Patents for G21K 5 - Irradiation devices (9,144)
04/1999
04/20/1999US5895926 Beamline control and security system for a radiation treatment facility
04/15/1999WO1999018579A2 X-ray examination apparatus including x-ray filter and collimator
04/15/1999WO1999018428A1 Radiographic inspection apparatus
04/13/1999US5893549 Slotted support for x-ray focusing mirrors
03/1999
03/31/1999EP0904594A1 Actinic radiation source having anode that includes a window area formed by a thin, monolithic silicon membrane
03/30/1999US5889758 Reflection type mask structure and exposure apparatus using the same
03/30/1999US5889367 Long-life high powered excimer lamp with specified halogen content, method for its manufacture and extension of its burning life
03/24/1999EP0902951A1 Method and apparatus for controlling and optimizing output of an x-ray source
03/16/1999US5883470 Fast atomic beam source with an inductively coupled plasma generator
03/16/1999US5883392 Apparatus comprising inductive and/or power transfer and/or voltage multiplication components
03/16/1999CA2093016C Modular oxidation chamber
03/10/1999EP0901149A2 Secondary electron emission electron shower for an ion implanter
03/04/1999WO1999010107A1 Thin film coater, coating method, and method for manufacturing liquid crystal display element
03/04/1999WO1999010045A1 Radioactive stent structures
03/03/1999EP0899561A1 Microscope system equipped with an electron microscope and a scanning probe microscope
03/02/1999US5878109 X-ray apparatus
03/02/1999US5878105 X-ray mask
03/02/1999US5877582 Method and apparatus for cooling window foils of electron beam accelerator
03/02/1999CA2064143C Irradiation device having a capacitively coupled, non-metallic treatment chamber
02/1999
02/23/1999US5874811 Superconducting cyclotron for use in the production of heavy isotopes
02/17/1999EP0702839B1 Radiation therapy machine for producing a desired fluence profile
02/10/1999EP0895706A1 Method and apparatus for generating x-ray or euv radiation
02/10/1999EP0743887B1 Method for the vacuumtight sealing of a beryllium window to a metal substrate
02/09/1999US5869354 Forming a etch stop layer in the substrate parallel to the principal surface, forming semiconductor on the principal surface, depositing a low stress dielectric membranes over semiconductor, etching etch barrier and a substrate portion
02/03/1999EP0894263A1 Multiple station gamma ray absorption contraband detection system
02/03/1999EP0894017A2 System and method for delivery of neutron beams for medical therapy
02/03/1999EP0788462B1 Uv fluid treatment device and method
02/02/1999US5866984 Mercury-free ultraviolet discharge source
01/1999
01/27/1999CN1206200A Acoustic delay line with movable partition plates
01/21/1999WO1998046056A3 A portable apparatus for x-ray radiography
01/13/1999CN2304175Y Cnotinuous irradiation apparatus for producing nuclear-track film
01/07/1999WO1999000882A1 Method and device for managing an electronic component with complementary mos transistors functioning under radiation
01/07/1999WO1999000801A1 Irradiation equipment
01/05/1999US5856674 Filament for ion implanter plasma shower
12/1998
12/30/1998EP0776595B1 Superconducting cyclotron and target for use in the production of heavy isotopes
12/30/1998EP0553282B1 Apparatus for stereotoxic surgery and method of control of the apparatus
12/30/1998CN1203148A Micro structure and its manufacture method
12/23/1998EP0886181A2 Micro structure and its manufacture method
12/16/1998CN1041237C X-ray detector for low dosage scanning beam digital X-ray image system
12/15/1998US5849436 Block mask and charged particle beam exposure method and apparatus using the same
12/15/1998US5849252 Charged particle accelerator apparatus and electronic sterilizer apparatus using the same
12/08/1998US5848120 X-ray mask blank, X-ray mask and pattern transfer method
12/08/1998US5848119 Illumination system and exposure apparatus having the same
12/08/1998US5847401 For delivering a beam of charged particles along two separate beam paths
12/02/1998EP0881428A2 Ultraviolet irradiation device of the optical path division type
12/01/1998US5844962 X-ray examination apparatus with an X-ray source and a diaphragm unit connected thereto
11/1998
11/25/1998EP0880073A1 Diamond films suitable for x-ray lithography and their manufacture
11/24/1998US5840593 Membrane dielectric isolation IC fabrication
