| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/03/2011 | US20110049491 Method for manufacturing a multi-layer stack structure with improved wvtr barrier property |
| 03/03/2011 | US20110049474 Tunnel field effect devices |
| 03/03/2011 | US20110049473 Film Wrapped NFET Nanowire |
| 03/03/2011 | US20110049467 Manufacturing method of metal oxide nanostructure and electronic element having the same |
| 03/03/2011 | US20110049465 Semiconductor integrated circuit device and method of fabricating the same |
| 03/03/2011 | US20110049463 Nonvolatile memory device and method of fabricating the same |
| 03/03/2011 | US20110049462 Flat lower bottom electrode for phase change memory cell |
| 03/03/2011 | US20110049461 Chemical mechanical polishing stop layer for fully amorphous phase change memory pore cell |
| 03/03/2011 | US20110049460 Single mask adder phase change memory element |
| 03/03/2011 | US20110049456 Phase change structure with composite doping for phase change memory |
| 03/03/2011 | US20110049455 Wafer bonded access device for multi-layer phase change memory using lock-and-key alignment |
| 03/03/2011 | US20110049087 Frame for holding laminate during processing |
| 03/03/2011 | US20110049006 Wafer container with recessed latch |
| 03/03/2011 | US20110048644 Plasma reactor with tiltable overhead rf inductive source |
| 03/03/2011 | US20110048643 Plasma processing apparatus and focus ring |
| 03/03/2011 | US20110048642 Plasma processing apparatus |
| 03/03/2011 | US20110048537 Method of fabricating a semiconductor junction |
| 03/03/2011 | US20110048527 Silver thick film paste compositions and their use in conductors for photovoltaic cells |
| 03/03/2011 | US20110048525 Functional device and method for producing the same |
| 03/03/2011 | US20110048514 Lattice matched semiconductor growth on crystalline metallic substrates |
| 03/03/2011 | US20110048489 Combined thermoelectric/photovoltaic device for high heat flux applications and method of making the same |
| 03/03/2011 | US20110048488 Combined thermoelectric/photovoltaic device and method of making the same |
| 03/03/2011 | US20110048469 Liquid processing apparatus and liquid processing method |
| 03/03/2011 | US20110048326 Film formation apparatus for semiconductor process |
| 03/03/2011 | US20110048319 Substrate transfer processing apparatus |
| 03/03/2011 | US20110048034 Processing equipment for object to be processed |
| 03/03/2011 | DE19820878B4 Verfahren zum Abscheiden einer Materialschicht auf einem Substrat A method of depositing a material layer on a substrate |
| 03/03/2011 | DE112009000924T5 Oberflächenaufrauungsverfahren für ein Substrat und Herstellungsverfahren für eine Fotovoltaische Vorrichtung Surface roughening a substrate and manufacturing method of a photovoltaic device |
| 03/03/2011 | DE102010039798A1 Method for processing semiconductor wafer during manufacturing of e.g. integrated circuit, involves arranging adhesive tape at upper end of reinforcement section of wafer, removing protective band from wafer, and removing section from tape |
| 03/03/2011 | DE102010039147A1 Halbleiterstruktur und ein Verfahren zum Bilden derselben Semiconductor structure and a method of forming the same |
| 03/03/2011 | DE102010038826A1 Leistungshalbleitervorrichtung und Verfahren zum Herstellen derselben Power semiconductor device and method of manufacturing the same |
| 03/03/2011 | DE102010038641A1 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation |
| 03/03/2011 | DE102010036978A1 Bauelement mit einer ringförmigen Metallstruktur und Verfahren Component with an annular metal structure and procedures |
| 03/03/2011 | DE102009040503A1 Verfahren zur Herstellung von Wafern A process for the production of wafers |
| 03/03/2011 | DE102009039522A1 Vergrabene Ätzstoppschicht in Grabenisolationsstrukturen für eine bessere Oberflächenebenheit in dicht gepackten Halbleiterbauelementen Buried etch stop layer in grave isolation structures for better surface flatness in densely packed semiconductor devices |
| 03/03/2011 | DE102009039421A1 Doppelkontaktmetallisierung mit stromloser Plattierung in einem Halbleiterbauelement Doppelkontaktmetallisierung with electroless plating in a semiconductor device |
