H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2011
08/18/2011	WO2011062900A3 Showerhead assembly with improved impact protection
08/18/2011	WO2011060002A3 Redistribution layer enhancement to improve reliability of wafer level packaging
08/18/2011	WO2011059891A3 Chamber with uniform flow and plasma distribution
08/18/2011	WO2011057238A3 Integrated decoupling capacitor employing conductive through-substrate vias
08/18/2011	WO2011057201A3 Vacuum quality measurement system
08/18/2011	WO2011056313A3 Structure and method to form a thermally stale silicide in narrow dimension gate stacks
08/18/2011	WO2011050207A3 Split gate semiconductor device with curved gate oxide profile
08/18/2011	WO2011050117A3 System and method for wafer carrier vibration reduction
08/18/2011	WO2011047179A3 Plasma ashing compounds and methods of use
08/18/2011	WO2011038229A3 High strength bonding and coating mixture
08/18/2011	WO2011035046A3 Stackable multi-port gas nozzles
08/18/2011	WO2011035041A3 Substrate transfer mechanism with preheating features
08/18/2011	WO2010120685A8 Scrubber clean before oxide chemical mechanical polish (cmp) for reduced microscratches and improved yields
08/18/2011	US20110202890 Design system for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates
08/18/2011	US20110202752 Semiconductor device including encryption section, semiconductor device including external interface, and content reproduction method
08/18/2011	US20110201212 Method for producing semiconductor device and semiconductor device
08/18/2011	US20110201211 Method and Apparatus Providing Air-Gap Insulation Between Adjacent Conductors Using Nanoparticles
08/18/2011	US20110201210 Film formation method, film formation apparatus, and method for using film formation apparatus
08/18/2011	US20110201209 Method and System for Wafer-Level Planarization of a Die-to-Wafer System
08/18/2011	US20110201208 Plasma etching method and plasma etching apparatus
08/18/2011	US20110201207 Backplane structures for solution processed electronic devices
08/18/2011	US20110201206 Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film, method for manufacturing semiconductor device, and storage medium in which control program is stored
08/18/2011	US20110201205 Method of forming a deep trench in a substrate
08/18/2011	US20110201204 Precisely Tuning Feature Sizes on Hard Masks Via Plasma Treatment
08/18/2011	US20110201203 Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole
08/18/2011	US20110201202 Method of forming fine patterns of semiconductor device
08/18/2011	US20110201201 Methods of fabricating large-area, semiconducting nanoperforated graphene materials
08/18/2011	US20110201200 Diodes, and Methods Of Forming Diodes
08/18/2011	US20110201199 Laser annealing for 3-d chip integration
08/18/2011	US20110201198 Method forming metal film and semiconductor fabrication device having metal film
08/18/2011	US20110201197 Method for making via interconnection
08/18/2011	US20110201196 Method for producing a metal contact on a semiconductor substrate provided with a coating
08/18/2011	US20110201195 Flip chip mounting method and bump forming method
08/18/2011	US20110201194 Direct IMS (Injection Molded Solder) Without a Mask for Forming Solder Bumps on Substrates
08/18/2011	US20110201193 Method for manufacturing semiconductor device, particle, and semiconductor device
08/18/2011	US20110201192 Method of processing backside copper layer for semiconductor chips
08/18/2011	US20110201191 METHOD FOR NONDESTRUCTIVE LIFT-OFF OF GaN FROM SAPPHIRE SUBSTRATE UTILIZING A SOLID-STATE LASER
08/18/2011	US20110201190 Composition for printing a seed layer and process for producing conductor tracks
08/18/2011	US20110201189 Semiconductor memory device and method of forming the same
08/18/2011	US20110201188 Self-aligned ion implantation for ibc solar cells
08/18/2011	US20110201187 Igbt and method for manufacturing igbt
08/18/2011	US20110201186 Method and apparatus for reducing flicker noise in a semiconductor device
08/18/2011	US20110201185 Method to improve transistor performance matching for plasma-assisted source/drain formation
08/18/2011	US20110201184 Oxygen doping method to gallium nitride single crystal substrate
08/18/2011	US20110201183 Method for manufacturing crystalline semiconductor film and semiconductor device
08/18/2011	US20110201182 Nonvolative memory device using semiconductor nanocrystals and method of forming same
08/18/2011	US20110201181 Apparatus and method for growing nitride semiconductor crystal film
08/18/2011	US20110201180 Fabrication of gan and iii-nitride alloys freestanding epilayers membranes using a nonbonding laser
08/18/2011	US20110201179 Method and structure for dividing a substrate into individual devices
