| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/06/2011 | US8012785 Method of fabricating an integrated CMOS-MEMS device |
| 09/06/2011 | US8012784 Method for producing group III nitride semiconductor light emitting device, group III nitride semiconductor light emitting device, and lamp |
| 09/06/2011 | US8012783 Semiconductor element and method for manufacturing same |
| 09/06/2011 | US8012782 Method for producing display device |
| 09/06/2011 | US8012780 Method of fabricating semiconductor laser |
| 09/06/2011 | US8012779 Gallium nitride-based light emitting diode and method of manufacturing the same |
| 09/06/2011 | US8012778 LED package and fabricating method thereof |
| 09/06/2011 | US8012777 Packaging process of light emitting diode |
| 09/06/2011 | US8012776 Methods of manufacturing imaging device packages |
| 09/06/2011 | US8012775 Method of forming a light activated silicon controlled switch |
| 09/06/2011 | US8012774 Coating process for a light-emitting diode (LED) |
| 09/06/2011 | US8012773 Method for manufacturing liquid discharge head |
| 09/06/2011 | US8012772 Substrate treating apparatus, substrate treating method, and method for manufacturing high-voltage device |
| 09/06/2011 | US8012673 Processing a copolymer to form a polymer memory cell |
| 09/06/2011 | US8012665 Positive photosensitive composition and pattern forming method using the same |
| 09/06/2011 | US8012653 Substrate for EUV mask blanks |
| 09/06/2011 | US8012594 Functional film containing structure and method of manufacturing functional film |
| 09/06/2011 | US8012592 Monolithically integrated semiconductor materials and devices |
| 09/06/2011 | US8012580 Adhesive bonding sheet, semiconductor device using the same, and method for manufacturing such semiconductor device |
| 09/06/2011 | US8012403 Method for producing high purity low dielectric constant ceramic and hybrid ceramic films |
| 09/06/2011 | US8012365 Deep anisotropic silicon etch method |
| 09/06/2011 | US8012314 Manufacturing method and apparatus of phase shift mask blank |
| 09/06/2011 | US8012306 Plasma processing reactor with multiple capacitive and inductive power sources |
| 09/06/2011 | US8012305 Exhaust assembly for a plasma processing system |
| 09/06/2011 | US8012304 Plasma reactor with a multiple zone thermal control feed forward control apparatus |
| 09/06/2011 | US8012303 Container cleanliness measurement apparatus and method, and substrate processing system |
| 09/06/2011 | US8012298 Manufacturing method for organic light emitting display |
| 09/06/2011 | US8012289 Method of fabricating a release substrate |
| 09/06/2011 | US8012261 ALD apparatus and method |
| 09/06/2011 | US8011999 Polishing pad, method for manufacturing the polishing pad |
| 09/06/2011 | US8011933 Substrate connecting connector and semiconductor device socket, cable connector, and board-to-board connector having substrate connecting connector |
| 09/06/2011 | US8011917 Compression molding of an electronic device |
| 09/06/2011 | US8011762 Droplet discharging head and method of manufacturing the same, and droplet discharging device and method of manufacturing the same |
| 09/06/2011 | US8011648 Clamp for holding work-pieces of any size upon a pallet support table |
| 09/06/2011 | US8011646 Structure of vacuum chuck for absorbing substrate |
| 09/06/2011 | US8011513 Semiconductor workpiece carriers and methods for processing semiconductor workpieces |
| 09/06/2011 | US8011319 Method for oxidizing a layer, and associated holding devices for a substrate |
| 09/06/2011 | US8011317 Advanced mixing system for integrated tool having site-isolated reactors |
| 09/06/2011 | US8011315 Thin film forming apparatus |
| 09/06/2011 | US8011089 Method of repairing segmented contactor |
| 09/01/2011 | WO2011106750A2 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system |
| 09/01/2011 | WO2011106346A1 Reducing susceptibility to electrostatic discharge damage during die-to-die bonding for 3-d packaged integrated circuits |
| 09/01/2011 | WO2011106337A1 Methods of making transistor including reentrant profile |
| 09/01/2011 | WO2011106235A2 Methods and apparatus for deposition processes |
| 09/01/2011 | WO2011106218A2 Ultra low dielectric materials using hybrid precursors containing silicon with organic functional groups by plasma-enhanced chemical vapor deposition |
| 09/01/2011 | WO2011106215A2 Growth of group iii-v material layers by spatially confined epitaxy |
| 09/01/2011 | WO2011106203A2 Spalling for a semiconductor substrate |
| 09/01/2011 | WO2011106176A1 Systems and methods for a continuous-well decoupling capacitor |
| 09/01/2011 | WO2011106165A1 Vertical transistor including reentrant profile |
| 09/01/2011 | WO2011106144A1 Methods for reducing the width of the unbonded region in soi structures and wafers and soi structures produced by such methods |
