| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/03/2011 | WO2011024440A1 Nitride semiconductor device |
| 03/03/2011 | WO2011024408A1 Diffusion agent composition, method of forming impurity diffusion layer, and solar cell |
| 03/03/2011 | WO2011024367A1 Nitride semiconductor device |
| 03/03/2011 | WO2011024362A1 Apparatus and method for inspecting defect |
| 03/03/2011 | WO2011024358A1 Method for manufacturing semiconductor device |
| 03/03/2011 | WO2011024340A1 Semiconductor device and process for production thereof |
| 03/03/2011 | WO2011024295A1 Interface apparatus and semiconductor testing apparatus |
| 03/03/2011 | WO2011024289A1 Optical component manufacturing method and optical component manufacturing apparatus |
| 03/03/2011 | WO2011024213A1 Nonvolatile semiconductor storage device |
| 03/03/2011 | WO2011024045A1 Method for fabricating a through interconnect on a semiconductor substrate |
| 03/03/2011 | WO2011023905A1 Method for detaching a silicon thin film by means of splitting, using triple implantation |
| 03/03/2011 | WO2011023607A1 Method for determining the structure of a transistor |
| 03/03/2011 | WO2011023556A1 Carrier device, arrangement comprising such a carrier device, and method for patterning a layer stack comprising at least one ceramic layer |
| 03/03/2011 | WO2011023520A1 Film wrapped nfet nanowire |
| 03/03/2011 | WO2011023519A1 Selective nanotube growth inside vias using an ion beam |
| 03/03/2011 | WO2011023518A1 Recessed contact for multi-gate fet optimizing series resistance |
| 03/03/2011 | WO2011023470A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter |
| 03/03/2011 | WO2011023398A1 Method for producing at least one strip conductor on a substrate |
| 03/03/2011 | WO2011023325A1 Cooling element and method for producing the cooling element |
| 03/03/2011 | WO2011023312A1 Method for measuring a semiconductor structure, which is a solar cell or a precursor of a solar cell |
| 03/03/2011 | WO2011023297A1 Method for producing a semiconductor wafer |
| 03/03/2011 | WO2011023078A1 Deep silicon etching device and gas intake system for deep silicon etching device |
| 03/03/2011 | WO2011022949A1 High-density memory assembly |
| 03/03/2011 | WO2011022749A1 Method of removing photoresist and etch-residues from vias |
| 03/03/2011 | WO2011005921A3 Fabrication of multi-dimensional microstructures |
| 03/03/2011 | WO2011005620A3 Tunable gas flow equalizer |
| 03/03/2011 | WO2011005484A3 High speed low power magnetic devices based on current induced spin-momentum transfer |
| 03/03/2011 | WO2011005433A3 Boron film interface engineering |
| 03/03/2011 | WO2011005389A3 Methods of utilizing block copolymer to form patterns |
| 03/03/2011 | WO2011002603A3 Methods of forming capacitors |
| 03/03/2011 | WO2011002574A3 Memory cells, and methods of forming memory cells |
| 03/03/2011 | WO2010147363A3 Wafer processing sheet |
| 03/03/2011 | WO2010147357A3 Heterogeneous substrate, nitride-based semiconductor device using same and manufacturing method thereof |
| 03/03/2011 | WO2010144856A3 Techniques to enhance selectivity of electrical breakdown of carbon nanotubes |
| 03/03/2011 | WO2010144541A3 Extreme flow rate and/or high temperature fluid delivery substrates |
| 03/03/2011 | WO2010144439A3 Fluid processing systems and methods |
| 03/03/2011 | WO2010144375A3 3d channel architecture for semiconductor devices |
| 03/03/2011 | WO2010144330A3 Method and apparatus for electroplating |
| 03/03/2011 | WO2010144302A3 Roll-to-roll chemical vapor deposition system |
| 03/03/2011 | WO2010141942A3 Mems switch with latch mechanism |
| 03/03/2011 | WO2010141836A3 Silicon pen nanolithography |
| 03/03/2011 | WO2010141668A3 Methods of forming strontium titanate films |
| 03/03/2011 | WO2010141624A3 Modified pillar design for improved flip chip packaging |
| 03/03/2011 | WO2010141351A3 Wafer bonding technique in nitride semiconductors |
| 03/03/2011 | WO2010141257A3 Method and apparatus for etching |
| 03/03/2011 | WO2010138811A3 Method of providing a flexible semiconductor device at high temperatures and flexible semiconductor device thereof |
| 03/03/2011 | WO2010137857A3 Half tone mask and manufacturing method of the same |
| 03/03/2011 | WO2010137856A3 Half tone mask and manufacturing method of the same |
| 03/03/2011 | WO2010135120A3 Selective self-aligned double patterning of regions in an integrated circuit device |
| 03/03/2011 | WO2010129459A3 Carrier for glass substrates |
| 03/03/2011 | WO2010129452A3 Shuttered gate valve |
| 03/03/2011 | WO2010128432A3 Non-destructive signal propagation system and method to determine substrate integrity |
