H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2011
11/01/2011	US8048749 Method for manufacturing semiconductor device
11/01/2011	US8048748 Reducing contamination in a process flow of forming a channel semiconductor alloy in a semiconductor device
11/01/2011	US8048747 Method of manufacturing embedded metal-oxide-nitride-oxide-silicon memory device
11/01/2011	US8048746 Method of making flash memory cells and peripheral circuits having STI, and flash memory devices and computer systems having the same
11/01/2011	US8048745 Transistor and method of fabricating the same
11/01/2011	US8048744 Semiconductor device and fabricating method thereof
11/01/2011	US8048743 Method for fabricating vertical channel type nonvolatile memory device
11/01/2011	US8048742 Transistor including bulb-type recess channel and method for fabricating the same
11/01/2011	US8048741 Semiconductor memory device and method of fabricating the same
11/01/2011	US8048740 Vertical MOS transistor and method therefor
11/01/2011	US8048739 Method of manufacturing flash memory device
11/01/2011	US8048738 Method for forming a split gate device
11/01/2011	US8048735 Manufacturing method of semiconductor device
11/01/2011	US8048734 Bipolar transistor and method for making same
11/01/2011	US8048733 Method for fabricating a gate structure
11/01/2011	US8048732 Method for reducing leakage current and increasing drive current in a metal-oxide semiconductor (MOS) transistor
11/01/2011	US8048731 Method for reducing low frequency noise of transistor
11/01/2011	US8048730 Semiconductor device and method for manufacturing the same
11/01/2011	US8048729 Method for manufacturing semiconductor device
11/01/2011	US8048728 Display device, method for manufacturing display device, and SOI substrate
11/01/2011	US8048727 Methods of forming SRAM devices having buried layer patterns
11/01/2011	US8048726 SOI semiconductor device with reduced topography above a substrate window area
11/01/2011	US8048725 Method of forming pattern and method of producing electronic element
11/01/2011	US8048724 Semiconductor switching device
11/01/2011	US8048723 Germanium FinFETs having dielectric punch-through stoppers
11/01/2011	US8048722 Manufacturing method of semiconductor device
11/01/2011	US8048721 Method for filling multi-layer chip-stacked gaps
11/01/2011	US8048720 Wire loop and method of forming the wire loop
11/01/2011	US8048719 Semiconductor device and manufacturing method thereof
11/01/2011	US8048718 Semiconductor device comprising an excess resin portion, manufacturing method thereof, and apparatus for manufacturing semiconductor device comprising a excess resin portion
11/01/2011	US8048717 Method and system for bonding 3D semiconductor devices
11/01/2011	US8048716 Structure of embedded active components and manufacturing method thereof
11/01/2011	US8048715 Multi-chip module and methods
11/01/2011	US8048714 Semiconductor device and method for manufacturing a semiconductor device having improved heat dissipation capabilities
11/01/2011	US8048713 Process for manufacturing a CBRAM memory having enhanced reliability
11/01/2011	US8048710 Photoelectric conversion device and method for producing photoelectric conversion device
11/01/2011	US8048709 Photovoltaic panel, relative production process and plant for carrying out such a process
11/01/2011	US8048708 Method and apparatus providing an imager module with a permanent carrier
11/01/2011	US8048706 Ablative scribing of solar cell structures
11/01/2011	US8048705 Method and structure for a CMOS image sensor using a triple gate process
11/01/2011	US8048704 Method of forming a MEMS topped integrated circuit with a stress relief layer
11/01/2011	US8048703 Light emitting devices with inhomogeneous quantum well active regions
11/01/2011	US8048702 Method of fabricating nitride-based semiconductor optical device
11/01/2011	US8048701 Nitride semiconductor LED using a hybrid buffer layer and a fabrication method therefor
11/01/2011	US8048700 Semiconductor light emitting element and manufacturing method thereof
11/01/2011	US8048699 Dual panel type organic electroluminescent display device and method of fabricating the same
11/01/2011	US8048698 Thin film transistor array substrate and method for manufacturing the same
11/01/2011	US8048697 Method for manufacturing an LCD device employing a reduced number of photomasks including bottom and top gate type devices
11/01/2011	US8048696 Light emitting diode devices and manufacturing method thereof
