| Patents for G21K 5 - Irradiation devices (9,144) |
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| 01/27/2000 | DE19934049A1 Multi-column lithography system using charged particle radiation-like electron rays has control unit for adjusting waiting time for each intensifier connected to main deflectors |
| 01/26/2000 | EP0975004A2 Method for measuring distribution of beams of charged particles and methods relating thereto |
| 01/26/2000 | CN1242253A Electron beam irradiation device |
| 01/19/2000 | EP0792530A4 Low cost, high average power, high brightness solid state laser |
| 01/18/2000 | CA2044177C Apparatus for controlling the dose of irradiation |
| 01/04/2000 | US6011829 Liquid cooled bearing assembly for x-ray tubes |
| 01/04/2000 | CA2157907C Irradiation system utilizing conveyor-transported article carriers |
| 12/30/1999 | DE19816246C1 Verfahren zur Elektronenbestrahlung von Schichten auf Oberflächen von Objekten sowie Einrichtung zur Durchführung des Verfahrens A method for electron beam irradiation of layers on surfaces of objects as well as means for carrying out the method |
| 12/29/1999 | WO1999067793A1 Article irradiation system having intermediate wall of radiation shielding material within loop of a conveyor system that transports the articles |
| 12/29/1999 | CN1047734C Positioning device and method for radiation treatment |
| 12/28/1999 | US6009147 X-ray bone densitometry |
| 12/28/1999 | US6009144 X-ray system and X-ray exposure apparatus |
| 12/28/1999 | US6008495 Electron beam exposure device |
| 12/22/1999 | CN1239445A Thin film coater, coating method, and method for mfg. liquid crystal display element |
| 12/21/1999 | US6005918 X-ray tube window heat shield |
| 12/21/1999 | US6005907 Method and apparatus for producing tomosynthesis exposures employing a reference object composed of a number of sub-objects |
| 12/16/1999 | WO1999065038A1 Simplified method of modifying a surface of a material |
| 12/15/1999 | CN1238551A Beam generation apparatus |
| 12/14/1999 | US6002744 Method and apparatus for generating X-ray or EUV radiation |
| 12/14/1999 | US6002734 Method and systems for gold assay in large ore samples |
| 12/09/1999 | WO1999063550A1 METHOD FOR PRODUCING Ac-225 BY IRRADIATION OF Ra-226 WITH PROTONS |
| 12/08/1999 | EP0962942A1 Method for producing Ac-225 by irradiation of Ra-226 with protons |
| 12/08/1999 | EP0962020A1 Method and apparatus for product x-radiation |
| 12/08/1999 | CN1237779A Electron beam generating device and system |
| 12/02/1999 | WO1999062074A1 Fluid-jet deposition of radioactive material for brachytherapy devices |
| 12/02/1999 | CA2331421A1 Fluid-jet deposition of radioactive material for brachytherapy devices |
| 11/30/1999 | US5995586 X-ray generator |
| 11/30/1999 | US5995582 X-ray reduction exposure apparatus and device manufacturing method using the same |
| 11/30/1999 | US5994706 Article irradiation system in which article-transporting conveyor is closely encompassed by shielding material |
| 11/23/1999 | US5991360 Laser plasma x-ray source, semiconductor lithography apparatus using the same and a method thereof |
| 11/16/1999 | US5987236 Charged particle trajectory analysis through element analysis |
| 11/16/1999 | US5986274 Charged particle irradiation apparatus and an operating method thereof |
| 11/11/1999 | WO1999057732A1 Lighting system, especially for extreme ultraviolet lithography |
| 11/11/1999 | WO1999056521A2 Method and apparatus for the production of neutrons and other particles |
| 11/11/1999 | WO1999034396A3 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms |
| 11/11/1999 | DE19903807A1 EUV illumination system especially for microlithography in the production of electronic components with sub-micron structure widths |
| 11/10/1999 | EP0955641A1 Illumination system,particularly for deep ultraviolet lithography |
| 11/09/1999 | US5982838 Method and portable apparatus for the detection of substances by use of neutron irradiation |
| 11/09/1999 | US5981963 Electron-beam system |
| 11/04/1999 | DE19823448A1 Object examination device using X-rays, for inspection of luggage or containers |
| 11/02/1999 | US5976257 Apparatus for continuously forming a large area deposited film by means of microwave plasma CVD process |
| 11/02/1999 | US5975709 Reflecting system |
| 10/26/1999 | US5973332 Electron beam exposure method, and device manufacturing method using same |
| 10/21/1999 | WO1999052650A1 Method for the electron irradiation of layers on surfaces of objects and a device for carrying out the method |
| 10/20/1999 | EP0950256A1 Electron beam accelerator |
| 10/19/1999 | US5969367 Charged particle beam apparatus and method for operating the same |
| 10/19/1999 | US5969365 Charged-particle-beam exposure device and charged-particle-beam exposure method |
