Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2012
01/05/2012WO2012002292A1 Semiconductor device
01/05/2012WO2012002282A1 Film forming method and processing system
01/05/2012WO2012002273A1 Joint structure manufacturing method, heating and melting treatment method, and system for same
01/05/2012WO2012002243A1 Water-repellent protective film formation agent, chemical solution for forming water-repellent protective film, and wafer cleaning method using chemical solution
01/05/2012WO2012002236A1 Wiring board, semiconductor device, and manufacturing methods thereof
01/05/2012WO2012002233A1 Method of producing sensor device and sensor device
01/05/2012WO2012002232A1 Plasma processing apparatus and plasma processing method
01/05/2012WO2012002212A1 Method for manufacturing semiconductor device and substrate cassette used therefor
01/05/2012WO2012002211A1 Chip bonder
01/05/2012WO2012002200A1 Wafer cleaning method
01/05/2012WO2012002191A1 Trap device and substrate processing device
01/05/2012WO2012002186A1 Semiconductor device
01/05/2012WO2012002182A1 Conductive paste composition for solar cell
01/05/2012WO2012002159A1 Substrate treatment device, and method for cleaning of substrate treatment device
01/05/2012WO2012002156A1 Magnetic memory element, magnetic memory
01/05/2012WO2012002155A1 Laser lift-off method and laser lift-off apparatus
01/05/2012WO2012002146A1 Chemical solution for forming protective film, and washing method for wafer surface
01/05/2012WO2012002145A1 Chemical solution for forming water-repellent protective film
01/05/2012WO2012002125A1 Metal-film forming device
01/05/2012WO2012002124A1 Metal film formation system, metal film formation method, and computer storage medium
01/05/2012WO2012002104A1 Semiconductor device and manufacturing method thereof
01/05/2012WO2012002100A1 Current control semiconductor device and control apparatus using same
01/05/2012WO2012002085A1 Semiconductor device
01/05/2012WO2012002045A1 Semiconductor device and method for manufacturing same, integrated substrate, optical module and optical communication device
01/05/2012WO2012002027A1 Etching method and device
01/05/2012WO2012001967A1 Semiconductor device
01/05/2012WO2012001916A1 Solid-state imaging device and imaging system
01/05/2012WO2012001874A1 Method for cleaning semiconductor wafer for solar cell substrate
01/05/2012WO2012001867A1 Semiconductor inspecting apparatus
01/05/2012WO2012001848A1 Method for manufacturing semiconductor device
01/05/2012WO2012001837A1 Power semiconductor device
01/05/2012WO2012001500A1 Quinone radicals for enriching specific species of carbon nanotubes
01/05/2012WO2012000907A1 A method of treating a multilayer structure with hydrofluoric acid
01/05/2012WO2012000821A1 Method for reducing irregularities at the surface of a layer transferred from a source substrate to a glass-based support substrate
01/05/2012WO2012000815A1 Modification of silicon layers formed from silane-containing formulations
01/05/2012WO2012000723A1 P-channel ldmos transistor and method of producing a p-channel ldmos transistor
01/05/2012WO2012000685A2 Interposer and method for producing holes in an interposer
01/05/2012WO2012000663A1 Method and apparatus for calibrating a wafer transport robot
01/05/2012WO2012000594A1 Preparation of semiconductor films
01/05/2012WO2012000442A1 Three dimensional and multi-valued nonvolatile memory device and manufacturing method thereof
01/05/2012WO2012000316A1 Isolation region, semiconductor device and manufacturing method thereof
01/05/2012WO2012000302A1 Semiconductor device and manufacturing method thereof
01/05/2012WO2012000301A1 Semiconductor device and method for forming the same
01/05/2012WO2012000300A1 Semiconductor device and fabrication method thereof
01/05/2012WO2012000284A1 Semiconductor structure having high germanium strain layer formed on insulating substrate and manufacturing method thereof
01/05/2012WO2012000015A1 Metal contact scheme for solar cells
01/05/2012WO2011126621A3 Inorganic rapid alternating process for silicon etch
01/05/2012WO2011126610A3 Interferometric encoder systems
01/05/2012WO2011123333A3 Ldmos device with p-body for reduced capacitance
01/05/2012WO2011123220A3 Packaging process to create wettable lead flank during board assembly
