| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/05/2011 | US7972890 Methods of manufacturing image sensors |
| 07/05/2011 | US7972888 Methods for manufacturing MEMS sensor and thin film and cantilever beam thereof with epitaxial growth process |
| 07/05/2011 | US7972887 Micro-electro-mechanical-system package and method for manufacturing the same |
| 07/05/2011 | US7972886 Method of manufacturing micro electro mechanical systems device |
| 07/05/2011 | US7972885 Broadband imaging device and manufacturing thereof |
| 07/05/2011 | US7972884 Micromechanical device and method of manufacturing micromechanical device |
| 07/05/2011 | US7972883 Method of manufacturing photoelectric device |
| 07/05/2011 | US7972882 Microresonator systems and methods of fabricating the same |
| 07/05/2011 | US7972881 Method for cooling light-emitting diode |
| 07/05/2011 | US7972880 Method for fabricating a liquid crystal display device and an LCD device thereby |
| 07/05/2011 | US7972879 Multi-level integrated photonic devices |
| 07/05/2011 | US7972878 Quantum dot memory |
| 07/05/2011 | US7972877 Fabricating method of light emitting diode package |
| 07/05/2011 | US7972876 Zinc-oxide-based semiconductor light-emitting device and method of fabricating the same |
| 07/05/2011 | US7972875 Optical systems fabricated by printing-based assembly |
| 07/05/2011 | US7972874 Semiconductor process evaluation methods including variable ion implanting conditions |
| 07/05/2011 | US7972873 Material removing processes in device formation and the devices formed thereby |
| 07/05/2011 | US7972750 Mask blank and mask |
| 07/05/2011 | US7972711 Large area, uniformly low dislocation density GaN substrate and process for making the same |
| 07/05/2011 | US7972663 Method and apparatus for forming a high quality low temperature silicon nitride layer |
| 07/05/2011 | US7972583 Iron silicide sputtering target and method for production thereof |
| 07/05/2011 | US7972553 Method for imprint lithography at constant temperature |
| 07/05/2011 | US7972485 Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| 07/05/2011 | US7972483 High performance integrated circuit manufacturing; monitors, adjusts and controls |
| 07/05/2011 | US7972472 Process for forming a patterned thin film structure for in-mold decoration |
| 07/05/2011 | US7972471 Inductively coupled dual zone processing chamber with single planar antenna |
| 07/05/2011 | US7972470 Asymmetric grounding of rectangular susceptor |
| 07/05/2011 | US7972469 Plasma processing apparatus |
| 07/05/2011 | US7972468 Semiconductor device fabricating system |
| 07/05/2011 | US7972467 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 07/05/2011 | US7972460 Method of manufacturing printed circuit board |
| 07/05/2011 | US7972444 Workpiece support with fluid zones for temperature control |
| 07/05/2011 | US7972443 Metering of particulate material and vaporization thereof |
| 07/05/2011 | US7972441 Thermal oxidation of silicon using ozone |
| 07/05/2011 | US7972440 Monitoring and control of a fabrication process |
| 07/05/2011 | US7972350 Catheter tip |
| 07/05/2011 | US7971354 Method of manufacturing a multilayer printed wiring board |
| 07/05/2011 | CA2493963C Carbon fiber composite transfer member with reflective surfaces |
| 07/05/2011 | CA2419482C Method and device for determining backgate characteristics |
| 07/04/2011 | DE202011005450U1 Sensormodul und Sensormodulbaugruppe Sensor module and the sensor module assembly |
| 06/30/2011 | WO2011079170A2 Automated thermal slide debonder |
| 06/30/2011 | WO2011078982A1 Post deposition wafer cleaning formulation |
| 06/30/2011 | WO2011078930A1 Methods and systems for high sigma yield estimation |
| 06/30/2011 | WO2011078901A1 SUPERCAPACITOR BASED ON MnO2 AND TiO2 COMPOSITES |
| 06/30/2011 | WO2011078802A1 Assembly and method for ic unit engagement |
| 06/30/2011 | WO2011078686A1 Cleaning stack of wafers |
| 06/30/2011 | WO2011078627A2 Pattern-roll and printing device including the same |
| 06/30/2011 | WO2011078512A2 Etchant and electronic device manufacturing method |
| 06/30/2011 | WO2011078488A2 Grounding structure, and heater and chemical vapor deposition apparatus having the same |
| 06/30/2011 | WO2011078483A2 Fine gap-fill polymers, fine gap-filling compositions comprising same, and method for making integrated circuit semiconductor devices using same |
| 06/30/2011 | WO2011078477A2 Method for supplying and discharging flat product to be treated |
| 06/30/2011 | WO2011078414A2 Substrate for euvl optical member |
