Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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06/23/2011 | US20110151677 Wet oxidation process performed on a dielectric material formed from a flowable cvd process |
06/23/2011 | US20110151676 Methods of thin film process |
06/23/2011 | US20110151675 Device and process for liquid treatment of a wafer shaped article |
06/23/2011 | US20110151674 Smooth siconi etch for silicon-containing films |
06/23/2011 | US20110151673 Plasma etching method, plasma etching device, and method for producing photonic crystal |
06/23/2011 | US20110151672 Method of Etching Oxide Layer and Nitride Layer |
06/23/2011 | US20110151671 method of texturing semiconductor substrates |
06/23/2011 | US20110151670 Method of controlling etch microloading for a tungsten-containing layer |
06/23/2011 | US20110151669 Release Accumulative Charges by Tuning ESC Voltages in Via-Etchers |
06/23/2011 | US20110151668 Pitch division patterning techniques |
06/23/2011 | US20110151667 Methods of Manufacturing Three-Dimensional Semiconductor Devices and Related Devices |
06/23/2011 | US20110151666 Method for fabricating semiconductor device |
06/23/2011 | US20110151665 Method for non-contact materials deposition |
06/23/2011 | US20110151664 Method of manufacturing multi-level metal thin film and apparatus for manufacturing the same |
06/23/2011 | US20110151663 Method to form a via |
06/23/2011 | US20110151662 Manufacture method for semiconductor device having improved copper diffusion preventive function of plugs and wirings made of copper or copper alloy and semiconductor device of this kind |
06/23/2011 | US20110151661 Method of manufacturing semiconductor device |
06/23/2011 | US20110151660 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus |
06/23/2011 | US20110151659 Multilayered through a via |
06/23/2011 | US20110151658 Methods of Forming a Semiconductor Device Having a Contact Structure |
06/23/2011 | US20110151657 Method for fabricating electrical bonding pads on a wafer |
06/23/2011 | US20110151656 Semiconductor device and method of fabricating the same |
06/23/2011 | US20110151655 Metal gate fill and method of making |
06/23/2011 | US20110151654 Semiconductor device manufacturing method |
06/23/2011 | US20110151653 Spin-on formulation and method for stripping an ion implanted photoresist |
06/23/2011 | US20110151652 Method for fabricating semiconductor device and plasma doping system |
06/23/2011 | US20110151651 Method for forming integrated circuits with aligned (100) nmos and (110) pmos finfet sidewall channels |
06/23/2011 | US20110151650 Semiconductor layer structure and method for fabricating a semiconductor layer structure |
06/23/2011 | US20110151649 Method for fabricating a semiconductor device |
06/23/2011 | US20110151648 Apparatus and method for transformation of substrate |
06/23/2011 | US20110151647 Semiconductor substrate, semiconductor device, and manufacturing methods thereof |
06/23/2011 | US20110151646 Microwave annealing method for device processing with plastic substrate |
06/23/2011 | US20110151645 Manufacturing method of semiconductor device |
06/23/2011 | US20110151644 Process for fabricating a heterostructure with minimized stress |
06/23/2011 | US20110151643 Method for manufacturing bonded wafer |
06/23/2011 | US20110151642 Semiconductor device including high voltage and low voltage mos devices |
06/23/2011 | US20110151641 Method of forming a semiconductor device |
06/23/2011 | US20110151640 Compound for filling small gaps in a semiconductor device, composition including the compound, and method of fabricating a semiconductor capacitor |
06/23/2011 | US20110151639 Semiconductor device, method of fabricating the same, semiconductor module, electronic circuit board, and electronic system including the device |
06/23/2011 | US20110151638 Method of fabricating semiconductor device |
06/23/2011 | US20110151637 Method for Improving the Thermal Stability of Silicide |
06/23/2011 | US20110151636 Method For Angular Doping Of Source And Drain Regions For Odd And Even NAND Blocks |
06/23/2011 | US20110151635 High temperature gate replacement process |
06/23/2011 | US20110151634 Lateral drain-extended mosfet having channel along sidewall of drain extension dielectric |
06/23/2011 | US20110151633 Methods of forming a conductive layer structure and methods of manufacturing a recessed channel transistor including the same |
06/23/2011 | US20110151632 Method for forming semiconductor device |
06/23/2011 | US20110151631 Thin film transistor substrate and method of manufacturing thereof |
06/23/2011 | US20110151629 Recessed Channel Negative Differential Resistance-Based Memory Cell |
06/23/2011 | US20110151628 Configuration of gate to drain (GD) clamp and ESD protection circuit for power device breakdown protection |
06/23/2011 | US20110151627 Overcoming laminate warpage and misalignment in flip-chip packages |
06/23/2011 | US20110151626 Method of making a semiconductor chip assembly with a post/base/post heat spreader and asymmetric posts |
