H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2011
08/30/2011	US8008111 Bulk copper species treatment of thin film photovoltaic cell and manufacturing method
08/30/2011	US8008110 Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method
08/30/2011	US8008109 Flat display active plate
08/30/2011	US8008107 Semiconductor wafer pre-process annealing and gettering method and system for solar cell formation
08/30/2011	US8008106 Semiconductor imaging device and fabrication process thereof
08/30/2011	US8008105 Methods for fabricating micro-electro-mechanical devices
08/30/2011	US8008103 Light emitting device having light extraction structure and method for manufacturing the same
08/30/2011	US8008101 GaN compound semiconductor light emitting element and method of manufacturing the same
08/30/2011	US8008100 Light emitting diode package structure and manufacturing method therefor
08/30/2011	US8008099 LED package structure with concave area for positioning heat-conducting substance and method for manufacturing the same
08/30/2011	US8008098 Light emitting device and method of manufacturing the same
08/30/2011	US8008097 MgO tunnel barriers and method of formation
08/30/2011	US8008096 ALD processing techniques for forming non-volatile resistive-switching memories
08/30/2011	US8008095 Methods for fabricating contacts to pillar structures in integrated circuits
08/30/2011	US8007986 Immersion lithography fluids
08/30/2011	US8007964 Photomask blank and photomask
08/30/2011	US8007961 Mask blank substrate set and mask blank set
08/30/2011	US8007960 Light reflecting mask, exposure apparatus, and measuring method
08/30/2011	US8007959 Photomask and pattern formation method using the same
08/30/2011	US8007914 Two layer LTO temperature oxide backside seal for a wafer
08/30/2011	US8007676 Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
08/30/2011	US8007641 Method of detecting arc discharges in a plasma process
08/30/2011	US8007634 Wafer spin chuck and an etcher using the same
08/30/2011	US8007633 Surface processing apparatus
08/30/2011	US8007632 Semiconductor manufacturing apparatus and manufacturing method of semiconductor device
08/30/2011	US8007627 Electronic component mounting method and apparatus
08/30/2011	US8007591 Substrate holder having a fluid gap and method of fabricating the substrate holder
08/30/2011	US8007218 Unit and method for transferring substrates and apparatus and method for treating substrates with the unit
08/30/2011	US8006641 Installation for depositing, by means of a microwave plasma, an internal barrier coating in thermoplastic containers
08/29/2011	DE202011102453U1 Vorrichtung zum Entnehmen von einzelnen Wafern von einem Stapel solcher Wafer aus einer Aufnahmevorrichtung A device for removing individual wafers from a stack of such wafers from a receiving device
08/26/2011	DE202010000325U1 Serviceeinrichtung Facility
08/25/2011	WO2011103538A2 Post-cmp cleaning brush
08/25/2011	WO2011103391A2 High efficiency high accuracy heater driver
08/25/2011	WO2011103386A1 Atmospheric pressure chemical vapor deposition with saturation control
08/25/2011	WO2011103323A1 Self-aligned ion implantation for ibc solar cells
08/25/2011	WO2011103314A1 Electronic devices and systems, and methods for making and using the same
08/25/2011	WO2011103282A2 VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS
08/25/2011	WO2011103216A2 Adaptive patterning for panelized packaging
08/25/2011	WO2011103214A1 Integrated shielding for wafer plating
08/25/2011	WO2011103211A1 Panelized packaging with transferred dielectric
08/25/2011	WO2011103187A2 Semiconductor that has a functionalized surface
08/25/2011	WO2011103093A1 Semiconductor structure made using improved ion implantation process
08/25/2011	WO2011103062A2 Reactive site deactivation against vapor deposition
08/25/2011	WO2011103048A2 Method and system for providing process tool correctables using an optimzed sampling scheme with smart interpolation
08/25/2011	WO2011103041A1 Method of fabricating micro-devices
08/25/2011	WO2011102952A2 Substrate load and unload mechanisms for high throughput
08/25/2011	WO2011102938A2 A method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion
08/25/2011	WO2011102929A2 Direct ims (injection molded solder) without a mask for formaing solder bumps on substrates
