| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/14/2011 | US7959734 Substrate mounting structure and substrate processing apparatus |
| 06/14/2011 | US7959733 Film formation apparatus and method for semiconductor process |
| 06/14/2011 | US7959403 Linear semiconductor processing facilities |
| 06/14/2011 | US7959400 Aligner, wafer transferring device, and semiconductor production device |
| 06/14/2011 | US7959395 Substrate processing apparatus |
| 06/14/2011 | US7958898 Substrate processing apparatus |
| 06/14/2011 | US7958842 Substrate processing apparatus |
| 06/14/2011 | US7958628 Bonding tool for mounting semiconductor chips |
| 06/14/2011 | US7958626 Embedded passive component network substrate fabrication method |
| 06/14/2011 | US7958608 Process for manufacting a piezoelectric device |
| 06/14/2011 | CA2542360C Structuring of electrical functional layers by means of a transfer film and structuring the adhesive |
| 06/09/2011 | WO2011069140A2 Semiconductor material doping |
| 06/09/2011 | WO2011069054A2 Phonon-enhanced crystal growth and lattice healing |
| 06/09/2011 | WO2011068959A1 High-selectivity etching system and method |
| 06/09/2011 | WO2011068936A2 Methods and apparatus for treating exhaust gas in a processing system |
| 06/09/2011 | WO2011068737A2 Planar mosfet with textured channel and gate |
| 06/09/2011 | WO2011068730A2 Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads |
| 06/09/2011 | WO2011068660A2 Method for improving performance of a substrate carrier |
| 06/09/2011 | WO2011068652A2 Oxygen-doping for non-carbon radical-component cvd films |
| 06/09/2011 | WO2011068621A2 Methods of patterning materials, and methods of forming memory cells |
| 06/09/2011 | WO2011068480A1 Method and system for forming a metal electrode for a solar cell |
| 06/09/2011 | WO2011068478A1 Method and apparatus for improved sorting of diced substrates |
| 06/09/2011 | WO2011068352A2 Tray transfer apparatus and side push apparatus employed in same |
| 06/09/2011 | WO2011068283A1 Chemical vapor deposition reactor having a radiant heat barrier layer for improving energy efficiency |
| 06/09/2011 | WO2011068263A1 Cylindrical sputtering cathode |
| 06/09/2011 | WO2011068236A1 Wafer polishing method |
| 06/09/2011 | WO2011068223A1 Optical member for euv lithography, and process for production of reflective-layer-attached substrate for euv lithography |
| 06/09/2011 | WO2011068219A1 Shape measurement device and shape measurement method |
| 06/09/2011 | WO2011068100A1 Method for producing silica-based glass substrate for imprint mold, and method for producing imprint mold |
| 06/09/2011 | WO2011068096A1 Interface layer reduction method, method for forming high dielectric constant gate insulating film, high dielectric constant gate insulating film, high dielectric constant gate oxide film, and transistor having high dielectric constant gate oxide film |
| 06/09/2011 | WO2011068066A1 Semiconductor device and manufacturing method thereof |
| 06/09/2011 | WO2011068065A1 Semiconductor device and production method thereof |
| 06/09/2011 | WO2011068064A1 Silica glass containing tio2 |
| 06/09/2011 | WO2011068056A1 Method for defect inspection and apparatus for defect inspection |
| 06/09/2011 | WO2011068039A1 Etching gas |
| 06/09/2011 | WO2011068038A1 Cleaning gas |
| 06/09/2011 | WO2011068037A1 Semiconductor device and manufacturing method thereof |
| 06/09/2011 | WO2011068033A1 Semiconductor device and manufacturing method thereof |
| 06/09/2011 | WO2011068029A1 Method for manufacturing semiconductor device |
| 06/09/2011 | WO2011068028A1 Semiconductor element, semiconductor device, and method for manufacturing the same |
| 06/09/2011 | WO2011068022A1 Semiconductor device |
| 06/09/2011 | WO2011068021A1 Display device |
| 06/09/2011 | WO2011068016A1 Semiconductor device |
| 06/09/2011 | WO2011068014A1 Exposure apparatus |
| 06/09/2011 | WO2011068011A1 Charged particle beam device and image quality improvement method therefor |
| 06/09/2011 | WO2011067991A1 Semiconductor device, process for producing same, and display device |
| 06/09/2011 | WO2011067903A1 Switch device |
| 06/09/2011 | WO2011067893A1 Substrate, and method for producing same |
| 06/09/2011 | WO2011067885A1 Semiconductor device |
| 06/09/2011 | WO2011067882A1 Semiconductor integrated circuit and semiconductor device provided with the same, and electronic equipment |
