H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2011
03/23/2011	CN1834123B Thin film transistor and flat display device employing the thin film transistor
03/23/2011	CN1775640B Screen board making equipment
03/23/2011	CN1764982B Phase-change memory device and its manufacture method
03/23/2011	CN1716551B Method of fabricating self-aligned source and drain contacts in a double gate FET
03/23/2011	CN101990789A Lower liner with integrated flow equalizer and improved conductance
03/23/2011	CN101990710A High aspect ratio openings
03/23/2011	CN101990708A Apparatus and method for attaching sheet
03/23/2011	CN101990707A Method for detecting abnormal placement state of substrate, substrate processing method, computer-readable storage medium and substrate processing apparatus
03/23/2011	CN101990706A Wafer testing apparatus and processing equipment having the same
03/23/2011	CN101990705A Method for patterned etching of selected material
03/23/2011	CN101990704A Methods and apparatus for normalizing optical emission spectra
03/23/2011	CN101990703A High throughput chemical mechanical polishing system
03/23/2011	CN101990702A A polishing system having a track
03/23/2011	CN101990701A Method for adjusting the height of a gate electrode in a semiconductor device
03/23/2011	CN101990700A Diffusing agent composition for ink-jet, and method for production of electrode or solar battery using the composition
03/23/2011	CN101990699A Vertical boat for heat treatment and method for heat treatment of silicon wafer using the same
03/23/2011	CN101990698A Group iii nitride semiconductor element and epitaxial wafer
03/23/2011	CN101990697A Method for manufacturing bonded substrate
03/23/2011	CN101990636A Surface inspecting method and surface inspecting apparatus
03/23/2011	CN101990481A Laser-scribing platform
03/23/2011	CN101990353A Plasma processing apparatus and plasma processing method
03/23/2011	CN101989631A Film transistor photoreceptor and method for manufacturing fluosilicic oxygen hydrocarbon dielectric layer
03/23/2011	CN101989621A Metal-insulator-metal (MIM) capacitor and manufacturing method thereof
03/23/2011	CN101989620A Metal-insulator-metal (MIM) capacitor and manufacturing method thereof
03/23/2011	CN101989619A Thin film transistor substrate and thin film transistor used for the same
03/23/2011	CN101989618A Flexible thin film transistor and preparation method thereof
03/23/2011	CN101989617A Fin structure for a semiconductor transistor and its manufacture method
03/23/2011	CN101989616A Transistor and fabrication method thereof
03/23/2011	CN101989615A Silicon carbide semiconductor structures, devices, and methods for making the same
03/23/2011	CN101989614A Semiconductor substrate and associated method
03/23/2011	CN101989613A Organic el display apparatus
03/23/2011	CN101989609A Solid-state imaging device and method for producing the same
03/23/2011	CN101989603A Semiconductor device with buried gate and method for fabricating the same
03/23/2011	CN101989602A Trench MOSFET
03/23/2011	CN101989601A Semiconductor device and method for manufacturing same
03/23/2011	CN101989600A Semiconductor structure and manufacturing method thereof
03/23/2011	CN101989599A Semiconductor device with shallow trench isolation structure and manufacturing process thereof
03/23/2011	CN101989598A Multi-die package
03/23/2011	CN101989594A Test structure and test method of semiconductor device
03/23/2011	CN101989593A Packaging substrate as well as manufacturing method and packaging structure thereof
03/23/2011	CN101989592A Packaging substrate as well as manufacturing method and base material thereof
03/23/2011	CN101989591A Semiconductor device and method of manufacturing the same
03/23/2011	CN101989589A Power device package and method of fabricating the same
03/23/2011	CN101989586A Metal terminal and construction method thereof
03/23/2011	CN101989582A Packaging substrate embedded with semiconductor chip
03/23/2011	CN101989581A Packaging structure and packaging method
03/23/2011	CN101989579A Thin film transistor (TFT) array substrate and manufacture method thereof
03/23/2011	CN101989578A Method for improving erasing and writing resistance of storage device
03/23/2011	CN101989577A Method for manufacturing groove MOSFET (Metal-Oxide -Semiconductor Field Effect Transistor)
03/23/2011	CN101989576A Manufacture method of semiconductor device
