H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2011
08/17/2011	CN101459125B Connection pore forming method
08/17/2011	CN101459123B Through hole and dual damascene structure forming method
08/17/2011	CN101459108B Method for forming shallow groove isolation structure and etching method for forming shallow groove
08/17/2011	CN101442067B Image sensor and fabricating method thereof
08/17/2011	CN101439235B Gas-liquid separating device
08/17/2011	CN101436003B Exposure apparatus and device manufacturing method
08/17/2011	CN101435960B Manufacturing method of liquid crystal display device array substrate
08/17/2011	CN101431090B Image sensor and method for manufacturing the same
08/17/2011	CN101431042B Method for manufacturing image sensor
08/17/2011	CN101410968B Improved CMOS devices with stressed channel regions, and methods for fabricating the same
08/17/2011	CN101409230B Method for preparing polycrystalline silicon layer
08/17/2011	CN101398684B Scheduling method for a substrate treating apparatus
08/17/2011	CN101398578B Capacitor, silicon based LCD and method for making same
08/17/2011	CN101393894B Semiconductor device and manufacturing method thereof
08/17/2011	CN101393842B Slot forming method
08/17/2011	CN101393401B Developing method of photolithographic process
08/17/2011	CN101383266B Reaction cavity
08/17/2011	CN101371958B Exhaust gas collection device
08/17/2011	CN101370962B Methods and arrangement for a highly efficient gas distribution arrangement
08/17/2011	CN101369515B Reaction cavity
08/17/2011	CN101364531B Method for forming membrane
08/17/2011	CN101359670B Active driving TFT matrix construction and manufacturing method thereof
08/17/2011	CN101354535B Method for forming and coating multi-layer mask layer
08/17/2011	CN101351076B Apparatus for processing plasma
08/17/2011	CN101346031B Adapter and method for implementing adaptation control
08/17/2011	CN101345235B Production method of LED chip with electrostatic protection function
08/17/2011	CN101335200B AIN film preparing method
08/17/2011	CN101329986B Etching method
08/17/2011	CN101312180B Superposed marker and method for forming same as well as uses
08/17/2011	CN101295629B Methods to eliminate M-shape etch rate profile in inductively coupled plasma reactor
08/17/2011	CN101281872B Wiring substrate and wiring substrate manufacturing method
08/17/2011	CN101276789B Method and ink for etching amorphous silicon solar battery aluminum membrane
08/17/2011	CN101276744B Coating and developing system, coating and developing method
08/17/2011	CN101271838B Light doping section forming method and mask used to forming light doping section
08/17/2011	CN101268119B Resin composition, varnish, resin film and semiconductor device
08/17/2011	CN101258587B Semiconductor power device with multiple drain structure and corresponding manufacturing process
08/17/2011	CN101256935B Method and apparatus for controlling gas flow to a processing chamber
08/17/2011	CN101252148B Nonvolatile memory electronic device and its manufacture method
08/17/2011	CN101202219B Method and system for preparing semiconductor device on semiconductor substrate
08/17/2011	CN101199923B Excimer light irradiation apparatus
08/17/2011	CN101196906B Method and system of data weighted object orientation for data mining
08/17/2011	CN101195908B Technique for cleaning reaction chamber of chemical vapor deposition equipment
08/17/2011	CN101187735B Display device and flat display device
08/17/2011	CN101165617B Method of optimizing process recipe of substrate processing system
08/17/2011	CN101140945B Organic light emitting display device and its manufacture method
08/17/2011	CN101140859B Etching apparatus and etching method using the same
08/17/2011	CN101130187B Substrate cleaning device, substrate cleaning method and substrate manufacture method
08/17/2011	CN101116180B Fixation carrier, production method of fixation carrier, use method of fixation carrier, and substrate reception container
08/17/2011	CN101114008B A system for acquiring device parameters
08/17/2011	CN101080673B Resist composition for liquid immersion exposure and method for resist pattern formation
08/17/2011	CN101071279B Lithographic apparatus, calibration method, device manufacturing method
08/16/2011	USRE42619 Magnetic tunnel junction magnetic device, memory and writing and reading methods using said device
