Patents for H01J 27 - Ion beam tubes (3,716)
06/2013
06/13/2013WO2013084651A1 Scanning ion microscope and secondary particle control method
06/13/2013US20130146782 Spatial Segregation of Plasma Components
06/13/2013US20130146781 Ion generating device and electrical apparatus
06/13/2013DE102011103464B4 Plasmaionenquelle für eine Vakuumbeschichtungsanlage Plasma ion source for vacuum coating plant
06/12/2013CN202996764U Connection structure for multimodal field negative hydrogen ion source lamp screw and filament base
06/12/2013CN103151233A Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions
06/11/2013US8461557 Ion sources, systems and methods
06/11/2013US8461549 Multi-needle multi-parallel nanospray ionization source for mass spectrometry
06/11/2013US8461523 Ionizer for vapor analysis decoupling the ionization region from the analyzer
06/11/2013US8460842 Defect repair apparatus and method for EUV mask using a hydrogen ion beam
06/06/2013WO2013081647A1 Automatic control system for selection and optimization of co-gas flow levels
06/06/2013WO2013080543A1 Ion beam generator
06/06/2013US20130140453 Mass spectrometer with soft ionizing glow discharge and conditioner
06/06/2013DE112011102643T5 Gasfeld-Ionenquelle und Verfahren zur Verwendung derselben, Ionenstrahl-Vorrichtung und Ermitterspitze sowie Verfahren zur Herstellung derselben Gas field ion source and methods of using the same, the ion beam device and method of making same as well as Ermitterspitze
06/05/2013EP2600381A2 System for attachment of an electrode into an inductively coupled plasma source
06/05/2013EP2600380A1 Inductively coupled plasma source as an electron beam source for spectroscopic analysis
06/05/2013CN202977356U Source module, mass spectrometer and instrument including the mass spectrometer, and end lens and complete equipment including the end lens
06/04/2013US8455840 Gas field ion microscopes having multiple operation modes
06/04/2013US8455813 Multi-photon ionization spectrometer
05/2013
05/30/2013WO2013077555A1 Electron cyclotron resonance ion source apparatus and method for boosting extraction current
05/30/2013WO2013077483A1 Variable ion guide and electron cyclotron resonance ion source apparatus including same
05/30/2013US20130138184 Target for generating carbon ions and treatment apparatus using the same
05/28/2013US8450700 Ion supply device
05/22/2013CN103119687A Compact rf antenna for an inductively coupled plasma ion source
05/21/2013US8445857 Flame sensor
05/16/2013WO2013067851A1 Method for modulating arc current balancing of double-filament ion source
05/16/2013US20130119264 Ion Wind Generator and Ion Wind Generating Device
05/16/2013US20130118523 Methods and apparatuses for cleaning at least one surface of an ion source
05/15/2013CN103107055A Internal split faraday shield for an inductively coupled plasma source
05/09/2013US20130112892 In-line corona-based gas flow ionizer
05/09/2013US20130112299 Air conditioner and ion generation device
05/08/2013CN103094029A Ion Beam Extraction Electrode And Ion Source
05/08/2013CN103094028A Cleaning apparatus of ion source extraction electrode system
05/08/2013CN103094027A Extraction electrode system and slit electrodes
05/07/2013US8436318 Apparatus for controlling the temperature of an RF ion source window
05/02/2013US20130105705 Ion beam extraction electrode and ion source
05/02/2013US20130105686 Methods and apparatus for detecting neutral chemical units via nanostructures
05/01/2013EP2587516A1 Ion sources and methods of operating an electromagnet of an ion source
04/2013
04/30/2013US8432660 Ion generating unit and lighting apparatus
04/25/2013WO2013057824A1 Laser ionization mass analysis device
04/24/2013CN103069537A Sputter target feed system
04/24/2013CN103069534A Laser ion source
04/18/2013WO2013055523A2 Ion source apparatus and methods of using the same
04/18/2013WO2013054799A1 Ion source and ion beam device using same
04/18/2013US20130095000 Ion generator and air cleaner
04/11/2013US20130088150 Ion source apparatus and methods of using the same
04/11/2013US20130087716 Charged particle source