08/25/2011	WO2011102884A2 Flush mounted fastener for plasma processing apparatus
08/25/2011	WO2011102864A2 On-demand nanoelectronics platform
08/25/2011	WO2011102849A1 Nanoimprint lithography
08/25/2011	WO2011102659A2 Conductive ink and electronic device using same
08/25/2011	WO2011102648A2 Substrate processing system and substrate transferring method
08/25/2011	WO2011102627A2 SINGLE CRYSTAL ZnMgAlO THIN FILM FOR ULTRAVIOLET RAYS, WHICH IS LATTICE MATCHED TO ZnO, AND PREPARATION METHOD THEREOF
08/25/2011	WO2011102622A2 Ingot inspection device and method
08/25/2011	WO2011102569A1 Solder ink and electronic device package using same
08/25/2011	WO2011102547A1 Power semiconductor element
08/25/2011	WO2011102546A1 Pattern forming method, chemical amplification resist composition and resist film
08/25/2011	WO2011102511A1 Circuit-pattern inspection device
08/25/2011	WO2011102500A1 Field effect transistor, display element, image display device, and system
08/25/2011	WO2011102486A1 Laser device for exposure device
08/25/2011	WO2011102470A1 Composition for formation of resist underlayer film containing silicon having nitrogen-containing ring
08/25/2011	WO2011102410A1 Transfer apparatus, transfer method, exposure apparatus, and device manufacturing method
08/25/2011	WO2011102396A1 Al alloy film for display device
08/25/2011	WO2011102362A1 Integrated circuit and method of using same
08/25/2011	WO2011102341A1 Semiconductor block bonding apparatus, semiconductor block bonding method, and semiconductor wafer manufacturing method
08/25/2011	WO2011102318A1 Substrate storing container
08/25/2011	WO2011102308A1 Conveying roller and substrate conveying apparatus
08/25/2011	WO2011102279A1 Substrate cleaning method and substrate cleaning device
08/25/2011	WO2011102278A1 Method for planarising the rear surface of a substrate
08/25/2011	WO2011102274A1 Thin film manufacturing apparatus, thin film manufacturing method, and method for maintaining thin film manufacturing apparatus
08/25/2011	WO2011102270A1 Electronic apparatus
08/25/2011	WO2011102268A1 Method for producing semiconductor gas
08/25/2011	WO2011102263A1 Vacuum processing device
08/25/2011	WO2011102254A1 Silicon carbide insulated gate semiconductor element and method for producing same
08/25/2011	WO2011102240A1 Imprinting method
08/25/2011	WO2011102233A1 Semiconductor device
08/25/2011	WO2011102228A1 Semiconductor device and driving method of semiconductor device
08/25/2011	WO2011102217A1 Semiconductor device and method for manufacturing the same
08/25/2011	WO2011102206A1 Semiconductor memory device, driving method thereof, and method for manufacturing semiconductor device
08/25/2011	WO2011102205A1 Semiconductor device
08/25/2011	WO2011102162A1 Chamber apparatus, and extreme ultraviolet light generating device
08/25/2011	WO2011102140A1 Method for manufacturing a semiconductor device
08/25/2011	WO2011102135A1 Method and device for manufacturing a semiconductor device
08/25/2011	WO2011102109A1 Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation method
08/25/2011	WO2011102100A1 Semiconductor device and stacked-type semiconductor device
08/25/2011	WO2011102096A1 High frequency module manufacturing method
08/25/2011	WO2011102095A1 Module manufacturing method
08/25/2011	WO2011102083A1 Plasma processing device and plasma processing method
08/25/2011	WO2011102078A1 Abrasive head and abrading device
08/25/2011	WO2011102064A1 METHOD FOR FORMATION OF ELECTRODE ON n-TYPE SEMICONDUCTOR LAYER
08/25/2011	WO2011102053A1 Film forming device, method of film forming, device and method for manufacturing thin-film solar cell
08/25/2011	WO2011102045A1 Epitaxial substrate and method for producing same
08/25/2011	WO2011102044A1 Epitaxial substrate and method for producing same
08/25/2011	WO2011102010A1 Polarization film lamination apparatus, and lcd device production system equipped with same
08/25/2011	WO2011102009A1 Solar cell, method for producing same, and apparatus for producing solar cell
08/25/2011	WO2011101958A1 Pin diode
08/25/2011	WO2011101956A1 Pin diode
08/25/2011	WO2011101943A1 Semiconductor integrated circuit device
08/25/2011	WO2011101936A1 Etching method and etching device

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