H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2011
08/17/2011	CN102160184A Display device
08/17/2011	CN102160182A Thin film transistor having crystalline indium oxide semiconductor film
08/17/2011	CN102160179A Semiconductor device and method for manufacturing same
08/17/2011	CN102160177A Method for manufacturing semiconductor device
08/17/2011	CN102160169A Semiconductor integrated circuit device
08/17/2011	CN102160168A Substrate-transferring device, substrate-processing apparatus having same, and method of transferring substrate using substrate-transferring device
08/17/2011	CN102160167A Electrostatic chuck assembly
08/17/2011	CN102160166A Substrate processing apparatus and substrate placing table
08/17/2011	CN102160165A Electrostatic chuck
08/17/2011	CN102160164A Self-diagnostic semiconductor equipment
08/17/2011	CN102160163A Semiconductor device and method for manufacturing same
08/17/2011	CN102160162A Component mounting apparatus and component mounting method
08/17/2011	CN102160161A Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring
08/17/2011	CN102160160A Method and apparatus for metal silicide formation
08/17/2011	CN102160159A A transistor with embedded si/ge material having enhanced across-substrate uniformity
08/17/2011	CN102160158A Transistor with passive gate and methods of fabricating same
08/17/2011	CN102160157A Managing thermal budget in annealing of substrates
08/17/2011	CN102160156A Method and apparatus for forming polymerized film
08/17/2011	CN102160155A Etch reactor suitable for etching high aspect ratio features
08/17/2011	CN102160154A Selective etching of silicon nitride
08/17/2011	CN102160153A Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter
08/17/2011	CN102160152A Chemical mechanical polishing apparatus, chemical mechanical polishing method, and control program
08/17/2011	CN102160151A Copper wiring surface protective liquid and method for manufacturing semiconductor circuit
08/17/2011	CN102160150A Method and apparatus for surface treatment of semiconductor substrates using sequential chemical applications
08/17/2011	CN102160149A Methods and systems for preventing feature collapse during microelectronic topography fabrication
08/17/2011	CN102160148A Deposition systems, ald systems, cvd systems, deposition methods, als methods and cvd methods
08/17/2011	CN102160147A Cvd reactor with multiple processing levels and dual-axis motorized lift mechanism
08/17/2011	CN102160146A Shutter disk for physical vapor deposition chamber
08/17/2011	CN102160145A Formation of devices by epitaxial layer overgrowth
08/17/2011	CN102160144A Patterning single integrated circuit layer using automatically-generated masks and multiple masking layers
08/17/2011	CN102160143A Method for producing semiconductor substrate
08/17/2011	CN102160105A Display device and manufacturing method of the same
08/17/2011	CN102160104A Semiconductor device
08/17/2011	CN102160103A Display device
08/17/2011	CN102160102A Display device
08/17/2011	CN102159748A Film formation method, film formation device, piezoelectric film, piezoelectric device and liquid discharge device
08/17/2011	CN102159662A Barrier slurry for low-k dielectrics
08/17/2011	CN102159646A Poly(arylene ether) composition and covered conductor with flexible covering wall and large size conductor
08/17/2011	CN102159609A Two-pack urethane resin composite for use in an abrasive pad, polyurethane abrasive pad, and method for manufacturing a polyurethane abrasive pad
08/17/2011	CN102159472A Transport packag
08/17/2011	CN102159356A Wafer bonding apparatus and wafer bonding method
08/17/2011	CN102158073A DC voltage conversion module, semiconductor module and method for manufacturing semiconductor module
08/17/2011	CN102157709A Laser beam irradiation apparatus , and method of manufacturing organic light emitting display device by using the laser beam irradiation apparatus
08/17/2011	CN102157639A LED (Light-Emitting Diode) chip and preparation method thereof
08/17/2011	CN102157638A Method for preparing substrate for epitaxial growth of GaN
08/17/2011	CN102157633A Separation method of LED (light emitting diode) epitaxy chip
08/17/2011	CN102157631A Method for forming semiconductor layer and method for manufacturing light emitting device
08/17/2011	CN102157618A Low-cost diffusion method for crystalline silicon solar cell
08/17/2011	CN102157616A Wash solution for removing laser damage layers
08/17/2011	CN102157615A Method of producing photoelectric conversion device
