Patents for G03B 27 - Photographic printing apparatus (25,157) |
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11/10/2011 | US20110273695 Lithographic apparatus and device manufacturing method |
11/10/2011 | US20110273694 Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithography |
11/10/2011 | US20110273693 Beam transforming element, illumination optical apparatus, exposure apparatus, and exposure method with two optical elements having different thicknesses |
11/10/2011 | US20110273692 Beam transforming element, illumination optical apparatus, exposure apparatus, and exposure method with two optical elements having different thicknesses |
11/10/2011 | US20110273691 Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device |
11/10/2011 | US20110273690 Maskless exposure apparatus and method of alignment for overlay in maskless exposure |
11/10/2011 | US20110273689 Method for increasing throughput and reducing blurriness due to movement |
11/10/2011 | US20110273688 Method and device for imaging a radiation-sensitive substrate |
11/10/2011 | US20110273687 Lithographic apparatus and device manufacturing method |
11/10/2011 | US20110273686 Exposure apparatus, exposure method, and method of manufacturing device |
11/10/2011 | US20110273685 Production of an alignment mark |
11/10/2011 | US20110273684 Nano-imprint method and apparatus |
11/10/2011 | US20110273683 Lithographic apparatus and device manufacturing method |
11/10/2011 | US20110273682 Lithographic Apparatus and Thermal Optical Manipulator Control Method |
11/10/2011 | US20110273681 Vacuum system for immersion photolithography |
11/10/2011 | US20110273680 Immersion photolithography system and method using microchannel nozzles |
11/10/2011 | US20110273679 Lithographic apparatus and device manufacturing method |
11/10/2011 | US20110273678 Lithographic apparatus and device manufacturing method |
11/10/2011 | US20110273677 Lithographic apparatus and device manufacturing method |
11/10/2011 | US20110273676 Immersion photolithography system and method using microchannel nozzles |
11/10/2011 | US20110273675 Lithographic apparatus and device manufacturing method |
11/09/2011 | CN202033580U Half-tone screen printing down positioning tool |
11/08/2011 | US8054557 Lithography projection objective, and a method for correcting image defects of the same |
11/08/2011 | US8054450 Stepper system for ultra-high resolution photolithography using photolithographic mask exhibiting enhanced light transmission due to utilizing sub-wavelength aperture arrays |
11/08/2011 | US8054449 Enhancing the image contrast of a high resolution exposure tool |
11/08/2011 | US8054448 Apparatus and method for providing fluid for immersion lithography |
11/08/2011 | US8054447 Exposure apparatus, exposure method, method for producing device, and optical part |
11/08/2011 | US8054446 EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface |
11/08/2011 | US8054445 Lithographic apparatus and device manufacturing method |
11/08/2011 | US8054444 Lens cleaning module for immersion lithography apparatus |
11/08/2011 | US8054443 Developing method and developing apparatus |
11/08/2011 | US8053178 Mask-less method and structure for patterning photosensitive material using optical fibers |
11/08/2011 | US8052289 Mirror array for lithography |
11/03/2011 | US20110267597 Method of Performing Model-Based Scanner Tuning |
11/03/2011 | US20110267596 Gravitation compensation for optical elements in projection exposure apparatuses |
11/03/2011 | US20110267595 Lithographic apparatus and method of manufacturing article |
11/03/2011 | US20110267594 Maskless exposure apparatus and stitching exposure method using the same |
11/03/2011 | US20110267593 Method and apparatus for maintaining depth of focus |
11/03/2011 | US20110267592 Lithographic apparatus and substrate edge seal |
11/03/2011 | US20110267591 Apparatus for Method for Immersion Lithography |
11/03/2011 | US20110267590 Dual Containment System for Transporting a Fluid Through a "Rolling Loop" Cable Duct |
11/02/2011 | EP2383972A1 Image reader device and method for driving same |
11/02/2011 | CN101794067B Platen, high speed vacuum platen system and high speed vacuum forming method |
11/01/2011 | US8050709 Wireless printer configuration module |
11/01/2011 | US8049964 Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element |
11/01/2011 | US8049866 Method and apparatus for variable polarization control in a lithography system |
11/01/2011 | US8049865 Lithographic system, device manufacturing method, and mask optimization method |
11/01/2011 | US8049864 Device manufacturing method and lithographic apparatus |
10/27/2011 | US20110262870 Purge ring with split baffles for photonic thermal processing systems |
10/27/2011 | US20110262866 Exposure apparatus and device manufacturing method |
10/27/2011 | US20110262848 Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
