| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/13/2011 | US8017413 Field emission array having carbon microstructure and method of manufacturing the same |
| 09/13/2011 | US8017412 Betavoltaic battery with a shallow junction and a method for making same |
| 09/13/2011 | US8017411 Dynamic adaptive sampling rate for model prediction |
| 09/13/2011 | US8017410 Power semiconductor devices having integrated inductor |
| 09/13/2011 | US8017305 Pattern forming method, semiconductor device manufacturing method and exposure mask set |
| 09/13/2011 | US8017295 Laser induced thermal imaging apparatus and laser induced thermal imaging method and organic light emitting display device using the same |
| 09/13/2011 | US8017287 Development method, method of manufacturing photomask, and method of manufacturing semiconductor device |
| 09/13/2011 | US8017285 Masking process using photoresist |
| 09/13/2011 | US8017245 Composition for preparing organic insulator |
| 09/13/2011 | US8017197 Plasma processing method and plasma processing apparatus |
| 09/13/2011 | US8017176 Robust activation method for negative electron affinity photocathodes |
| 09/13/2011 | US8016975 Etching system |
| 09/13/2011 | US8016941 Method and apparatus for manufacturing a semiconductor |
| 09/13/2011 | US8016541 Substrate handling system for aligning and orienting substrates during a transfer operation |
| 09/13/2011 | US8016537 Inline-type wafer conveyance device |
| 09/13/2011 | US8016277 Flexure based macro motion translation stage |
| 09/13/2011 | US8016114 Reduction of electric-field-induced damage in field-sensitive articles |
| 09/13/2011 | US8015702 Metal substrate having electronic devices formed thereon |
| 09/13/2011 | CA2452885C Ammonia-free alkaline microelectronic cleaning compositions with improved substrate compatibility |
| 09/09/2011 | WO2011109811A2 Substrate clean solution for copper contamination removal |
| 09/09/2011 | WO2011109590A1 Damage free cleaning using narrow band megasonic cleaning |
| 09/09/2011 | WO2011109560A1 Epitaxial lift off systems and methods |
| 09/09/2011 | WO2011109242A1 Methods of forming a low resistance silicon metal contact |
| 09/09/2011 | WO2011109192A1 Systems and methods for application of optical materials to optical elements |
| 09/09/2011 | WO2011109044A1 Multi-chip integrated circuit |
| 09/09/2011 | WO2011108768A1 Embedded gate type silicon carbide static induction transistor and method for manufacturing same |
| 09/09/2011 | WO2011108750A1 Pattern transfer method and apparatus |
| 09/09/2011 | WO2011108744A1 Actinic ray-sensitive or radiation-sensitive resin composition, and resist film and pattern forming method using the same |
| 09/09/2011 | WO2011108738A1 Semiconductor element and method for producing the same |
| 09/09/2011 | WO2011108710A1 Crystalline film, device, and production methods for crystalline film and device |
| 09/09/2011 | WO2011108706A1 Single crystal substrate, production method for single crystal substrate, production method for single crystal substrate with multilayer film, and device production method |
| 09/09/2011 | WO2011108705A1 Photosensitive resin composition |
| 09/09/2011 | WO2011108703A1 Single crystal substrate with multilayer film, production method for single crystal substrate with multilayer film, and device production method |
| 09/09/2011 | WO2011108698A1 Internal reforming substrate for epitaxial growth, internal reforming substrate with multilayer film, semiconductor device, bulk semiconductor substrate, and production methods therefor |
| 09/09/2011 | WO2011108676A1 Robot hand |
| 09/09/2011 | WO2011108667A1 Radiation-sensitive resin composition, resist pattern forming method, and sulfonium compound |
| 09/09/2011 | WO2011108665A1 Radiation-sensitive resin composition and resist pattern formation method |
| 09/09/2011 | WO2011108664A1 Optical semiconductor device |
| 09/09/2011 | WO2011108663A1 Plasma etching method, method for producing semiconductor device, and plasma etching device |
| 09/09/2011 | WO2011108640A1 Crystal growing apparatus, method for manufacturing nitride compound semiconductor crystal, and nitride compound semiconductor crystal |
| 09/09/2011 | WO2011108615A1 Semiconductor transistor |
| 09/09/2011 | WO2011108614A1 Semiconductor transistor production method |
| 09/09/2011 | WO2011108533A1 Method for producing semiconductor element substrate |
| 09/09/2011 | WO2011108519A1 Semiconductor epitaxial substrate |
| 09/09/2011 | WO2011108484A1 Method for manufacturing semiconductor light emitting element, semiconductor light emitting element, lamp, electronic device and mechanical apparatus |
| 09/09/2011 | WO2011108475A1 Semiconductor memory device and semiconductor device |
| 09/09/2011 | WO2011108470A1 Reflection-type mask blank for euv lithography and method for producing the same |
