Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2011
06/14/2011US7960280 Process method to fully salicide (FUSI) both N-poly and P-poly on a CMOS flow
06/14/2011US7960279 Semiconductor device and manufacturing method therefor
06/14/2011US7960278 Method of film deposition
06/14/2011US7960277 Electronic device and method of manufacturing the same
06/14/2011US7960276 Conductor-dielectric structure and method for fabricating
06/14/2011US7960275 Method for manufacturing an interconnection structure with cavities for an integrated circuit
06/14/2011US7960274 Structure and method for creating reliable via contacts for interconnect applications
06/14/2011US7960273 Metal interconnection of a semiconductor device and method of manufacturing the same
06/14/2011US7960272 Method for fabricating thermal compliant semiconductor chip wiring structure for chip scale packaging
06/14/2011US7960271 Semiconductor device and method of manufacturing the same
06/14/2011US7960270 Method for fabricating circuit component
06/14/2011US7960269 Method for forming a double embossing structure
06/14/2011US7960268 Method for forming gate having metal layer in semiconductor device
06/14/2011US7960267 Method for making a stressed non-volatile memory device
06/14/2011US7960266 Spacer patterns using assist layer for high density semiconductor devices
06/14/2011US7960265 Method for fabricating semiconductor device
06/14/2011US7960264 Lithography for printing constant line width features
06/14/2011US7960263 Amorphization/templated recrystallization method for hybrid orientation substrates
06/14/2011US7960262 Method for manufacturing semiconductor device by applying laser beam to single-crystal semiconductor layer and non-single-crystal semiconductor layer through cap film
06/14/2011US7960260 Formation of nanowhiskers on a substrate of dissimilar material
06/14/2011US7960258 Method for fabricating nanoscale thermoelectric device
06/14/2011US7960257 Silicon carbide semiconductor device and manufacturing method therefor
06/14/2011US7960256 Use of CL2 and/or HCL during silicon epitaxial film formation
06/14/2011US7960255 Process for forming a wire portion in an integrated electronic circuit
06/14/2011US7960254 Manufacturing method for epitaxial wafer
06/14/2011US7960253 Thin silicon wafer with high gettering ability and production method thereof
06/14/2011US7960252 Method for forming a semiconductor film including a film forming gas and decomposing gas while emitting a laser sheet
06/14/2011US7960251 Method for producing nanowires using a porous template
06/14/2011US7960250 Method for manufacturing device
06/14/2011US7960249 Method for producing wafer for backside illumination type solid imaging device
06/14/2011US7960248 Method for transfer of a thin layer
06/14/2011US7960247 Die thinning processes and structures
06/14/2011US7960246 Method for the manufacture of electronic devices on substrates and devices related thereto
06/14/2011US7960245 Dual wired integrated circuit chips
06/14/2011US7960244 Process for the aligned manufacture of electronic semiconductor devices in a SOI substrate
06/14/2011US7960243 Method of forming a semiconductor device featuring a gate stressor and semiconductor device
06/14/2011US7960242 Method for fabrication of a semiconductor device and structure
06/14/2011US7960241 Manufacturing method for double-side capacitor of stack DRAM
06/14/2011US7960240 System and method for providing a dual via architecture for thin film resistors
06/14/2011US7960238 Multiple indium implant methods and devices and integrated circuits therefrom
06/14/2011US7960237 Structure and method for mosfet with reduced extension resistance
06/14/2011US7960236 Phosphorus containing Si epitaxial layers in N-type source/drain junctions
06/14/2011US7960235 Method for manufacturing a MOSFET with a surrounding gate of bulk Si
06/14/2011US7960234 Multiple-gate MOSFET device and associated manufacturing methods
06/14/2011US7960233 MOSFET with a second poly and an inter-poly dielectric layer over gate for synchronous rectification
06/14/2011US7960232 Methods of designing an integrated circuit on corrugated substrate
06/14/2011US7960231 Method of forming a semiconductor memory device
06/14/2011US7960230 Semiconductor device and method of manufacturing the same
06/14/2011US7960229 Metal oxide semiconductor transistor with reduced gate height, and related fabrication methods
06/14/2011US7960228 Methods of making a ferroelectric memory device having improved interfacial characteristics
06/14/2011US7960227 Manufacturing method of semiconductor device