08/18/2011	US20110201178 Semiconductor device and process for fabricating the same
08/18/2011	US20110201177 Method in the microelectronics fields of forming a monocrystalline layer
08/18/2011	US20110201176 Pressurized treatment of substrates to enhance cleaving process
08/18/2011	US20110201175 System on a Chip with On-Chip RF Shield
08/18/2011	US20110201174 Configuration of high-voltage semiconductor power device to achieve three dimensional charge coupling
08/18/2011	US20110201173 Semiconductor device and method of fabricating the same
08/18/2011	US20110201172 Method for fabricating a semiconductor device
08/18/2011	US20110201171 Processes For Forming Isolation Structures For Integrated Circuit Devices
08/18/2011	US20110201170 Method of fabricating memory
08/18/2011	US20110201169 Thermal Treatment Equipment and Method for Heat-Treating
08/18/2011	US20110201168 Methods of manufacturing semiconductor devices having a recessed-channel
08/18/2011	US20110201167 Method for manufacturing semiconductor device
08/18/2011	US20110201166 Methods of manufacturing semiconductor devices
08/18/2011	US20110201165 Cmos device comprising mos transistors with recessed drain and source areas and non-conformal metal silicide regions
08/18/2011	US20110201164 Method of Dual EPI Process For Semiconductor Device
08/18/2011	US20110201163 Semiconductor nanostructures, semiconductor devices, and methods of making same
08/18/2011	US20110201162 Amorphous oxide and thin film transistor
08/18/2011	US20110201161 Method of forming a buried plate by ion implantation
08/18/2011	US20110201160 Metal-embedded substrate and method for manufacturing semiconductor package using the same
08/18/2011	US20110201159 Semiconductor package and manufacturing method thereof
08/18/2011	US20110201158 Selective Removal of Gold From a Lead Frame
08/18/2011	US20110201157 Method of making a semiconductor chip assembly with a post/base heat spreader and a multilevel conductive trace
08/18/2011	US20110201156 Method of manufacturing wafer level package including coating resin over the dicing lines
08/18/2011	US20110201155 Manufacturing method of semiconductor device
08/18/2011	US20110201154 Semiconductor device including stacked semiconductor chips
08/18/2011	US20110201153 Integrated circuit packaging system and method of manufacture thereof
08/18/2011	US20110201152 Semiconductor device and manufacturing method therefor
08/18/2011	US20110201151 Methods for forming a bonded semiconductor substrate including a cooling mechanism
08/18/2011	US20110201150 Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor
08/18/2011	US20110201149 Methods for forming resistive switching memory elements
08/18/2011	US20110201148 Phase change current density control structure
08/18/2011	US20110201139 Method of managing substrate
08/18/2011	US20110201138 Mask verifying method, manufacturing method of semiconductor device, and computer program product
08/18/2011	US20110201137 Method of manufacturing layered chip package
08/18/2011	US20110201136 Combinatorial evaluation of dry semiconductor processes
08/18/2011	US20110201135 Method of Reducing Contamination by Providing a Removable Polymer Protection Film During Microstructure Processing
08/18/2011	US20110201134 Capacitively coupled plasma reactor with magnetic plasma control
08/18/2011	US20110201133 Method for forming polarization reversal
08/18/2011	US20110200942 Chemically amplified negative resist composition for eb or euv lithography and patterning process
08/18/2011	US20110200941 Chemically amplified positive resist composition for eb or euv lithography and patterning process
08/18/2011	US20110200919 Chemically amplified positive resist composition and pattern forming process
08/18/2011	US20110200790 Method for Localised Electro-Grafting on Conducting or Semiconducting Substrates in the Presence of a Microelectrode
08/18/2011	US20110200417 Apparatus for transferring substrates
08/18/2011	US20110200415 Substrate load and unload mechanisms for high throughput
08/18/2011	US20110200414 Transfer apparatus for cell made organic light-emitting diode display device
08/18/2011	US20110199842 Dram cell utilizing floating body effect and manufacturing method thereof
08/18/2011	US20110199813 Non-volatile memory device having 3d structure and method for fabricating the same
08/18/2011	US20110199808 Memory device from which dummy edge memory block is removed
08/18/2011	US20110199708 Level conversion circuit and semiconductor integrated circuit device employing the level conversion circuit
08/18/2011	US20110199597 Imaging device in a projection exposure facility
08/18/2011	US20110199346 Semiconductor device having guard ring, display driver circuit, and display apparatus

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