H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2011
03/23/2011	CN101299412B Semiconductor device and method of manufacturing the same
03/23/2011	CN101295705B Test substrate, test substrate mask and test substrate forming method
03/23/2011	CN101295685B Heat pipe and manufacturing method thereof
03/23/2011	CN101295660B Chip encapsulation block positioning device, fixing device and decapsulation device
03/23/2011	CN101290877B Preparing method of polycrystalline silicon thin film
03/23/2011	CN101286496B Electrically conductive barrier material for copper wiring and preparing method thereof
03/23/2011	CN101284952B Abrasive grain CeO2 for chemical and mechanical buffing and method for preparing same
03/23/2011	CN101276991B Method of manufacturing nitride semiconductor light-emitting device
03/23/2011	CN101274419B Method for abrasing GaN substrate
03/23/2011	CN101257076B Method for making LED
03/23/2011	CN101252102B Method of manufacturing photoelectric conversion device
03/23/2011	CN101252081B Vertical heat processing apparatus and heat processing method using the vertical heat processing apparatus
03/23/2011	CN101248507B Selection of wavelength for end point in a time division multiplexed process
03/23/2011	CN101241302B Preparation method for improving mask critical size trend
03/23/2011	CN101234481B Polishing pad with grooves to retain slurry on the pad texture and its preparation method
03/23/2011	CN101232769B Plasma processing apparatus
03/23/2011	CN101231470B Method for determining temperature distortion correcting parameter of lens array system apparatus
03/23/2011	CN101207156B Semiconductor device and method of manufacturing the same
03/23/2011	CN101202212B Substrate damage prevention system and method
03/23/2011	CN101201539B Pattern mask for forming microlens, image sensor and fabricating method thereof
03/23/2011	CN101195917B Method for etching copper or copper alloy
03/23/2011	CN101192520B Semiconductor device and manufacture method thereof
03/23/2011	CN101192510B Method of improving a surface
03/23/2011	CN101192011B System and method for self aligning etching
03/23/2011	CN101159233B Gate etching process for high voltage mosfet
03/23/2011	CN101150041B A method for medium granularity sediment at specified site
03/23/2011	CN101138070B Stage apparatus and exposure apparatus
03/23/2011	CN101096077B Substrate holding device and polishing device
03/23/2011	CN101093853B Organic light emitting diode display and method for manufacturing the same
03/23/2011	CN101026110B Method of manufacturing circuit device
03/23/2011	CN101025573B Lithographic apparatus and device manufacturing method
03/23/2011	CN101013665B Manufacturing method of semiconductor device
03/23/2011	CN101009303B Organic light emitting display and method of fabricating the same
03/23/2011	CN101008080B Film-forming device
03/22/2011	USRE42241 Method of fabricating a semiconductor device
03/22/2011	USRE42232 RF chipset architecture
03/22/2011	US7913221 Interconnect structure of semiconductor integrated circuit, and design method and device therefor
03/22/2011	US7913212 Method for determining a length of shielding of a semiconductor integrated circuit wiring
03/22/2011	US7913195 Method for creating mask layout data, apparatus for creating mask layout data, and method for manufacturing semiconductor device
03/22/2011	US7912576 Calibration of high speed loader to substrate transport system
03/22/2011	US7912275 Method of evaluating a photo mask and method of manufacturing a semiconductor device
03/22/2011	US7911831 Nanotube-on-gate FET structures and applications
03/22/2011	US7911795 Electronic device including electronic component, heat dissipating member and alloy layer
03/22/2011	US7911612 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
03/22/2011	US7911601 Apparatus and method for inspecting pattern
03/22/2011	US7911600 Apparatus and a method for inspection of a mask blank, a method for manufacturing a reflective exposure mask, a method for reflective exposure, and a method for manufacturing semiconductor integrated circuits
03/22/2011	US7911599 Reticle defect inspection apparatus and reticle defect inspection method
03/22/2011	US7911588 Exposure apparatus and original
03/22/2011	US7911586 Lithographic apparatus and device manufacturing method
03/22/2011	US7911568 Multi-layered thin films, thin film transistor array panel including the same, and method of manufacturing the panel
03/22/2011	US7911460 Active matrix organic electroluminescent display device and method of fabricating the same
03/22/2011	US7911220 Semiconductor integrated circuit apparatus, measurement result management system, and management server
