Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2011
06/15/2011CN102097289A Load lock chamber
06/15/2011CN102097288A Rework method for back-side metal process
06/15/2011CN102097287A Method for monitoring chip groove depth and wafer
06/15/2011CN102097286A Method for monitoring step profiler in measuring accuracy of chip groove depth
06/15/2011CN102097285A Method for monitoring over etched depth of edge of super-thick metal groove
06/15/2011CN102097284A Control method and device for making alignment marks
06/15/2011CN102097127A Operating method of nonvolatile memory with variable raceway channel region interface
06/15/2011CN102096412A Information processing apparatus, semiconductor manufacturing system and information processing method
06/15/2011CN102096335A Double-exposure method
06/15/2011CN102096327A Exposure device, exposure method and producing method of display panel substrate
06/15/2011CN102096322A Lithographic pellicle
06/15/2011CN102096321A Negative resist composition and patterning process
06/15/2011CN102096319A Photoresist composition and method of manufacturing a display substrate using the same
06/15/2011CN102096314A Methods of fabricating an imprint mold and of forming a pattern using the imprint mold
06/15/2011CN102096311A Photomask-forming glass substrate and making method
06/15/2011CN102096255A Array substrate for liquid crystal display device and method of fabricating the same
06/15/2011CN102096250A Method of fabricating liquid crystal display device
06/15/2011CN102096224A Liquid crystal display device and method of fabricating the same
06/15/2011CN102096223A Display device and method of manufacturing the same
06/15/2011CN102096089A Photo diode for detecting X-ray and manufacturing method thereof
06/15/2011CN102095888A Heat-type wind-speed and wind-direction sensor with heat insulation structure and preparation method thereof
06/15/2011CN102095769A Carbon-nano-tube air-sensitive sensor and preparation method thereof
06/15/2011CN102095377A Line width measuring device
06/15/2011CN102094199A Etching equipment of electronic soft label
06/15/2011CN102093929A Method for recycling solar polyethylene glycol (PEG)-based recycling cutting liquid and cutting liquid prepared on basis of method
06/15/2011CN102093925A Solar silicon wafer cutting liquid
06/15/2011CN102093828A Wafer processing tape
06/15/2011CN102093827A Re-peelable adhesive sheet
06/15/2011CN102092007A Method for preparing trimmer
06/15/2011CN102092002A Liquid polishing method for monocrystalline silicon piece
06/15/2011CN102091995A Chemical and mechanism grinding method and system
06/15/2011CN102091703A Method for cleaning polymer on side wall of etching chamber and contact hole forming method
06/15/2011CN101840902B Direct chip placing lead frame structure and production method thereof
06/15/2011CN101800284B Method for manufacturing double-layer top electrode organic field effect transistor
06/15/2011CN101794719B Automatic lifting and adsorbing mechanism for wafer
06/15/2011CN101777564B SOI CMO device with vertical grid structure
06/15/2011CN101777489B Method for automatically controlling stability of ion injection process
06/15/2011CN101760770B Electroplating equipment for electrode of silicon solar cell slice
06/15/2011CN101740570B Complementary metal oxide semiconductor transistor device and manufacturing method thereof
06/15/2011CN101740327B Method for manufacturing chip capable of reducing stress
06/15/2011CN101728333B Manufacturing method of array substrate
06/15/2011CN101719491B Structure and method for encapsulating light-emitting diode
06/15/2011CN101713057B Process used for spray forming Si-Al alloy solid-liquid two-phase region hot working molding encapsulating parts
06/15/2011CN101697343B Film encapsulation method
06/15/2011CN101681880B Semiconductor device
06/15/2011CN101673659B Method for detecting measurement stability of tester tables
06/15/2011CN101669199B Substrate holding mechanism and substrate assembling apparatus provided with the same
06/15/2011CN101667533B Plasma processing method and plasma processing apparatus
06/15/2011CN101661951B Color display device and method for manufacturing the same
06/15/2011CN101656239B Bonding welding disk lowering parasitic capacitance and preparing method thereof
06/15/2011CN101656192B Device for dry etching
06/15/2011CN101656191B Method for removing silicon oxynitride film