| 09/01/2011 | WO2011106075A2 A microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure |
| 09/01/2011 | WO2011106072A2 Use of ruthenium tetroxide as a precursor and reactant for thin film depositions |
| 09/01/2011 | WO2011106064A1 Processing methods and apparatus with temperature distribution control |
| 09/01/2011 | WO2011105961A1 Method of stacking chips |
| 09/01/2011 | WO2011105908A1 Apparatus and method for reactive ion etching |
| 09/01/2011 | WO2011105873A2 Method for controlling synchronization when applying dc power of pulse plasma |
| 09/01/2011 | WO2011105870A2 Method for easily forming a nanopattern by means of reactive ion etching alone without using a mask |
| 09/01/2011 | WO2011105855A2 Apparatus for synchronizing a high-frequency voltage and a direct current bias voltage |
| 09/01/2011 | WO2011105830A2 Method for producing a polycrystalline silicon layer, and apparatus for forming a metal mixed layer for same |
| 09/01/2011 | WO2011105737A2 Gate valve |
| 09/01/2011 | WO2011105730A2 Method for manufacturing retainer ring of chemical mechanical polishing device |
| 09/01/2011 | WO2011105665A1 Manufacturing method of microelectrode array |
| 09/01/2011 | WO2011105598A1 Copper column and process for producing same |
| 09/01/2011 | WO2011105494A1 Abrasive pad |
| 09/01/2011 | WO2011105484A1 Transfer system and transfer method |
| 09/01/2011 | WO2011105461A1 Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate |
| 09/01/2011 | WO2011105450A1 Method for designing resin-coated saw wire |
| 09/01/2011 | WO2011105443A1 Negative photosensitive resin composition, interlayer insulating film and method of formation of same |
| 09/01/2011 | WO2011105434A1 Semiconductor device |
| 09/01/2011 | WO2011105399A1 Fluorine-containing lactone monomeric compound, fluorine -containing lactone polymeric compound, resist fluid and topcoating composition that contain same, and method for pattern formation using same |
| 09/01/2011 | WO2011105370A1 Semiconductor device manufacturing method, substrate manufacturing method, and substrate processing apparatus |
| 09/01/2011 | WO2011105368A1 Silicon-containing resist underlayer-forming composition containing amic acid |
| 09/01/2011 | WO2011105343A1 Semiconductor device, method for manufacturing same, and display device |
| 09/01/2011 | WO2011105339A1 Base wire for coated saw wire |
| 09/01/2011 | WO2011105331A1 Etching method and etching apparatus |
| 09/01/2011 | WO2011105326A1 Joining device |
| 09/01/2011 | WO2011105325A1 Joining method, program, and computer recording medium |
| 09/01/2011 | WO2011105310A1 Semiconductor device |
| 09/01/2011 | WO2011105282A1 Method for forming conductor traces and method for manufacturing semiconductor substrates |
| 09/01/2011 | WO2011105268A1 Method for manufacturing semiconductor device |
| 09/01/2011 | WO2011105255A1 Manufacturing method for semiconductor wafer |
| 09/01/2011 | WO2011105249A1 Pattern forming method |
| 09/01/2011 | WO2011105198A1 Semiconductor device |
| 09/01/2011 | WO2011105194A1 Nitride semiconductor light emitting element and method for manufacturing same |
| 09/01/2011 | WO2011105189A1 Laser illumination device |
| 09/01/2011 | WO2011105184A1 Method for manufacturing semiconductor device |
| 09/01/2011 | WO2011105183A1 Method for manufacturing semiconductor element and deposition apparatus |
| 09/01/2011 | WO2011105163A1 Plasma film-forming apparatus and plasma film-forming method |
| 09/01/2011 | WO2011105158A1 Plasma processing apparatus |
| 09/01/2011 | WO2011105122A1 Component-adjustment member and monocrystal growth device provided therewith |
| 09/01/2011 | WO2011105104A1 Tape adhering apparatus, tape holding unit, and tape adhering method |
| 09/01/2011 | WO2011105100A1 Substrate separation device, load lock device, substrate adhesion device and substrate separation method |
| 09/01/2011 | WO2011105066A1 Semiconductor substrate, semiconductor device, and method for manufacturing semiconductor substrate |
| 09/01/2011 | WO2011105056A1 Electronic device and method for manufacturing electronic device |
| 09/01/2011 | WO2011105047A1 In-Ga-Sn OXIDE SINTER, TARGET, OXIDE SEMICONDUCTOR FILM, AND SEMICONDUCTOR ELEMENT |
| 09/01/2011 | WO2011105016A1 Defect inspection device and method of inspecting defect |
| 09/01/2011 | WO2011105010A1 Semiconductor substrate support susceptor for vapor-phase epitaxy, epitaxial wafer manufacturing device, and epitaxial wafer manufacturing method |
| 09/01/2011 | WO2011104970A1 Etching device, control simulator, and semiconductor device manufacturing method |
| 09/01/2011 | WO2011104958A1 Plasma processing device |
| 09/01/2011 | WO2011104938A1 Method for producing circuit board, circuit board and display device |