| 06/09/2011 | WO2011067875A1 Method for manufacturing electronic component, electronic component and conductive film |
| 06/09/2011 | WO2011067872A1 Light emitting element and method for manufacturing same |
| 06/09/2011 | WO2011067821A1 Method for manufacturing semiconductor device |
| 06/09/2011 | WO2011067820A1 Sputtering apparatus and method for manufacturing electronic device |
| 06/09/2011 | WO2011067394A1 Method for manufacturing a semiconductor-on-insulator structure having low electrical losses, and corresponding structure |
| 06/09/2011 | WO2011067383A1 Surface treatments and coatings |
| 06/09/2011 | WO2011067276A1 Heterostructure for electronic power components, optoelectronic or photovoltaic components |
| 06/09/2011 | WO2011067085A1 Sealed electronic housing and method for the sealed assembly of such a housing |
| 06/09/2011 | WO2011067069A1 Omega shaped nanowire field effect transistors |
| 06/09/2011 | WO2011067050A1 Gate-all-around nanowire field effect transistors |
| 06/09/2011 | WO2011067049A1 Method and structure for forming finfets with multiple doping regions on a same chip |
| 06/09/2011 | WO2011066802A1 N type lateral double diffused metal oxide semiconductor device and manufacturing method thereof |
| 06/09/2011 | WO2011066800A1 Bipolar transistor and method for manufacturing the same |
| 06/09/2011 | WO2011066786A1 Ultra-shallow junction and method for forming the same |
| 06/09/2011 | WO2011066750A1 Method for preparing full silicide metal gate electrode |
| 06/09/2011 | WO2011066747A1 Semiconductor device and forming method thereof |
| 06/09/2011 | WO2011066746A1 Semiconductor device and manufacturing method thereof |
| 06/09/2011 | WO2011066742A1 3d integrated circuit structure, semiconductor device and method for forming the same |
| 06/09/2011 | WO2011066701A1 Clamping type substrate turning device |
| 06/09/2011 | WO2011066696A1 Gas feeding device and gas feeding method |
| 06/09/2011 | WO2011066668A1 Method of etching features into substrate |
| 06/09/2011 | WO2011047142A3 A technique for processing a substrate having a non-planar surface |
| 06/09/2011 | WO2011037840A3 Method of forming a deep trench in a substrate |
| 06/09/2011 | WO2011028617A3 Apparatus and methods for enhanced fluid delivery on bevel etch applications |
| 06/09/2011 | WO2011022301A3 Wafer level contactor |
| 06/09/2011 | WO2011016651A3 Photocurable resin composition for imprint lithography and method for manufacturing an imprint mold using same |
| 06/09/2011 | WO2011014864A3 Buffered storage and transport device for tool utilization |
| 06/09/2011 | WO2011008717A3 Integrated power supplies and combined high-side plus low-side switches |
| 06/09/2011 | US20110138341 Semiconductor Material Doping |
| 06/09/2011 | US20110138242 Method and apparatus for selectively compacting test responses |
| 06/09/2011 | US20110137454 Vacuum chamber |
| 06/09/2011 | US20110136414 Polishing head and polishing apparatus |
| 06/09/2011 | US20110136411 Method and apparatus for polishing a substrate having a grinded back surface |
| 06/09/2011 | US20110136348 Phonon-enhanced crystal growth and lattice healing |
| 06/09/2011 | US20110136347 Point-of-use silylamine generation |
| 06/09/2011 | US20110136346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes |
| 06/09/2011 | US20110136345 Process for the Manufacture of Etched Items |
| 06/09/2011 | US20110136344 Composition and method for polishing polysilicon |
| 06/09/2011 | US20110136343 Composition and method for low temperature deposition of silicon-containing films |
| 06/09/2011 | US20110136342 Semiconductor apparatus and method for manufacturing the same |
| 06/09/2011 | US20110136341 Field effect transistor having multiple pinch off voltages |
| 06/09/2011 | US20110136340 Method of fabricating semiconductor device |
| 06/09/2011 | US20110136339 Conductor structure including manganese oxide capping layer |
| 06/09/2011 | US20110136338 Method for fabricating semiconductor device |
| 06/09/2011 | US20110136337 Method for Manufacturing Semiconductor Device |
| 06/09/2011 | US20110136336 Methods of forming conductive vias |
| 06/09/2011 | US20110136335 Semiconductor Device with Improved Contacts |
| 06/09/2011 | US20110136334 Method of forming at least one bonding structure |
| 06/09/2011 | US20110136333 Semiconductor materials and methods of preparation and use thereof |
| 06/09/2011 | US20110136332 Methods of forming integrated circuit devices with crack-resistant fuse structures |