H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2011
03/10/2011	WO2011027915A1 Current-amplifying transistor device and current-amplifying, light-emitting transistor device
03/10/2011	WO2011027896A1 Nitride semiconductor multilayer structure, method for producing same, and nitride semiconductor light-emitting element
03/10/2011	WO2011027894A1 Semiconductor substrate, method for producing semiconductor substrate, substrate for semiconductor growth, method for producing substrate for semiconductor growth, semiconductor element, light-emitting element, display panel, electronic element, solar cell element, and electronic device
03/10/2011	WO2011027884A1 Substrate for mounting semiconductor chip and method for producing same
03/10/2011	WO2011027882A1 Photocurable composition for pattern formation, and method for measuring film thickness using same
03/10/2011	WO2011027871A1 Semiconductor substrate, field effect transistor, integrated circuit, and method for producing semiconductor substrate
03/10/2011	WO2011027835A1 METHOD FOR FORMING Co FILM
03/10/2011	WO2011027834A1 METHOD FOR FORMING Co FILM AND METHOD FOR FORMING Cu WIRING FILM
03/10/2011	WO2011027831A1 Semiconductor device and process for production thereof
03/10/2011	WO2011027826A1 Method for producing siliceous film and polysilazane coating treatment liquid used therefor
03/10/2011	WO2011027782A1 Coating material composition for liquid immersion exposure apparatus, laminate, method for forming laminate, and liquid immersion exposure apparatus
03/10/2011	WO2011027772A1 Processing agent composition for semiconductor surface and method for processing semiconductor surface using same
03/10/2011	WO2011027737A1 Plasma light source
03/10/2011	WO2011027723A1 Semiconductor device and method for manufacturing the same
03/10/2011	WO2011027715A1 Manufacturing method of semiconductor device
03/10/2011	WO2011027705A1 Semiconductor device, active matrix substrate, and display device
03/10/2011	WO2011027702A1 Light-emitting device and method for manufacturing the same
03/10/2011	WO2011027701A1 Light-emitting device and method for manufacturing the same
03/10/2011	WO2011027699A1 Plasma light source system
03/10/2011	WO2011027698A1 Imprinting method, computer storage medium, and imprinting device
03/10/2011	WO2011027676A1 Semiconductor device and manufacturing method thereof
03/10/2011	WO2011027670A1 Method for quantitatively evaluating concentration of atomic vacancies existing in silicon wafer, method for manufacturing silicon wafer, and silicon wafer manufactured by the method for manufacturing silicon wafer
03/10/2011	WO2011027664A1 Liquid crystal display device and method for manufacturing the same
03/10/2011	WO2011027661A1 Light-emitting device and method for manufacturing the same
03/10/2011	WO2011027656A1 Transistor and display device
03/10/2011	WO2011027655A1 Semiconductor device, and method for supplying electric power to same
03/10/2011	WO2011027650A1 Semiconductor device, active matrix substrate, and display device
03/10/2011	WO2011027647A1 Method for manufacturing half-tone mask, and half-tone mask
03/10/2011	WO2011027583A1 Circuit board for electronic device, method for producing same, and touch panel
03/10/2011	WO2011027577A1 Field effect transistor, semiconductor substrate, method for manufacturing field effect transistor, and method for producing semiconductor substrate
03/10/2011	WO2011027553A1 Aging diagnostic device, aging diagnostic method
03/10/2011	WO2011027547A1 Substrate transfer apparatus
03/10/2011	WO2011027546A1 Substrate transfer apparatus and substrate transfer method
03/10/2011	WO2011027545A1 Method for producing soi wafer
03/10/2011	WO2011027540A1 Semiconductor element and method for manufacturing same
03/10/2011	WO2011027525A1 Semiconductor element and method for manufacturing same
03/10/2011	WO2011027523A1 Semiconductor device and method for producing same
03/10/2011	WO2011027515A1 Method for etching silicon-containing film
03/10/2011	WO2011027490A1 Nitride semiconductor device
03/10/2011	WO2011027487A1 Semiconductor device and method for manufacturing same
03/10/2011	WO2011027481A1 Semiconductor device and method for manufacturing same
03/10/2011	WO2011027474A1 Semiconductor device including semiconductor substrate having diode region and igbt region
03/10/2011	WO2011027473A1 Semiconductor device including semiconductor substrate having diode region and igbt region
03/10/2011	WO2011027467A1 Thin-film transistor and method for manufacturing the thin-film transistor
03/10/2011	WO2011027425A1 Method for forming metal oxide film, metal oxide film and apparatus for forming metal oxide film
03/10/2011	WO2011027412A1 Supporting pad
