| Patents for G03B 27 - Photographic printing apparatus (25,157) |
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| 08/06/2013 | US8502957 Pulse to pulse energy equalization of light beam intensity |
| 08/06/2013 | US8502956 Exposure apparatus, mask plate and exposing method |
| 08/06/2013 | US8502955 Method of determining a characteristic |
| 08/06/2013 | US8502954 Lithographic apparatus and device manufacturing method |
| 08/01/2013 | US20130193564 Semiconductor structure and method and tool for forming the semiconductor structure |
| 07/31/2013 | CN203101812U Novel parallel exposure machine |
| 07/31/2013 | CN203101804U Printing-down machine light protection device capable of preventing light outflow damage |
| 07/30/2013 | US8498025 Image reader and method of reading image |
| 07/30/2013 | US8497980 Holding apparatus, exposure apparatus, exposure method, and device manufacturing method |
| 07/30/2013 | US8497979 Exposure method and exposure apparatus |
| 07/30/2013 | US8497978 Exposure apparatus and method of manufacturing device |
| 07/30/2013 | US8497977 Optical integrator, illumination optical system, exposure apparatus, and device manufacturing method |
| 07/30/2013 | US8497976 Substrate measurement method and apparatus |
| 07/30/2013 | US8497975 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
| 07/30/2013 | US8497974 Exhaust apparatus, processing apparatus, and device manufacturing method |
| 07/30/2013 | US8497973 Immersion lithography fluid control system regulating gas velocity based on contact angle |
| 07/30/2013 | CA2371531C Image processor for camera module |
| 07/25/2013 | WO2013109986A1 Materials, components, and methods for use with extreme ultraviolet radiation in lithography and other applications |
| 07/25/2013 | WO2013108190A1 Method for backing up digital cinematographic content |
| 07/25/2013 | US20130188164 Double dipole lithography method for semiconductor device fabrication |
| 07/24/2013 | EP2618213A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
| 07/23/2013 | US8493553 Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame |
| 07/23/2013 | US8493551 Scanning exposure apparatus, control apparatus and method of manufacturing device |
| 07/23/2013 | US8493549 Illumination optical apparatus, exposure apparatus, and device manufacturing method |
| 07/23/2013 | US8493548 Lithographic apparatus and device manufacturing method |
| 07/23/2013 | US8493547 Exposure apparatus, exposure method, and device manufacturing method |
| 07/23/2013 | US8493546 Plasma as a band pass filter for photo lithography |
| 07/23/2013 | US8493545 Cleanup method for optics in immersion lithography supplying cleaning liquid onto a surface of object below optical element, liquid supply port and liquid recovery port |
| 07/23/2013 | US8492935 Lithographic apparatus having a Lorentz actuator with a composite carrier |
| 07/17/2013 | CN102207672B Device for carrying out liquid crystal display (LCD) monochrome image mosaic by prism |
| 07/16/2013 | US8488109 Exposure method, exposure apparatus, and device manufacturing method |
| 07/16/2013 | US8488108 Exposure method, exposure apparatus, and method for producing device |
| 07/16/2013 | US8488107 Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units |
| 07/16/2013 | US8488106 Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method |
| 07/16/2013 | US8488105 Multi-table lithographic systems, lithography processing tools and methods for processing workpieces |
| 07/16/2013 | US8488104 Projection objective with diaphragms |
| 07/16/2013 | US8488103 Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same |
| 07/16/2013 | US8488101 Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position |
| 07/16/2013 | US8488100 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
| 07/16/2013 | US8488099 Exposure apparatus and device manufacturing method |
| 07/11/2013 | WO2013102398A1 Three dimensional display system |
| 07/10/2013 | EP2613195A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
| 07/10/2013 | EP2613194A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
| 07/10/2013 | EP2613193A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
| 07/10/2013 | EP2613192A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
| 07/09/2013 | US8482719 Positioning system, lithographic apparatus and method |
| 07/09/2013 | US8482718 Lithographic apparatus and device manufacturing method |
| 07/09/2013 | US8482717 Polarization-modulating optical element |
| 07/09/2013 | US8482716 Exposure apparatus, exposure method, and method for producing device |
