| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/22/2011 | US7910387 Phosphor coating method for fabricating light emitting semiconductor device and applications thereof |
| 03/22/2011 | US7910385 Method of fabricating microelectronic devices |
| 03/22/2011 | US7910384 Method for producing a modulated grating for an optimal reflection spectrum |
| 03/22/2011 | US7910266 Pattern forming method and mask |
| 03/22/2011 | US7910264 Reflective mask blank for exposure, reflective mask for exposure, method of producing a semiconductor device, and substrate provided with multilayer reflective film |
| 03/22/2011 | US7910218 Removing the first metal layer by dissolving in a cleaning solution, removing intermetallics by propelling blasting beads, electrodepositing the second metal or alloy layer; surface treatment of enclosure wall, chamber shield, cover ring, deposition ring, insulator ring, coil, shutter disk, clamp shield |
| 03/22/2011 | US7910177 Sequential pulse deposition |
| 03/22/2011 | US7910166 System and method for depositing a material on a substrate |
| 03/22/2011 | US7910165 Ruthenium layer formation for copper film deposition |
| 03/22/2011 | US7910013 Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure |
| 03/22/2011 | US7909961 Method and apparatus for photomask plasma etching |
| 03/22/2011 | US7909960 Apparatus and methods to remove films on bevel edge and backside of wafer |
| 03/22/2011 | US7909949 Sputtering target with few surface defects, and surface processing method thereof |
| 03/22/2011 | US7909934 Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency |
| 03/22/2011 | US7909167 Wafer container |
| 03/22/2011 | US7908745 Method of manufacturing multi-layer printed circuit board |
| 03/17/2011 | WO2011032068A2 Edge grip end effector |
| 03/17/2011 | WO2011031949A1 Graphene nanoelectronic device fabrication |
| 03/17/2011 | WO2011031858A1 High aspect ratio silicon oxide etch |
| 03/17/2011 | WO2011031749A2 Dram cell utilizing a doubly gated vertical channel |
| 03/17/2011 | WO2011031707A1 Method for manufacturing thin crystalline solar cells pre-assembled on a panel |
| 03/17/2011 | WO2011031672A2 Parallel system for epitaxial chemical vapor deposition |
| 03/17/2011 | WO2011031590A2 Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential |
| 03/17/2011 | WO2011031589A2 Methods and arrangement for detecting a wafer-released event within a plasma processing chamber |
| 03/17/2011 | WO2011031565A2 Super junction trench power mosfet device fabrication |
| 03/17/2011 | WO2011031563A2 Super junction trench power mosfet devices |
| 03/17/2011 | WO2011031556A2 Gas distribution showerhead and method of cleaning |
| 03/17/2011 | WO2011031521A2 Method of decontamination of process chamber after in-situ chamber clean |
| 03/17/2011 | WO2011031512A2 Interdigitated vertical parallel capacitor |
| 03/17/2011 | WO2011031507A1 Debonding a glass substrate from carrier using ultrasonic wave |
| 03/17/2011 | WO2011031431A2 Semiconductor devices with field plates |
| 03/17/2011 | WO2011031396A2 Near-infrared absorbing film compositions |
| 03/17/2011 | WO2011031321A2 Replaceable upper chamber parts of plasma processing apparatus |
| 03/17/2011 | WO2011031092A2 Cleaning solution composition for substrate for preparation of flat panel display |
| 03/17/2011 | WO2011031056A2 Sputtering system comprising a substrate-vibrating apparatus, and method for controlling same |
| 03/17/2011 | WO2011031028A2 Resist stripper composition for forming copper-based wiring |
| 03/17/2011 | WO2011030993A1 Repair method and apparatus of light emitting diode using quantum dot coating |
| 03/17/2011 | WO2011030966A1 Apparatus and method for etching edge of wafer |
| 03/17/2011 | WO2011030918A1 Leaving substituent-containing compound, organic semiconductor material, organic semiconductor film containing the material, organic electronic device containing the film, method for producing film-like product, pi-electron conjugated compound and method for producing the pi-electron conjugated compound |
| 03/17/2011 | WO2011030917A1 Method for cleaning article employing ultrasonic wave |
| 03/17/2011 | WO2011030867A1 Semiconductor device and production method therefor |
| 03/17/2011 | WO2011030834A1 Substrate inspecting apparatus and aligning method employed in substrate inspecting apparatus |
| 03/17/2011 | WO2011030802A1 Laser processing method and laser processing device |
| 03/17/2011 | WO2011030782A1 Method for forming a semiconductor element structure and semiconductor element |
| 03/17/2011 | WO2011030753A1 Method for manufacturing a semiconductor device |
| 03/17/2011 | WO2011030744A1 Photosensitive resin composition and method for producing photosensitive resin film |
| 03/17/2011 | WO2011030741A1 Transparent electrode and crystalline silicon solar cell |
| 03/17/2011 | WO2011030737A1 Radiation-sensitive composition and novel compound |
| 03/17/2011 | WO2011030735A1 Process for production of semiconductor device, and semiconductor device |
| 03/17/2011 | WO2011030721A1 Method for operating substrate processing apparatus |
| 03/17/2011 | WO2011030706A1 Dispersant for silica particles or ceria particles, and abrasive |
