Patents for G03B 27 - Photographic printing apparatus (25,157) |
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08/21/2012 | US8248584 Exposure apparatus and device manufacturing method |
08/21/2012 | US8248583 Lithographic apparatus and calibration method |
08/21/2012 | US8248582 Stage apparatus, exposure apparatus, and method of manufacturing device |
08/21/2012 | US8248581 Exposure system |
08/21/2012 | US8248580 Scanning exposure apparatus and method of manufacturing device |
08/21/2012 | US8248579 Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns |
08/21/2012 | US8248578 Projection exposure method and projection exposure system therefor |
08/21/2012 | US8248577 Lithographic apparatus and device manufacturing method |
08/21/2012 | US8246211 Filter device for the compensation of an asymmetric pupil illumination |
08/21/2012 | US8245824 Combination of structure and an active damping system, and a lithographic apparatus |
08/16/2012 | US20120208115 Imaging optics |
08/16/2012 | US20120206705 Optical element and exposure apparatus |
08/16/2012 | US20120206704 Illumination optical unit for projection lithography |
08/16/2012 | US20120206703 Inspection Apparatus and Method, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method |
08/16/2012 | US20120206702 Computer-readable recording medium recording exposing condition determination program |
08/16/2012 | US20120206701 Aberration measurement method, exposure apparatus, and device manufacturing method |
08/16/2012 | US20120206700 Apparatus for manufacturing a photomask |
08/16/2012 | US20120205782 Imprint Apparatus, Imprint Method, and Process Condition Selection Method |
08/16/2012 | US20120205558 Tools, Methods and Devices for Mitigating Extreme Ultraviolet Optics Contamination |
08/14/2012 | USRE43576 Dual stage lithographic apparatus and device manufacturing method |
08/14/2012 | US8243260 Lithography apparatus |
08/14/2012 | US8243259 Lithographic apparatus |
08/14/2012 | US8243258 Lithographic apparatus having acoustic resonator |
08/14/2012 | US8243257 Position measurement system, exposure apparatus, position measuring method, exposure method and device manufacturing method, and tool and measuring method |
08/14/2012 | US8243256 Measurement apparatus for measuring an aberration of an optical system, measurement method, exposure apparatus, and device fabrication method |
08/14/2012 | US8243255 Lithographic apparatus and in-line cleaning apparatus |
08/14/2012 | US8243254 Exposing method, exposure apparatus, and device fabricating method |
08/14/2012 | US8243253 Lyophobic run-off path to collect liquid for an immersion lithography apparatus |
08/14/2012 | US8242470 Optical switching in a lithography system |
08/09/2012 | WO2012105151A1 Illumination device |
08/09/2012 | US20120202157 Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
08/09/2012 | US20120200839 Pulse to Pulse Energy Equalization of Light Beam Intensity |
08/09/2012 | US20120200838 Method for a lithographic apparatus |
08/09/2012 | US20120200837 Exposure apparatus, and device manufacturing method |
08/09/2012 | US20120200836 Exposure apparatus and device manufacturing method |
08/09/2012 | US20120200835 Reticle protection member, reticle carrying device, exposure device and method for carrying reticle |
08/08/2012 | EP1687829B1 Lithographic systems and methods with extended depth of focus |
08/07/2012 | US8239787 Method of generating original plate data by repeatedly calculating approximate aerial image |
08/07/2012 | US8237962 Throughput estimate based upon document complexity analysis |
08/07/2012 | US8237919 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads |
08/07/2012 | US8237918 Optical system of a microlithographic projection exposure apparatus |
08/07/2012 | US8237917 Exposure apparatus and device manufacturing method |
08/07/2012 | US8237916 Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method |
08/07/2012 | US8237915 Method for improving an optical imaging property of a projection objective of a microlithographic projection exposure apparatus |
08/07/2012 | US8237914 Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patterns |
08/07/2012 | US8237913 Lithographic apparatus and method |
08/07/2012 | US8237912 Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
08/07/2012 | US8237911 Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
08/07/2012 | US8236467 Exposure method, exposure apparatus, and device manufacturing method |
08/02/2012 | WO2012051483A3 Method and system of archiving video to film |
08/02/2012 | US20120196230 Layout decomposition method and apparatus for multiple patterning lithography |