| 07/09/2013 | US8482715 Monitoring apparatus and method particularly useful in photolithographically processing substrates |
| 07/09/2013 | US8482657 Imaging apparatus and camera |
| 07/09/2013 | US8480261 Filter device for the compensation of an asymmetric pupil illumination |
| 07/02/2013 | US8477289 Position measurement using natural frequency vibration of a pattern |
| 07/02/2013 | US8477288 Digital exposure method and digital exposure device for performing the method |
| 07/02/2013 | US8477287 Device manufacturing method, lithographic apparatus and a computer program |
| 07/02/2013 | US8477286 Projection optical system, exposure apparatus, and device manufacturing method |
| 07/02/2013 | US8477285 Particle cleaning of optical elements for microlithography |
| 07/02/2013 | US8477284 Apparatus and method to control vacuum at porous material using multiple porous materials |
| 07/02/2013 | US8477283 Exposure apparatus and device manufacturing method |
| 07/02/2013 | US8476665 Display device |
| 06/27/2013 | US20130164688 Support, Lithographic Apparatus and Device Manufacturing Method |
| 06/27/2013 | US20130162968 Stage System and a Lithographic Apparatus |
| 06/27/2013 | US20130162965 Exposure apparatus |
| 06/27/2013 | US20130162963 Lithographic Apparatus With a Deformation Sensor |
| 06/26/2013 | CN101849205B Chromatically corrected catadioptric objective and projection exposure apparatus including the same |
| 06/25/2013 | US8472010 Actuator, positioning system and lithographic apparatus |
| 06/25/2013 | US8472009 Exposure apparatus and device manufacturing method |
| 06/25/2013 | US8472008 Movable body apparatus, exposure apparatus and device manufacturing method |
| 06/25/2013 | US8472007 Substrate holding device, lithography apparatus using same, and device manufacturing method |
| 06/25/2013 | US8472006 Lithographic apparatus and device manufacturing method |
| 06/25/2013 | US8472005 Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabrication |
| 06/25/2013 | US8472004 Immersion photolithography scanner |
| 06/25/2013 | US8472003 Fluid handling structure, lithographic apparatus and device manufacturing method |
| 06/25/2013 | US8472002 Lithographic apparatus and device manufacturing method |
| 06/25/2013 | US8472001 Exposure method, exposure apparatus, and method for producing device |
| 06/20/2013 | US20130156939 Method and apparatus for analyzing and/or repairing of an euv mask defect |
| 06/20/2013 | US20130155385 Vacuum chamber assembly for supporting a workpiece |
| 06/20/2013 | US20130155383 Exposure apparatus and exposure method |
| 06/20/2013 | US20130155381 Methods for small trench patterning using chemical amplified photoresist compositions |
| 06/19/2013 | EP2605066A1 Method and apparatus for archiving an image |
| 06/19/2013 | EP2605065A1 Method and apparatus for archiving a digital image |
| 06/19/2013 | CN102216849B Optical imaging writer system |
| 06/18/2013 | US8467035 Pellicle frame and lithographic pellicle |
| 06/18/2013 | US8467034 Light shielding unit, variable slit apparatus, and exposure apparatus |
| 06/18/2013 | US8467033 Method for operating an illumination system of a microlithographic projection exposure apparatus |
| 06/18/2013 | US8467032 Exposure apparatus and electronic device manufacturing method |
| 06/18/2013 | US8467031 Illumination system for illuminating a mask in a microlithographic exposure apparatus |
| 06/18/2013 | US8465907 Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
| 06/13/2013 | US20130148200 Optical arrangement, in particular projection exposure apparatus for euv lithography, as well as reflective optical element with reduced contamination |
| 06/12/2013 | CN202995246U Blueprint discharging and rolling device in front of blue-print machine |
| 06/12/2013 | CN103155546A Method and system of archiving video to film |
| 06/12/2013 | CN103155545A Method and system for producing video archive on film |
| 06/11/2013 | US8462317 Illumination optical system, exposure apparatus, and device manufacturing method |
| 06/11/2013 | US8462316 Exposure apparatus, method of controlling the same, and device manufacturing method |
| 06/11/2013 | US8462315 Optical system and method of use |
| 06/11/2013 | US8462314 Lithographic apparatus and device manufacturing method |
| 06/11/2013 | US8462313 Lithographic apparatus and device manufacturing method |
| 06/11/2013 | US8462312 Lithographic apparatus and device manufacturing method |
| 06/06/2013 | WO2013080547A1 Reading device |
| 06/06/2013 | US20130143007 Mask |