H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2011
08/25/2011	WO2011101934A1 Mixture gas supply device
08/25/2011	WO2011101931A1 Semiconductor device and method for manufacturing same
08/25/2011	WO2011101929A1 Semiconductor light-emitting device and method for manufacturing the same
08/25/2011	WO2011101926A1 Manufacturing method for semiconductor device(s) and photomask
08/25/2011	WO2011101798A1 Stackable substrate carriers
08/25/2011	WO2011101463A1 A transistor device
08/25/2011	WO2011101450A1 Substrate support structure, clamp preparation unit, and lithography system
08/25/2011	WO2011101359A1 Method for manufacturing an electronic package
08/25/2011	WO2011101238A1 Electric resistance element suitable for light-emitting diode, laser diodes, or photodetectors
08/25/2011	WO2011101170A1 Method and assembly for producing a semiconductor module
08/25/2011	WO2011100998A1 Method and device for producing a semiconductor layer
08/25/2011	WO2011081941A3 Surface passivation techniques for chamber-split processing
08/25/2011	WO2011077416A3 Pre-thermal greased led array
08/25/2011	WO2011075228A3 Isolation for nanowire devices
08/25/2011	WO2011065122A9 Method for manufacturing semiconductor substrate
08/25/2011	WO2011061106A3 Method for producing silicon layers
08/25/2011	WO2011059782A3 Trench metal-oxide-semiconductor field effect transistor
08/25/2011	WO2011058831A9 Method for manufacturing a semiconductor substrate
08/25/2011	WO2011058830A9 Method for manufacturing a semiconductor substrate
08/25/2011	WO2011058829A9 Method for manufacturing a semiconductor substrate
08/25/2011	WO2011056519A3 Synthesis and use of precursors for ald of group va element containing thin films
08/25/2011	WO2011056515A3 Ion implantation system and method
08/25/2011	WO2011049832A3 3d-trench electrode detectors
08/25/2011	WO2011037373A3 Solar cell module and method of manufacturing the same
08/25/2011	WO2011034284A4 Epi wafer and silicon single crystal ingot for the same and fabrication method thereof
08/25/2011	WO2011025280A3 Wafer carrier
08/25/2011	WO2010134415A9 Semiconductor device and method of producing same
08/25/2011	WO2010119416A3 Foil and method for foil-based clip-and/or wire-bonding and resulting package
08/25/2011	WO2010086154A8 In situ formed drain and source regions including a strain inducing alloy and a graded dopant profile
08/25/2011	US20110209107 Mask-layout creating method, apparatus therefor, and computer program product
08/25/2011	US20110208467 Calibration standards and methods of their fabrication and use
08/25/2011	US20110207339 Heat treatment apparatus and method of manufacturing semiconductor device
08/25/2011	US20110207338 Laser crystallization apparatus and laser crystallization method
08/25/2011	US20110207337 Method of forming dielectric films, new precursors and their use in semiconductor manufacturing
08/25/2011	US20110207336 Method of manufacturing a semiconductor device
08/25/2011	US20110207335 Constrained Oxidation of Suspended Micro- and Nano-Structures
08/25/2011	US20110207334 Method of manufacturing semiconductor device
08/25/2011	US20110207333 Method for applying a layer to a substrate
08/25/2011	US20110207332 Thin film coated process kits for semiconductor manufacturing tools
08/25/2011	US20110207331 Resist underlayer film forming composition for lithography, containing aromatic fused ring-containing resin
08/25/2011	US20110207330 Method of manufacturing semiconductor device
08/25/2011	US20110207329 Double patterning strategy for contact hole and trench in photolithography
08/25/2011	US20110207328 Methods and apparatus for the manufacture of microstructures
08/25/2011	US20110207327 Abrasive, polishing method, method for manufacturing semiconductor integrated circuit device
08/25/2011	US20110207326 Slurry for polishing and planarization method of insulating layer using the same
08/25/2011	US20110207325 Method of manufacturing substrate and organic emitting display device having the substrate
08/25/2011	US20110207324 New metal precursors for semiconductor applications
08/25/2011	US20110207323 Method of forming and patterning conformal insulation layer in vias and etched structures
08/25/2011	US20110207322 Method of manufacturing semiconductor device
08/25/2011	US20110207321 Semiconductor device manufacturiing method
08/25/2011	US20110207320 Noble Metal Activation Layer
