| Patents for G03B 27 - Photographic printing apparatus (25,157) |
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| 04/05/2012 | US20120081686 Microlithographic projection exposure apparatus illumination optics |
| 04/05/2012 | US20120081685 Microlithographic projection exposure apparatus illumination optics |
| 04/05/2012 | US20120081684 Object Inspection Systems and Methods |
| 04/05/2012 | US20120081683 Lithographic Apparatus And Detector Apparatus |
| 04/05/2012 | US20120081682 Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography |
| 04/05/2012 | US20120081681 Drawing device and drawing method |
| 04/03/2012 | US8149387 Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus |
| 04/03/2012 | US8149386 Illumination optical system, exposure apparatus using the same and device manufacturing method |
| 04/03/2012 | US8149385 Alignment unit and exposure apparatus |
| 04/03/2012 | US8149384 Method and apparatus for extracting dose and focus from critical dimension data |
| 04/03/2012 | US8149383 Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology |
| 04/03/2012 | US8149382 Surface position detection apparatus, exposure apparatus, and exposure method |
| 04/03/2012 | US8149381 Optical element and exposure apparatus |
| 04/03/2012 | US8149380 Exposure apparatus and correction apparatus |
| 04/03/2012 | US8149379 Lithographic apparatus and device manufacturing method |
| 04/03/2012 | US8149378 Cleaning apparatus for exposure apparatus and exposure apparatus |
| 03/29/2012 | US20120075614 Exposure method and storage medium |
| 03/29/2012 | US20120075613 Lithographic Apparatus Having an Encoder Type Position Sensor System |
| 03/29/2012 | US20120075612 Exposure method and exposure apparatus |
| 03/29/2012 | US20120075611 Diaphragm changing device |
| 03/29/2012 | US20120075610 Lithographic apparatus and method for reducing stray radiation |
| 03/29/2012 | US20120075609 Optical arrangement of autofocus elements for use with immersion lithography |
| 03/29/2012 | US20120075608 Projection objective and projection exposure apparatus with negative back focus of the entry pupil |
| 03/29/2012 | US20120075607 Detector Module, Cooling Arrangement And Lithographic Apparatus Comprising A Detector Module |
| 03/29/2012 | US20120075606 Mask Inspection with Fourier Filtering and Image Compare |
| 03/29/2012 | US20120075605 Source Polarization Optimization |
| 03/29/2012 | US20120075604 Methods and Systems for Evaluating Extreme Ultraviolet Mask Flatness |
| 03/29/2012 | US20120075603 Process tuning with polarization |
| 03/29/2012 | US20120075602 Optical arrangement in a projection objective of a microlithographic projection exposure apparatus |
| 03/29/2012 | US20120075601 Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell |
| 03/29/2012 | US20120075600 Imaging apparatus, imaging system, and method for controlling imaging apparatus |
| 03/28/2012 | CN202177776U 投影蓝线晒图机 Projection blue line Shaitu |
| 03/28/2012 | CN102390731A Drawing rubbing device used in blueprint machine |
| 03/28/2012 | CN101059587B Optical device |
| 03/27/2012 | US8144310 Positioning system, lithographic apparatus and device manufacturing method |
| 03/27/2012 | US8144309 Imprint lithography |
| 03/27/2012 | US8144308 Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| 03/27/2012 | US8144307 Image forming method and apparatus |
| 03/27/2012 | US8144306 Reverse flow gas gauge proximity sensor |
| 03/27/2012 | US8144305 Lithographic apparatus and device manufacturing method |
| 03/27/2012 | US8142963 Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device |
| 03/22/2012 | US20120070985 Exposure method and method for manufacturing semiconductor device |
| 03/22/2012 | US20120070629 Method for producing optical orientation film, method for producing retardation film, system for producing optical orientation film, optical orientation film and retardation film |
| 03/22/2012 | US20120069318 Projection exposure method and projection exposure system therefor |
| 03/22/2012 | US20120069317 Lithography system arranged on a foundation, and method for arranging a lithography system on said foundation |
| 03/22/2012 | US20120069316 Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same |
| 03/22/2012 | US20120069315 Imaging optics and projection exposure installation for microlithography with an imaging optics |
| 03/22/2012 | US20120069314 Imaging optics and projection exposure installation for microlithography with an imaging optics of this type |
| 03/22/2012 | US20120069313 Euv microlithography illumination optical system and euv attenuator for same |
| 03/22/2012 | US20120069312 Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type |