11/19/1998WO1998052389A1 Plasma focus high energy photon source
11/17/1998US5838765 Whole-body x-ray bone densitometry using a narrow-angle fan beam, including variable fan beam displacement between scan passes
11/17/1998US5838760 Method and apparatus for product x-radiation
11/12/1998WO1998050939A1 Article irradiation system with an article transporting conveyor
11/12/1998WO1998033199A3 Ion accelerator for use in ion implanter
11/12/1998DE19719728A1 Lighting system with bundled light guide
11/12/1998CA2607065A1 Article irradiation system with an article-transporting conveyor
11/11/1998EP0877389A1 Electron beam irradiating method and object to be irradiated with electron beam
11/10/1998US5835562 Medical radiological apparatus including optical crosshair device for patient positioning and forearm and spinal positioning aides
11/10/1998US5835560 Exposure apparatus
11/10/1998US5835555 X-ray bone densitometry apparatus with variable attenuation, modulation and collimation of penetrating radiation beam
11/10/1998US5834783 Electron beam exposure apparatus and method, and device manufacturing method
11/10/1998US5834334 Method of forming a multi-chip module from a membrane circuit
10/1998
10/29/1998WO1998048442A1 Apparatus and method for a modular electron beam system for the treatment of surfaces
10/29/1998CA2288911A1 Apparatus and method for a modular electron beam system for the treatment of surfaces
10/27/1998US5828727 X-ray tube
10/27/1998US5828069 An enclosure for receiving radioactive waste for quantitative nondestructive detection is protected by several neutron moderator coatings and also shielded by several cadmium coatings
10/21/1998EP0872872A1 X-ray target
10/21/1998EP0871972A1 Electron beam device with single crystal window and matching anode
10/20/1998US5825844 Optical arrangement and illumination method
10/18/1998CA2228867A1 Rotary target driven by cooling fluid flow for medical linac and intense beam linac
10/15/1998WO1998046056A2 A portable apparatus for x-ray radiography
10/15/1998DE19715388A1 Lighting system for illuminating conductor plates or wafers
10/14/1998CN1040261C Device for regulation of radiant quantity
10/13/1998US5822389 Alignment apparatus and SOR X-ray exposure apparatus having same
10/07/1998EP0869703A1 Acoustic delay line with movable partition plates
10/07/1998EP0869702A1 X-ray apparatus
10/06/1998US5818217 Electron beam irradiating apparatus and electric signal detecting apparatus
10/06/1998US5818058 Particle beam irradiation apparatus
09/1998
09/29/1998US5814821 Mobile irradiation device
09/17/1998DE19710222A1 X=ray beam generator especially for fast computer tomography in medicine
09/15/1998US5809106 X-ray apparatus having a control device for preventing damaging X-ray emissions
09/09/1998CN1192821A Multiple-channel total-reflection optic with controllable divergence
09/08/1998US5805661 Positioning device and method for radiation treatment
09/01/1998US5801385 X-ray image pickup device
08/1998
08/25/1998CA2081642C X-ray exposure apparatus and semiconductor-device manufacturing method
08/12/1998EP0858249A1 Laser plasma X-ray source, and semiconductor lithography apparatus and method using the same
08/12/1998EP0858080A1 Charged particle irradiation apparatus and operating method thereof
08/11/1998US5793048 Curvilinear variable axis lens correction with shifted dipoles
08/06/1998WO1998034234A1 Method and apparatus for producing extreme ultra-violet light for use in photolithography
08/05/1998EP0856206A1 Method of enhancing radioactivity decay
08/04/1998US5790630 Radiation window and radiation system using the same
07/1998
07/30/1998WO1998033199A2 Ion accelerator for use in ion implanter
07/29/1998EP0832491A4 Multiple-channel, total-reflection optic with controllable divergence
07/28/1998US5787144 Sterilization process for medical devices
07/22/1998EP0854317A2 Reflector and lamp comprising the same
07/21/1998US5784430 Improved disk shaped beryllium target can be rotated allowing one accelerator to support multiple detection stations, identification of illegal drugs and explosives
07/21/1998US5784423 Method of producing molybdenum-99
07/20/1998CA2227347A1 Reflector and light with such a reflector
07/14/1998US5781608 X-ray exposure system
07/09/1998WO1998029895A1 Electron beam accelerator
07/07/1998US5778045 Medical radiological apparatus
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