01/05/2012WO2011119424A3 Fortification of charge-storing material in high-k dielectric environments and resulting apparatuses
01/05/2012WO2011113033A3 Thin wafer shipper
01/05/2012WO2011112823A3 Apparatus and methods for cyclical oxidation and etching
01/05/2012WO2011112802A3 Apparatus and methods for cyclical oxidation and etching
01/05/2012WO2011112330A3 REDUCED PATTERN LOADING USING BIS(DIETHYLAMINO)SILANE (C8H22N2Si) AS SILICON PRECURSOR
01/05/2012WO2011105737A3 Gate valve
01/05/2012WO2011104198A3 Method and apparatus for irradiating a semiconductor material surface by laser energy
01/05/2012WO2011103216A3 Adaptive patterning for panelized packaging
01/05/2012WO2011102952A3 Substrate load and unload mechanisms for high throughput
01/05/2012WO2011102864A3 On-demand nanoelectronics platform
01/05/2012WO2011100647A3 Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
01/05/2012WO2011100204A3 Thin wafer carrier
01/05/2012WO2011099768A3 Method for manufacturing a nanoporous ultra-low dielectric thin film including a high-temperature ozone treatment and nanoporous ultra-low dielectric thin film manufactured by the method
01/05/2012WO2011096684A3 Method for manufacturing galium naitride wafer
01/05/2012WO2011094597A3 Graphene nanomesh and method of making the same
01/05/2012WO2011094127A3 Texturing and damage etch of silicon single crystal (100) substrates
01/05/2012WO2011073937A3 System and method for doping semiconductor materials
01/05/2012WO2011054009A8 Semiconductor device
01/05/2012WO2011041522A3 Methods for multi-step copper plating on a continuous ruthenium film in recessed features
01/05/2012WO2011038718A3 Treatment and production of selective emitters of solar cells
01/05/2012WO2011032538A3 Diode array and method for producing a diode array
01/05/2012WO2011016741A4 Amorphous multicomponent dielectric based on the mixture of high band gap and high k materials, respective devices and manufacture
01/05/2012US20120005636 Method for manufacturing a photomask
01/05/2012US20120003903 Method of Regenerating a Polishing Pad Using a Polishing Pad Sub Plate
01/05/2012US20120003842 Method for forming silicon oxide film and method for manufacturing semiconductor device
01/05/2012US20120003841 Method of producing semiconductor device
01/05/2012US20120003840 In-situ ozone cure for radical-component cvd
01/05/2012US20120003839 Chemical treatment method
01/05/2012US20120003838 Plasma etching method
01/05/2012US20120003837 Semiconductor Device Manufacturing Apparatus Capable Of Reducing Particle Contamination
01/05/2012US20120003836 Movable ground ring for a plasma processing chamber
01/05/2012US20120003835 Method of etching sacrificial layer
01/05/2012US20120003834 Method Of Polishing Chalcogenide Alloy
01/05/2012US20120003833 Methods for forming tungsten-containing layers
01/05/2012US20120003832 Method of reducing erosion of a metal cap layer during via patterning in semiconductor devices
01/05/2012US20120003831 Methods of Forming Nonvolatile Memory Devices Using Nonselective and Selective Etching Techniques to Define Vertically Stacked Word Lines
01/05/2012US20120003830 Method for manufacture of integrated circuit package system with protected conductive layers for pads
01/05/2012US20120003829 Method of fabricating semiconductor device
01/05/2012US20120003828 Semiconductor memory device and method of forming the same
01/05/2012US20120003827 Method for manufacturing metal gate stack structure in gate-first process
01/05/2012US20120003826 Methods and compositions for doping silicon substrates with molecular monolayers
01/05/2012US20120003825 Method of forming strained epitaxial carbon-doped silicon films
01/05/2012US20120003824 Method for manufacturing gallium nitride wafer
01/05/2012US20120003823 Method for manufacturing semiconductor substrate
01/05/2012US20120003822 Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method
01/05/2012US20120003821 Method for fabricating semiconductor device
01/05/2012US20120003820 Method for fabricating semiconductor device
01/05/2012US20120003819 Methods and apparatus for selective epitaxy of si-containing materials and substitutionally doped crystalline si-containing material
01/05/2012US20120003818 Field Effect Resistor for ESD Protection
01/05/2012US20120003817 Integrated circuit wafer dicing method