| 03/22/2012 | US20120069311 Passivation of Multi-Layer Mirror for Extreme Ultraviolet Lithography |
| 03/22/2012 | US20120069310 Semiconductor microlithography projection exposure apparatus |
| 03/22/2012 | US20120069309 Fluid handling structure, module for an immersion lithographic apparatus, lithographic apparatus and device manufacturing method |
| 03/20/2012 | US8139202 Apparatus and a method for illuminating a light-sensitive medium |
| 03/20/2012 | US8139201 Exposure apparatus and method of manufacturing device |
| 03/20/2012 | US8139200 Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method |
| 03/20/2012 | US8139199 Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing method |
| 03/20/2012 | US8139198 Exposure apparatus, exposure method, and method for producing device |
| 03/15/2012 | US20120064461 Movable body apparatus, exposure apparatus, device manufacturing method, flat-panel display manufacturing method, and object exchange method |
| 03/15/2012 | US20120064460 Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
| 03/15/2012 | US20120062866 Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current drag |
| 03/15/2012 | US20120062865 Optical imaging with reduced immersion liquid evaporation effects |
| 03/15/2012 | US20120062864 Reflective imaging optical system, exposure apparatus, and method for producing device |
| 03/15/2012 | US20120062863 Alignment Measurement System, Lithographic Apparatus, and a Method to Determine Alignment in a Lithographic Apparatus |
| 03/15/2012 | US20120062862 Apparatuses And Methods For Compensation Of Carrier Distortions From Measurement Machines |
| 03/15/2012 | US20120062861 Exposure apparatus, exposure method, and device manufacturing method |
| 03/15/2012 | US20120062860 Exposure apparatus, exposure method, and device manufacturing method |
| 03/15/2012 | US20120062859 Polishing device, polishing method, exposure apparatus and device manufacturing method |
| 03/15/2012 | US20120062858 Cleaning method, device manufacturing method, exposure apparatus, and device manufacturing system |
| 03/14/2012 | CN202166822U 胶片式蓝线晒图机 Film-style blue line Shaitu |
| 03/13/2012 | US8134689 Dual stage positioning and switching system |
| 03/13/2012 | US8134688 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
| 03/13/2012 | US8134687 Illumination system of a microlithographic exposure apparatus |
| 03/13/2012 | US8134686 Immersion exposure apparatus and device manufacturing method |
| 03/13/2012 | US8134685 Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
| 03/13/2012 | US8134684 Immersion lithography using hafnium-based nanoparticles |
| 03/13/2012 | US8134683 Device manufacturing method, computer program and lithographic apparatus |
| 03/13/2012 | US8134682 Exposure apparatus and method for producing device |
| 03/13/2012 | US8134681 Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording medium |
| 03/13/2012 | US8134257 Lithographic apparatus having a lorentz actuator with a composite carrier |
| 03/13/2012 | US8133640 Apparatus and method for mounting pellicle |
| 03/08/2012 | US20120058434 Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate |
| 03/08/2012 | US20120057159 Alignment Mark, Substrate, Set of Patterning Devices, and Device Manufacturing Method |
| 03/08/2012 | US20120057144 Lithographic apparatus, excimer laser and device manufacturing method |
| 03/08/2012 | US20120057143 Illumination System for Use in a Stereolithography Apparatus |
| 03/08/2012 | US20120057142 Lithographic Apparatus and Device Manufacturing Method |
| 03/08/2012 | US20120057141 Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and device |
| 03/08/2012 | US20120057140 Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method |
| 03/08/2012 | US20120057139 Cleaning method, device manufacturing method, cleaning substrate, liquid immersion member, liquid immersion exposure apparatus, and dummy substrate |
| 03/07/2012 | CN101276157B Exposure plotting device |
| 03/06/2012 | US8131078 Imprint lithography |
| 03/06/2012 | US8130366 Method for coarse wafer alignment in a lithographic apparatus |
| 03/06/2012 | US8130365 Immersion flow field maintenance system for an immersion lithography machine |
| 03/06/2012 | US8130364 Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method |
| 03/06/2012 | US8130363 Exposure apparatus and method for producing device |
| 03/06/2012 | US8130362 Correction method and exposure apparatus |
| 03/06/2012 | US8130361 Exposure apparatus, exposure method, and method for producing device |
| 03/06/2012 | US8130360 Exposure apparatus and device manufacturing method |
| 03/06/2012 | US8130359 Lithographic apparatus and a vacuum chamber |
| 03/01/2012 | US20120052447 Lithographic apparatus and device manufacturing method |