Patents for G03B 27 - Photographic printing apparatus (25,157) |
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09/20/2012 | US20120236276 Immersion Lithography System Using Direction-Controlling Fluid Inlets |
09/20/2012 | US20120236275 Projection system, lithographic apparatus and device manufacturing method |
09/20/2012 | US20120236274 Liquid crystal panel manufacturing apparatus and method for manufacturing the liquid crystal panel |
09/20/2012 | US20120236273 Target supply unit |
09/20/2012 | US20120236272 Combination stop for catoptric projection arrangement |
09/19/2012 | EP2499523A1 Phase-compensated thin-film beam combiner |
09/19/2012 | CN102687070A Hinge |
09/19/2012 | CN102681318A Multi-pump light source based on fluorescent powder and projection optical engine using multi-pump light source |
09/18/2012 | US8269949 Lithographic apparatus and device manufacturing method |
09/18/2012 | US8269948 Projection exposure apparatus and optical system |
09/18/2012 | US8269947 Optical system for semiconductor lithography |
09/18/2012 | US8269946 Cleanup method for optics in immersion lithography supplying cleaning liquid at different times than immersion liquid |
09/18/2012 | US8269945 Movable body drive method and apparatus, exposure method and apparatus, pattern formation method and apparatus, and device manufacturing method |
09/18/2012 | US8269944 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
09/18/2012 | US8269179 Illumination system and filter system |
09/18/2012 | US8268514 Pellicle mounting method and apparatus |
09/18/2012 | US8267520 Method for aerial display of images |
09/13/2012 | WO2012122155A2 Alignment system for various materials and material flows |
09/13/2012 | US20120229787 Lithographic apparatus and device manufacturing method |
09/13/2012 | US20120229786 Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process |
09/13/2012 | US20120229785 Multilayer mirror, lithograpic apparatus, and methods for manufacturing a multilayer mirror and a product |
09/13/2012 | US20120229784 Mirror for use in a microlithography projection exposure apparatus |
09/13/2012 | US20120229783 Lithographic apparatus and device manufacturing method |
09/13/2012 | US20120229782 Lithographic apparatus and device manufacturing method |
09/13/2012 | US20120228743 Methods of Manufacturing Semiconductor Devices and Optical Proximity Correction |
09/12/2012 | CN102667546A Phase-compensated thin-film beam combiner |
09/12/2012 | CN102665024A Image sensor, image sensor unit, and image reader |
09/11/2012 | USRE43643 Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby |
09/11/2012 | US8264750 Image reading apparatus |
09/11/2012 | US8264686 Lithographic apparatus and device manufacturing method using overlay measurement |
09/11/2012 | US8264671 Lithographic apparatus and device manufacturing method |
09/11/2012 | US8264670 Lithographic apparatus and device manufacturing method for clamping a patterning device |
09/11/2012 | US8264669 Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head |
09/11/2012 | US8264668 Illumination system of a microlithographic projection exposure apparatus |
09/11/2012 | US8264667 Lithographic apparatus and device manufacturing method using interferometric and other exposure |
09/11/2012 | US8264666 Exposure apparatus, exposure method, and method of manufacturing device |
09/11/2012 | US8264665 Cooled spider and method for grazing-incidence collectors |
09/11/2012 | US8264664 Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method |
09/11/2012 | US8264663 System for accumulating exposure energy information of wafer and management method of mask for exposure utilizing exposure energy information of wafer accumulated with the system |
09/11/2012 | US8264662 In-line particle detection for immersion lithography |
09/11/2012 | US8264530 Method for processing an imprint image |
09/11/2012 | US8263950 Radiation source |
09/06/2012 | US20120224186 Method for producing a mirror having at least two mirror surfaces, mirror of a projection exposure apparatus for microlithography, and projection exposure apparatus |
09/06/2012 | US20120224163 Exposure apparatus and method of manufacturing device |
09/06/2012 | US20120224162 Image forming apparatus |
09/06/2012 | US20120224161 Lithographic Apparatus and Method |
09/06/2012 | US20120224160 Reflective optical imaging system |
09/06/2012 | US20120224159 Method and apparatus for patterning a disk |
09/06/2012 | US20120224158 Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method |
09/06/2012 | US20120224157 Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method |
09/06/2012 | US20120224156 Method of correcting flare and method of preparing extreme ultra violet mask |
