Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2011
09/08/2011US20110217851 Conformal layers by radical-component cvd
09/08/2011US20110217850 Methods for oxidation of a semiconductor device
09/08/2011US20110217849 Device and method for producing dielectric layers in microwave plasma
09/08/2011US20110217848 Photoresist removing processor and methods
09/08/2011US20110217847 Semiconductor device and manufacturing method thereof
09/08/2011US20110217846 Method for manufacturing semiconductor device
09/08/2011US20110217845 Polishing Composition and Polishing Method Using The Same
09/08/2011US20110217844 Method of manufacturing semiconductor device
09/08/2011US20110217843 Patterning mask and method of formation of mask using step double patterning
09/08/2011US20110217842 Method for forming semiconductor device
09/08/2011US20110217841 Method of forming through silicon via with dummy structure
09/08/2011US20110217840 Method for Forming Self-Assembled Mono-Layer Liner for Cu/Porous Low-k Interconnections
09/08/2011US20110217839 Interconnect arrangement and associated production methods
09/08/2011US20110217838 Method for forming interconnect structure having airgap
09/08/2011US20110217837 Connecting pad producing method
09/08/2011US20110217836 Programmable Via Devices in Back End of Line Level
09/08/2011US20110217835 Methods of fabricating semiconductor devices with sidewall conductive patterns
09/08/2011US20110217834 Method and apparatus for single step selective nitridation
09/08/2011US20110217833 Method of manufacturing a semiconductor device using an etchant
09/08/2011US20110217832 Method of filling a deep trench in a substrate
09/08/2011US20110217831 Nonvolatile semiconductor memory and method of manufacturing the same
09/08/2011US20110217830 Plasma doping method and apparatus
09/08/2011US20110217829 Semiconductor devices with non-punch-through semiconductor channels having enhanced conduction and methods of making
09/08/2011US20110217828 Methods of fabricating vertical semiconductor device utilizing phase changes in semiconductor materials
09/08/2011US20110217827 Removing Undesirable Nanotubes During Nanotube Device Fabrication
09/08/2011US20110217826 Method of fabricating semiconductor device
09/08/2011US20110217825 Forming structures that include a relaxed or pseudo-relaxed layer on a substrate
09/08/2011US20110217824 Electrode structure, method of fabricating the same, and semiconductor device
09/08/2011US20110217823 Storage capacitor having an increased aperture ratio and method of manufacturing the same
09/08/2011US20110217822 Method for manufacturing semiconductor device
09/08/2011US20110217821 Method of manufacturing doping patterns
09/08/2011US20110217820 Methods of fabricating semiconductor devices
09/08/2011US20110217819 Dram layout with vertical fets and method of formation
09/08/2011US20110217818 Phase change memory cell having vertical channel access transistor
09/08/2011US20110217817 Semiconductor memory device and method of manufacturing the same
09/08/2011US20110217816 Field effect transistor and method for fabricating the same
09/08/2011US20110217815 Manufacturing method of oxide semiconductor film and manufacturing method of transistor
09/08/2011US20110217814 Method for singulating electronic components from a substrate
09/08/2011US20110217813 Method of fabricating multi-chip package structure
09/08/2011US20110217812 Integrated circuit device and method for fabricating same with an interposer substrate
09/08/2011US20110217811 Method for manufacturing microcrystalline semiconductor film and method for manufacturing semiconductor device
09/08/2011US20110217806 Radiofrequency plasma reactor and method for manufacturing vacuum process treated substrates
09/08/2011US20110217805 Semiconductor device and method of manufacturing the same
09/08/2011US20110217804 Thermally activated micromirror and fabrication method
09/08/2011US20110217801 Semiconductor device and manufacturing method thereof
09/08/2011US20110217800 Method for forming a light conversion material
09/08/2011US20110217799 Method of separating semiconductor dies
09/08/2011US20110217798 Optical transmission module and manufacturing method of the same
09/08/2011US20110217797 Method of manufacturing an ink jet print head
09/08/2011US20110217796 Etching method and apparatus
09/08/2011US20110217795 Semiconductor manufacturing apparatus and semiconductor manufacturing method