03/10/2011	WO2011027411A1 Supporting pad
03/10/2011	WO2011027404A1 Magnetic memory
03/10/2011	WO2011027392A1 Testing apparatus, testing method, and program
03/10/2011	WO2011027384A1 Thin film manufacturing apparatus, solar cell manufacturing apparatus, thin film manufacturing method and solar cell manufacturing method
03/10/2011	WO2011027193A1 Reduction of fluorine contamination of bond pads of semiconductor devices
03/10/2011	WO2011027185A1 Package structure
03/10/2011	WO2011027159A1 Structures comprising planar electronic devices
03/10/2011	WO2011026915A1 Process for manufacturing a crystalline silicon layer
03/10/2011	WO2011026888A1 Device for housing a substrate, and relative method
03/10/2011	WO2011026875A1 Testing apparatus and relative method
03/10/2011	WO2011026852A1 Composition for printing electrodes
03/10/2011	WO2011026769A1 Composition for printing conductive tracks and method for producing solar cells
03/10/2011	WO2011026696A1 Method for electrochemical processing of non-flat samples
03/10/2011	WO2011026570A1 Device and method for detaching a semiconductor wafer from a substrate
03/10/2011	WO2011026393A1 Semiconductor device and fabrication method thereof
03/10/2011	WO2011026295A1 Vacuum substrate conveying system
03/10/2011	WO2011026294A1 Substrate case microscope carrier
03/10/2011	WO2011026218A1 Using interrupted through-silicon-vias in integrated circuits adapted for stacking
03/10/2011	WO2011008376A3 Determining plasma processing system readiness without generating plasma
03/10/2011	WO2011008359A3 Scaling of bipolar transistors
03/10/2011	WO2011005284A3 Encapsulated phase change cell structures and methods
03/10/2011	WO2011002705A9 Hollow gst structure with dielectric fill
03/10/2011	WO2011002612A3 Circuit structure and method for programming and re-programming a low power, multiple states, electronic fuse(e-fuse)
03/10/2011	WO2011002149A3 Cmp polishing pad with pores formed therein, and method for forming pores
03/10/2011	WO2010141652A3 Polishing composition for nickel-phosphorous memory disks
03/10/2011	WO2010140778A3 Showerhead for film depositing vacuum equipment
03/10/2011	WO2010140766A3 Substrate-supporting unit and substrate-processing apparatus comprising same
03/10/2011	WO2010137838A3 Composition for a liquid process, electronic device using same, and method for manufacturing same
03/10/2011	WO2010127370A3 Series current limiting device
03/10/2011	WO2010123570A3 Apparatus and methodology for 3-d nano system construction and structural modification
03/10/2011	WO2010123333A3 Single tub-type washing apparatus
03/10/2011	WO2010063405A3 Hardening device for photovoltaic thin-film solar cells
03/10/2011	US20110059622 Semiconductor manufacturing process
03/10/2011	US20110059621 Device manufacturing apparatus and device manufacturing method
03/10/2011	US20110059620 Protective film forming method and apparatus
03/10/2011	US20110059619 Silicon etching liquid and etching method
03/10/2011	US20110059618 Method for texturing silicon surfaces and wafers thereof
03/10/2011	US20110059617 High aspect ratio silicon oxide etch
03/10/2011	US20110059616 Method for processing a target object
03/10/2011	US20110059615 Hybrid rf capacitively and inductively coupled plasma source using multifrequency rf powers and methods of use thereof
03/10/2011	US20110059614 Apparatus and Methods for Enhanced Fluid Delivery on Bevel Etch Applications
03/10/2011	US20110059613 Mask pattern for semiconductor device fabrication, method of forming the same, and method of fabricating finely patterned semiconductor device
03/10/2011	US20110059612 Method of manufacturing semiconductor device
03/10/2011	US20110059611 Electroless deposition of barrier layers
03/10/2011	US20110059610 Method of using an electroless plating for depositing a metal seed layer for the subsequent plated backside metal film
03/10/2011	US20110059609 Fabrication method of two-terminal semiconductor component using trench technology
03/10/2011	US20110059608 Method for improving adhesion of low resistivity tungsten/tungsten nitride layers
03/10/2011	US20110059607 Semiconductor device manufacturing method
03/10/2011	US20110059606 Method of manufacturing semiconductor device and mask
03/10/2011	US20110059605 Methods of forming non-volatile memory
03/10/2011	US20110059604 Methods for fabricating step gate electrode structures for field-effect transistors
03/10/2011	US20110059603 Semiconductor device and method for manufacturing the same
03/10/2011	US20110059602 Methods of Forming Semiconductor Devices
03/10/2011	US20110059601 Method for tuning a work function of high-k metal gate devices

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