| 03/03/2011 | DE102009039420A1 Verspannungseinstellung in verspannten dielektrischen Materialien von Halbleiterbauelementen durch Verspannungsrelaxation auf der Grundlage von Strahlung Tension setting in stressed dielectric materials of semiconductor devices by stress relaxation on the basis of radiation |
| 03/03/2011 | DE102009039419A1 Bewahren der Integrität eines Gatestapels mit großem ε durch Passivierung mittels eines Sauerstoffplasmas Preserve the integrity of a gate stack with large ε passivation by means of an oxygen plasma, |
| 03/03/2011 | DE102009039418A1 Einstellung der Austrittsarbeit in Gate-Stapeln mit großem ε, die Gatedielektrika mit unterschiedlicher Dicke enthalten Setting the work function in gate stacks with large ε containing gate dielectrics with different thickness |
| 03/03/2011 | DE102009039417A1 UV-Strahlungsüberwachung in der Halbleiterverarbeitung unter Anwendung eines temperaturabhänigen Signals UV radiation monitoring in semiconductor processing using a signal temperaturabhänigen |
| 03/03/2011 | DE102009039399A1 Verfahren zur Vermessung einer Halbleiterstruktur, welche eine Solarzelle oder eine Vorstufe einer Solarzelle ist A method of measuring a semiconductor structure, which is a solar cell or a precursor of a solar cell |
| 03/03/2011 | DE102009037684A1 Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness |
| 03/03/2011 | DE102009029040A1 Vorrichtung und Verfahren zur Herstellung einer Vorrichtung Apparatus and method for manufacturing a device |
| 03/03/2011 | DE102009028961A1 Thin chip comprises connection pads formed in the chip topside for electrical contacting, and electrically conductive coating that extends itself from the connection pad up to chip side surface and functions as electrical connecting line |
| 03/03/2011 | DE102009028762A1 Verfahren zum Ätzen von Siliziumoberflächen A process for etching silicon surfaces |
| 03/03/2011 | DE102008016438B4 Doppelabscheidung einer verspannungsinduzierenden Schicht mit dazwischenliegender Verspannungsrelaxation Double depositing a stress-inducing layer with intermediate stress relaxation |
| 03/03/2011 | DE102007036246B4 Verfahren zur Herstellung eines integrierten Schaltkreises mit einem resistiven Speicherelement, ein integrierter Schaltkreis, Verwendung in einem Verfahren zum Speichern von Informationen und ein Speichermodul A process for producing an integrated circuit with a resistive memory element, an integrated circuit, use in a method for storing information and a memory module |
| 03/03/2011 | DE102007018760B4 Verfahren zur Herstellung einer Transistorvorrichtung und Transistorvorrichtung mit vertieftem Gate A method of manufacturing a transistor device and transistor device with recessed gate |
| 03/03/2011 | DE102006046425B4 Verfahren zur Bildung einer Justiermarke eines Halbleiterbauelements A method of forming an alignment mark of a semiconductor device |
| 03/03/2011 | DE102006046376B4 Verfahren zur Herstellung von Feldeffekttransistoren mit Technik zum lokalen Anpassen von Transistoreigenschaften durch Verwenden fortschrittlicher Laser/Blitzlichtausheizverfahren geeignet auch für die Herstellung von Transistorelementen von SRAM-Zellen A method of fabrication of field effect transistors having technique for local adjusting transistor characteristics by using more advanced lasers / Blitzlichtausheizverfahren also suitable for the manufacture of transistor elements of the SRAM cell |
| 03/03/2011 | DE102004064116B4 Isolierschichttransistor mit eingebauter Diode und Inverterschaltung Insulated with built-in diode and inverter circuit |
| 03/03/2011 | DE10121044B4 Anordnung zur Waferinspektion Arrangement for wafer inspection |
| 03/02/2011 | EP2290713A1 Power light emitting die package with reflecting lens and the method of making the same |
| 03/02/2011 | EP2290701A1 Apparatus for manufacturing thin film solar cell |
| 03/02/2011 | EP2290700A1 Apparatus for manufacturing thin film solar cell |
| 03/02/2011 | EP2290699A2 Inverted metamorphic solar cell with via for backside contacts |
| 03/02/2011 | EP2290698A2 Semiconductor Devices and Methods of Manufacture Thereof |
| 03/02/2011 | EP2290697A1 High-voltage semiconductor device with column structures and method of making the same |
