Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2011
10/27/2011WO2011132782A1 p-TYPE DIFFUSION LAYER FORMING COMPOSITION, METHOD OF PRODUCING p-TYPE DIFFUSION LAYER, AND METHOD OF PRODUCING SOLAR CELL ELEMENT
10/27/2011WO2011132781A1 n-TYPE DIFFUSION LAYER FORMING COMPOSITION, METHOD OF PRODUCING n-TYPE DIFFUSION LAYER, AND METHOD OF PRODUCING SOLAR CELL ELEMENT
10/27/2011WO2011132780A1 p-TYPE DIFFUSION LAYER-FORMING COMPOSITION, p-TYPE DIFFUSION LAYER PRODUCTION METHOD AND SOLAR CELL COMPONENT PRODUCTION METHOD
10/27/2011WO2011132779A1 n-TYPE DIFFUSION LAYER-FORMING COMPOSITION, n-TYPE DIFFUSION LAYER PRODUCTION METHOD AND SOLAR CELL COMPONENT PRODUCTION METHOD
10/27/2011WO2011132778A1 COMPOSITION THAT FORMS p-TYPE DIFFUSION LAYER, METHOD FOR PRODUCING p-TYPE DIFFUSION LAYER, AND METHOD FOR PRODUCING SOLAR CELL ELEMENT
10/27/2011WO2011132777A1 COMPOSITION THAT FORMS n-TYPE DIFFUSION LAYER, METHOD FOR PRODUCING n-TYPE DIFFUSION LAYER, AND METHOD FOR PRODUCING SOLAR CELL ELEMENT
10/27/2011WO2011132775A1 Method for manufacturing a thin-film solar cell
10/27/2011WO2011132769A1 Semiconductor device, rfid tag using same, and display device
10/27/2011WO2011132766A1 Reviewing method and reviewing device
10/27/2011WO2011132764A1 Pattern forming method, chemical amplification resist composition and resist film
10/27/2011WO2011132744A1 Method for producing semiconductor device
10/27/2011WO2011132670A1 Wire bonding method for power semiconductor device
10/27/2011WO2011132654A1 Method for producing composite substrate
10/27/2011WO2011132648A1 Film for back surface of flip-chip semiconductor, dicing-tape-integrated film for back surface of semiconductor, process for producing semiconductor device, and flip-chip semiconductor device
10/27/2011WO2011132647A1 Film for back surface of flip-chip semiconductor
10/27/2011WO2011132644A1 Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistor
10/27/2011WO2011132641A1 Composition for formation of lithographic resist underlayer film which contains resin containing polyimide structure
10/27/2011WO2011132630A1 Semiconductor device, semiconductor device manufacturing device, semiconductor device manufacturing method, and ic tag
10/27/2011WO2011132625A1 Manufacturing method of semiconductor device
10/27/2011WO2011132616A1 Highly abrasion-resistant imprint material
10/27/2011WO2011132613A1 Inspection contact element and inspection jig
10/27/2011WO2011132602A1 Glass plate conveyance method, glass plate conveyance device, and production method for glass plate products
10/27/2011WO2011132595A1 Adhesive sheet for semiconductor wafer processing
10/27/2011WO2011132591A1 Method for manufacturing semiconductor device
10/27/2011WO2011132590A1 Method for manufacturing semiconductor device
10/27/2011WO2011132559A1 Laser annealing method, device, and microlens array
10/27/2011WO2011132556A1 Method for manufacturing semiconductor device
10/27/2011WO2011132553A1 Substrate storage container
10/27/2011WO2011132548A1 Semiconductor device and manufacturing method thereof
10/27/2011WO2011132529A1 Method for manufacturing semiconductor device
10/27/2011WO2011132494A1 Plasma processing device
10/27/2011WO2011132492A1 Thin film capacitor
10/27/2011WO2011132454A1 Plasma processing device, plasma processing method, and method for producing semiconductor element
10/27/2011WO2011132425A1 Organic thin-film transistor
10/27/2011WO2011132423A1 Non-volatile storage device and method for manufacturing the same
10/27/2011WO2011132418A1 Deposition method
10/27/2011WO2011132396A1 A method for joining a film onto a substrate
10/27/2011WO2011132394A1 Light emitting diode
10/27/2011WO2011132384A1 Device and method for producing electronic device, and pair of compressed members thereof
10/27/2011WO2011132376A1 Thin-film transistor substrate
10/27/2011WO2011132353A1 Display device and process for producing same
10/27/2011WO2011132340A1 Method for producing low reflection substrate, method for manufacturing photovoltaic device, and photovoltaic device
10/27/2011WO2011132285A1 Semiconductor device and method for manufacturing same
10/27/2011WO2011132284A1 Semiconductor device, method for manufacturing same, and power supply device
10/27/2011WO2011132226A1 Pin card and test device using same
10/27/2011WO2011132225A1 Pin card and test device using same
10/27/2011WO2011131847A1 Microtechnology proven for transferring at least one layer
10/27/2011WO2011131769A1 Sensing of plasma process parameters
