H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2011
03/23/2011	CN101988196A Deep reactive ion etching method and gas-flow control device thereof
03/23/2011	CN101987431A Grinding method, grinding pad and grinding system
03/23/2011	CN101987430A Fixing ring for chemically and mechanically grinding
03/23/2011	CN101987429A Grinding method and device by chemical machinery
03/23/2011	CN101987428A Chemical and mechanical grinding method
03/23/2011	CN101740514B MOS (Metal Oxide Semiconductor) transistor and fabricating method thereof
03/23/2011	CN101740513B MOS (Metal Oxide Semiconductor) transistor and fabricating method thereof
03/23/2011	CN101740510B Method for forming gate oxide with uniform thickness
03/23/2011	CN101719478B Thimble mechanism
03/23/2011	CN101692428B Integrating method of hybrid integrated circuit with controllable working temperature
03/23/2011	CN101685843B Method for packaging light emitting diode
03/23/2011	CN101661880B Method for producing metal gates and contact holes by adopting Damascus process
03/23/2011	CN101656219B System-in-package method
03/23/2011	CN101656217B System-in-package method
03/23/2011	CN101656212B Process for manufacturing MOS transistor of T metal grid
03/23/2011	CN101651102B Bidirectional trigger diode chip production method
03/23/2011	CN101643895B Plasma reaction chamber pretreatment method
03/23/2011	CN101640179B Method for manufacturing weld pad structure
03/23/2011	CN101634783B Pixel structure of liquid crystal display panel of thin film transistor and manufacturing method
03/23/2011	CN101630683B Integrated electrostatic discharge device
03/23/2011	CN101625996B ONO side wall etching process for reducing dark current
03/23/2011	CN101625492B Manufacturing method of array base plate of film transistor
03/23/2011	CN101625468B Touch liquid crystal display preparation method
03/23/2011	CN101621041B Packaging structure with reconfiguration chip and method thereof
03/23/2011	CN101621015B Metal lug surface planarization method
03/23/2011	CN101620993B Substrate processing method and substrate processing apparatus
03/23/2011	CN101604695B Array substrate and fabricating method thereof, and liquid crystal display device
03/23/2011	CN101604622B Electronic component mounting apparatus and printed circuit board processing apparatus
03/23/2011	CN101593754B Read only memory (ROM) cell array and manufacturing method thereof
03/23/2011	CN101593683B Grid and formation method thereof
03/23/2011	CN101593667B Method for improving consistency of thickness of dielectric layers deposited on different substrates
03/23/2011	CN101587863B Polysilicon grid etching method for flash memory based on SONOS and device
03/23/2011	CN101587859B Method for forming semiconductor interconnected structure
03/23/2011	CN101587858B Semiconductor device interconnected structure and manufacturing method thereof
03/23/2011	CN101587857B Cover layer of semiconductor device interconnected structure and manufacturing method thereof
03/23/2011	CN101587838B Method for forming hole on dielectric layer
03/23/2011	CN101587820B Plasma etching method and device for improving depth difference of grooves
03/23/2011	CN101582382B Preparation method of thin film transistor
03/23/2011	CN101577254B Method for manufacturing thin film transistor array substrate
03/23/2011	CN101577242B Shallow trench isolation structure and forming method thereof
03/23/2011	CN101577223B Grid, semiconductor apparatus and methods for forming grid, doped area and nitrogen-containing side wall substrate
03/23/2011	CN101572234B Method for processing PMOS devices with low leakage current by utilizing the footing features of polycrystalline silicon
03/23/2011	CN101572228B Methods for forming polysilicon thin film and gate
03/23/2011	CN101572218B Methods for forming semiconductor component and gate
03/23/2011	CN101569016B Semiconductor device and method for manufacturing the same
03/23/2011	CN101567351B Miniature radio frequency module and packaging method thereof
03/23/2011	CN101552231B Manufacturing method of display device
03/23/2011	CN101552214B Multi-chip stacking method for halving routing procedure and structure thereof
03/23/2011	CN101546727B Process for Damascus
03/23/2011	CN101546725B Lining insulating layer high-density ionic depositing method
03/23/2011	CN101542739B Silicon carbide semiconductor device and process for producing the same
03/23/2011	CN101510518B Method for sealing micro-fluidic chip and use thereof
