| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/21/2011 | US7964506 Two step copper electroplating process with anneal for uniform across wafer deposition and void free filling on ruthenium coated wafers |
| 06/21/2011 | US7964505 Atomic layer deposition of tungsten materials |
| 06/21/2011 | US7964504 PVD-based metallization methods for fabrication of interconnections in semiconductor devices |
| 06/21/2011 | US7964503 Methods of patterning photoresist, and methods of forming semiconductor constructions |
| 06/21/2011 | US7964502 Multilayered through via |
| 06/21/2011 | US7964501 Semiconductor device and method of fabricating the same |
| 06/21/2011 | US7964500 Method of manufacturing semiconductor integrated circuit device |
| 06/21/2011 | US7964499 Methods of forming semiconductor solar cells having front surface electrodes |
| 06/21/2011 | US7964498 Phase-change memory device capable of improving contact resistance and reset current and method of manufacturing the same |
| 06/21/2011 | US7964497 Structure to facilitate plating into high aspect ratio vias |
| 06/21/2011 | US7964496 Schemes for forming barrier layers for copper in interconnect structures |
| 06/21/2011 | US7964495 Method of manufacturing complementary metal oxide semiconductor image sensor |
| 06/21/2011 | US7964494 Integrated connection arrangements |
| 06/21/2011 | US7964493 Method of manufacturing semiconductor device |
| 06/21/2011 | US7964492 Semiconductor device and automotive AC generator |
| 06/21/2011 | US7964491 Method of forming metal wiring of nonvolatile memory device |
| 06/21/2011 | US7964490 Methods of forming nickel sulfide film on a semiconductor device |
| 06/21/2011 | US7964489 Semiconductor device |
| 06/21/2011 | US7964488 Semiconductor device and method for fabricating the same |
| 06/21/2011 | US7964487 Carrier mobility enhanced channel devices and method of manufacture |
| 06/21/2011 | US7964486 Field effect transistor and method for fabricating the same |
| 06/21/2011 | US7964485 Method of forming a region of graded doping concentration in a semiconductor device and related apparatus |
| 06/21/2011 | US7964484 Semiconductor integrated circuit device with reduced leakage current |
| 06/21/2011 | US7964483 Growth method for nitride semiconductor epitaxial layers |
| 06/21/2011 | US7964482 Deposition of group III-nitrides on Ge |
| 06/21/2011 | US7964481 Method for fabricating an inorganic nanocomposite |
| 06/21/2011 | US7964480 Single scan irradiation for crystallization of thin films |
| 06/21/2011 | US7964479 Low-temperature formation of layers of polycrystalline semiconductor material |
| 06/21/2011 | US7964478 Group III nitride compound semiconductor device |
| 06/21/2011 | US7964477 Method of manufacturing III nitride crystal, III nitride crystal substrate, and semiconductor device |
| 06/21/2011 | US7964476 Method and apparatus for the laser scribing of ultra lightweight semiconductor devices |
| 06/21/2011 | US7964475 Semiconductor wafer, method of manufacturing the same and semiconductor device |
| 06/21/2011 | US7964474 Use of field oxidation to simplify chamber fabrication in microfluidic devices |
| 06/21/2011 | US7964473 Method of filling an opening in the manufacturing of a semiconductor device |
| 06/21/2011 | US7964472 Method of producing semiconductor device |
| 06/21/2011 | US7964471 Methods of forming capacitors |
| 06/21/2011 | US7964470 Flexible processing method for metal-insulator-metal capacitor formation |
| 06/21/2011 | US7964469 Method of manufacturing semiconductor device having resistor formed of a polycrystalline silicon film |
| 06/21/2011 | US7964468 Multi-level memory cell having phase change element and asymmetrical thermal boundary |
| 06/21/2011 | US7964467 Method, structure and design structure for customizing history effects of soi circuits |
| 06/21/2011 | US7964466 FinFET transistor and circuit |
| 06/21/2011 | US7964465 Transistors having asymmetric strained source/drain portions |
| 06/21/2011 | US7964464 Semiconductor device and method of manufacturing the same |
| 06/21/2011 | US7964463 Method for fabricating semiconductor device including vertical channel transistor |
| 06/21/2011 | US7964462 Method of manufacturing semiconductor device |
| 06/21/2011 | US7964461 Method of forming isolation layer in semiconductor device |
| 06/21/2011 | US7964460 Method of manufacturing an NMOS device and a PMOS device |
| 06/21/2011 | US7964459 Non-volatile memory structure and method of fabrication |
| 06/21/2011 | US7964458 Method for forming a strained transistor by stress memorization based on a stressed implantation mask |
| 06/21/2011 | US7964456 Method of fabricating polysilicon thin film and thin film transistor using polysilicon fabricated by the same method |
| 06/21/2011 | US7964455 Manufacturing method of semiconductor device |