| 03/03/2011 | WO2010126274A3 Cigt thin film and method for fabricating same |
| 03/03/2011 | WO2010124268A3 Substrate support having side gas outlets and methods |
| 03/03/2011 | WO2010118346A3 Shallow trench type quadri-cell of phase-change random access memory (pram) |
| 03/03/2011 | WO2010115128A4 High pressure rf-dc sputtering and methods to improve film uniformity and step-coverage of this process |
| 03/03/2011 | WO2010114823A4 Sputtering target for pvd chamber |
| 03/03/2011 | WO2010107616A4 System and method for characterizing solar cell conversion performance and detecting defects in a solar cell |
| 03/03/2011 | WO2010048653A3 Method for integrating an electronic component into a printed circuit board |
| 03/03/2011 | WO2009151397A9 Nanostructured mos capacitor |
| 03/03/2011 | US20110055776 Method of designing semiconductor device |
| 03/03/2011 | US20110054661 Direct drive arrangement to control confinement rings positioning and methods thereof |
| 03/03/2011 | US20110053474 Polishing apparatus |
| 03/03/2011 | US20110053470 Workpiece double-disc grinding apparatus and workpiece double-disc grinding method |
| 03/03/2011 | US20110053465 Method and apparatus for local polishing control |
| 03/03/2011 | US20110053384 Method for manufacturing soi substrate and method for manufacturing semiconductor device |
| 03/03/2011 | US20110053383 High concentration water pulses for atomic layer deposition |
| 03/03/2011 | US20110053382 Substrate processing apparatus and semiconductor devices manufacturing method |
| 03/03/2011 | US20110053381 Method for modifying insulating film with plasma |
| 03/03/2011 | US20110053380 Silicon-selective dry etch for carbon-containing films |
| 03/03/2011 | US20110053379 Profile control in dielectric etch |
| 03/03/2011 | US20110053378 Dielectric Etching |
| 03/03/2011 | US20110053377 Polishing pad |
| 03/03/2011 | US20110053376 Wafer dividing apparatus and methods |
| 03/03/2011 | US20110053375 Method for processing amorphous carbon film, and semiconductor device manufacturing method using the method |
| 03/03/2011 | US20110053374 Method for manufacturing semiconductor device |
| 03/03/2011 | US20110053373 Method for manufacturing semiconductor device |
| 03/03/2011 | US20110053372 Low Temperature Surface Preparation for Removal of Organometallic Polymers in the Manufacture of Integrated Circuits |
| 03/03/2011 | US20110053371 Semiconductor process |
| 03/03/2011 | US20110053370 Metal line of semiconductor device without production of high resistance compound due to metal diffusion and method for forming the same |
| 03/03/2011 | US20110053369 Methods of manufacturing a semiconductor memory device |
| 03/03/2011 | US20110053368 Arrangement for solder bump formation on wafers |
| 03/03/2011 | US20110053367 Method of manufacturing semiconductor device |
| 03/03/2011 | US20110053366 Methods of fabricating memory devices |
| 03/03/2011 | US20110053365 Method of manufacturing gate structure and method of manufacturing semiconductor device including the same |
| 03/03/2011 | US20110053364 Method of manufacturing semiconductor device |
| 03/03/2011 | US20110053363 Semiconductor device and method for manufacturing the same |
| 03/03/2011 | US20110053362 Method of forming a mask pattern, method of forming a minute pattern, and method of manufacturing a semiconductor device using the same |
| 03/03/2011 | US20110053361 FinFET Formation with a Thermal Oxide Spacer Hard Mask Formed from Crystalline Silicon Layer |
| 03/03/2011 | US20110053360 Plasma immersed ion implantation process using balanced etch-deposition process |
| 03/03/2011 | US20110053359 Methods of manufacturing quantum well materials |
| 03/03/2011 | US20110053358 Method for manufacturing microcrystalline semiconductor film and method for manufacturing semiconductor device |
| 03/03/2011 | US20110053357 Plasma cvd apparatus, method for forming microcrystalline semiconductor film and method for manufacturing semiconductor device |
| 03/03/2011 | US20110053356 Gas mixing method realized by back diffusion in a pecvd system with showerhead |
| 03/03/2011 | US20110053355 Plasma apparatus and method of fabricating nano-crystalline silicon thin film |
| 03/03/2011 | US20110053354 Method of manufacturing layer-stacked wiring |
| 03/03/2011 | US20110053353 Manufacturing method of semiconductor device |
| 03/03/2011 | US20110053352 Method of forming a passivated densified nanoparticle thin film on a substrate |
| 03/03/2011 | US20110053351 Solar Cell Defect Passivation Method |
| 03/03/2011 | US20110053350 Silicon wafer |