11/01/2011	US8048694 Package base structure and associated manufacturing method
11/01/2011	US8048693 Methods and structures for relaxation of strained layers
11/01/2011	US8048692 LED light emitter with heat sink holder and method for manufacturing the same
11/01/2011	US8048691 Wiring forming method
11/01/2011	US8048690 Pressure-sensitive adhesive sheet and process for producing semiconductor device having same
11/01/2011	US8048689 Semiconductor chip with backside conductor structure
11/01/2011	US8048688 Method and apparatus for evaluation and improvement of mechanical and thermal properties of CNT/CNF arrays
11/01/2011	US8048687 Processing method for recovering a damaged low-k film of a substrate and storage medium
11/01/2011	US8048686 Production of a device comprising magnetic structures formed on one and the same substrate and having respective different magnetization orientations
11/01/2011	US8048685 Magnetic RAM
11/01/2011	US8048684 Structure and method for manipulating spin quantum state through dipole polarization switching
11/01/2011	US8048614 Semiconductor integrated circuit device fabrication method
11/01/2011	US8048596 Photomask producing method and photomask blank
11/01/2011	US8048595 Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask
11/01/2011	US8048594 Photomask blank, photomask, and methods of manufacturing the same
11/01/2011	US8048474 Method of making nonvolatile memory cell containing carbon resistivity switching as a storage element by low temperature processing
11/01/2011	US8048330 Method of forming an interlayer dielectric material having different removal rates during CMP
11/01/2011	US8048328 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
11/01/2011	US8048327 Plasma processing apparatus and control method thereof
11/01/2011	US8048283 Method and apparatus for plating semiconductor wafers
11/01/2011	US8048282 Apparatus and method for plating a substrate
11/01/2011	US8048280 Process for electroplating metals into microscopic recessed features
11/01/2011	US8048260 Magnetic neutral line discharge plasma processing system
11/01/2011	US8048230 Metering and vaporizing particulate material
11/01/2011	US8048228 Masking apparatus and method of fabricating electronic component
11/01/2011	US8048227 Compensation plate used in a film coating device
11/01/2011	US8047896 Polishing apparatus, polishing method, and processing apparatus
11/01/2011	US8047379 Wafer container with purgeable supporting module
11/01/2011	US8047158 Substrate processing apparatus and reaction container
11/01/2011	US8047023 Method for producing titania-doped fused silica glass
11/01/2011	US8046914 Method for manufacturing multilayer printed circuit board
10/2011
10/27/2011	WO2011133883A1 Method of priming and drying substrates
10/27/2011	WO2011133782A2 Purge ring with split baffles for photonic thermal processing systems
10/27/2011	WO2011133680A2 Novel dual-tone resist formulations and methods
10/27/2011	WO2011133562A2 Methods and apparatus for an induction coil arrangement in a plasma processing system
10/27/2011	WO2011133481A2 Power mosfet with embedded recessed field plate and methods of fabrication
10/27/2011	WO2011133412A1 P-type control gate in non-volatile storage and methods for forming same
10/27/2011	WO2011133386A2 Closed-loop control for improved polishing pad profiles
10/27/2011	WO2011133351A2 Hybrid deposition chamber for in-situ formation of group iv semiconductors & compounds with group iii-nitrides
10/27/2011	WO2011133349A2 Methods for etching silicon-based antireflective layers
10/27/2011	WO2011133339A2 Monolayer dopant embedded stressor for advanced cmos
10/27/2011	WO2011133304A2 Group iii-nitride n-type doping
10/27/2011	WO2011133223A1 Silaborane implantation processes
10/27/2011	WO2011133207A2 A coating method for gas delivery system
10/27/2011	WO2011133205A2 Vertical transistor phase change memory
10/27/2011	WO2011133138A1 Nanoscale switching devices with partially oxidized electrodes
10/27/2011	WO2011132971A2 Semiconductor chip including bump having barrier layer, and manufacturing method thereof
10/27/2011	WO2011132913A2 Substrate processing apparatus
10/27/2011	WO2011132903A2 Plasma processing apparatus
10/27/2011	WO2011132885A2 Substrate processing apparatus
10/27/2011	WO2011132867A2 Sputter target having stepped structure and sputtering device using same

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