09/06/2012 | US20120224155 Direct write lithography system |
09/06/2012 | US20120224154 Exposure apparatus, exposure method, and method for producing device |
09/06/2012 | US20120224153 Optical arrangement, in particular in a projection exposure apparatus for euv lithography |
09/05/2012 | EP2495948A1 Illumination device, image capturing device provided with the said illumination device, image forming device provided with said image capturing device |
09/05/2012 | CN102656515A An optical imaging writer system |
09/05/2012 | CN102656514A An optical imaging writer system |
09/04/2012 | US8260449 Photolithography systems and associated methods of overlay error correction |
09/04/2012 | US8259290 Diffractive optical device, and aligner comprising that device |
09/04/2012 | US8259289 Lithographic apparatus and device manufacturing method |
09/04/2012 | US8259287 Lithographic apparatus and device manufacturing method |
09/04/2012 | US8259286 Lithography and associated methods, devices, and systems |
09/04/2012 | US8259285 Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data |
09/04/2012 | US8259284 Exposure apparatus and device manufacturing method |
09/04/2012 | US8259283 Immersion lithographic apparatus and device manufacturing method |
09/04/2012 | US8256722 Guiding device and guiding assembly for guiding cables and/or hoses, and a lithographic apparatus |
08/30/2012 | US20120218537 Exposure apparatus and photomask used therein |
08/30/2012 | US20120218536 Catadioptric projection objective including a reflective optical component and a measuring device |
08/30/2012 | US20120218535 Method and device for a spatially resolved introduction of an intensity pattern comprising electro-magnetic radiation into a photosensitive substance as well as applications thereof |
08/30/2012 | US20120218534 Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
08/30/2012 | US20120218533 Method of calculating model parameters of a substrate, a lithographic apparatus and an apparatus for controlling lithographic processing by a lithographic apparatus |
08/30/2012 | US20120218532 Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufaturing method |
08/30/2012 | US20120218531 Developing method and apparatus using organic-solvent containing developer |
08/29/2012 | CN102213909B Method for outputting high-resolution digital image to microfilm |
08/28/2012 | US8253929 Stage apparatus, fixation method, exposure apparatus, exposure method, and device-producing method |
08/28/2012 | US8253928 Exposure apparatus and device manufacturing method |
08/28/2012 | US8253927 Optical element with multiple primary light sources |
08/28/2012 | US8253926 Exposure device |
08/28/2012 | US8253925 Catoptric illumination system for microlithography tool |
08/28/2012 | US8253924 Exposure method, exposure apparatus and device manufacturing method |
08/28/2012 | US8253923 Optical imaging writer system |
08/28/2012 | US8253922 Immersion lithography system using a sealed wafer bath |
08/28/2012 | US8253921 Exposure apparatus and device fabricating method |
08/23/2012 | US20120212726 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method |
08/23/2012 | US20120212725 Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
08/23/2012 | US20120212724 Illumination optical system, exposure apparatus, and method of manufacturing device |
08/23/2012 | US20120212723 Electromagnetic actuator, stage apparatus and lithographic apparatus |
08/23/2012 | US20120212722 Fast Illumination Simulator Based on a Calibrated Flexible Point Spread Function |
08/23/2012 | US20120212721 Substrates and mirrors for euv microlithography, and methods for producing them |
08/23/2012 | US20120212720 Device for guiding electromagnetic radiation into a projection exposure apparatus |
08/23/2012 | US20120212719 Thermal management systems, assemblies and methods for grazing incidence collectors for euv lithography |
08/23/2012 | US20120212718 Optical Apparatus, Method of Scanning, Lithographic Apparatus and Device Manufacturing Method |
08/23/2012 | US20120212717 Exposure apparatus and photo mask |
08/23/2012 | US20120212716 Optical element and exposure apparatus |
08/23/2012 | US20120212715 Lithographic apparatus and lithographic projection method |
08/23/2012 | US20120212714 Manufacturing device of a film patterned retarder for a three dimensional display device |
08/23/2012 | US20120212713 Lithographic apparatus and method having substrate and sensor tables |
08/22/2012 | EP2240815B1 Device and method for exposing a photo material |
08/22/2012 | CN102073207B Mechanical button induction type full-automatic copying machine circuit with adjustable power |
08/21/2012 | US8249653 Wireless printer configuration module |