08/17/2011	CN102157602A Method for carrying out wet-method phosphorous diffusion and texturing on substrate and acid solution for texturing
08/17/2011	CN102157568A P-N junction surface diode structure of metal oxide semiconductor and manufacturing method thereof
08/17/2011	CN102157565A Manufacturing method of thin-film transistor
08/17/2011	CN102157564A Preparation method of top gate metal oxide thin film transistor (TFT)
08/17/2011	CN102157563A Method for manufacturing metal oxide thin film transistor
08/17/2011	CN102157562A Method for manufacturing bottom gate metal oxide thin film transistor
08/17/2011	CN102157558A Thin film transistor, method of manufacturing the same, and display unit
08/17/2011	CN102157556A Oxidizing-dephlegmation-based silicon-based wrap gate transistor with buried-channel structure and preparation method thereof
08/17/2011	CN102157555A Method of fabricating a finfet device
08/17/2011	CN102157554A Fin-type transistor structure and manufacturing method thereof
08/17/2011	CN102157553A Structure of asymmetrical semi-conductor and forming method thereof
08/17/2011	CN102157552A Thyristor structure with enhanced reliability and production method thereof
08/17/2011	CN102157549A PN junction and manufacturing method thereof
08/17/2011	CN102157547A Short base region structure for improving high voltage and large current tolerance of thyristor and production method thereof
08/17/2011	CN102157546A Power supply overvoltage protection structure and manufacture method thereof
08/17/2011	CN102157537A Solid-state imaging device, manufacturing method thereof, electronic apparatus, and semiconductor device
08/17/2011	CN102157525A Semiconductor device and manufacturing method thereof
08/17/2011	CN102157518A Novel double-surge protection device with single-chip integration and manufacturing method thereof
08/17/2011	CN102157516A Structure and manufacturing method of LED (light-emitting diode) protection diode
08/17/2011	CN102157514A RF semiconductor device and fabrication method thereof
08/17/2011	CN102157513A Thin film surface mount components
08/17/2011	CN102157512A Chip package and manufacturing method thereof
08/17/2011	CN102157510A Contact sensor packaging structure and manufacture method thereof
08/17/2011	CN102157499A Hybrid integrated circuit module based on low temperature co-fired ceramic technology and manufacturing method thereof
08/17/2011	CN102157498A Hybrid integrated circuit module and manufacturing method thereof
08/17/2011	CN102157497A Multi-layer stacked semiconductor device structure and forming method
08/17/2011	CN102157496A Contact hole test device and method for testing leakage current of grid by active area contact hole
08/17/2011	CN102157495A Semiconductor devices including an interconnection pattern and methods of fabricating the same
08/17/2011	CN102157493A Metal plug and manufacturing method thereof
08/17/2011	CN102157492A Chip package
08/17/2011	CN102157491A Semiconductor structure and manufacturing method thereof
08/17/2011	CN102157489A Semiconductor device and manufacturing method of semiconductor device
08/17/2011	CN102157487A Inductors and methods for integrated circuits
08/17/2011	CN102157483A Chip package and method for fabricating the same
08/17/2011	CN102157479A Semiconductor device and a method of manufacturing the same
08/17/2011	CN102157478A Methods and apparatus for robust flip chip interconnections
08/17/2011	CN102157476A Semiconductor package with single sided substrate design and manufacturing methods thereof
08/17/2011	CN102157473A 半导体装置及其制造方法 Semiconductor device and manufacturing method
08/17/2011	CN102157468A High-power loop heat pipe radiator and manufacturing method thereof
08/17/2011	CN102157466A Attachment arrangement for a heat sink
08/17/2011	CN102157462A Chip package and fabrication method thereof
08/17/2011	CN102157460A Power semiconductor module with interconnected package portions
08/17/2011	CN102157456A Three-dimensional system level packaging method
08/17/2011	CN102157455A Formation of silicone through holes for multichip integrated chip
08/17/2011	CN102157454A Method for modular arrangement of a silicon based array and modular silicon based array
08/17/2011	CN102157453A Stack-type package structure and manufacturing method thereof
08/17/2011	CN102157452A Soi semiconductor device with reduced topography above a substrate window area
08/17/2011	CN102157451A Method of manufacturing a display substrate
08/17/2011	CN102157450A Multiple silicide integration structure and method
08/17/2011	CN102157449A Wafer processing method

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