10/27/2011 | US20110261345 Exposure apparatus and device manufacturing method |
10/27/2011 | US20110261344 Exposure method |
10/27/2011 | US20110261343 Reflective optical element, optical system euv and lithography device |
10/27/2011 | US20110261342 Optical unit, illumination optical apparatus, exposure appartus, exposure method, and device manufacturing method |
10/27/2011 | US20110261341 Optical module with an adjustable optical element |
10/27/2011 | US20110261340 Modulation device and charged particle multi-beamlet lithography system using the same |
10/27/2011 | US20110261339 Scatterometer and lithographic apparatus |
10/27/2011 | US20110261338 Microlithography projection system with an accessible diaphragm or aperture stop |
10/27/2011 | US20110261337 Photosensing device for digital stereo spliced picture projection imaging and operation method thereof |
10/27/2011 | US20110261336 System for patterning flexible foils |
10/27/2011 | US20110261335 Systems and methods for thermally-induced aberration correction in immersion lithography |
10/27/2011 | US20110261334 Apparatus for Method for Immersion Lithography |
10/27/2011 | US20110261333 Exposure apparatus, device manufacturing method using same, and gas supply device |
10/27/2011 | US20110261332 Fluid handling structure, lithographic apparatus and device manufacturing method |
10/27/2011 | US20110261331 Exposure apparatus and device manufacturing method |
10/27/2011 | US20110261330 Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure apparatus and exposure method, device manufacturing method |
10/27/2011 | US20110261329 Method and system for determining a suppression factor of a suppression system and a lithographic apparatus |
10/26/2011 | CN102227672A Liquid crystal filter, phase difference plate, and optical low pass filter |
10/25/2011 | US8045226 Multi-module device including a printer module |
10/25/2011 | US8045185 Image processing apparatus and method of controlling same |
10/25/2011 | US8045139 Exposure apparatus capable of asymmetrically adjusting light intensity |
10/25/2011 | US8045138 Support plate, exposure apparatus having the support plate, and a device manufacturing method using the exposure apparatus |
10/25/2011 | US8045137 Lithographic apparatus and device manufacturing method |
10/25/2011 | US8045136 Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
10/25/2011 | US8045135 Lithographic apparatus with a fluid combining unit and related device manufacturing method |
10/25/2011 | US8045134 Lithographic apparatus, control system and device manufacturing method |
10/25/2011 | US8044373 Lithographic apparatus and device manufacturing method |
10/25/2011 | US8043797 Lithographic apparatus and device manufacturing method |
10/20/2011 | US20110255069 Compositions and processes for immersion lithography |
10/20/2011 | US20110255068 EUV mirror module |
10/20/2011 | US20110255067 Microlithography illumination systems, components and methods |
10/20/2011 | US20110255066 Apparatus and Method for Inspecting a Substrate |
10/20/2011 | US20110255065 Method and apparatus for modifying a substrate surface of a photolithographic mask |
10/20/2011 | US20110255064 Photolithography method and device |
10/20/2011 | US20110255063 Seamless Stitching of Patterns Formed by Interference Lithography |
10/20/2011 | US20110255062 Fluid handling structure, lithographic apparatus and a device manufacturing method |
10/20/2011 | US20110255061 Compositions comprising base-reactive component and processes for photolithography |
10/20/2011 | US20110253425 Roll-to-roll digital photolithography |
10/19/2011 | EP2378358A1 Three dimensional digital imaging grating and photosensitive material photosensitive device and imaging method thereof |
10/19/2011 | EP2378357A1 Apparatus for moving stereo imaging lens and method for digital stereo projection |
10/19/2011 | EP2378356A1 A device to fix grating and photosensitive materials for stereo-projection imaging |
10/19/2011 | EP2378355A1 Photosensing device for digital stereo spliced picture projection imaging and operation method thereof |
10/19/2011 | EP1340123B1 Systems and methods for exposing substrate periphery |
10/19/2011 | CN102221772A Apparatus for smoothing forward curling printing paper |
10/19/2011 | CN102221764A Photographing device and portable apparatus |
10/19/2011 | CN101385327B Image reading apparatus, and its manufacturing method |
10/18/2011 | USRE42849 Lithographic apparatus and device manufacturing method |
10/18/2011 | US8040497 monitoring the quality of a lithography process by determining respective lateral dimensions of respective test features, such as photoresist features, lines or apertures, patterned on the basis of the lithography process |
10/18/2011 | US8040492 Illumination system of a microlithographic projection exposure apparatus |