Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2011
06/29/2011CN102113109A Susceptor ring
06/29/2011CN102113108A Substrate-conveying device
06/29/2011CN102113107A Transfer robot control method
06/29/2011CN102113106A Apparatus for detecting micro-cracks in wafers and method therefor
06/29/2011CN102113105A An integrated circuit comprising light absorbing adhesive
06/29/2011CN102113104A Lithographic process using nanowire mask, and nanoscale devices fabricated using process
06/29/2011CN102113103A System and method for manufacturing thin film electrical devices
06/29/2011CN102113102A Relaxation of strained layers
06/29/2011CN102113101A Polishing systems and methods for removing conductive material from microelectronic substrates
06/29/2011CN102113100A Method for manufacturing semiconductor device
06/29/2011CN102113099A Novel silicon precursors to make ultra low-K films with high mechanical properties by plasma enhanced chemical vapor deposition
06/29/2011CN102113098A Silicon etchant and etching method
06/29/2011CN102113097A Chamber plasma-cleaning process method
06/29/2011CN102113096A Polishing solution for cmp, and method for polishing substrate using the polishing solution for cmp
06/29/2011CN102113095A Method and apparatus for producing a dislocation-free crystalline sheet
06/29/2011CN102113094A Ion source cleaning method and apparatus
06/29/2011CN102113093A Techniques for changing temperature of a platen
06/29/2011CN102113092A Roll-to-roll continuous thin film PV manufacturing process and equipment with real time online IV measurement
06/29/2011CN102113091A Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target
06/29/2011CN102113090A Relaxation and transfer of strained layers
06/29/2011CN102113089A Stretchable and foldable electronic devices
06/29/2011CN102113088A Alignment device controller and alignment method
06/29/2011CN102113087A A system and process for dicing integrated circuits
06/29/2011CN102112925A Illumination optical unit for microlithography
06/29/2011CN102112922A Positive photosensitive composition and permanent resist
06/29/2011CN102112885A Electric contact member and contact probe
06/29/2011CN102112655A Atomic layer deposition apparatus and loading methods
06/29/2011CN102112653A Raw material recovery method and trapping mechanism for recovering raw material
06/29/2011CN102112651A Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film, method for manufacturing semiconductor device, and storage medium in which control program is stored
06/29/2011CN102112649A Placing table structure
06/29/2011CN102112646A Vacuum treatment apparatus and vacuum treatment method
06/29/2011CN102112568A Adhesive composition, film-like adhesive, adhesive sheet and semiconductor device
06/29/2011CN102112410A Substrate holding device, substrate holding method, and method of manufacturing laminated glass
06/29/2011CN102112274A Method of teaching conveying robot
06/29/2011CN102112206A Metal recovery method, metal recovery apparatus, exhaust system, and film forming device using same
06/29/2011CN102110759A Structure and method for packaging light-emitting diode (LED)
06/29/2011CN102110757A White light LED and packaging method thereof
06/29/2011CN102110720A Gallium arsenide Schottky varactor diode with Gaussian distribution profile of dopants and manufacturing method thereof
06/29/2011CN102110719A Thin film transistor, display device including the same, and method of manufacturing the display device
06/29/2011CN102110718A Oxide semiconductor film for thin film transistor and preparation method thereof
06/29/2011CN102110717A Trench metal oxide semiconductor field effect transistor and manufacturing method thereof
06/29/2011CN102110715A Transistor, display device, electronic device and fabrication method of transistor
06/29/2011CN102110714A Semiconductor element and method for forming the same
06/29/2011CN102110712A Lateral power metal oxide semiconductor field effect transistor structure and manufacturing method
06/29/2011CN102110711A MOS (metal-oxide semiconductor) transistor with reduced parasitic capacitance and manufacturing method thereof
06/29/2011CN102110710A Semiconductor structure with channel stress layer and forming method thereof
06/29/2011CN102110709A Parasitic vertical PNP triode in bipolar complementary metal oxide semiconductor (BiCMOS) process and manufacturing method thereof
06/29/2011CN102110708A High-voltage isolation trench and manufacturing method thereof and metal oxide semiconductor (MOS) device
06/29/2011CN102110707A 发光装置及其制造方法 A light emitting device and manufacturing method
06/29/2011CN102110706A Organic light emitting display and manufacturing method thereof