08/02/2012 | US20120194884 Image display, labeled article, and methods of manufacturing thereof |
08/02/2012 | US20120194797 Lithographic apparatus and methods for determining an improved configuration of a lithographic apparatus |
08/02/2012 | US20120194796 Light quantity adjustment apparatus lens unit and optical apparatus provided with the same |
08/02/2012 | US20120194795 Optical element |
08/02/2012 | US20120194794 Illumination System, Lithographic Apparatus and Method |
08/02/2012 | US20120194793 Optical apparatus for use in photolithography |
08/02/2012 | US20120194792 Method and system to predict lithography focus error using simulated or measured topography |
08/02/2012 | US20120194791 Device and method for processing printing substrate web into printed products |
08/02/2012 | US20120194790 Lithographic apparatus and device manufacturing method |
08/01/2012 | CN102621794A Plate copying machine with light-emitting diode lamp source |
07/31/2012 | US8233210 Illumination aperture for optical lithography |
07/31/2012 | US8233142 Monitoring method of exposure apparatus |
07/31/2012 | US8233141 Shutter pixel, shutter structure including the shutter pixel, and exposure apparatus including the shutter structure |
07/31/2012 | US8233140 Measuring apparatus, exposure apparatus, and device fabrication method |
07/31/2012 | US8233139 Immersion system, exposure apparatus, exposing method, and device fabricating method |
07/31/2012 | US8233137 Lithographic apparatus and device manufacturing method |
07/31/2012 | US8233136 Method and apparatus for generating periodic patterns by step-and-align interference lithography |
07/31/2012 | US8233135 Lithographic apparatus and device manufacturing method |
07/31/2012 | US8233134 Lithographic apparatus and device manufacturing method |
07/31/2012 | US8233133 Exposure method, exposure apparatus, and method for producing device |
07/31/2012 | US8232540 Lithographic apparatus and substrate edge seal |
07/31/2012 | US8231286 System for printing a book on pre-bound pages |
07/31/2012 | US8231285 Substrate processing method and apparatus |
07/26/2012 | US20120188528 Lithographic Apparatus and Device Manufacturing Method |
07/26/2012 | US20120188527 Illumination system of a microlithographic projection exposure apparatus |
07/26/2012 | US20120188526 Illumination optical apparatus, exposure apparatus, and device manufacturing method |
07/26/2012 | US20120188525 Catoptric objectives and systems using catoptric objectives |
07/26/2012 | US20120188524 Projection exposure apparatus with optimized adjustment possibility |
07/26/2012 | US20120188523 Optical arrangement in a projection exposure apparatus for euv lithography |
07/26/2012 | US20120188522 Reflective optical components for lithographic apparatus and device manufacturing method |
07/26/2012 | US20120188521 Cleaning method, liquid immersion member, immersion exposure apparatus, device fabricating method, program and storage medium |
07/24/2012 | US8228487 Lithographic apparatus and device manufacturing method |
07/24/2012 | US8228486 Exposing method and device manufacturing method |
07/24/2012 | US8228485 Projection illumination system |
07/24/2012 | US8228484 Coupling apparatus, exposure apparatus, and device fabricating method |
07/24/2012 | US8228483 Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate |
07/24/2012 | US8228482 Exposure apparatus, exposure method, and device manufacturing method |
07/19/2012 | US20120183889 Multiple lithographic system mask shape sleeving |
07/19/2012 | US20120182538 Methods and Apparatus for Inspection Of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices |
07/19/2012 | US20120182537 Spectral purity filter, lithographic apparatus, and device manufacturing method |
07/19/2012 | US20120182536 Source collector, lithographic apparatus and device manufacturing method |
07/19/2012 | US20120182535 Optical device, exposure apparatus and laser apparatus |
07/19/2012 | US20120182534 Lithographic apparatus and device manufacturing method |
07/19/2012 | US20120182533 Optical arrangement and microlithographic projection exposure apparatus including same |
07/18/2012 | CN102598647A Illumination device, image capturing device provided with the said illumination device, image forming device provided with said image capturing device |
07/18/2012 | CN102597869A 投影和显示系统 Projection and display systems |
07/17/2012 | USRE43515 Lithographic apparatus and device manufacturing method |
07/17/2012 | US8223382 Printing apparatus and control method therefor |
07/17/2012 | US8223320 Exposing method using variable shaped beam, and pattern forming method using the same |