06/23/2011 | US20110151625 Heat-resistant adhesive sheet for substrateless semiconductor package fabrication and method for fabricating substrateless semiconductor package using the adhesive sheet |
06/23/2011 | US20110151624 Coating for a microelectronic device, treatment comprising same, and method of managing a thermal profile of a microelectronic die |
06/23/2011 | US20110151623 Exposed mold |
06/23/2011 | US20110151622 Method of manufacturing semiconductor device |
06/23/2011 | US20110151621 Microfeature workpieces having interconnects and conductive backplanes, and associated systems and methods |
06/23/2011 | US20110151620 Method for manufacturing chips |
06/23/2011 | US20110151619 Method of forming metal oxide film and apparatus for forming metal oxide film |
06/23/2011 | US20110151618 Semiconductor device and manufacturing method thereof |
06/23/2011 | US20110151617 Memory and methods of forming the same to enhance scalability of non-volatile two-terminal memory cells |
06/23/2011 | US20110151616 Mbe growth technique for group ii-vi inverted multijunction solar cells |
06/23/2011 | US20110151612 Method For Manufacturing An Oled Or A blank For Forming An Oled As Well As Such A Blank Or Oled |
06/23/2011 | US20110151609 Method for Forming Thin Film Heat Dissipater |
06/23/2011 | US20110151608 Capacitive micromachined ultrasonic transducer and manufacturing method |
06/23/2011 | US20110151601 Crystallization method, method of manufacturing thin film transistor, and method of manufacturing display device |
06/23/2011 | US20110151598 Method for manufacturing a substrate for liquid-ejecting heads and a liquid-ejecting head |
06/23/2011 | US20110151597 Analysis method for semiconductor device |
06/23/2011 | US20110151596 Cascaded-Based De-embedding Methodology |
06/23/2011 | US20110151595 Fabrication method for semiconductor device |
06/23/2011 | US20110151594 Method and system for controlled isotropic etching on a plurality of etch systems |
06/23/2011 | US20110151593 Manufacturing method of semiconductor substrate |
06/23/2011 | US20110151592 Methods for monitoring the amount of contamination imparted into semiconductor wafers during wafer processing |
06/23/2011 | US20110151590 Apparatus and method for low-k dielectric repair |
06/23/2011 | US20110151588 Method and magnetic transfer stamp for transferring semiconductor dice using magnetic transfer printing techniques |
06/23/2011 | US20110151358 Reflective exposure mask, method of fabricating reflective exposure mask, method of inspecting reflective exposure mask, and method of cleaning reflective exposure mask |
06/23/2011 | US20110151357 Exposure dose monitoring method and method of manufacturing exposure dose monitoring mask |
06/23/2011 | US20110151227 High-k dielectric films and methods of producing using titanium-based b-diketonate precursors |
06/23/2011 | US20110151194 Synthetic quartz glass body, process for producing the same, optical element, and optical apparatus |
06/23/2011 | US20110151119 Methods and Systems of Transferring, Docking and Processing Substrates |
06/23/2011 | US20110150608 Apparatus for transferring a substrate |
06/23/2011 | US20110150607 Method of adjusting velocity of transfer member, method of transferring substrate using the method, and substrate-processing apparatus |
06/23/2011 | US20110150500 Vertical cavity surface emitting laser, vertical cavity surface emitting laser device, optical transmission device, and information processing apparatus |
06/23/2011 | US20110150036 Flexible thermoelectric generator, wireless sensor node including the same and method of manufacturing the same |
06/23/2011 | US20110150023 Nitride semiconductor laser device |
06/23/2011 | US20110150017 Relaxed InGaN/AlGaN Templates |
06/23/2011 | US20110149656 Multi-cell vertical memory nodes |
06/23/2011 | US20110149647 Perpendicular magnetic tunnel junctions, magnetic devices including the same and method of manufacturing a perpendicular magnetic tunnel junction |
06/23/2011 | US20110149630 High read speed electronic memory with serial array transistors |
06/23/2011 | US20110149565 Lighting module with diffractive optical element |
06/23/2011 | US20110149462 Electrostatic chuck, production method of electrostatic chuck and electrostatic chuck device |
06/23/2011 | US20110149189 Semiconductor Device |
06/23/2011 | US20110148543 Integrated Circuit With Inductive Bond Wires |
06/23/2011 | US20110148529 Radio frequency amplifier with effective decoupling |
06/23/2011 | US20110148466 Logic-cell-compatible decoupling capacitor |
06/23/2011 | US20110148284 Light-emitting diode element and method for fabricating the same |
06/23/2011 | US20110148128 Semiconductor Wafer Transport System |
06/23/2011 | US20110147952 Dicing die-bonding film |
06/23/2011 | US20110147949 Hybrid integrated circuit device |
06/23/2011 | US20110147947 Semiconductor device and method for fabricating the same |
06/23/2011 | US20110147946 Wafer-level stack package and method of fabricating the same |