Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2011
06/23/2011US20110151677 Wet oxidation process performed on a dielectric material formed from a flowable cvd process
06/23/2011US20110151676 Methods of thin film process
06/23/2011US20110151675 Device and process for liquid treatment of a wafer shaped article
06/23/2011US20110151674 Smooth siconi etch for silicon-containing films
06/23/2011US20110151673 Plasma etching method, plasma etching device, and method for producing photonic crystal
06/23/2011US20110151672 Method of Etching Oxide Layer and Nitride Layer
06/23/2011US20110151671 method of texturing semiconductor substrates
06/23/2011US20110151670 Method of controlling etch microloading for a tungsten-containing layer
06/23/2011US20110151669 Release Accumulative Charges by Tuning ESC Voltages in Via-Etchers
06/23/2011US20110151668 Pitch division patterning techniques
06/23/2011US20110151667 Methods of Manufacturing Three-Dimensional Semiconductor Devices and Related Devices
06/23/2011US20110151666 Method for fabricating semiconductor device
06/23/2011US20110151665 Method for non-contact materials deposition
06/23/2011US20110151664 Method of manufacturing multi-level metal thin film and apparatus for manufacturing the same
06/23/2011US20110151663 Method to form a via
06/23/2011US20110151662 Manufacture method for semiconductor device having improved copper diffusion preventive function of plugs and wirings made of copper or copper alloy and semiconductor device of this kind
06/23/2011US20110151661 Method of manufacturing semiconductor device
06/23/2011US20110151660 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
06/23/2011US20110151659 Multilayered through a via
06/23/2011US20110151658 Methods of Forming a Semiconductor Device Having a Contact Structure
06/23/2011US20110151657 Method for fabricating electrical bonding pads on a wafer
06/23/2011US20110151656 Semiconductor device and method of fabricating the same
06/23/2011US20110151655 Metal gate fill and method of making
06/23/2011US20110151654 Semiconductor device manufacturing method
06/23/2011US20110151653 Spin-on formulation and method for stripping an ion implanted photoresist
06/23/2011US20110151652 Method for fabricating semiconductor device and plasma doping system
06/23/2011US20110151651 Method for forming integrated circuits with aligned (100) nmos and (110) pmos finfet sidewall channels
06/23/2011US20110151650 Semiconductor layer structure and method for fabricating a semiconductor layer structure
06/23/2011US20110151649 Method for fabricating a semiconductor device
06/23/2011US20110151648 Apparatus and method for transformation of substrate
06/23/2011US20110151647 Semiconductor substrate, semiconductor device, and manufacturing methods thereof
06/23/2011US20110151646 Microwave annealing method for device processing with plastic substrate
06/23/2011US20110151645 Manufacturing method of semiconductor device
06/23/2011US20110151644 Process for fabricating a heterostructure with minimized stress
06/23/2011US20110151643 Method for manufacturing bonded wafer
06/23/2011US20110151642 Semiconductor device including high voltage and low voltage mos devices
06/23/2011US20110151641 Method of forming a semiconductor device
06/23/2011US20110151640 Compound for filling small gaps in a semiconductor device, composition including the compound, and method of fabricating a semiconductor capacitor
06/23/2011US20110151639 Semiconductor device, method of fabricating the same, semiconductor module, electronic circuit board, and electronic system including the device
06/23/2011US20110151638 Method of fabricating semiconductor device
06/23/2011US20110151637 Method for Improving the Thermal Stability of Silicide
06/23/2011US20110151636 Method For Angular Doping Of Source And Drain Regions For Odd And Even NAND Blocks
06/23/2011US20110151635 High temperature gate replacement process
06/23/2011US20110151634 Lateral drain-extended mosfet having channel along sidewall of drain extension dielectric
06/23/2011US20110151633 Methods of forming a conductive layer structure and methods of manufacturing a recessed channel transistor including the same
06/23/2011US20110151632 Method for forming semiconductor device
06/23/2011US20110151631 Thin film transistor substrate and method of manufacturing thereof
06/23/2011US20110151629 Recessed Channel Negative Differential Resistance-Based Memory Cell
06/23/2011US20110151628 Configuration of gate to drain (GD) clamp and ESD protection circuit for power device breakdown protection
06/23/2011US20110151627 Overcoming laminate warpage and misalignment in flip-chip packages
06/23/2011US20110151626 Method of making a semiconductor chip assembly with a post/base/post heat spreader and asymmetric posts