04/11/2013US20130087704 Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method
04/10/2013CN202869982U Micro quartz furnace atomizer
04/04/2013US20130082599 Transformer-coupled rf source for plasma processing tool
04/04/2013US20130082189 Pre-aligned multi-beam nozzle/skimmer module
04/03/2013CN103021772A Electrode frame and charged particle beam generator with the same
04/03/2013CN101681781B Ion sources and methods of operating an electromagnet of an ion source
04/02/2013US8411407 Reversible flow electrohydrodynamic fluid accelerator
04/02/2013US8410459 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
04/02/2013US8410452 Ion source means for desorption/ionisation of analyte substances and method of desorbing/ionising of analyte substances
03/2013
03/28/2013WO2013043794A2 Liquid metal ion source, system and method
03/26/2013US8405054 Multi-source plasma focused ion beam system
03/21/2013WO2012158805A3 Plasma attentuation for uniformity control
03/21/2013US20130068963 Shielded capacitive electrode
03/19/2013US8399863 Charged particle beam apparatus using an electrostatic lens gun
03/14/2013WO2013035411A1 Emitter, gas field ionization ion source, and ion beam device
03/14/2013WO2013035221A1 Ion beam device
03/14/2013WO2012172436A3 Looped ionization source
03/07/2013WO2013031777A1 Ion source
03/05/2013US8389954 System for fast ions generation and a method thereof
03/05/2013US8389953 Focused ion beam apparatus
02/2013
02/28/2013US20130053542 Method for producing gas-phase metal anions
02/27/2013EP2561540A1 Improved ion source
02/27/2013EP2561539A1 Two-segment ion transfer tube for mass spectrometer
02/21/2013US20130043404 Ion generation device and ion detection method in the device
02/21/2013US20130043385 Apparatus and Method for a Multi-Stage Ion Transfer Tube Assembly for Use with Mass Spectrometry
02/06/2013CN202721106U Gas discharge type ion source for neutron tube
02/06/2013CN202721105U Field emission ion source used for outputting monatomic hydrogen ion beam
02/05/2013US8368309 Method and apparatus for extracting ions from an ion source for use in ion implantation
02/05/2013US8368012 Guiding charged droplets and ions in an electrospray ion source
01/2013
01/31/2013WO2013016061A1 Charged particle source from a photoionized cold atom beam
01/31/2013US20130026917 Ion focusing in a hall effect thruster
01/29/2013US8362445 UV-LED ionization source and process for low energy photoemission ionization
01/24/2013WO2013013086A1 Current limiter for high voltage power supply used with ion implantation system
01/24/2013WO2013011657A1 Ion beam generating apparatus, and ion beam plasma processing apparatus
01/24/2013US20130020497 Electrostatic atomizing device
01/24/2013US20130020496 Particle sources and apparatuses using the same
01/10/2013US20130009055 System of electrospray ion generator
01/10/2013DE112010004286T5 Ladungsteilchenmikroskop Charged particle
01/09/2013CN102867717A Protection plate supporting component and ion source with same
01/03/2013US20130001416 Windowless ionization device
01/03/2013DE112010002981T5 Gasfeldionisations-Ionenquellenvorrichtung und damit ausgestattetesRasterladungsteilchenmikroskop Gasfeldionisations ion source device and thus ausgestattetesRasterladungsteilchenmikroskop
01/02/2013EP2539915A1 Plasma mass spectrometry with ion suppression
01/02/2013CN101361159B Ion sources, systems and methods
01/01/2013US8344319 Laser-induced acoustic desorption/atmospheric pressure chemical ionization of compounds
12/2012
12/27/2012DE112011100476T5 Ladungsteilchenmikroskop und Ionenmikroskop Charged particle and ion microscope
12/26/2012CN101960554B 离子源 Ion source
12/26/2012CN101960553B 离子源 Ion source
12/25/2012US8338797 Debris mitigation device with rotating foil trap and drive assembly
12/25/2012US8338773 High-speed analog photon counter and method
12/20/2012US20120319002 Ion generating apparatus
12/20/2012US20120318973 Atmospheric pressure ionization apparatus and method
12/20/2012CA2839405A1 Looped ionization source
12/19/2012CN102832091A Strong current Hall ion source system
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