06/14/2011US7960226 Method of forming on-chip decoupling capacitor with bottom electrode layer having surface roughness
06/14/2011US7960225 Method of controlling film thinning of semiconductor wafer for solid-state image sensing device
06/14/2011US7960224 Operation method for multi-level switching of metal-oxide based RRAM
06/14/2011US7960223 Structure and method to integrate dual silicide with dual stress liner to improve CMOS performance
06/14/2011US7960222 System and method for manufacturing double EPI N-type lateral diffusion metal oxide semiconductor transistors
06/14/2011US7960221 Thin film transistor substrate and method of manufacturing the same and mask for manufacturing thin film transistor substrate
06/14/2011US7960220 Method of forming polysilicon, thin film transistor using the polysilicon, and method of fabricating the thin film transistor
06/14/2011US7960219 Thin-film transistor substrate and method of fabricating the same
06/14/2011US7960218 Method for fabricating high-speed thin-film transistors
06/14/2011US7960216 Confinement techniques for non-volatile resistive-switching memories
06/14/2011US7960215 Electronic device, electronic apparatus mounted with electronic device, article equipped with electronic device and method of producing electronic device
06/14/2011US7960214 Chip package
06/14/2011US7960213 Electronic package structure and method
06/14/2011US7960212 Structure of high performance combo chip and processing method
06/14/2011US7960211 Semiconductor system-in-package and method for making the same
06/14/2011US7960210 Ultra-thin chip packaging
06/14/2011US7960209 Semiconductor device assembly process
06/14/2011US7960208 Wafer level hermetic bond using metal alloy with raised feature
06/14/2011US7960206 Adjustment of masks by re-flow
06/14/2011US7960205 Tellurium precursors for GST films in an ALD or CVD process
06/14/2011US7960204 Method and structure for adhesion of absorber material for thin film photovoltaic cell
06/14/2011US7960203 Pore phase change material cell fabricated from recessed pillar
06/14/2011US7960202 Photodiode array having semiconductor substrate and crystal fused regions and method for making thereof
06/14/2011US7960201 String interconnection and fabrication of inverted metamorphic multijunction solar cells
06/14/2011US7960200 Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS
06/14/2011US7960199 Thin film transistor (TFT) array substrate and fabricating method thereof that protect the TFT and a pixel electrode without a protective film
06/14/2011US7960197 Method of making a solid-state imaging device
06/14/2011US7960196 Light-emitting device, light-emitting element and method of manufacturing same
06/14/2011US7960195 Laser diode array, method of manufacturing same, printer, and optical communication device
06/14/2011US7960194 Method for manufacturing a reflective surface sub-assembly for a light-emitting device
06/14/2011US7960193 Dual panel-type organic electroluminescent display device and method of fabricating the same
06/14/2011US7960192 Light emitting device having silicon-containing composition and method of making same
06/14/2011US7960191 Composite laser element and laser oscillator employing it
06/14/2011US7960190 Temporary package for at-speed functional test of semiconductor chip
06/14/2011US7960189 Method of manufacturing a system in package
06/14/2011US7960188 Polishing method
06/14/2011US7960187 Recovery processing method to be adopted in substrate processing apparatus, substrate processing apparatus and program
06/14/2011US7960186 Method of forming ferromagnetic material, transistor and method of manufacturing the same
06/14/2011US7960094 Laser induced thermal imaging apparatus and laser induced thermal imaging method
06/14/2011US7960090 Pattern forming method, pattern formed thereby, mold, processing apparatus, and processing method
06/14/2011US7960078 Exposure condition setting method, substrate processing device, and computer program
06/14/2011US7960076 Reflective-type mask
06/14/2011US7960075 Photomask unit, exposing method and method for manufacturing semiconductor device
06/14/2011US7959977 Substrate processing method and apparatus
06/14/2011US7959830 Articles comprising high-electrical-conductivity nanocomposite material and method for fabricating same
06/14/2011US7959819 Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes
06/14/2011US7959782 Method of manufacturing a Ni-Pt alloy
06/14/2011US7959738 Via permeating supercritical carbon dioxide therein; etching; semiconductors
06/14/2011US7959735 Susceptor with insulative inserts