| 10/05/1999 | US5962995 Electron beam accelerator |
| 09/22/1999 | EP0943148A1 X-ray examination apparatus including an x-ray filter |
| 09/20/1999 | CA2232798A1 Electron-beam system |
| 09/16/1999 | WO1999046963A1 Light source using dielectric barrier discharge lamp, and power supply |
| 09/16/1999 | DE19808096A1 Readily portable x-ray unit for object radioscopy |
| 09/15/1999 | EP0941501A1 Imaging cassette for x-ray apparatus |
| 09/14/1999 | CA2194759C X-ray apparatus for applying a predetermined flux to an interior surface of a body cavity |
| 09/08/1999 | EP0940158A1 System & method for gated radiotherapy based on physiological inputs |
| 09/08/1999 | EP0815565A4 Method and apparatus for micromachining using hard x-rays |
| 09/07/1999 | US5949844 Exposure apparatus |
| 09/07/1999 | US5949836 Production of radioisotopes with a high specific activity by isotopic conversion |
| 09/07/1999 | US5949080 Irradiation apparatus for effectively performing intermittent irradiation in synchronism with respiration |
| 09/07/1999 | US5949079 Method of and an apparatus for electron beam exposure |
| 08/31/1999 | US5946559 Method of forming a field effect transistor |
| 08/25/1999 | EP0938249A2 X-ray tubes |
| 08/25/1999 | CA2262743A1 System & method for gated radiotherapy based on psychological inputs |
| 08/18/1999 | EP0936658A2 Charged particle beam exposure method and apparatus |
| 08/18/1999 | EP0935803A1 Simultaneous double sided irradiation |
| 08/17/1999 | US5940469 Multi-chromatic x-ray source |
| 08/11/1999 | EP0934615A1 Method and device for managing an electronic component with complementary mos transistors functioning under radiation |
| 08/10/1999 | US5936358 Dielectric barrier discharge device |
| 08/04/1999 | EP0933139A1 Thin film coater, coating method, and method for manufacturing liquid crystal display element |
| 08/03/1999 | US5933211 Charged beam lithography apparatus and method thereof |
| 08/03/1999 | US5932886 Ultraviolet irradiation device |
| 07/29/1999 | WO1999038171A1 Wavelength dispersive x-ray spectrometer with x-ray collimator optic for increased sensitivity over a wide x-ray energy range |
| 07/22/1999 | WO1999035965A1 Instrument for measuring the amount of salt in a bone |
| 07/20/1999 | US5926522 Wavelength dispersive x-ray spectrometer with x-ray collimator optic for increased sensitivity over a wide x-ray energy range |
| 07/14/1999 | EP0928431A1 Tapered capillary optics |
| 07/08/1999 | WO1999034396A2 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms |
| 07/08/1999 | DE19757852A1 Implantation von radioaktiven ·3··2·P-Atomen Implantation of radioactive · 3 · · 2 · P atoms |
| 07/08/1999 | CA2314953A1 Implantation of radioactive p32 atoms |
| 07/06/1999 | US5920601 System and method for delivery of neutron beams for medical therapy |
| 07/01/1999 | WO1999033064A1 X-ray ambient level safety system |
| 06/24/1999 | WO1999018579A3 X-ray examination apparatus including x-ray filter and collimator |
| 06/23/1999 | EP0924742A2 Means for preventing excessive heating of an X-ray tube window |
| 06/23/1999 | EP0808465A4 Scanning-beam x-ray imaging system |
| 06/23/1999 | EP0693225A4 X-ray detector for a low dosage scanning beam digital x-ray imaging system |
| 06/16/1999 | EP0751972A4 Polymer surface treatment with pulsed particle beams |
| 06/15/1999 | US5912468 Charged particle beam exposure system |
| 06/15/1999 | US5912467 Charged particle beam exposure apparatus |
| 06/10/1999 | WO1999028613A1 Fuel improving method and apparatus |
| 06/03/1999 | WO1999027542A1 Collimator for x-ray proximity lithography |
| 06/01/1999 | US5909032 Apparatus and method for a modular electron beam system for the treatment of surfaces |
| 06/01/1999 | US5909031 Ion implanter electron shower having enhanced secondary electron emission |
| 06/01/1999 | US5908733 The present invention relates to electron beam exposure, and more particularly to that for drawing such a pattern as an ic (integrated circuit) directly on a semiconductor wafer. |
| 05/20/1999 | WO1999025000A1 Ion implantation apparatus and method of implanting ions to prevent charge build up on a substrate |
| 05/18/1999 | US5905267 Electron beam exposure apparatus and method of controlling same |
| 05/18/1999 | US5905005 X-ray mask and method of fabricating the same |
| 05/14/1999 | WO1999023670A1 Digital filmless x-ray projection imaging system and method |
| 04/28/1999 | EP0911861A1 Filament for ion implanter plasma shower |
| 04/28/1999 | EP0911064A2 Charged-particle beam irradiation apparatus, charged-particle beam rotary irradiation system, and charged-particle beam irradiation method |
| 04/28/1999 | EP0856206A4 Method of enhancing radioactivity decay |
| 04/20/1999 | US5896437 X-ray diagnostics apparatus for tomosynthesis having a reference object in fixed relationship to a radiation emitter |