03/23/2011	CN101506992B Semiconductor substrate, method for forming electrode, and method for manufacturing solar cell
03/23/2011	CN101504914B Improved cooling apparatus for silicon chip cutting liquor
03/23/2011	CN101494235B Polycrystalline silicon layer of thin film transistor
03/23/2011	CN101494191B Manufacturing method for dual damascene structure
03/23/2011	CN101491889B Method for flow control to CMP tool
03/23/2011	CN101483165B Tape carrier package on reel and plasma display device using the same
03/23/2011	CN101466867B Catalyst body chemical vapor depositing apparatus
03/23/2011	CN101465403B Technique for producing encapsulating material for high-power LED support frame
03/23/2011	CN101462414B Printing device and printing method for integrating electronic components
03/23/2011	CN101461072B Methods for minimizing mask undercuts and notches for plasma processing system
03/23/2011	CN101459194B Perofskite structure lanthanide manganese oxides/tin oxide heterogeneous p-n junction and preparation thereof
03/23/2011	CN101459184B System and method for sensing image on CMOS
03/23/2011	CN101459137B DRAM unit transistor device and method
03/23/2011	CN101459124B Chemical mechanical grinding method and wafer cleaning method
03/23/2011	CN101459087B Redistribution metal wire and manufacturing method for redistribution convex point
03/23/2011	CN101459082B Mos transistor and forming method thereof
03/23/2011	CN101459064B Forming method for lateral wall substrate
03/23/2011	CN101459045B Manufacturing method for transistor protection ring, optimization method and apparatus for ion injection process
03/23/2011	CN101458462B Photolithography developing method for reducing photoresist developing defect in semiconductor process
03/23/2011	CN101454887B Electronic component, semiconductor package and electronic device
03/23/2011	CN101454878B Method for dry-etching interlayer insulating film
03/23/2011	CN101454874B Selective epitaxial formation of semiconductor films
03/23/2011	CN101452213B Secondary image exposure method of contact hole
03/23/2011	CN101447499B Image sensor and method of manufacturing the same
03/23/2011	CN101447498B Electro-static discharge protection device and method for manufacturing the same
03/23/2011	CN101447404B Method for limiting expansion of earthquake damage and system for limiting expansion of earthquake damage for use in semiconductor manufacturing apparatus
03/23/2011	CN101443912B Fin-type field effect transistor
03/23/2011	CN101442001B Method for etching polysilicon gate
03/23/2011	CN101436634B Photosemiconductor package, manufacturing method thereof and photoelectric sensor equipped therewith
03/23/2011	CN101432850B Method for manufacturing group 3-5 nitride semiconductor substrate
03/23/2011	CN101431086B Semiconductor package and its forming method
03/23/2011	CN101416300B Method of forming semiconductor device
03/23/2011	CN101416270B Ion implanter
03/23/2011	CN101413978B Semiconductor encapsulation component test device
03/23/2011	CN101410947B Method of repairing a polymer mask
03/23/2011	CN101409252B Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head
03/23/2011	CN101393862B Manufacturing method for gate lateral wall layer and semi-conductor device
03/23/2011	CN101378006B Single type substrate treating apparatus and cleaning method thereof
03/23/2011	CN101359593B Metal-insulator-metal type capacitor, memory cell and method for forming the same
03/23/2011	CN101356633B Methods of packaging a semiconductor die and package formed by the methods
03/23/2011	CN101350327B Method for preparing local silicon oxidation isolation structure
03/23/2011	CN101331586B Semiconductor device
03/23/2011	CN101330050B Compensating metal oxide semiconductor image sensor and manufacturing method thereof
03/23/2011	CN101330040B Interconnection layer top layer wiring layer of semiconductor device and method for forming the same
03/23/2011	CN101325220B Thin film transistor, method of fabricating the thin film transistor, and display device including the thin film transistor
03/23/2011	CN101315885B Method for confirming red line limit of semiconductor device grid residue
03/23/2011	CN101315514B Mask plate and matching method of photo-etching machine nesting precision using mask plate
03/23/2011	CN101308764B Method for eliminating residual polymer of etching procedure

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