| 06/21/2011 | US7964454 Low noise and high performance LSI device, layout and manufacturing method |
| 06/21/2011 | US7964453 Method and system for spatially selective crystallization of amorphous silicon |
| 06/21/2011 | US7964452 Liquid crystal display device and method for manufacturing the same |
| 06/21/2011 | US7964451 Solid state imaging device and method for fabricating the same |
| 06/21/2011 | US7964450 Wirebondless wafer level package with plated bumps and interconnects |
| 06/21/2011 | US7964449 Method for manufacturing semiconductor chip and method for processing semiconductor wafer |
| 06/21/2011 | US7964448 Electronic device and method of manufacturing same |
| 06/21/2011 | US7964447 Process of making carbon nanotube array that includes impregnating the carbon nanotube array with metal |
| 06/21/2011 | US7964446 Semiconductor device and method of manufacturing the same |
| 06/21/2011 | US7964445 Recycling faulty multi-die packages |
| 06/21/2011 | US7964444 Method and apparatus for manufacturing electronic integrated circuit chip |
| 06/21/2011 | US7964438 Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
| 06/21/2011 | US7964437 Memory device having wide area phase change element and small electrode contact area |
| 06/21/2011 | US7964436 Co-sputter deposition of metal-doped chalcogenides |
| 06/21/2011 | US7964435 Method for dopant diffusion |
| 06/21/2011 | US7964433 Anti-reflective device having an anti-reflective surface formed of silicon spikes with nano-tips |
| 06/21/2011 | US7964431 Method to make electrical contact to a bonded face of a photovoltaic cell |
| 06/21/2011 | US7964430 Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications |
| 06/21/2011 | US7964429 Method for manufacturing photoelectric conversion device |
| 06/21/2011 | US7964428 Micromechanical component and method for fabricating a micromechanical component |
| 06/21/2011 | US7964427 Silicon-based RF system and method of manufacturing the same |
| 06/21/2011 | US7964426 Solid-state image pickup device and manufacturing method thereof |
| 06/21/2011 | US7964424 Method for manufacturing nitride semiconductor light-emitting element |
| 06/21/2011 | US7964423 Semiconductor device and method for manufacturing the same |
| 06/21/2011 | US7964422 Method and system for controlling a semiconductor fabrication process |
| 06/21/2011 | US7964421 Process for producing organiclight-emitting display device |
| 06/21/2011 | US7964420 LED chip package structure with an embedded ESD function and method for manufacturing the same |
| 06/21/2011 | US7964419 Semiconductor light emitting device, its manufacturing method, semiconductor device and its manufacturing method |
| 06/21/2011 | US7964418 Real time process monitoring and control for semiconductor junctions |
| 06/21/2011 | US7964417 Method of measuring degree of crystallinity of polycrystalline silicon substrate, method of fabricating organic light emitting display using the same, and organic light emitting display fabricated using the same |
| 06/21/2011 | US7964288 Semiconductor device and method for manufacturing the same |
| 06/21/2011 | US7964107 Substrate with trenches; depositing block polymer; annealing; evaporation of solvent |
| 06/21/2011 | US7964106 Method for fabricating a packaging substrate |
| 06/21/2011 | US7964058 Processing system and method for chemically treating a substrate |
| 06/21/2011 | US7964005 Copper CMP slurry composition |
| 06/21/2011 | US7963825 Abrasive, method of polishing target member and process for producing semiconductor device |
| 06/21/2011 | US7963736 Wafer processing apparatus with wafer alignment device |
| 06/21/2011 | US7963628 Method for the printing of homogeneous electronic material with a multi-ejector print head |
| 06/21/2011 | US7963308 Apparatus and method for fabricating bonded substrate |
| 06/21/2011 | US7963248 Plasma generator, substrate treating apparatus including the same and substrate treating method |
| 06/16/2011 | WO2011072307A2 Compositions comprising base-reactive component and processes for photolithography |
| 06/16/2011 | WO2011072278A2 Germanium ingots/wafers having low micro-pit density (mpd) as well as systems and methods for manufacturing same |
| 06/16/2011 | WO2011072268A1 Process to keep substrate surface wet during plating |
| 06/16/2011 | WO2011072260A2 Porous barrier for evenly distributed purge gas in a microenvironment |
| 06/16/2011 | WO2011072188A2 Removal of masking material |
| 06/16/2011 | WO2011072143A2 Novel gap fill integration |
| 06/16/2011 | WO2011072061A2 Enhanced passivation process to protect silicon prior to high dose implant strip |
| 06/16/2011 | WO2011072042A2 Low damage photoresist strip method for low-k dielectrics |
| 06/16/2011 | WO2011072034A1 Manufacturing nanowire photo-detector grown on a back-side illuminated image sensor |