09/08/2011US20110217794 Microelectronic workpiece processing systems and associated methods of color correction
09/08/2011US20110217793 Methods of Processing a Substrate and Forming a Micromagnetic Device
09/08/2011US20110217792 Semiconductor device and method of manufacturing the same
09/08/2011US20110217763 A semiconductor for measuring biological interactions
09/08/2011US20110217469 Methods and Systems of Transferring, Docking and Processing Substrates
09/08/2011US20110217148 Vacuum processing apparatus and program
09/08/2011US20110216803 System and process for calibrating pyrometers in thermal processing chambers
09/08/2011US20110216585 Metal containing materials
09/08/2011US20110216566 Semiconductor device and method for manufacturing semiconductor device
09/08/2011US20110216328 Polishing monitoring method, polishing method, and polishing monitoring apparatus
09/08/2011US20110216303 Method for adjusting a projection objective
09/08/2011US20110216279 Thin film transistor array panel for liquid crystal display
09/08/2011US20110215824 Operation voltage supply apparatus
09/08/2011US20110215482 Semiconductor device
09/08/2011US20110215480 Stress resistant micro-via structure for flexible circuits
09/08/2011US20110215477 Integrated circuits including air gaps around interconnect structures, and fabrication methods thereof
09/08/2011US20110215476 Method for fabricating circuit component
09/08/2011US20110215475 Multi-surface ic packaging structures
09/08/2011US20110215474 Integrated circuit structure and method for manufacturing the same
09/08/2011US20110215473 Semiconductor device and method for manufacturing same
09/08/2011US20110215468 Bump-on-Lead Flip Chip Interconnection
09/08/2011US20110215467 Metal post chip connecting device and method free to use soldering material
09/08/2011US20110215465 Multi-chip integrated circuit
09/08/2011US20110215464 Semiconductor package with embedded die and its methods of fabrication
09/08/2011US20110215463 Compressive ring structure for flip chip packaging
09/08/2011US20110215462 Semiconductor device and manufacturing method thereof
09/08/2011US20110215461 Method for manufacturing a semiconductor device and a semiconductor device
09/08/2011US20110215458 Semiconductor Device and Method of Forming Package-on-Package Structure Electrically Interconnected Through TSV in WLCSP
09/08/2011US20110215457 Dummy TSV to Improve Process Uniformity and Heat Dissipation
09/08/2011US20110215456 Thin package system with external terminals and method of manufacture thereof
09/08/2011US20110215452 Semiconductor package, substrate, electronic component, and method of mounting semiconductor package
09/08/2011US20110215450 Integrated circuit packaging system with encapsulation and method of manufacture thereof
09/08/2011US20110215449 Semiconductor Device and Method of Forming Wafer Level Multi-Row Etched Lead Package
09/08/2011US20110215448 Integrated circuit package system with package stacking and method of manufacture thereof
09/08/2011US20110215445 Methods to Prepare Silicon-Containing Films
09/08/2011US20110215443 Multichip semiconductor device, chip therefor and method of formation thereof
09/08/2011US20110215441 Silicon nanostructures and method for producing the same and application thereof
09/08/2011US20110215439 Epitaxial growth substrate, manufacturing method thereof, nitride-based compound semiconductor substrate, and nitride-based compound semiconductor self-supporting substrate
09/08/2011US20110215436 Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices
09/08/2011US20110215435 Semiconductor device and method of manufacturing semiconductor device
09/08/2011US20110215431 Electrical contact configuration of micro-electromechanical component and fabrication method
09/08/2011US20110215429 Manufacturing method of electronic device package, electronic device package, and oscillator
09/08/2011US20110215428 Mems structure and manufacturing method thereof
09/08/2011US20110215426 Semiconductor device and manufacturing method of semiconductor device
09/08/2011US20110215425 Tunneling field-effect transistor with direct tunneling for enhanced tunneling current
09/08/2011US20110215424 Semiconductor device and manufacturing method thereof
09/08/2011US20110215423 Semiconductor device and a manufacturing method thereof
09/08/2011US20110215422 Penetrating implant for forming a semiconductor device
09/08/2011US20110215421 Method of fabricating semiconductor device