08/25/2011	US20110207319 Method of manufacturing semiconductor device
08/25/2011	US20110207318 Semiconductor device and method of manufacturing the same
08/25/2011	US20110207317 Semiconductor device and manufacturing method thereof
08/25/2011	US20110207316 Void boundary structures, semiconductor devices having the void boundary structures and methods of forming the same
08/25/2011	US20110207315 Method of fabricating gate structures
08/25/2011	US20110207314 Methods to Enhance Effective Work Function of Mid-Gap Metal by Incorporating Oxygen and Hydrogen at a Low Thermal Budget
08/25/2011	US20110207313 Semiconductor Devices and Methods of Fabricating the Same
08/25/2011	US20110207312 Semiconductor device including gate electrode for applying tensile stress to silicon substrate, and method of manufacturing the same
08/25/2011	US20110207311 Method of Manufacturing Semiconductor Device
08/25/2011	US20110207310 Semiconductor device with a field stop zone and process of producing the same
08/25/2011	US20110207309 Semiconductor manufacturing method and semiconductor device
08/25/2011	US20110207308 Technique for low-temperature ion implantation
08/25/2011	US20110207307 Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces
08/25/2011	US20110207306 Semiconductor structure made using improved ion implantation process
08/25/2011	US20110207305 Method for fabricating semiconductor device
08/25/2011	US20110207304 Method of Fabricating Semiconductor Devices
08/25/2011	US20110207303 Methods of Fabricating Semiconductor Devices
08/25/2011	US20110207302 Semiconductor device manufacturing method, and substrate processing method and apparatus
08/25/2011	US20110207301 Atmospheric pressure chemical vapor deposition with saturation control
08/25/2011	US20110207300 Electronic devices
08/25/2011	US20110207299 Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor
08/25/2011	US20110207298 Dense pitch bulk finfet process by selective epi and etch
08/25/2011	US20110207297 Method for Manufacturing Chalcopyrite Film
08/25/2011	US20110207296 Fabrication method for semiconductor device
08/25/2011	US20110207295 Method of detaching semi-conductor layers at low temperature
08/25/2011	US20110207294 Method for manufacturing semiconductor device
08/25/2011	US20110207293 Method of producing a hybrid substrate having a continuous buried eectrically insulating layer
08/25/2011	US20110207292 Method for manufacturing thin film integrated circuit, and element substrate
08/25/2011	US20110207291 Wafer bonding device and wafer bonding method
08/25/2011	US20110207290 Semiconductor device fabrication method
08/25/2011	US20110207289 Method of fabricating semiconductor device and electronic system
08/25/2011	US20110207288 Semiconductor device and a method of manufacturing the same and designing the same
08/25/2011	US20110207287 Method of manufacturing nonvolatile memory device
08/25/2011	US20110207286 Reprogrammable Fuse Structure and Method
08/25/2011	US20110207285 Method Of Forming Pattern Structure And Method Of Fabricating Semiconductor Device Using The Same
08/25/2011	US20110207283 High temperature atomic layer deposition of dielectric oxides
08/25/2011	US20110207282 Methods for Producing a Tunnel Field-Effect Transistor
08/25/2011	US20110207281 Semiconductor device and method of producing semiconductor device
08/25/2011	US20110207280 Scavanging metal stack for a high-k gate dielectric
08/25/2011	US20110207279 Integrated method for forming high-k metal gate finfet devices
08/25/2011	US20110207278 Method of fabricating semiconductor device
08/25/2011	US20110207277 Method of forming a semiconductor device having vertical charge-compensated structure and sub-surface connecting layer
08/25/2011	US20110207276 Power mos device fabrication
08/25/2011	US20110207275 Method for producing semiconductor element
08/25/2011	US20110207274 Method for forming a split-gate memory cell
08/25/2011	US20110207273 Methods of Manufacturing Transistors
08/25/2011	US20110207272 Semiconductor device and manufacturing process therefor
08/25/2011	US20110207271 Wiring structure in a semiconductor device, method of forming the wiring structure, semiconductor device including the wiring structure and method of manufacturing the semiconductor device
08/25/2011	US20110207270 Semiconductor device and method of manufacturing the same

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