Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2011
09/14/2011CN102184894A Semiconductor device and forming method thereof, vertical double diffused metal oxide semiconductor (VDMOS) transistor and forming method of VDMOS transistor
09/14/2011CN102184893A Process for manufacturing microcrystalline-silicon-based thin film resistor (TFT) active matrix
09/14/2011CN102184892A Manufacturing method of soft board used for flexible display
09/14/2011CN102184891A Intelligent label, its fabrication method and management process of the goods with the same
09/14/2011CN102184890A Metal interconnecting structure forming method and metal interconnecting structure
09/14/2011CN102184889A Manufacturing methods of contact hole and contact hole plug
09/14/2011CN102184888A Multilayer copper interconnection manufacturing method
09/14/2011CN102184887A Method for forming shallow trench isolation (STI) structure used for flash memory
09/14/2011CN102184886A Manufacturing method of shallow trench isolation structure
09/14/2011CN102184885A Groove isolating structure and manufacturing method thereof
09/14/2011CN102184884A Deep trench filling method of superstructure
09/14/2011CN102184883A Method for filling deep trench having superstructure
09/14/2011CN102184882A Method for forming composite functional material structure
09/14/2011CN102184881A Sorting method before silicon wafer dry etching
09/14/2011CN102184880A Unit for supporting substrate and equipment equipped with the unit for processing substrate
09/14/2011CN102184879A TCAD simulation calibration method of SOI field effect transistor
09/14/2011CN102184878A System and method for feeding back image quality of template for wafer alignment
09/14/2011CN102184877A Method for measuring temperature by using thermal wave meter
09/14/2011CN102184876A Method for measuring wafer positioning error during laser processing
09/14/2011CN102184875A Manufacturing method of nail head gold bump
09/14/2011CN102184874A Chip bonding system and method
09/14/2011CN102184873A Method for preparing diamond-silicon carbide electronic packaging material fast
09/14/2011CN102184872A Semiconductor packaging bonding process
09/14/2011CN102184871A Method for manufacturing high-voltage lateral dual-diffusion N-channel metal oxide semiconductor (NMOS) based on standard complementary metal-oxide-semiconductor transistor (CMOS) process
09/14/2011CN102184870A UMOS (U-groove-metal-oxide-silicon) transistor and forming method thereof
09/14/2011CN102184869A Method for manufacturing metal oxide semiconductor (MOS) transistor isolation area and MOS transistor
09/14/2011CN102184868A Method for improving reliability of apex gate oxide of trench gate
09/14/2011CN102184867A Manufacturing method of EDMOS (Extended Drain Metal Oxide Semiconductor) device
09/14/2011CN102184866A Thin-film transistor and manufacturing method thereof
09/14/2011CN102184865A Thin film transistor and manufacturing method thereof
09/14/2011CN102184864A Thin film transistor and manufacturing method thereof
09/14/2011CN102184863A RFLDMOS (Radio Frequency Laterally Diffused Metal Oxide Semiconductor) based on self-aligned silicide and tungsten plug structure and manufacturing method thereof
09/14/2011CN102184862A Method for etching grid groove of groove power device
09/14/2011CN102184861A Trench filling method and trench structure of cold MOS (metal oxide semiconductor)
09/14/2011CN102184860A Cold MOS (Metal Oxide Semiconductor) groove padding method and cold MOS groove structure
09/14/2011CN102184859A Manufacturing method of cold metal oxide semiconductor (MOS) super-junction structure and cold MOS super-junction structure
09/14/2011CN102184858A Preparation method of graphene field effect transistor
09/14/2011CN102184857A Method for preparing trench field effect tube
09/14/2011CN102184856A Method for manufacturing groove type longitudinal semiconductor device
09/14/2011CN102184855A Method for manufacturing non-punch-through (NPT) type groove IGBT (Insulated Gate Bipolar Transistor) with field stop structure
09/14/2011CN102184854A Method for protecting front face metal pattern during thermal annealing of back face of power device
09/14/2011CN102184853A Manufacturing method of Schottky diode
09/14/2011CN102184852A Method for etching double-doped polysilicon
09/14/2011CN102184851A Photoresists and methods for use thereof
09/14/2011CN102184850A Depth-diffusion method for preparing semiconductor device
09/14/2011CN102184849A Method for manufacturing graphene-based field effect transistor
09/14/2011CN102184848A Metal nanocrystalline storage capacitor and preparation method thereof
09/14/2011CN102184847A Semiconductor structure and forming method thereof, PMOS (P-channel Metal Oxide Semiconductor) transistor and forming method thereof