| 06/30/2011 | WO2011078399A1 Method for forming crystalline cobalt silicide film |
| 06/30/2011 | WO2011078398A1 Field-effect transistor, semiconductor memory, display element, image display device, and system |
| 06/30/2011 | WO2011078373A1 Memory device, semiconductor device, and electronic device |
| 06/30/2011 | WO2011078346A1 SiC FIELD EFFECT TRANSISTOR |
| 06/30/2011 | WO2011078335A1 Etchant and method for manufacturing semiconductor device using same |
| 06/30/2011 | WO2011078319A1 Semiconductor device, semiconductor wafer, and method for manufacturing a semiconductor device |
| 06/30/2011 | WO2011078299A1 Method for forming bond between different elements |
| 06/30/2011 | WO2011078270A1 Method for operating vacuum processing apparatus |
| 06/30/2011 | WO2011078265A1 Method for evaluating performance of organic release agent, process for producing mold, and process for producing transparent film with finely roughened structure on surface |
| 06/30/2011 | WO2011078252A1 N-type contact electrode comprising a group iii nitride semiconductor, and method for forming same |
| 06/30/2011 | WO2011078240A1 Method for selectively growing doped epitaxial film, and method for selectively growing doped epitaxial film |
| 06/30/2011 | WO2011078193A1 Adhesive tape for protecting surface of semiconductor wafer |
| 06/30/2011 | WO2011078169A1 Thin film transistor, display device, and manufacturing method for thin film transistor and display device |
| 06/30/2011 | WO2011078144A1 Cleaning method |
| 06/30/2011 | WO2011078114A1 Epoxy resin composition, process for production of assembly using same, and assembly |
| 06/30/2011 | WO2011078083A1 Method of manufacturing semiconductor device and system for manufacturing semiconductor device |
| 06/30/2011 | WO2011078070A1 Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method |
| 06/30/2011 | WO2011078018A1 Magnetoresistive effect element, and magnetic random access memory using same |
| 06/30/2011 | WO2011078005A1 Semiconductor device and process for production thereof, and display device |
| 06/30/2011 | WO2011077999A1 Pad for chemical mechanical polishing and method of chemical mechanical polishing using same |
| 06/30/2011 | WO2011077993A1 Radiation-sensitive composition |
| 06/30/2011 | WO2011077992A1 Photomask |
| 06/30/2011 | WO2011077978A1 Method for manufacturing display device |
| 06/30/2011 | WO2011077976A1 Substrate transfer apparatus and sensor attaching base |
| 06/30/2011 | WO2011077973A1 Polishing agent for copper polishing and polishing method using the same |
| 06/30/2011 | WO2011077967A1 Semiconductor device |
| 06/30/2011 | WO2011077966A1 Semiconductor device and method for manufacturing the same |
| 06/30/2011 | WO2011077965A1 Exposure device |
| 06/30/2011 | WO2011077962A1 Electronic component manufacturing method |
| 06/30/2011 | WO2011077960A1 Support device and drying device including the same |
| 06/30/2011 | WO2011077959A1 Paint-coating system |
| 06/30/2011 | WO2011077946A1 Semiconductor device |
| 06/30/2011 | WO2011077941A1 Radiation-sensitive resin composition and compound contained therein |
| 06/30/2011 | WO2011077940A1 Semiconductor device |
| 06/30/2011 | WO2011077937A1 Apparatus for drying substrate and method for drying substrate |
| 06/30/2011 | WO2011077911A1 Vacuum chuck |
| 06/30/2011 | WO2011077887A1 Cmp polishing fluid for polishing palladium and polishing method |
| 06/30/2011 | WO2011077882A1 Double-side imprint device |
| 06/30/2011 | WO2011077851A1 Process for production of semiconductor substrate, and device for production of semiconductor substrate |
| 06/30/2011 | WO2011077835A1 Adhesive sheet and production method for electronic component |
| 06/30/2011 | WO2011077797A1 Silicon carbide substrate |
| 06/30/2011 | WO2011077702A1 Temperature control method for substrate heat treatment apparatus, method for producing semiconductor device, temperature control program and recording medium for substrate heat treatment apparatus |
| 06/30/2011 | WO2011077697A1 Exposure method, and exposure device |
| 06/30/2011 | WO2011077681A1 Air tension apparatus |
| 06/30/2011 | WO2011077679A1 Conductive connection material, electronic component producing method, and electronic member and electronic component with conductive connection material |
| 06/30/2011 | WO2011077678A1 Substrate holding apparatus |
| 06/30/2011 | WO2011077664A1 Semiconductor device |
| 06/30/2011 | WO2011077661A1 Semiconductor wafer, and method for producing same |