H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2011
03/24/2011	US20110068014 Ni-Pt Alloy and Target Comprising the Same
03/24/2011	US20110067815 Plasma processing apparatus and shower head
03/24/2011	US20110067814 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode
03/24/2011	US20110067803 Method for low temperature bonding and and bonded structure
03/24/2011	US20110067753 Compositionally-graded and structurally-graded photovoltaic devices and methods of fabricating such devices
03/24/2011	US20110067495 Micromachined accelerometer with monolithic electrodes and method of making the same
03/24/2011	DE202010017181U1 Vorrichtung zum Schließen und Öffnen einer Be-/Entladeöffnung einer Prozesskammer A device for closing and opening a loading / unloading a process chamber
03/24/2011	DE112008003726T5 Oxidation nach Oxidauflösung Oxidation by oxide dissolution
03/24/2011	DE112008003349T5 Waferträger mit Nabe Wafer carrier with hubs
03/24/2011	DE10205323B4 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device
03/24/2011	DE102010045196A1 Verbindungshalbleitersubstrat Compound semiconductor substrate
03/24/2011	DE102010040842A1 Halbleitervorrichtung und Verfahren zum Herstellen derselben A semiconductor device and method of manufacturing the same
03/24/2011	DE102010003659A1 Raum- und Kosteneffizientes Einfügen von Spezialpins bei Substraten für integrierte Schaltungen Space and cost efficient insertion of Spezialpins with substrates for integrated circuits
03/24/2011	DE102009044086A1 Verfahren zur Herstellung eines elektronischen Bauteils und nach diesem Verfahren hergestelltes elektronisches Bauteil A method of manufacturing an electronic component and electronic component manufactured according to this method
03/24/2011	DE102009043482A1 Ein Halbleiterfertigungsprozess mit dazugehörigem Apparat A semiconductor manufacturing process with associated apparatus
03/24/2011	DE102009041641A1 Diodenanordnung und Verfahren zur Herstellung einer Diodenanordnung Diode array and method of producing a diode arrangement
03/24/2011	DE102009041548A1 Halbleiterstruktur Semiconductor structure
03/24/2011	DE102009040537A1 Multilayered foil element, particularly laminating foil or transfer foil, has two electrically conductive layers and dielectric layer which is arranged between electrically conductive layers
03/24/2011	DE102008020585B4 Plunger mit Schnellverriegelungssystem Plunger with quick locking system
03/24/2011	DE102006046380B4 Verfahren zur Herstellung eines Feldeffekttransistors mit einem elastisch verspannten Kanalgebiet und Feldeffekttransistor A process for producing a field effect transistor with an elastically strained channel region and the field-effect transistor
03/24/2011	DE102006032796B4 Verfahren zum Herstellen eines Halbleiter-Bauelements A method of manufacturing a semiconductor device
03/24/2011	DE10144893B4 Phasenverschiebungsmaskenvorform, Phasenverschiebungsmaske und Verfahren zu ihrer Herstellung Phase shift mask blank, the phase shift mask and process for their preparation
03/24/2011	CA2774308A1 Adhesive film, multilayer circuit board, electronic component, and semiconductor device
03/24/2011	CA2772919A1 Light emitting, photovoltaic or other electronic apparatus and system and method of making same
03/23/2011	EP2299789A1 Plasma generating apparatus and plasma processing apparatus
03/23/2011	EP2299784A1 Patterning method, device manufacturing method using the patterning method, and device
03/23/2011	EP2299498A1 Apparatus for manufacturing thin film solar cell
03/23/2011	EP2299496A2 Method for producing a contact area of an electronic component
03/23/2011	EP2299494A2 Semiconductor device
03/23/2011	EP2299493A2 Fabrication of silicon and germanium nanowires integrated on a substrate
03/23/2011	EP2299490A2 A semiconductor device comprising a honeycomb heteroepitaxy
03/23/2011	EP2299486A1 Method for bonding chips to wafers
03/23/2011	EP2299485A1 SRAM cell comprising four NMOS SGTs and two load resistors
03/23/2011	EP2299484A2 Semiconductor device comprising surrounding gate transistors.