| 03/17/2011 | WO2011030683A1 Cyclic compound, process for preparation thereof, radiation-sensitive composition, and method for formation of resist pattern |
| 03/17/2011 | WO2011030661A1 Semiconductor device and process for production of semiconductor device |
| 03/17/2011 | WO2011030607A1 Drying device |
| 03/17/2011 | WO2011030597A1 Semiconductor device |
| 03/17/2011 | WO2011030584A1 Active matrix substrate and display device |
| 03/17/2011 | WO2011030529A1 Method for manufacturing magnetoresistive element |
| 03/17/2011 | WO2011030521A1 Method for manufacturing mask blank, method for manufacturing mask for transfer, and method for manufacturing reflective mask |
| 03/17/2011 | WO2011030517A1 Connecting material, semiconductor device and method for manufacturing semiconductor device |
| 03/17/2011 | WO2011030488A1 Defect review support device, defect review device and inspection support device |
| 03/17/2011 | WO2011030483A1 Semiconductor integrated circuit, electronic apparatus provided with the semiconductor integrated circuit, and method for controlling the electronic apparatus |
| 03/17/2011 | WO2011030476A1 Method for manufacturing semiconductor device |
| 03/17/2011 | WO2011030454A1 Semiconductor device provided with semiconductor substrate having diode zone and igbt zone |
| 03/17/2011 | WO2011030396A1 Semiconductor device and method for manufacturing same |
| 03/17/2011 | WO2011030379A1 Conductive member, connecting member, testing apparatus and method for repairing connecting member |
| 03/17/2011 | WO2011030368A1 Semiconductor device and method for manufacturing same |
| 03/17/2011 | WO2011030238A1 Iii-nitride light emitting device with curvature control layer |
| 03/17/2011 | WO2011030152A1 LATERAL INSULATED GATE BIPOLAR TRANSISTORS (LIGBTs) |
| 03/17/2011 | WO2011030001A1 A method for reducing internal mechanical stresses in a semiconductor structure and a low mechanical stress semiconductor structure |
| 03/17/2011 | WO2011029890A1 Tool for picking a planar object from a supply station |
| 03/17/2011 | WO2011029783A1 Mechanical modularity chambers |
| 03/17/2011 | WO2011029757A1 Circuit configuration having a prescribed capacitance, and method and device for the production thereof |
| 03/17/2011 | WO2011029427A1 Method and device for archiving and/or temporarily storing coated glass panes in clean rooms |
| 03/17/2011 | WO2011029185A1 Semiconductor chip with stair arrangement bump structures |
| 03/17/2011 | WO2011002798A3 Automatic fault detection and classification in a plasma processing system and methods thereof |
| 03/17/2011 | WO2010151224A8 A phase shifting device and a method for manufacturing the same |
| 03/17/2011 | WO2010147846A3 Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks |
| 03/17/2011 | WO2010135220A4 Systems and methods for optimizing looping parameters and looping trajectories in the formation of wire loops |
| 03/17/2011 | WO2010080069A3 Shielding and protecting elements for plasma doping and their maintainance |
| 03/17/2011 | WO2009135685A3 Device and method for tempering objects in a treatment chamber |
| 03/17/2011 | US20110066273 Imprint system and imprint method |
| 03/17/2011 | US20110065289 Method of manufacturing semiconductor device and substrate processing apparatus |
| 03/17/2011 | US20110065288 Substrate processing method and substrate processing apparatus |
| 03/17/2011 | US20110065287 Pulsed chemical vapor deposition of metal-silicon-containing films |
| 03/17/2011 | US20110065286 Method of manufacturing semiconductor device and substrate processing apparatus |
| 03/17/2011 | US20110065284 Method and System for Isolated and Discretized Process Sequence Integration |
| 03/17/2011 | US20110065283 Semiconductor device manufacturing method and substrate processing apparatus |
| 03/17/2011 | US20110065281 Method of rapid thermal treatment using high energy electromagnetic radiation of a semiconductor substrate for formation of epitaxial materials |
| 03/17/2011 | US20110065280 Mask pattern forming method and semiconductor device manufacturing method |
| 03/17/2011 | US20110065279 Method of processing a workpiece in a plasma reactor using feed forward thermal control |
| 03/17/2011 | US20110065278 Method for fabricating pellicle of euv mask |
| 03/17/2011 | US20110065277 Reflow method, pattern generating method, and fabrication method for tft for lcd |
| 03/17/2011 | US20110065276 Apparatus and Methods for Cyclical Oxidation and Etching |
| 03/17/2011 | US20110065275 Methods of manufacturing semiconductor devices |
| 03/17/2011 | US20110065274 Enhanced method of forming nickel silicides |
| 03/17/2011 | US20110065273 Methods of Fabricating a Barrier Layer Over Interconnect Structures in Atomic Deposition Environments |
| 03/17/2011 | US20110065272 Stacked multilayer structure and manufacturing method thereof |
| 03/17/2011 | US20110065271 Method of manufacturing semiconductor device |
| 03/17/2011 | US20110065270 Three-dimensional semiconductor memory device and a method of fabricating the same |
| 03/17/2011 | US20110065269 Electron device using oxide semiconductor and method of manufacturing the same |