| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/30/2011 | WO2011077644A1 Pattern measuring apparatus and computer program |
| 06/30/2011 | WO2011077641A1 Epitaxial growing apparatus and method for manufacturing epitaxial growing apparatus |
| 06/30/2011 | WO2011077631A1 Dual-surface polishing device |
| 06/30/2011 | WO2011077629A1 Photosensor element, photosensor circuit, thin film transistor substrate, display panel, and method for manufacturing photosensor element |
| 06/30/2011 | WO2011077608A1 Semiconductor device, high-frequency integrated circuit, high-frequency wireless communication system, and process for production of semiconductor device |
| 06/30/2011 | WO2011077607A1 Active matrix substrate, display panel provided with same, and method for manufacturing active matrix substrate |
| 06/30/2011 | WO2011077606A1 Semiconductor device and process for manufacture thereof |
| 06/30/2011 | WO2011077605A1 Semiconductor device and process for production thereof |
| 06/30/2011 | WO2011077584A1 Imprinting device and method for manufacturing article |
| 06/30/2011 | WO2011077541A1 Template for epitaxial growth and process for producing same |
| 06/30/2011 | WO2011077536A1 Semiconductor device and process for production thereof |
| 06/30/2011 | WO2011077507A1 Compound semiconductor device and method for manufacturing same |
| 06/30/2011 | WO2011077416A2 Pre-thermal greased led array |
| 06/30/2011 | WO2011077344A2 Method for monitoring the amount of contamination imparted into semiconductor wafers during wafer processing |
| 06/30/2011 | WO2011077339A1 Methods for analysis of water and substrates rinsed in water |
| 06/30/2011 | WO2011077338A1 Semiconductor wafer transport system |
| 06/30/2011 | WO2011077181A1 Semiconductor device with multilayer contact and method of manufacturing the same |
| 06/30/2011 | WO2011077122A1 Charged particle beam system |
| 06/30/2011 | WO2011076920A1 Method and device for treating silicon substrates |
| 06/30/2011 | WO2011076917A1 Device and method for identifying a wafer |
| 06/30/2011 | WO2011076507A1 Wafer handler comprising a vision system |
| 06/30/2011 | WO2011076430A2 Method and apparatus for forming a dielectric layer on a substrate |
| 06/30/2011 | WO2011076429A1 Semiconductor wafer inspection system and method |
| 06/30/2011 | WO2011076072A1 Soi cmos device with vertical gate structure |
| 06/30/2011 | WO2011076002A1 Floating body dram unit structure, its manufacturing techniques and its operation method |
| 06/30/2011 | WO2011075997A1 A manufaturing method of body silicon enclosed gate mosfet |
| 06/30/2011 | WO2011075991A1 High performance semiconductor device and manufacturing method thereof |
| 06/30/2011 | WO2011075989A1 Semiconductor structure with channel stress layer and manufacturing method thereof |
| 06/30/2011 | WO2011075987A1 Semiconductor device |
| 06/30/2011 | WO2011075955A1 Microelectronic device structure and manufacturing method thereof |
| 06/30/2011 | WO2011053926A3 Bipolar transistor |
| 06/30/2011 | WO2011043933A3 Post-planarization densification |
| 06/30/2011 | WO2011038036A3 Non-contact interface system |
| 06/30/2011 | WO2011031590A3 Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential |
| 06/30/2011 | WO2011031396A3 Near-infrared absorbing film compositions |
| 06/30/2011 | WO2011022221A3 Near-infrared absorbing film compositions |
| 06/30/2011 | WO2011021812A3 Trench line for the disconnection of a solar cell |
| 06/30/2011 | WO2011017339A3 Methods of selectively depositing an epitaxial layer |
| 06/30/2011 | US20110160900 Substrate processing apparatus, method of displaying error of substrate processing apparatus and transfer control method |
| 06/30/2011 | US20110159783 Method and apparatus for polishing a substrate |
| 06/30/2011 | US20110159782 Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus |
| 06/30/2011 | US20110159771 Semiconductor device and manufacturing method thereof |
| 06/30/2011 | US20110159703 Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio |
| 06/30/2011 | US20110159702 Film deposition apparatus and film deposition method |
| 06/30/2011 | US20110159701 Chemical liquid supply nozzle and chemical liquid supply method |
| 06/30/2011 | US20110159700 Film formation system and film formation method |
| 06/30/2011 | US20110159699 Line-edge roughness improvement for small pitches |
| 06/30/2011 | US20110159698 Photoresist Processing Methods |
| 06/30/2011 | US20110159697 Etching method and etching apparatus |
| 06/30/2011 | US20110159696 Method of manufacturing semiconductor devices |
| 06/30/2011 | US20110159695 Method for manufacturing mask |
| 06/30/2011 | US20110159694 Method for fabricating semiconductor device |
| 06/30/2011 | US20110159693 Method for fabricating hole pattern |