06/15/2011CN101651121B Method for adjusting voltage threshold of pull up transistor of static random access memory
06/15/2011CN101651117B Metal copper filling method used in Damascus interconnecting process
06/15/2011CN101651097B Non-volatile memory cell and manufacturing method thereof
06/15/2011CN101644890B Optical adjacent correction method suitable for pixel array of image sensor
06/15/2011CN101642893B Precise polishing method of stainless steel substrate
06/15/2011CN101640091B Inductive coupling coil and plasma processing device adopting same
06/15/2011CN101636827B Active matrix substrate
06/15/2011CN101635291B Mini-size package lead frame structure and processing method thereof
06/15/2011CN101630651B Chip pick-up component
06/15/2011CN101626035B Poly silicon thin film transistor and method of fabricating the same
06/15/2011CN101626007B Ultrathin pre-plating layer lead frame and preparation method thereof
06/15/2011CN101621033B Method for etching dielectric storage layer in flash memory
06/15/2011CN101615584B Packaging method of chip reconfiguration structure
06/15/2011CN101594961B Disklike cutting tool and cutting device
06/15/2011CN101593695B Method for solving power field effect tube wafer bending
06/15/2011CN101584035B Substrate processing apparatus and substrate processing method
06/15/2011CN101582426B Capless DRAM unit and preparation method thereof
06/15/2011CN101581861B Liquid crystal display device and method for manufacturing the same
06/15/2011CN101566667B MOS component testing method
06/15/2011CN101546707B Method for fabricating dielectric isolation structure with improved quality
06/15/2011CN101544389B Method for preparing high-purity electro-melting corundum aluminum oxide epoxy casting filler
06/15/2011CN101540278B Substrate inspection device, and recovery tool
06/15/2011CN101533784B Light emitting diode encapsulating structure and production method thereof
06/15/2011CN101529557B Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures
06/15/2011CN101516573B Cutting method
06/15/2011CN101515544B Growing method of polysilicon gate
06/15/2011CN101512753B Fabrication of self-assembled nanowire-type interconnects on a semiconductor device
06/15/2011CN101510517B Method for packaging smart card chip on gershgorim band
06/15/2011CN101500742B Room-temperature bonding method and room-temperature bondingapparatus
06/15/2011CN101500369B Inductor coupling coil and inductor coupling plasma generation apparatus
06/15/2011CN101483168B Molding mode SIM card encapsulation construction based on metal frame and encapsulation method thereof
06/15/2011CN101478003B Single electron transistor based on ordered mesoporous and preparation method thereof
06/15/2011CN101470455B Direct current auto-bias compensation method and system, semiconductor processing equipment
06/15/2011CN101465307B Standard mechanical interface equipment with microparticle adsorption pad
06/15/2011CN101465299B Method for manufacturing grind used in encapsulation structure of chip reconfiguration
06/15/2011CN101461047B Semiconductor element, method for manufacturing the semiconductor element, electronic device and method for manufacturing the electronic device
06/15/2011CN101459318B Manufacturing method of nitride semiconductor device and nitride semiconductor device
06/15/2011CN101456165B Polishing cloth and substrate manufacturing method using same
06/15/2011CN101452887B Capacitor layer manufacturing method in DRAM
06/15/2011CN101445386B Preparing method of ceramic copper-clad base plate
06/15/2011CN101432882B A transistor having a channel with tensile strain and oriented along a crystallographic orientation with increased charge carrier mobility
06/15/2011CN101432860B Method for forming self-aligned metal silicide contacts
06/15/2011CN101432851B Laser irradiation device, laser irradiation method, and method for manufacturing modified object
06/15/2011CN101427365B Semiconductor sensor device and method for manufacturing same
06/15/2011CN101427355B Patterning sub-lithographic features with variable widths
06/15/2011CN101425472B Electrostatic clamping disc controlling temperature by air and method for controlling temperature of substrate
06/15/2011CN101421837B Method for making a structure comprising at least one thin layer in an amorphous material obtained by epitaxy on a supporting substrate and structure obtained according to said method
06/15/2011CN101398457B Wafer, test system thereof, test method thereof, and test fixture thereof