06/23/2011US20110151625 Heat-resistant adhesive sheet for substrateless semiconductor package fabrication and method for fabricating substrateless semiconductor package using the adhesive sheet
06/23/2011US20110151624 Coating for a microelectronic device, treatment comprising same, and method of managing a thermal profile of a microelectronic die
06/23/2011US20110151623 Exposed mold
06/23/2011US20110151622 Method of manufacturing semiconductor device
06/23/2011US20110151621 Microfeature workpieces having interconnects and conductive backplanes, and associated systems and methods
06/23/2011US20110151620 Method for manufacturing chips
06/23/2011US20110151619 Method of forming metal oxide film and apparatus for forming metal oxide film
06/23/2011US20110151618 Semiconductor device and manufacturing method thereof
06/23/2011US20110151617 Memory and methods of forming the same to enhance scalability of non-volatile two-terminal memory cells
06/23/2011US20110151616 Mbe growth technique for group ii-vi inverted multijunction solar cells
06/23/2011US20110151612 Method For Manufacturing An Oled Or A blank For Forming An Oled As Well As Such A Blank Or Oled
06/23/2011US20110151609 Method for Forming Thin Film Heat Dissipater
06/23/2011US20110151608 Capacitive micromachined ultrasonic transducer and manufacturing method
06/23/2011US20110151601 Crystallization method, method of manufacturing thin film transistor, and method of manufacturing display device
06/23/2011US20110151598 Method for manufacturing a substrate for liquid-ejecting heads and a liquid-ejecting head
06/23/2011US20110151597 Analysis method for semiconductor device
06/23/2011US20110151596 Cascaded-Based De-embedding Methodology
06/23/2011US20110151595 Fabrication method for semiconductor device
06/23/2011US20110151594 Method and system for controlled isotropic etching on a plurality of etch systems
06/23/2011US20110151593 Manufacturing method of semiconductor substrate
06/23/2011US20110151592 Methods for monitoring the amount of contamination imparted into semiconductor wafers during wafer processing
06/23/2011US20110151590 Apparatus and method for low-k dielectric repair
06/23/2011US20110151588 Method and magnetic transfer stamp for transferring semiconductor dice using magnetic transfer printing techniques
06/23/2011US20110151358 Reflective exposure mask, method of fabricating reflective exposure mask, method of inspecting reflective exposure mask, and method of cleaning reflective exposure mask
06/23/2011US20110151357 Exposure dose monitoring method and method of manufacturing exposure dose monitoring mask
06/23/2011US20110151227 High-k dielectric films and methods of producing using titanium-based b-diketonate precursors
06/23/2011US20110151194 Synthetic quartz glass body, process for producing the same, optical element, and optical apparatus
06/23/2011US20110151119 Methods and Systems of Transferring, Docking and Processing Substrates
06/23/2011US20110150608 Apparatus for transferring a substrate
06/23/2011US20110150607 Method of adjusting velocity of transfer member, method of transferring substrate using the method, and substrate-processing apparatus
06/23/2011US20110150500 Vertical cavity surface emitting laser, vertical cavity surface emitting laser device, optical transmission device, and information processing apparatus
06/23/2011US20110150036 Flexible thermoelectric generator, wireless sensor node including the same and method of manufacturing the same
06/23/2011US20110150023 Nitride semiconductor laser device
06/23/2011US20110150017 Relaxed InGaN/AlGaN Templates
06/23/2011US20110149656 Multi-cell vertical memory nodes
06/23/2011US20110149647 Perpendicular magnetic tunnel junctions, magnetic devices including the same and method of manufacturing a perpendicular magnetic tunnel junction
06/23/2011US20110149630 High read speed electronic memory with serial array transistors
06/23/2011US20110149565 Lighting module with diffractive optical element
06/23/2011US20110149462 Electrostatic chuck, production method of electrostatic chuck and electrostatic chuck device
06/23/2011US20110149189 Semiconductor Device
06/23/2011US20110148543 Integrated Circuit With Inductive Bond Wires
06/23/2011US20110148529 Radio frequency amplifier with effective decoupling
06/23/2011US20110148466 Logic-cell-compatible decoupling capacitor
06/23/2011US20110148284 Light-emitting diode element and method for fabricating the same
06/23/2011US20110148128 Semiconductor Wafer Transport System
06/23/2011US20110147952 Dicing die-bonding film
06/23/2011US20110147949 Hybrid integrated circuit device
06/23/2011US20110147947 Semiconductor device and method for fabricating the same
06/23/2011US20110147946 Wafer-level stack package and method of fabricating the same