03/22/2011	US7911064 Mounted body and method for manufacturing the same
03/22/2011	US7911062 Electronic component with varying rigidity leads using Pb-free solder
03/22/2011	US7911060 Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation
03/22/2011	US7911059 High thermal conductivity substrate for a semiconductor device
03/22/2011	US7911054 Semiconductor device
03/22/2011	US7911047 Semiconductor device and method of fabricating the semiconductor device
03/22/2011	US7911027 Semiconductor device, method of generating pattern for semiconductor device, method of manufacturing semiconductor device, and apparatus for generating pattern for semiconductor device
03/22/2011	US7911026 Chip carrier with reduced interference signal sensitivity
03/22/2011	US7911024 Ultra-thin SOI vertical bipolar transistors with an inversion collector on thin-buried oxide (BOX) for low substrate-bias operation and methods thereof
03/22/2011	US7911023 Semiconductor apparatus including a double-sided electrode element and method for manufacturing the same
03/22/2011	US7911022 Isolation structure in field device
03/22/2011	US7911012 Flexible and elastic dielectric integrated circuit
03/22/2011	US7911009 Nanosensors
03/22/2011	US7911007 Semiconductor device and method of manufacturing the same
03/22/2011	US7911006 Structure and fabrication method for capacitors integratible with vertical replacement gate transistors
03/22/2011	US7911005 Dram having deeper source drain region than that of an logic region
03/22/2011	US7911004 Semiconductor device and manufacturing method of the same
03/22/2011	US7911001 Methods for forming self-aligned dual stress liners for CMOS semiconductor devices
03/22/2011	US7911000 Semiconductor memory device
03/22/2011	US7910990 Insulated gate type semiconductor device and method for fabricating the same
03/22/2011	US7910987 Semiconductor device
03/22/2011	US7910985 Semiconductor device and method for fabricating the same
03/22/2011	US7910978 Process for manufacturing a memory device integrated on a semiconductor substrate and comprising nanocrystal memory cells and CMOS transistors
03/22/2011	US7910976 High density NOR flash array architecture
03/22/2011	US7910975 Semiconductor memory device
03/22/2011	US7910969 Magnetoresistive random access memory with improved layout design and process thereof
03/22/2011	US7910968 Semiconductor device and method for manufacturing the same
03/22/2011	US7910967 Ferroelectric capacitor having three-dimensional structure, nonvolatile memory device having the same and method of fabricating the same
03/22/2011	US7910963 Method and apparatus providing CMOS imager device pixel with transistor having lower threshold voltage than other imager device transistors
03/22/2011	US7910940 Semiconductor light-emitting device
03/22/2011	US7910927 Thin film transistor array panel with common bars of different widths
03/22/2011	US7910920 Thin film transistor and method of forming the same
03/22/2011	US7910917 Structure and method for realizing a microelectronic device provided with a number of quantum wires capable of forming one or more transistor channels
03/22/2011	US7910912 Semiconductor devices having a planarized insulating layer
03/22/2011	US7910910 Phase-change memory cell and method of fabricating the phase-change memory cell
03/22/2011	US7910907 Manufacturing method for pipe-shaped electrode phase change memory
03/22/2011	US7910897 Process and apparatus for post deposition treatment of low dielectric materials
03/22/2011	US7910765 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride
03/22/2011	US7910674 Polymerized cycloolefins using transition metal catalyst and end products thereof
03/22/2011	US7910499 Autofocus for high power laser diode based annealing system
03/22/2011	US7910498 Method for manufacturing semiconductor device
03/22/2011	US7910497 Method of forming dielectric layers on a substrate and apparatus therefor
03/22/2011	US7910496 Technique for forming an interlayer dielectric material of increased reliability above a structure including closely spaced lines
03/22/2011	US7910495 Plasma oxidizing method, plasma processing apparatus, and storage medium
03/22/2011	US7910494 Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto
03/22/2011	US7910493 Semiconductor device manufacturing method, semiconductor device, plasma nitriding treatment method, control program and computer storage medium
03/22/2011	US7910492 Nanowhiskers with PN junctions, doped nanowhiskers, and methods for preparing them
03/22/2011	US7910491 Gapfill improvement with low etch rate dielectric liners

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