10/27/2011WO2011131519A1 Composite component and method for producing a composite component
10/27/2011WO2011131349A1 Methods of processing and inspecting semiconductor substrates
10/27/2011WO2011131283A1 Device and method for detaching a product substrate from a carrier substrate
10/27/2011WO2011131125A1 Integrated patch unit
10/27/2011WO2011131121A1 Gumming device and method
10/27/2011WO2011131090A1 Semiconductor substrate and method for fabricating the same
10/27/2011WO2011131053A1 Source and drain regions, contact holes and fabrication methods thereof
10/27/2011WO2011131028A1 Body-contacted silicon on insulator transistor structure and manufacturing method thereof
10/27/2011WO2011130993A1 Semiconductor device structure and manufacturing method thereof
10/27/2011WO2011130891A1 Memory device and fabrication method thereof
10/27/2011WO2011130890A1 Method of etching mo-based metal gate stacked strecture based aluminum nitride barrier layer
10/27/2011WO2011130889A1 Semiconductor device and method for fabricating the same
10/27/2011WO2011108137A9 Method for producing silicon carbide substrate
10/27/2011WO2011102659A9 Conductive ink and electronic device using same
10/27/2011WO2011100109A3 Gas distribution showerhead with coating material for semiconductor processing
10/27/2011WO2011097178A3 Methods for nitridation and oxidation
10/27/2011WO2011093995A3 Gcib-treated resistive device
10/27/2011WO2011093959A3 High voltage scrmos in bicmos process technologies
10/27/2011WO2011090626A3 Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio
10/27/2011WO2011090262A3 Lithography method using tilted evaporation
10/27/2011WO2011087609A3 Techniques and configurations to impart strain to integrated circuit devices
10/27/2011WO2011084752A3 In-situ ozone cure for radical-component cvd
10/27/2011WO2011084667A3 Interconnect structure with a mushroom-shaped oxide capping layer and method for fabricating same
10/27/2011WO2011084666A3 Superfilled metal contact vias for semiconductor devices
10/27/2011WO2011082180A3 Test systems and methods for testing electronic devices
10/27/2011WO2011079170A3 Automated thermal slide debonder
10/27/2011WO2011078512A3 Etchant and electronic device manufacturing method
10/27/2011WO2011075197A3 System and method for the relaxation of stress in phase change memory devices
10/27/2011WO2011071973A3 Methods of making semiconductor devices having implanted sidewalls and devices made thereby
10/27/2011WO2011071717A3 Backside stress compensation for gallium nitride or other nitride-based semiconductor devices
10/27/2011WO2011068936A3 Methods and apparatus for treating exhaust gas in a processing system
10/27/2011WO2011068352A3 Tray transfer apparatus and side push apparatus employed in same
10/27/2011WO2011066485A3 Systems, methods and products including features of laser irradiation and/or cleaving of silicon with other substrates or layers
10/27/2011WO2011063890A3 Installation for exposing a photovoltaic thin film module by means of light
10/27/2011WO2011057047A3 Process for anisotropic etching of semiconductors
10/27/2011US20110265047 Mask data processing method for optimizing hierarchical structure
10/27/2011US20110264260 Substrate-processing apparatus and method of transferring substrate in the same
10/27/2011US20110263183 Polishing solution distribution apparatus and polishing apparatus having the same
10/27/2011US20110263138 Substrate processing chamber with dielectric barrier discharge lamp assembly
10/27/2011US20110263137 Pretreatment processes within a batch ald reactor
10/27/2011US20110263136 Methods of forming a passivation layer
10/27/2011US20110263135 Semiconductor Processing Methods, And Methods For Forming Silicon Dioxide
10/27/2011US20110263134 Prevention of oxidation of substrate surfaces in process chambers
10/27/2011US20110263133 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
10/27/2011US20110263132 Method for forming an adhesive layer and adhesive composition
10/27/2011US20110263131 Method for manufacturing semiconductor device and semiconductor manufacturing apparatus
10/27/2011US20110263130 Methods for rf pulsing of a narrow gap capacitively coupled reactor
10/27/2011US20110263129 Method of etching semiconductor nanocrystals
10/27/2011US20110263128 Selective wet etching and textured surface planarization processes
10/27/2011US20110263127 Method for Fabricating Low-k Dielectric and Cu Interconnect
10/27/2011US20110263126 Method for manufacturing a silicon wafer
10/27/2011US20110263125 Method of forming mark in ic-fabricating process