03/23/2011	CN101989575A Polishing method of dielectric layer of complementary metal-oxide-semiconductor transistor (CMOS) image sensor
03/23/2011	CN101989574A Method for manufacturing semiconductor device with strain memory action
03/23/2011	CN101989573A Method for manufacturing semiconductor light emitting device
03/23/2011	CN101989572A Method for cutting wafer
03/23/2011	CN101989571A Forming method of contact plug and plating platform device
03/23/2011	CN101989570A Forming method of contact hole structure
03/23/2011	CN101989569A Copper interconnection method
03/23/2011	CN101989568A Method for forming metal interconnection layer
03/23/2011	CN101989567A Method for fabricating a semiconductor substrate
03/23/2011	CN101989566A Manufacture method of semiconductor device and flash memory device
03/23/2011	CN101989565A Manufacturing method of shallow groove isolation structure
03/23/2011	CN101989564A Method for reducing corner defect of isolation channel of shallow trench
03/23/2011	CN101989563A Substrate mounting mechanism and substrate processing apparatus using same
03/23/2011	CN101989562A Assembly method of transfer mechanism and transfer chamber
03/23/2011	CN101989561A Transfer device and processing system having the same
03/23/2011	CN101989560A Method and device for transmitting wafer in manufacturing process
03/23/2011	CN101989559A Substrate position alignment mechanism, vacuum prechamber and substrate processing system having same
03/23/2011	CN101989558A Semiconductor device and method of producing the same
03/23/2011	CN101989557A Manufacturing method of semiconductor device and semiconductor device
03/23/2011	CN101989556A Method for forming a semiconductor device and method of forming electrical connections to a semiconductor wafer
03/23/2011	CN101989555A Manufacturing method for molding image sensor package structure and image sensor package structure thereof
03/23/2011	CN101989554A Packaging structure and packaging process
03/23/2011	CN101989553A Method for manufacturing lengthwise region of CoolMOS
03/23/2011	CN101989552A Method for manufacturing lengthwise region of CoolMOS
03/23/2011	CN101989551A Method for forming asymmetrical transistor
03/23/2011	CN101989550A Method for manufacturing n-metal-oxide-semiconductor (NMOS) transistor
03/23/2011	CN101989549A Method for manufacturing n-metal-oxide-semiconductor (NMOS) transistor
03/23/2011	CN101989548A Semiconductor device and manufacturing method thereof
03/23/2011	CN101989547A Method for manufacturing resistance type memory stack crystallization diode
03/23/2011	CN101989546A Method for improving defects of edge of active area
03/23/2011	CN101989545A Method for removing residue on silicon oxynitride (SiON) film
03/23/2011	CN101989544A Structure capable of reducing substrate back polymer
03/23/2011	CN101989543A Device for reducing polymers at back side of substrate
03/23/2011	CN101989542A Method of fabricating a device
03/23/2011	CN101989541A Lightly doping method
03/23/2011	CN101989540A Method for doping polycrystalline silicon layer
03/23/2011	CN101989539A Capacitor manufacturing method
03/23/2011	CN101989538A Liquid processing apparatus, liquid processing method, and storage medium
03/23/2011	CN101989537A Liquid processing apparatus and liquid processing method
03/23/2011	CN101989536A Gas diffusion board for plasma etching process
03/23/2011	CN101989535A All-in-one machine of semiconductor device for testing, sorting, marking and braiding and one-stop processing method
03/23/2011	CN101989534A Particle automatic control method and system thereof
03/23/2011	CN101989533A Chip packaging block de-packaging method and device
03/23/2011	CN101989532A Method for processing products by machine
03/23/2011	CN101989043A Multi-gray scale photomask, photomask blank, method of manufacturing multi-gray scale photomask and pattern transfer method
03/23/2011	CN101989042A Method of manufacturing multi-gray scale photomask and pattern transfer method
03/23/2011	CN101989038A Mask detection device and detection method
03/23/2011	CN101989023A Electrophoretic display device and method of fabricating the same
03/23/2011	CN101989015A TFT array structure and manufacturing method thereof
03/23/2011	CN101988586A Gate valve and substrate processing system using same

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