09/14/2011CN102184846A Preparation method of patterned substrate
09/14/2011CN102184845A Method for enhancing on-chip uniformity of titanium silicide square resistor
09/14/2011CN102184844A Voltage protecting ring of channel metal-oxide-semiconductor field effect transistor (MOSFET)-based diode and manufacturing method thereof
09/14/2011CN102184843A Chip cutting protection ring of diode based on groove MOSFET (metal-oxide-semiconductor field effect transistor) and manufacturing method thereof
09/14/2011CN102184842A Method for patterning sapphire by combining wet etching and dry etching
09/14/2011CN102184841A Method and system for recycling ultrapure water of wafer foundry machine platform
09/14/2011CN102184840A Method for manufacturing dual-layer quartz cylinder
09/14/2011CN102184839A Thermal filed structure of semiconductor thermal treatment vacuum furnace
09/14/2011CN102184838A 清洗系统 Cleaning System
09/14/2011CN102184837A Lamp unit
09/14/2011CN102183861A Array substrate, manufacturing method thereof and liquid crystal display panel
09/14/2011CN102183509A Plasma monitoring method and plasma monitoring device
09/14/2011CN102181819A Plasma nitridation processing method
09/14/2011CN102181232A Composition for low downforce chemically mechanical polishing of coppers in ULSI (Ultra Large Scale Integrated Circuit) multi-layered copper wiring
09/14/2011CN102179757A Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus
09/14/2011CN102179732A Method and device for enhancing chemical mechanical polishing process
09/14/2011CN102179731A Preparation of synthetic quartz glass substrates
09/14/2011CN102179349A Coating device, and method for replacing liquid material
09/14/2011CN102179343A Equipment and method for spraying solution
09/14/2011CN101924142B GaAs Schottky variable capacitance diode and manufacture method thereof
09/14/2011CN101882624B Structure with high-Ge strained layer formed on insulating substrate and forming method
09/14/2011CN101866834B Method for preparing SiGe material of high-Ge content
09/14/2011CN101866823B Plasma processing equipment and method for placing workpieces to be processed on static chuck thereof
09/14/2011CN101859852B Manufacturing process for improving capacity of aluminum gallium indium phosphorus light-emitting diodes
09/14/2011CN101853795B Low-temperature thermocompression bonding method
09/14/2011CN101818336B Processing apparatus and heater unit
09/14/2011CN101807538B Baseplate support device
09/14/2011CN101783296B Forming method of grid electrode side wall layer
09/14/2011CN101771051B Floating body cell structure of dynamic random access memory and manufacturing technology thereof
09/14/2011CN101770964B Test method for introducing charge in technology for forming passivation layer window
09/14/2011CN101770955B Method for manufacturing P-type metal oxide semiconductor
09/14/2011CN101764115B Conducting structure for semiconductor integrated circuit and forming method thereof
09/14/2011CN101764042B Air sucking device and semiconductor processing device
09/14/2011CN101728249B Method for preparing single crystal transition layer of epitaxial compound semiconductor material on silicon chip
09/14/2011CN101728236B Silicone grease coating device for display device
09/14/2011CN101727111B Method, device and system for chamber pressure control
09/14/2011CN101720502B Arrays of inductive elements for minimizing radial non-uniformity in plasma
09/14/2011CN101719471B Method for manufacturing field effect transistor
09/14/2011CN101707214B Semiconductor device
09/14/2011CN101699624B Thin-film transistor panel having structure that suppresses characteristic shifts and method for manufacturing the same
09/14/2011CN101699622B Packaging structure and packaging method of semiconductor device
09/14/2011CN101692430B Method for detecting random defects of silicon gate of CMOS process
09/14/2011CN101692417B Control method of platform
09/14/2011CN101689516B Method for manufacturing the semiconductor element mounting structure and pressurizing tool
09/14/2011CN101689498B Plasma processing with enhanced charge neutralization and process control
09/14/2011CN101685789B Front-open wafer box with integrally formed wafer limiting piece module
09/14/2011CN101685269B Exposure apparatus and device producing method
09/14/2011CN101681838B Method for suppressing lattice defects in a semiconductor substrate
09/14/2011CN101669198B Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer
09/14/2011CN101667524B Reaction chamber and plasma treatment device applying same
09/14/2011CN101663759B Electronic device with improved ohmic contact and manufacture method thereof
09/14/2011CN101663746B Semiconductor integrated circuit
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