08/16/2011	USRE42608 Automated foot bath apparatus and method
08/16/2011	US8001516 Characterization and reduction of variation for integrated circuits
08/16/2011	US8001491 Organic thin film transistor and method of fabricating the same
08/16/2011	US8000922 Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
08/16/2011	US8000587 Pulsed processing semiconductor heating methods and associated system using combinations of heating sources
08/16/2011	US8000564 Photoelectric conversion module for direct optical interconnection and method of manufacturing the same
08/16/2011	US8000133 Thin film magnetic memory device capable of conducting stable data read and write operations
08/16/2011	US8000082 Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same
08/16/2011	US8000081 Method and apparatus for safely dechucking wafers
08/16/2011	US7999919 Substrate holding technique
08/16/2011	US7999884 Liquid crystal display
08/16/2011	US7999753 Apparatus and methods for constructing antennas using vias as radiating elements formed in a substrate
08/16/2011	US7999603 Semiconductor integrated circuit apparatus which is capable of controlling a substrate voltage under the low source voltage driving of a miniaturized MOSFET
08/16/2011	US7999540 Eddy current apparatus and method for in-situ profile measurement
08/16/2011	US7999401 Semiconductor device and method of manufacturing same
08/16/2011	US7999389 Via hole structure with a conductive layer formed therein
08/16/2011	US7999387 Semiconductor element connected to printed circuit board
08/16/2011	US7999384 Top layers of metal for high performance IC's
08/16/2011	US7999381 High performance sub-system design and assembly
08/16/2011	US7999378 Semiconductor devices including semiconductor dice in laterally offset stacked arrangement
08/16/2011	US7999374 Semiconductor component having adhesive squeeze-out prevention configuration and method of manufacturing the same
08/16/2011	US7999355 Aminosilanes for shallow trench isolation films
08/16/2011	US7999350 Electrode structure of memory capacitor
08/16/2011	US7999348 Technique for stable processing of thin/fragile substrates
08/16/2011	US7999346 Semiconductor device and method of manufacturing the same
08/16/2011	US7999334 Hafnium tantalum titanium oxide films
08/16/2011	US7999332 Asymmetric semiconductor devices and method of fabricating
08/16/2011	US7999331 Semiconductor device and method of fabricating the same
08/16/2011	US7999330 Dynamic random access memory device and electronic systems
08/16/2011	US7999328 Isolation trench having first and second trench areas of different widths
08/16/2011	US7999325 Method to remove spacer after salicidation to enhance contact etch stop liner stress on MOS
08/16/2011	US7999316 Semiconductor device and method for manufacturing the same
08/16/2011	US7999314 Semiconductor device and manufacturing method thereof
08/16/2011	US7999312 Insulated gate-type semiconductor device having a low concentration diffusion region
08/16/2011	US7999311 Semiconductor device
08/16/2011	US7999307 Nonvolatile memory device having cell and peripheral regions and method of making the same
08/16/2011	US7999301 Semiconductor device and method of manufacturing the same
08/16/2011	US7999296 Single gate nonvolatile memory cell with transistor and capacitor
08/16/2011	US7999294 Semiconductor device which may prevent electrical failures of contacts
08/16/2011	US7999290 Dual panel type organic electroluminescent device and method of fabricating the same
08/16/2011	US7999285 Insulated gate bipolar transistor and method for manufacturing the same
08/16/2011	US7999281 Optical semiconductor device and method of manufacturing optical semiconductor device
08/16/2011	US7999266 Semiconductor device including poly-Si and method of manufacturing the same
08/16/2011	US7999264 Thin film transistor array panel and display device
08/16/2011	US7999263 Semiconductor element and display device using the same
08/16/2011	US7999261 Thin film transistor, method of fabricating the same, and organic light emitting diode display device having the TFT
08/16/2011	US7999258 Display substrate and method of manufacturing the same
08/16/2011	US7999256 Semiconductor device

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