| 09/09/2011 | WO2011108463A1 Annealing device, annealing method, and thin-film substrate manufacturing system |
| 09/09/2011 | WO2011108456A1 Inter-low-permittivity layer insulating film, and method for forming inter-low-permittivity layer insulating film |
| 09/09/2011 | WO2011108445A1 Esd protection circuit and semiconductor device provided with same |
| 09/09/2011 | WO2011108436A1 Semiconductor device and bonding material for semiconductor device |
| 09/09/2011 | WO2011108424A1 Substrate storage container |
| 09/09/2011 | WO2011108422A1 Process for production of nitride semiconductor element, nitride semiconductor light-emitting element, and light-emitting device |
| 09/09/2011 | WO2011108382A1 Method for manufacturing semiconductor device |
| 09/09/2011 | WO2011108381A1 Semiconductor device and manufacturing method thereof |
| 09/09/2011 | WO2011108367A1 Boosting circuit and rfid tag including boosting circuit |
| 09/09/2011 | WO2011108359A1 Magnetic memory cell and magnetic random access memory |
| 09/09/2011 | WO2011108346A1 Manufacturing method of oxide semiconductor film and manufacturing method of transistor |
| 09/09/2011 | WO2011108327A1 Method for producing reconstituted wafers and method for producing semiconductor devices |
| 09/09/2011 | WO2011108280A1 Method for producing semiconductor device |
| 09/09/2011 | WO2011108259A1 Process for production of photoresist pattern |
| 09/09/2011 | WO2011108219A1 Thin film forming apparatus |
| 09/09/2011 | WO2011108215A1 Substrate storing device |
| 09/09/2011 | WO2011108199A1 Method for manufacturing thin film transistor, thin film transistor manufactured by the method, and active matrix substrate |
| 09/09/2011 | WO2011108191A1 Method for manufacturing semiconductor device, and semiconductor device |
| 09/09/2011 | WO2011108178A1 Semiconductor device |
| 09/09/2011 | WO2011108170A1 Stage device |
| 09/09/2011 | WO2011108137A1 Method for producing silicon carbide substrate |
| 09/09/2011 | WO2011108063A1 Compound semiconductor device and method for manufacturing same |
| 09/09/2011 | WO2011108050A1 Thin film transistor substrate and process for production thereof |
| 09/09/2011 | WO2011108049A1 Plasma generating apparatus |
| 09/09/2011 | WO2011108045A1 Circuit pattern inspection device and inspection method for same |
| 09/09/2011 | WO2011107924A1 Cleaning solvent and cleaning method for metallic compound |
| 09/09/2011 | WO2011107665A1 A method for the production of a conformal element, a conformal element and uses of the same |
| 09/09/2011 | WO2011107364A2 Service device and service method |
| 09/09/2011 | WO2011107158A1 pHEMT HAVING A CHANNEL LENGTH LARGER THAN THE CHANNEL WIDTH |
| 09/09/2011 | WO2011107141A1 High voltage mos transistor |
| 09/09/2011 | WO2011106973A1 Method for forming channel materials |
| 09/09/2011 | WO2011106959A1 Movable rotary loading mechanism |
| 09/09/2011 | WO2011106860A1 Deposition of thin film dielectrics and light emitting nano-layer structures |
| 09/09/2011 | WO2011088384A3 Solder pillars in flip chip assembly and manufacturing method thereof |
| 09/09/2011 | WO2011084339A3 Nickel-silicide formation with differential pt composition |
| 09/09/2011 | WO2011084337A3 Method and apparatus for processing bevel edge |
| 09/09/2011 | WO2011084262A3 Semiconductor device having doped epitaxial region and its methods of fabrication |
| 09/09/2011 | WO2011084235A3 Glass core substrate for integrated circuit devices and methods of making the same |
| 09/09/2011 | WO2011081741A3 Electrical coupling of wafer structures |
| 09/09/2011 | WO2011072042A3 Low damage photoresist strip method for low-k dielectrics |
| 09/09/2011 | WO2011070156A3 Device and method for the ion beam modification of a semiconductor substrate |
| 09/09/2011 | WO2011068730A3 Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads |
| 09/09/2011 | WO2011065965A3 An electrostatic chuck with an angled sidewall |
| 09/09/2011 | WO2011063091A3 Apparatus and method for enhancing the cool down of radiatively heated substrates |
| 09/09/2011 | WO2011059749A3 Vertically integrated processing chamber |
| 09/09/2011 | WO2011059186A3 Soldering jig, surface array antenna and a production method therefor |
| 09/09/2011 | WO2011043580A3 Method for fabricating a plastic electrode film |
| 09/09/2011 | WO2011037388A3 3-dimensional nanostructure having nanomaterials stacked on graphene substrate and fabrication method thereof |
| 09/09/2011 | WO2010042509A9 Techniques for ion implantation of molecular ions |
| 09/09/2011 | WO2009128786A3 A system and process for dicing integrated circuits |
| 09/09/2011 | CA2765310A1 Method for manufacturing silicon carbide substrate |
| 09/08/2011 | US20110218659 Substrate processing apparatus |
| 09/08/2011 | US20110217852 Substrate processing apparatus and method of manufacturing semiconductor device |