06/29/2011CN102110693A Thin film transistor array panel
06/29/2011CN102110691A Power field effect transistor and layout method thereof
06/29/2011CN102110689A Semiconductor device and manufacturing method thereof
06/29/2011CN102110688A Serial number generator and forming method thereof, and integrated circuit and forming method thereof
06/29/2011CN102110679A Power semiconductor module with a substrate having a three dimensional surface contour and method for producing same
06/29/2011CN102110678A Semiconductor package and manufacturing method thereof
06/29/2011CN102110677A Method for assembling wiring element with electronic chip
06/29/2011CN102110673A Wafer level MMCM (microwave multichip module) packaging structure using photosensitive BCB (benzocyclobutene) as dielectric layer and method
06/29/2011CN102110672A Chip-stacked package structure and method for manufacturing the same
06/29/2011CN102110669A Composite dielectric layer and manufacturing method thereof
06/29/2011CN102110667A Device for wafer level electrical interconnection and extraction and processing method thereof
06/29/2011CN102110660A Semiconductor flip chip package and forming method thereof
06/29/2011CN102110659A Semiconductor apparatus and probe test method thereof
06/29/2011CN102110658A Method for fabricating dibit flash memory
06/29/2011CN102110657A Method for producing double-bit flash memory
06/29/2011CN102110656A Method for forming self-aligned source region
06/29/2011CN102110655A Method for manufacturing EEPROM (electrically erasable programmable read-only memory) device
06/29/2011CN102110654A Method for forming film structure on back of wafer
06/29/2011CN102110653A Method for forming bimetal grid
06/29/2011CN102110652A Method for manufacturing embedded type semiconductor devices
06/29/2011CN102110651A Semiconductor device and manufacturing method thereof
06/29/2011CN102110650A Semiconductor device and manufacturing method thereof
06/29/2011CN102110649A Method for correcting failures of quiescent current in aluminum gate CMOS
06/29/2011CN102110648A Method for preparing bulk silicon gate-all-around metal oxide semiconductor field effect transistors
06/29/2011CN102110647A Optimized etching method of stress memorization technology
06/29/2011CN102110646A NMOS (n-type metal-oxide semiconductor) device and manufacturing method thereof
06/29/2011CN102110645A Cleaning method used after chemical mechanical polishing
06/29/2011CN102110644A Method for manufacturing silicide alignment block (SAB) film of p-type metal-oxide semiconductor (PMOS) device
06/29/2011CN102110643A Electronic hybrid device
06/29/2011CN102110642A Via hole etching method for improving metal coverage rate of steps
06/29/2011CN102110641A Method for overcoming tungsten plug sagging shortcoming during chemical-mechanical polishing process
06/29/2011CN102110640A Method for treating metal fuse of single aluminium
06/29/2011CN102110639A Method for preparing diffusion impervious layer
06/29/2011CN102110638A Method and structure for overcoming discharge shortcoming of semiconductor device during manufacturing process
06/29/2011CN102110637A Method for fabricating semiconductor device
06/29/2011CN102110636A Methods for improving reverse narrow channel effect and manufacturing metal oxide semiconductor (MOS) transistor
06/29/2011CN102110635A Method for reducing plasma induced damage in HDP CVD (high-density plasma chemical vapor deposition) process
06/29/2011CN102110634A Rotary heating adsorption device
06/29/2011CN102110633A Linear vacuum robot with z motion and articulated arm
06/29/2011CN102110632A Substrate mounting table of substrate processing apparatus
06/29/2011CN102110631A Precision workpiece table and pipeline facility drive device thereof
06/29/2011CN102110630A Lifting device and semiconductor device processing equipment with lifting device
06/29/2011CN102110629A Electrostatic clamping device, method for reducing residual charge and plasma processing equipment
06/29/2011CN102110628A Offset correction methods and arrangement for positioning and inspecting substrates
06/29/2011CN102110627A Three-rod quartz boat for vertical oxidation furnace tube
06/29/2011CN102110626A Method for determining minimum measurable length of serpentine metal wires in wafer
06/29/2011CN102110625A Method for detecting pinhole type growth defect
06/29/2011CN102110624A Method for detecting nickel and platinum removing device
06/29/2011CN102110623A Method for realizing connection between chip and substrate with anisotropic conductive film by utilizing ultrasonic vibration
06/29/2011CN102110622A Quota calculation method for packaging metal wire