste generation |
| 03/10/2011 | WO2011028644A2 Vacuum transition for solder bump mold filling |
| 03/10/2011 | WO2011028617A2 Apparatus and methods for enhanced fluid delivery on bevel etch applications |
| 03/10/2011 | WO2011028600A2 Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof |
| 03/10/2011 | WO2011028599A2 Direct drive arrangement to control confinement rings positioning and methods thereof |
| 03/10/2011 | WO2011028581A2 Charge-trap based memory |
| 03/10/2011 | WO2011028462A1 Method for selective deposition of dielectric layers on semiconductor structures |
| 03/10/2011 | WO2011028461A1 Semiconductor structure and method |
| 03/10/2011 | WO2011028377A2 High concentration water pulses for atomic layer deposition |
| 03/10/2011 | WO2011028359A2 Mems device with stress isolation and method of fabrication |
| 03/10/2011 | WO2011028349A2 Remote hydrogen plasma source of silicon containing film deposition |
| 03/10/2011 | WO2011028343A2 Semiconductor memory device with hierarchical bitlines |
| 03/10/2011 | WO2011028312A1 Plasma reactor with tiltable overhead rf inductive source |
| 03/10/2011 | WO2011028080A2 Printing apparatus using thermal roll imprinting and a patterned plate, and film-laminating apparatus for microfluidics and sensor and printing method using same |
| 03/10/2011 | WO2011027987A2 Gas-discharging device and substrate-processing apparatus using same |
| 03/10/2011 | WO2011027972A2 Laser-reflective mask and method for manufacturing same |
| 03/10/2011 | WO2011027958A1 Apparatus for forming solder bumps |
| 03/10/2011 | WO2011027939A1 Method for forming a metal oxide thin-film pattern and production method for an led element using nanoimprinting |