| 03/02/2011 | EP2290695A1 Trench-constrained isolation diffusion in a semiconductor material |
| 03/02/2011 | EP2290693A1 Semiconductor device and manufacturing method thereof |
| 03/02/2011 | EP2290686A2 Method to perform electrical testing and assembly of electronic devices |
| 03/02/2011 | EP2290682A2 Package with a chip embedded between two substrates and method of manufacturing the same |
| 03/02/2011 | EP2290679A1 Device and method for releasing a semiconductor wafer from a support substrate |
| 03/02/2011 | EP2290678A1 Vacuum processing apparatus, vacuum processing method, and electronic device manufacturing method |
| 03/02/2011 | EP2290677A2 Method for evaluating semiconductor device |
| 03/02/2011 | EP2290676A1 Method for joining substrate and object to be mounted using solder paste |
| 03/02/2011 | EP2290675A2 Epitaxial substrate for semiconductor device, semiconductor device, and method of manufacturing epitaxial substrate for semiconductor device |
| 03/02/2011 | EP2290445A2 An image forming method and apparatus |
| 03/02/2011 | EP2290136A1 Method for achieving improved epitaxy quality (surface texture and defect densitity) on free-standing (aluminum, indium, gallium) nitride ((Al, In, Ga)N) substrates for opto-electronic and electronic devices |
| 03/02/2011 | EP2290135A1 Method for achieving improved epitaxy quality (surface texture and defect densitity) on free-standing (aluminum, indium, gallium) nitride ((Al, In, Ga)N) substrates for opto-electronic and electronic devices |
| 03/02/2011 | EP2290134A1 Method and production of at least one PCB track on a substrate |
| 03/02/2011 | EP2290128A2 Enhanced method of forming nickel silicides |
| 03/02/2011 | EP2290126A2 Atomic layer deposition systems and methods including metal beta-diketiminate compounds |
| 03/02/2011 | EP2290124A1 Vacuum processing apparatus and method for operating vacuum processing apparatus |
| 03/02/2011 | EP2290122A1 Nickel alloy sputtering target and nickel silicide film |
| 03/02/2011 | EP2290118A2 Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
| 03/02/2011 | EP2289955A1 Photocurable composition and manufacturing method for a molded body having a fine pattern on the surface |
| 03/02/2011 | EP2289668A2 Polishing apparatus |
| 03/02/2011 | EP2289667A1 Polishing agent for synthetic quartz glass substrate |
| 03/02/2011 | EP2289106A1 Nanostructured mos capacitor |
| 03/02/2011 | EP2289104A2 Diodes, and methods of forming diodes |
| 03/02/2011 | EP2289103A2 Semiconductor devices with non-punch-through semiconductor channels having enhanced conduction and methods of making |
| 03/02/2011 | EP2289100A2 Method for the manufacture of an electronic assembly |
| 03/02/2011 | EP2289097A1 Method and device for transporting objects |
| 03/02/2011 | EP2289096A1 Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm |
| 03/02/2011 | EP2289095A2 System for non radial temperature control for rotating substrates |
| 03/02/2011 | EP2289094A2 Method of forming an electronic device including removing a differential etch layer |
| 03/02/2011 | EP2289093A2 Low temperature deposition of silicon-containing films |
| 03/02/2011 | EP2289092A2 Method of forming an electronic device using a separation-enhancing species |
| 03/02/2011 | EP2288965A2 Low ph mixtures for the removal of high density implanted resist |
| 03/02/2011 | EP2288904A2 Sample inspection methods, systems and components |
| 03/02/2011 | EP2212910B1 Method of splitting a substrate |
| 03/02/2011 | EP2033224B1 Self aligned gate and guard ring structure for use in a sit |
| 03/02/2011 | EP1878046B1 Method of fabricating a bipolar transistor |
| 03/02/2011 | EP1812957B1 Method and device for thermally treating substrates |
| 03/02/2011 | EP1536043B1 N-type semiconductor diamond producing method and semiconductor diamond |
| 03/02/2011 | EP1532659B1 Methods for forming fin fet devices from bulk semiconductor |
| 03/02/2011 | EP1525088B1 Carbon fiber composite transfer member with reflective surfaces |
| 03/02/2011 | EP1468447B1 Adaptive threshold voltage control with positive body bias for n and p-channel transistors |
| 03/02/2011 | EP1321820B1 Halftone phase shift photomask and blank for halftone phase shift photomask |