03/23/2011	EP2299483A2 Rigid dual-servo nano stage
03/23/2011	EP2299482A2 Non-volatile memory device
03/23/2011	EP2299481A2 Semiconductor power device with multiple drain structure and corresponding manufacturing process
03/23/2011	EP2299480A2 A thin body mosfet with conducting surface channel extensions and gate-controlled channel sidewalls
03/23/2011	EP2299479A1 Plasma processing apparatus, and film forming method and etching method using plasma processing apparatus
03/23/2011	EP2299478A1 Laser annealing device
03/23/2011	EP2299477A1 Thin film solar cell manufacturing equipment
03/23/2011	EP2299476A1 Method and apparatus for laser annealing
03/23/2011	EP2299475A1 Improved fabrication and structures of crystalline material
03/23/2011	EP2299474A1 Hybrid silicon wafer and method for manufacturing same
03/23/2011	EP2299473A1 Modular substrate processing system and method
03/23/2011	EP2299472A1 Device for aligning two substrates
03/23/2011	EP2299452A1 Microstructure, and method for production thereof
03/23/2011	EP2299435A2 Active matrix liquid crystal display with pixel capacitor
03/23/2011	EP2299325A1 Resist composition, resist pattern forming method and compound
03/23/2011	EP2299237A2 Gantry stage orthogonality error measurement method and error compensation method
03/23/2011	EP2298968A2 Method for growing nanowires
03/23/2011	EP2298965A2 Method and device for galvanising substrates
03/23/2011	EP2298959A1 Film formation apparatus
03/23/2011	EP2298715A1 Lanthanum oxide-based sintered object, sputtering target comprising the sintered object, process for producing lanthanum oxide-based sintered object, and process for sputtering target production using the process
03/23/2011	EP2298714A1 Composition for ferroelectric thin film formation, method for ferroelectric thin film formation, and ferroelectric thin film formed by the method
03/23/2011	EP2298520A1 Method and device for cleaning wafers
03/23/2011	EP2298509A1 Carrier device, position-teaching method, and sensor jig
03/23/2011	EP2298490A1 Heat conducting structure with coplanar heated portion, manufacturing method thereof, and heat sink therewith
03/23/2011	EP2297786A1 Methods and apparatus for antimonide-based backward diode millimeter-wave detectors
03/23/2011	EP2297779A2 Methods of forming a plurality of capacitors
03/23/2011	EP2297778A1 Semiconductor device
03/23/2011	EP2297777A1 Next generation screen printing system
03/23/2011	EP2297775A1 Triangle two dimensional complementary patterning of pillars
03/23/2011	EP2297774A1 Trench capacitor and method for producing the same
03/23/2011	EP2297379A1 HIGH-K DIELECTRIC FILMS AND METHODS OF PRODUCING USING CERIUM-BASED ß-DIKETONATE PRECURSORS
03/23/2011	EP2297263A2 Stable, high rate silicon slurry
03/23/2011	EP2297168A1 Mixtures of precursors for producing ceramic layers by means of mocvd
03/23/2011	EP2218100B1 Method for fabricating isolated integrated semiconductor structures
03/23/2011	EP2191035B1 Deposition system for thin film formation
03/23/2011	EP1890319B1 METHOD FOR FLATTENING a SOLID SURFACE
03/23/2011	EP1889306B1 Structure for functional film pattern formation and method of manufacturing functional film
03/23/2011	EP1884889B1 Semiconductor device
03/23/2011	EP1831918B1 Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step
03/23/2011	EP1815529B1 Methods of making semiconductor devices
03/23/2011	EP1814817B1 Method of etching using a sacrificial substrate
03/23/2011	EP1670046B1 Semiconductor substrate cutting method
03/23/2011	EP1668678B1 Capacitor constructions, rugged silicon-containing surfaces, and methods of forming rugged silicon-containing surfaces
03/23/2011	EP1644971B1 Precursor solution, method of preparation thereof and use thereof
03/23/2011	EP1554758B1 Methods for making double and triple gate mosfet devices
03/23/2011	EP1533402B1 Epitaxial wafer and its manufacturing method
03/23/2011	EP1515363B1 Method and device for measuring wafer potential or temperature
03/23/2011	EP1468233B1 Resistance furnace
03/23/2011	EP1442071B1 Etch-stop resins
03/23/2011	EP1380049B1 Method for making transistors having optimized source-drain structures
03/23/2011	EP1269264B1 Method of analyzing a wafer manufacturing process
03/23/2011	EP1238424B1 Method of making a collector-up bipolar transistor
03/23/2011	CN201773830U Cover plate of integrated circuit device
03/23/2011	CN201773829U Pickup device for die bonder
03/23/2011	CN201773828U Acid washing plate structure
03/23/2011	CN201773827U Automatic buffering system
03/23/2011	CN201773826U Copper wire bonding equipment for power device
03/23/2011	CN201773825U Encapsulation die
03/23/2011	CN201773824U Handling tool for ball bearings on quick heat treatment station
03/23/2011	CN201773823U Two-in-one reaction and smelting equipment
03/23/2011	CN1979787B Semiconductor device and forming method thereof
03/23/2011	CN1976014B Semiconductor device and its production method
03/23/2011	CN1966548B Polishing medium for chemical-mechanical polishing, and method of polishing substrate member
03/23/2011	CN1944496B Polishing slurry, method of producing same, and method of polishing substrate
03/23/2011	CN1917156B Encapsulated chip scale package having flip-chip on lead frame structure and method
03/23/2011	CN1862782B Wire loop, semiconductor device containing same and wire connecting method

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