| 06/30/2011 | US20110159692 Method for fabricating semiconductor device |
| 06/30/2011 | US20110159691 Method for fabricating fine patterns of semiconductor device utilizing self-aligned double patterning |
| 06/30/2011 | US20110159690 Depositing tungsten into high aspect ratio features |
| 06/30/2011 | US20110159689 Printing plate and method for fabricating the same |
| 06/30/2011 | US20110159688 Selective Metal Deposition Over Dielectric Layers |
| 06/30/2011 | US20110159687 Method for fabricating semiconductor device |
| 06/30/2011 | US20110159686 Method for forming fine pattern having variable width and method for manufacturing semiconductor device using the same |
| 06/30/2011 | US20110159685 Methods Of Forming Electrically Insulative Materials, Methods Of Forming Low k Dielectric Regions, And Methods Of Forming Semiconductor Constructions |
| 06/30/2011 | US20110159684 Sram cell with t-shaped contact |
| 06/30/2011 | US20110159683 Method of forming a high density structure |
| 06/30/2011 | US20110159682 Methods of manufacturing memory devices |
| 06/30/2011 | US20110159681 Nonvolatile Memory Device and Method of Manufacturing the Same |
| 06/30/2011 | US20110159680 Method of forming a dielectric layer and method of manufacturing a semiconductor device using the same |
| 06/30/2011 | US20110159679 Method for manufacturing semiconductor device |
| 06/30/2011 | US20110159678 Method to form a semiconductor device having gate dielectric layers of varying thicknesses |
| 06/30/2011 | US20110159677 Method of fabricating landing plug contact in semiconductor memory device |
| 06/30/2011 | US20110159676 Fabricating low contact resistance conductive layer in semiconductor device |
| 06/30/2011 | US20110159675 PROCESS FOR FORMING SCHOTTKY RECTIFIER WITH PtNi SILICIDE SCHOTTKY BARRIER |
| 06/30/2011 | US20110159674 Method of Manufacturing Nonvolatile Memory Devices |
| 06/30/2011 | US20110159673 Novel method for conformal plasma immersed ion implantation assisted by atomic layer deposition |
| 06/30/2011 | US20110159672 Novel Manufacturing Approach for Collector and N Type Buried Layer Of Bipolar Transistor |
| 06/30/2011 | US20110159671 Isotopically-enriched boron-containing compounds, and methods of making and using same |
| 06/30/2011 | US20110159670 Method and Apparatus of Patterning a Semiconductor Device |
| 06/30/2011 | US20110159669 Method for depositing amorphous silicon thin film by chemical vapor deposition |
| 06/30/2011 | US20110159668 Methods For Processing Silicon On Insulator Wafers |
| 06/30/2011 | US20110159667 Semiconductor device manufacturing method |
| 06/30/2011 | US20110159666 Deposition systems and methods |
| 06/30/2011 | US20110159665 Method for the preparation of a multi-layered crystalline structure |
| 06/30/2011 | US20110159664 Method for fabricating semiconductor device with buried gates |
| 06/30/2011 | US20110159663 Method for fabricating semiconductor device using spacer patterning technique |
| 06/30/2011 | US20110159662 Method for fabricating crown-shaped capacitor |
| 06/30/2011 | US20110159661 Nonvolatile Memory Element and Production Method Thereof and Storage Memory Arrangement |
| 06/30/2011 | US20110159660 Methods of Forming Integrated Circuit Capacitors Having Sidewall Supports and Capacitors Formed Thereby |
| 06/30/2011 | US20110159659 Novel Manufacturing Approach for Collector and N Type Buried Layer Of Bipolar Transistor |
| 06/30/2011 | US20110159658 Method for fabricating metal-oxide semiconductor transistors |
| 06/30/2011 | US20110159657 Enhanced integrity of a high-k metal gate electrode structure by using a sacrificial spacer for cap removal |
| 06/30/2011 | US20110159656 Method for manufacturing a mosfet with a surrounding gate of bulk si |
| 06/30/2011 | US20110159655 Stress enhanced transistor devices and methods of making |
| 06/30/2011 | US20110159654 Enhanced confinement of high-k metal gate electrode structures by reducing material erosion of a dielectric cap layer upon forming a strain-inducing semiconductor alloy |
| 06/30/2011 | US20110159653 Semiconductor integrated circuit device and process for manufacturing the same |
| 06/30/2011 | US20110159652 Fabricating method of vertical transistor |
| 06/30/2011 | US20110159651 Method of manufacturing semiconductor device |
| 06/30/2011 | US20110159650 DMOS Type Semiconductor Device and Method for Manufacturing the same |
| 06/30/2011 | US20110159649 Non-volatile storage with substrate cut-out and process of fabricating |
| 06/30/2011 | US20110159648 Methods of fomring array of nanoscopic mosfet transistors |
| 06/30/2011 | US20110159647 Mask Pattern, Method of Fabricating Thin Film Transistor, and Method of Fabricating Organic Light Emitting Display Device Using the Same |
| 06/30/2011 | US20110159646 Thin film transistors and methods of manufacturing the same |